Institute of Physics ASCR, Prague Strip Sensors R&D for SCT and ITk

Marcela Mikeštíková

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Institute of Physics for ATLAS SCT: sensors

1. Participation in R&D of strip sensors p-on-n for SCT2. Study of radiation hardness of first prototypes 3. Qualification tests of strip sensors for SCT

• 2500 sensors tested in total (16% of whole production of discs sensors) in SCT lab of IP ASCR Prague

Automatic probe-station in SCT lab of IP ASCR, Prague

Prague SCT Lab

Detail of disc sensor

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1. Evaluation of large area n-on-p silicon strip sensors

• 2009: Study of electrical characteristics of design ATLAS07 large area (10x10cm) sensors at Prague SCT lab

J. Bohm, M. Mikestikova, A. Affolder, P.P. Allport, … Z. Dolezal, P.Kodyš, et al.NIM A636 (2011) S104-S110

0.6

0.8

1

1.2

1.4

1.6

1.8

2

2.2

0 200 400 600 800 1000 1200

Strip Number

Inte

rstr

ip c

ap

ac

ita

nc

e [

pF

]

W37-Seg1

W37-Seg2

W37-Seg3

W37-Seg4

0.5

1.0

1.5

2.0

2.5

3.0

0 100 200 300 400 500 600

Bias voltage [-V]

Inte

rstr

ip c

apac

itan

ce [

pF

]

W33-Seg1

W33-Seg2

W33-Seg3

W33-Seg4

W35-Seg1

W35-Seg2

W35-Seg3

W35-Seg4

W37-Seg1

W37-Seg2

W37-Seg3

W37-Seg4

W38-Seg1

W38-Seg2

W38-Seg3

W38-Seg4

W39-Seg1

W39-Seg2

W39-Seg3

W39-Seg4

W32-Seg1

W32-Seg2

W32-Seg3

W32-Seg4

W37-Seg1

3 probe method at 100kHz

5 probe method at 100kHz and 1MHz

Interstrip Capacitance -bias voltage scan

Interstrip capacitance – strip scan

Institute of Physics for ATLAS Upgrade ITk – strip sensors

Bias Voltage scans (IV, CV, Cint, Rint) Full strip scans (automatic probe station)

Interstrip Capacitance and Resistance AC Coupling Capacitance Polysilicon Bias Resistance Leakage Current to a strip

ATLAS07

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2. Study of radiation damage of ATLAS07 and ATLAS12 strip sensors

Samples: miniature (1x1cm) sensors n-strip in p-type material (FZ) Barrel and Endcap mini sensors : different layouts, pitches, types of stray strip ganging and types of PTP structures

Irradiation: protons (up to 2E15 neq/cm2 ): CERN, Birminham, Karlsruhe, CYRIC neutrons : from reactors in Řež (Prague), Ljubljana gamma (up to dose 10MRad): BNL

Studies IV (Current, Break down voltage), CV (Full depletion voltage) Surface radiation damage:

Interstrip Resistance and Capacitance Punch Trough Protection Structure (Beam loss protection) AC Coupling Capacitance Polysilicon Bias Resistance Measurements condition:

probe station with cooled chuck (up to -30°C) with Nitrogen flow, rel. humidity <5%

Institute of Physics for ATLAS Upgrade ITk

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Laboratory Equipment of Silicon Lab in IP ASCR PragueFor Quality Assurance - Sensors tests

Silicon Lab (24 m2) - with temperature and humidity control, vertical air flow, - electrically conductive flooring

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Laboratory Equipment of Silicon Lab in IP ASCR PragueFor Quality Assurance - Sensors tests

Manual probe station with cooled chuck (-30°C)Nitrogen flow in probe station, humidity < 5%Automatic probe station KarlSuss PA200

equipped with probe heads with vacuum and magnetic support, microscope , video camera and monitor

- for strip integrity tests and for visual inspection Measuring devices:

LCR meter HP4284A SMU Keithley 237 HP34401A multimeter Picoammeter Keithley 487Electometer K6517AHV Supply K248 up to 3000VSwitching system 4x5 Matrix Switch

Clean storage cabinet with Nitrogen purge for ~200 sensors

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• clean room (6m2) level 10 000 - temperature and humidity control, overpressure

Laboratory Equipment in IP ASCR Prague

BINDER: Environmental simulation chamber

for cyclical temperature (-40°+180°C)

Flowbox with HEPA filters

Backup

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Step No Name & Deception Equipment Needed QA Specs

1 Arrival• Unpacking? • Storage of

components

Storage Cabinets (if not packaged)

Humidity <5%

2 Visual Inspection• Check for

scratches, broken edges, dust etc.

• Check edge chip spec: no chips or cracks

Optical Microscope with automated inspection software

‘Nice and Clean sensor’

3 Metrology Survey• XY geometry• Z profile

Optical (non contact) CMM Total Bow <200mm

4a I-V • Probe Station with N2/humidity control/chiller

• Sensor held on jig using clamps (not vac) in dry conditions (N2)

• 0-800V in 10v steps with 10s interval

• I < 200mA (as spec)• No onset of micro-

disharge• T = Normalised to 20oC

4b C-V As Above 0-800V in 10v steps with 5s intervalT = Normalised to 20oC

1 - Sensors (Bart + Kristin)

ITK Week - Feb 2015Andy Blue

Quality assurance - Lab requirements

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Step No

Name & Deception Equipment Needed QA Specs

5a Full Strip Test • Probe Station• Multichannel probe card

• Starts at 5-10%• Reduce to 1-2%

5b Additional Tests• PTP, CINT, RINT

Probe Station Same sensors as 5a

7 Database• Sensor is

registered• Data uploaded

PC / Laptop

8 Decision• Grading of Sensor

is made

Good, Pass, Hold or Fail

1 - Sensors (Bart + Kristin)

Andy Blue ITK Week - Feb 2015

Quality assurance - Lab requirements