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Instituto de Ciencia de Materiales de Madrid ICMM is the biggest Spanish National Research Council (CSIC) research center in the area of Material Science and Technology Instituto de Ciencia de Materiales de Madrid Research lines (Departments): Nanostructures, Surfaces and Coatings Materials for Information Technologies Photonic Materials Energy, Environment and Sustainable Technologies Biomaterials and Bioinspired Materials New Architectures in Materials Chemistry Theory and Simulation of Materials Member of World Materials Research Institutes Forum http//www.icmm.csic.es Carlos Prieto Thin Films Group (films preparation for optical and magnetic applications)

Instituto de Ciencia de Materiales de Madrid - … · Instituto de Ciencia de Materiales de Madrid ICMM is the biggest Spanish National Research Council (CSIC) research center in

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Instituto de Ciencia de Materiales de Madrid

ICMM is the biggest Spanish National Research Council (CSIC) research center in the area of

Material Science and Technology

Instituto de Ciencia de Materiales de Madrid

Research lines (Departments): Nanostructures, Surfaces and Coatings Materials for Information Technologies Photonic Materials Energy, Environment and Sustainable

Technologies Biomaterials and Bioinspired Materials New Architectures in Materials Chemistry Theory and Simulation of Materials Member of World Materials

Research Institutes Forum

http//www.icmm.csic.es

Carlos Prieto Thin Films Group

(films preparation for optical and

magnetic applications)

Instituto de Ciencia de Materiales de Madrid

Thin Film Group

Coating preparation by vacuum techniques PVD: Magnetron sputtering, Cathodic Arc, IBAD (ion beam assisted deposition), Dual-Cathode Deposition. PVD: electron beam thermal evaporation CVD: Low Pressure CVD, Plasma Assisted CVD

Ar+

material

-300 V

& magnetic field

Instituto de Ciencia de Materiales de Madrid

Structural characterisation of the films Surface Characterisation (Profilometry, AFM) Structural Characterisation (XRD, XAS) Electron and probe microscopies (XPS ,SEM, TEM) Layer structure and composition (GDOES, RBS, ERDA)

Optical characterisation Optical Absorption Fourier Transform Infrared Spectroscopy (FTIR) Spectroscopic Ellipsometry Raman and Luminescence Spectroscopies

Magnetic characterisation SQUID magnetometry

Electrical characterisation Four contacts (Van der Paw) resistivity measurements Hall effect carrier density measurements

Thin Film Group Surface properties: • Roughness • Structure and composition • Atmosphere inertness

Coating properties: • Specific properties (optical, mechanical, electrical, magnetic, )

Interface properties: • Adhesion • Element inter-diffusion • Residual stress

Instituto de Ciencia de Materiales de Madrid 4

Thin Film Technology: Functional applications

AUTOMOTIVE • Decorative coatings for automobile components • Hard coatings for motor parts.

MECHANICS • Hard coatings for cutting and moulding tools • Tribological coatings for mobile components

HOUSING AND CONSTRUCTION

• Metallisation procedures for piping, plumbing, door handles, etc. • Thermal and optical coatings for architectural glass selective panels.

RENEWABLE ENERGIES

• Low emisivity coating for thermal collectors. • Fuel Cells and micro-batteries.

MICROELECTRONICS, PHOTONICS &

OPTICS

• Active, passive and protective layers for electronic and optical components • Anti reflective, photo-catalytic self-cleaning coatings for lenses, mirrors, etc. • Mixed oxide coatings for tuneable refractive index. • Transparent Conductive Materials for Solar Cells and optoelectronics.

MAGNETIC DEVICES • Magnetoresistive materials and Magnetic films for Spintronics and information storage (hard disks, magnetic labels etc.)

BIOMEDICAL • Coatings for prosthesis and implants to improve mechanical properties and inhibit biofilm formation.

OTHERS... • Ceramic decorative components • Food and liquid packaging (to avoid humidity diffusion, light aging, etc.)

Instituto de Ciencia de Materiales de Madrid

Instituto de Ciencia de Materiales de Madrid

http//www.icmm.csic.es

Thin film group

Collaborative Project: ENERGY.2010.2.5-2: Main CSP components for high-

temperature operation

“New solar collector for high temperature operation in Concentrated Solar

Power (CSP) applications”

Main aim: Development of a new concept of CSP plant able to work with heat carrier fluids operating at 650 ºC.

Instituto de Ciencia de Materiales de Madrid

http//www.icmm.csic.es

ICMM-CSIC : Development of new coating materials for thermal collectors.

Instituto de Ciencia de Materiales de Madrid

How to improve the

energy efficiency ?

Green-house

effect

Instituto de Ciencia de Materiales de Madrid

Thin Film Group: Objectives for HITECO

Working plan To research and develop new selective coating materials for the internal tube collector. Sputtering PVD method on flat samples. Adequate optical and tribological performances. With chemical stability for the high temperature operation.

Requirements: Low cost and easy process. Chemical stability at 650ºC. 0.9 and 0.05.

Instituto de Ciencia de Materiales de Madrid

Selective coatings

CERMET:

ceramic / metal

Instituto de Ciencia de Materiales de Madrid

Selective coatings

E Céspedes, C Prieto, R Escobar, J Sánchez

Patente OEPM (ES P201131009, junio 2011).

SS+O2+600ºC

Ag

Mo/Si3N4

Mo/Si3N4

Si3N4

Instituto de Ciencia de Materiales de Madrid

Selective coatings

Mo:SiO2 - Mo:Si3N4

comparison

Instituto de Ciencia de Materiales de Madrid

Selective coatings

Simulation of the optical

properties of Mo:Si3N4

CERMET

variation with metal content

variation with thickness

Experiment – Simulation

comparison

Instituto de Ciencia de Materiales de Madrid

Selective coatings Metallic IR-mirror study

Cut-off variation by changing the

double-CERMET structure

(thickness and metal fraction)

Instituto de Ciencia de Materiales de Madrid

Selective coating: thermal stability

Instituto de Ciencia de Materiales de Madrid

Selective coatings

E Céspedes, C Prieto, R Escobar, J Sánchez

Patente OEPM (ES P201131009, junio 2011).

100 1000 100000

20

40

60

80

100

0

1

2

3

S14 Reflectance

Re

fle

cta

nc

e (

%)

Wavelength (nm)

(x0.5)

(x0.5)

Black body emission 550 ºC

Black body emission 600 ºC

AM1.5 Solar spectrum

Bla

ck b

ody

emis

sion

(W

/m2 nm

)

α=0.95

εRT=0.02

ε600ºC=0.15

SS+O2+600ºC

Ag

Mo/Si3N4

Mo/Si3N4

Si3N4

Instituto de Ciencia de Materiales de Madrid

Selective coating: tunability

E. Céspedes et al. Oficina Española de Patentes y marcas, (solicitud ES P201131009, junio 2011).

Substrato (SS)

Metal (IR-reflejante) Au ; Mo; Ti; TiN

HMVF cermet M:Al2O3 ; M:AlN M=Mo;W;Ti

LMVF cermet M:Al2O3 ; M:AlN M=Mo;W;Ti

Dieléctrico (Antirreflejante) Al2O3;AlN; ZrO2Si3N4

Mo:Si3N4

Mo:Si3N4

Ag

100 1000 100000

20

40

60

80

100

0

1

2

3

(x0.5)

S5 Reflectance

Re

fle

cta

nce

(%

)

Wavelength (nm)

(x0.5)

AM 1.5 Solar spectrum

Black body emission at 450ºC

Black body emission at 600ºC

Bla

ck b

od

y e

mis

sio

n (

W/m

2n

m)

100 1000 100000

20

40

60

80

100

0

1

2

3

S14 Reflectance

Re

fle

cta

nc

e (

%)

Wavelength (nm)

(x0.5)

(x0.5)

Black body emission 550 ºC

Black body emission 600 ºC

AM1.5 Solar spectrum

Bla

ck b

ody e

mis

sio

n (

W/m

2nm

)

α = 0.95, ε = 0.02

α = 0.85, ε = 0.017

Instituto de Ciencia de Materiales de Madrid

Thin Film Group:

attention

your

for

Thanks