En

Specifications and equipment are subject to change without any notice or obligationon the part of the manufacturer. April 2005. ©2000-05 NIKON CORPORATION

This brochure is printed on recycled paper made from 40% used material.

WARNINGTO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS

CAREFULLY BEFORE USING YOUR EQUIPMENT.

Printed in Japan (0504-05)T Code No. 2CE-KWFH-7

www.nikon.com/

Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331, Japan

NIKON CORPORATION

NIKON INSTECH CO., LTD.Parale Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku,Kawasaki, Kanagawa 210-0005, Japanphone: +81-44-223-2175 fax: +81-44-223-2182 http://www.nikon-instruments.jp/eng/

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Industrial Microscopes LV150/150A/100D

Industrial Microscopes

32

A modular microscopy system for breadth and depth

• Printer heads• Micro sensors

• Optical switches• GMR heads for HDD

• Medium/small PCB• FPC

• Interposer substrates

• Bare wafers• Lithography process• Probe, test processes

• Post-dicing

• Macromolecules, monomeric materials• Organic/inorganic materials

• Polymers • Thin film• Magnetic materials

• Crystals • Metallugraphy

• Precision molds • LCD, color filters• Polarizing filters

• Organic EL

• CCD • CMOS• LCOS • DMD

• LF/TAB • WL-CSP• QFP • SIP• BGA, CSP, FC

VersatilityVersatility

Versatility

Extend your vision

Optical performance

Improved performance

Extendyour

vision

Extendyour

vision

Opticalperformance

Opticalperformance

BasicPerformance

Improvedperformance

• OA equipment parts• Cell phones, PDAs, DSC, PC parts

• Automobiles, aeronautics

MEMS

PCB

Casts and parts

Precision molds FPD Display devices

Semiconductors Materials Packages

Versatility 5

Extensive range of industrial stages andaccessoriesUsers can select suitable models based on sample and stagestroke. All stages are highly durable with triple-plate design.

Dia base unit for diascopic illumination In the Eclipse LV series, the LV-DIA Dia Base is available fordiascopic illumination OEM use. Users can now take fulladvantage of the modular design. A UN2 transformer is usedfor the power supply.

The modular design of the Eclipse LV series

allows an unprecedented level of versatility. The

Eclipse LV series offers flexibility that enables it

to cover a wide variety of products and

applications, extending from development and

quality control to inspection in the manufacturing

process. Users will recognize the superb

performance of the Eclipse LV series when

inspecting semiconductors, FPD, packages,

electronics substrates, materials (material

science), medical devices, cast/metallic/ceramic

parts, precision molds, MEMS, telecommuni-

cations devices, and a wide variety of other

samples.

Versatility

Accepts taller samplesThe maximum sample height can be increased to 82mm from47mm by inserting the LV-CR Column Riser 35 between themain body and arm of the microscope. This feature is usefulfor viewing the surfaces of precision molds, optical materialsand other thick samples.

Non-Nikon stages (LV150 or LV150Aonly) Use of non-Nikon stages, such as the Suruga Seiki B23-60CR,in combination with the LV-SUB Substage 2 allows themicroscope to handle taller samples of up to 116.5 mm,thereby enabling the observation of fiber ends and othertools.

With column riserWithout column riser

Combination of LV-150 with LV-SUB Substage 2and Suruga Seiki B23-60CR stage

82mm47mm

Modular design

LV150 standard combination

Appropriate holder and substage are selected based onsample and stage combination.

Compact industrial stage: LV-S32 3x2 StageThe newly designed LV-S32 3x2 is a compact stage forindustrial microscopes. Its triple-plate design ensures

durability, stability and ease ofuse, even when heavy samplessuch as metallic materials areobserved. The standard glassplate makes this stage suitablefor episcopic and diascopicillumination.

An example of LV-DIA Dia Base built into a taped sample inspection system

LV-DIA Bia BaseLV-S6 6x6 Stage Stroke: 150 x 150 mm

LV-S64 6x4 StageStroke: 150 x 100 mm

L-S6WH Wafer Holder 6(for LV-S6 6x6 Stage)

L-S6PL ESD Plate (for LV-S6 6x6 Stage)

LV-S32PL ESD Plate (for LV-S32 3x2 Stage)

LV-S32SGH Slideglass Holder(for LV-S32 3x2 Stage)

LV-SUB Stage (exclusive for LV150/LV150A)

LV-SUB Substage 2 (exclusive for LV150/LV150A)

LV-S32 3x2 Stage Stroke: 75 x 50 mm

Tape-suctionsection

Roll-out section Roll-in section

Tape-transportsection

Stage section

Exte

nd y

our

visi

on

Opt

ical

Per

form

ance

67

Optical PerformanceExtend your vision

A wide variety of observation methods is available with the Eclipse LV series. Observations with first-order

compensator, UV polarizing, and epi-fluorescence observations with UV excitation, in addition to brightfield,

darkfield, DIC, simple polarizing, epi-fluorescence (excitation using visible light) and double-beam

interferometry are all possible. Two new light sources also have been developed: high-intensity, low power-

consumption 12V-50W halogen light source and adjustable high-intensity mercury-fiber light source.

Field Aperture Shutter UV-cut diaphragm diaphragm filter

BF Any diameter Any diameter Open Insert

DF Open Open Open Insert

FL1 Any diameter Any diameter Open —

FL2 Any diameter Any diameter Open —

Universal epi-illuminator: LV-UEPIThe LV-UEPI universal epi-illuminator enablesbrightfield, darkfield, simple polarizing and DICobservations. Field and aperture diaphragms areautomatically opened when the observation is switchedfrom brightfield to darkfield, and return to their originalposition when switched back to brightfield.

High-intensity 12V-50W halogenlight source:

LV-LH50PC PrecenteredLamphouseAlthough the LV-LH50PC Precentered Lamphouseis 12V-50W, the brightness is equivalent to orhigher than that of 12-100W types. The low power-consumption halogen light source contributes tothe compact design of the microscope while alsobeing friendly to the environment. Focus drift dueto heat from the illuminator is substantiallyreduced.

Universal epi-illuminator 2: LV-UEPI2The LV-UEPI2 universal episcopic illuminator isequipped with advanced optics suited to a wide variety ofobservation methods—brightfield, darkfield, DIC and epi-fluorescence—and automatically sets optimalillumination in accordance with the field and aperturediaphragm, shutter, and filters, including diffuser andND. This design enables the operator to concentrate onthe observation.

Auto optimal illuminationselection

• Brightfield• Darkfield• Simple polarizing• DIC

• Brightfield• Darkfield• Simple polarizing• Observation with first-order compensator• UV polarizing epi-fluorescence• DIC• Epi-fluorescence (UV excitation possible)

CFI60 LU Plan Fluor EPI series

CFI60 LU Plan Fluor BD series

CFI60 L Plan EPI CR series of objective lenseswith correction ring

With correction at 0.7 mm (50x)Without correction (50x)

Transmission wavelength coverageextended to UV CFI LU Plan Fluor seriesThe new CFI LU Plan Fluor series covers transmissionwavelength ranges up to UV. These objective lenses are suitablefor various research, analysis and examination needs, whilemaintaining Nikon’s commitment to high NA and long workingdistance. Only one kind of objective lens is needed forbrightfield, darkfield, simple polarizing, observation with first-order compensator, DIC and UV epi-fluorescence observations.These objective lenses, which offer high resolution and easy-to-use performance, can be combined not only with microscopesbut also with other equipment for even greater versatility.

Objective lenses with correction ringCFI L Plan EPI CR seriesThe CFI60 series now includes the CFI L Plan EPI CR series tocope with the thinner coverglass used in liquid crystal displays,and highly integrated, and dense devices. Coverglass correctioncan be continuously made from 0 mm up to 1.2 mm (0-0.7 mmand 0.6-1.3 mm for 100x) with the correction ring. The 100xobjective lens offers 0.85 high NA, while enabling high-contrastimaging of cells and patterns without being affected by thecoverglass.

Environmentally friendlyThe eco glass used in the CFI LU Plan Fluor and L Plan EPI CRseries does not contain harmful substances such as lead andarsenic.

Model Magnification NA Working Distance (mm)CFI L Plan EPI 2.5X 0.075 8.8CFI LU Plan Fluor EPI 5X 0.15 23.5New 10X 0.30 17.3

20X 0.45 4.550X 0.80 1.0100X 0.90 1.0

CFI LU Plan EPI ELWD 20X 0.40 13.050X 0.55 10.1100X 0.80 3.5

CFI L Plan EPI SLWD 20X 0.35 24.050X 0.45 17.0100X 0.70 6.5

CFI LU Plan Apo EPI 100X 0.95 0.4150X 0.95 0.3

CFI L Plan Apo EPI WI 150X 1.25 0.25

Model Magnification NA Working Distance (mm)CFI LU Plan Fluor BD 5X 0.15 18.0New 10X 0.30 15.0

20X 0.45 4.550X 0.80 1.0100X 0.90 1.0

CFI LU Plan BD ELWD 20X 0.40 13.050X 0.55 9.8100X 0.80 3.5

CFI LU Plan Apo BD 100X 0.90 0.51150X 0.90 0.4

Model Magnification NA (mm) Working Distance (mm) Glass Thickness Correction Range CFI L Plan EPI CR New 20x 0.45 10.9-10.0 0-1.2mmCFI L Plan EPI CR New 50x 0.7 3.9-3.0 0-1.2mmCFI L Plan EPI CRA New 100x 0.85 1.2-0.85 0-0.7mmCFI L Plan EPI CRB New 100x 0.85 1.3-0.95 0.6-1.3mm

CFI60 Series Objectives

8 9Impr

oved

per

form

ance

Usability has been vastly improved as has durability and rigidity.

Improved performance

Highly rigid, vibration-free body The use of structural analysis during the design processhas improved rigidity and antivibration parameters toyield clear images even at high magnification.

Tilting trinocular eyepiece tube

LV-TT2 Tilting Trinocular EyepieceTubeThe newly developed LV-TT2 tilting trinoculareyepiece tube (erect image) offers comfort to allusers, regardless of their stature or viewingposition. The optical path changeover of100:0/20:80 allows the simultaneous use of amonitor.

Highly durable motorized nosepiece

LV-NU5A Nosepiece The LV-NU5A motorized universal quintuplenosepiece is 10 times more durable than itspredecessor and can be used with the LV150A. Incombination with the LV-NCNT motorizednosepiece controller, it can also be used in otherdevices.

Manual nosepiece A variety of manual nosepieces are available to suitall needs.

Thorough ESD protection

All parts of the microscope that might be touched,including the body, tube and stage, have beeninsulated. This improves anticontamination andprevents samples from being harmed by staticelectricity, thereby improving yields.

Electrostatic decay time: 1000-10V, within 0.2 sec.

C-N6 Nosepiece(Brightfield)

L-NBD5 Nosepiece(Bright/darkfield)

L-NU5 Nosepiece(Universal)

LV-�P� Plate

BrightfieldThe antiflare design appliedto the objective lenses andlight source ensures bright,high-contrast images.

DarkfieldNikon’s unique “Fly-eyeLens” used in the darkfieldilluminator yields athreefold increase inbrightness over previousmodels. This allows high-sensitivity detection ofdefects and height gaps insamples.

Nomarski DIC

Standard or high contrast DICsliders can be selected to suitthe sample. This method isuseful for the surfaceobservations of variousdevices and precision molds.

Epi-fluorescenceUV, V, BV, B or G excitationfluorescence filter blocks canbe selected. This method isperfect for the observation ofOEL, ion migration and othersubstrate uses.

L-DIC DIC Prism (standard) L-DIHC DIC Prism (high contrast) Brightfield Epi-fluorescence B-2A

Fluorescence filter blocks

Simple polarizingIn addition to simplepolarizing, a lambda platecan be inserted into theoptical path to achieveobservations with a first-order compensator. This isuseful for liquid crystalinspections (when used incombination with the LV-UEPI 2).

Double-beam interferometry equipment(measures minute height gaps)

Michelson (TI) and Mirau (DI)types of episcopic double-beam interferometry can becarried out. A filar micrometereyepiece can be used toexamine or measure sampleswhile avoiding direct contact.

Diascopic illuminationDiascopic illumination isused to observe opticalparts, FPD and other samplesthat transmit light.

Episcopic Two-beam Interferometry Equipment TI/DI

Condenser

Observation Methods

YM-POPolarizer

LV-UVPolarizer

LV-FLAN FLAnalyzer

L-ANAnalyzer

LV-PO Polarizer

LV-FLAN FL Analyzer

L-DIC DIC Prism

L-DICH[??]High-contrastDIC Prism

YM-POPolarizer

L-ANAnalyzer

10 11

Semiconductor (IC wafer) Semiconductor (IC wafer) MEMS (optical switch)

Brightfield Darkfield Brightfield

Micro bump Compact disc (CD) Image sensor (CCD)

Brightfield Simple polarizing Brightfield

PCB (ion migration) PCB (ion migration) Precision mold

Brightfield Epi-fluorescence DIC

L150A controls

(Episcopic illumination type)

Applications

CFI-series eyepiece

An illuminator that can beused for brightfield,darkfield, simplepolarizing and DICobservations.

LV-UEPI

A universal motorizednosepiece that is 10 timesmore durable than itspredecessors.

LV-NU5A Nosepiece

These objective lenses feature ahigh NA, long working distancesand an extended transmissionwavelength range.

CFI LU Plan Fluor series

The LV150 and LV150Amicroscopes are used forepiscopic illumination.

A trinocular tube with anoptical path changeoverof 100:0/0:100.

LV150/LV150A

An episcopic illuminationstage capable of inspecting150mm wafers. (With 6”wafer holder)

LV-S6 6x6 Stage

LV-TI3 Trinocular TubeA low power-consumption 12V-50Whalogen light source equivalent to orhigher than the 12V-100W type.

LV-LH50PC Precentered Lamphouse

Motorized nosepiece controls

12 13

Applications

(Episcopic/diascopic illumination type)

LCD (color filter) LCD (conductive particle) Test reticle

Diascopic brightfield DIC Diascopic brightfield

リシャ輝石？？ Carbon paper Nodular graphite cast iron

DIC Brightfield DIC

Tourmaline Tourmaline Tourmaline

Brightfield DIC Double-beam interferometry

CFI-series eyepiece

The LV-UEPI2 illuminatorenables brightfield,darkfield, DIC, simplepolarizing, and UVexcitation epi-fluorescenceobservations.

LV-UEPI2

Selectable from C-N6(brightfield), L-NBD5(bright/darkfield) and L-NU5 (universal) nosepieces.

Nosepiece

These objective lenses featurehigh NA, long working distancesand an extended transmissionwavelength range.

CFI LU Plan Fluor Series

A trinocular tube with anoptical path changeoverof 100:0/0:100.

This small, industrial-usestage has a triple-platedesign and can be used forepiscopic and diascopicillumination.

LV-S32 3x2 Stage

LV-TI3 Trinocular Tube

A low power-consumption 12V-50Whalogen light source equivalent to orhigher than the 12V-100W type.

LV-LH50PC 12V-50W Lamphouse

The LV100D microscope iscapable of episcopic anddiascopic illumination.

LV100D

14 15ACCESSORIES

100100

ININ

0

0 0

100100

OUTOUT

JAPA

N

Eyepiece tubesIlluminators Double Port Polarizing/DIC accessories

Nosepieces

Objective adapters

Objective lenses

Substages (LV150/LV150A)

Stages

Holders

MicrometersDiascopic illumination condensers

Model F.O.V. Remarks

CFI 10x 22

CFI 10xM 22 Photomask included

CFI 10×CM：for C-TE binocular ergo tube 22 Crosshairs and micrometer included

CFI 12.5x 16

CFI 15x 14.5

CFI UW 10x 25

CFI UW 10xM 25 Photomask included

Mirometer eyepiece 10xN 20 Stroke 10 mmMain scale: 0.1 mm/incrementsSub scale: 0.01 mm/increments

Objective micrometer Eyepiece micrometer Grid micrometer

LV-TI3 TrinocularEyepiece Tube ESD Y-IDP Double Port

(Beamsplit 45:55/0:100)Y-IDP Double Port 0/100(Beamsplit 100:0/0:100)

LV-TT2 Tilting Trinocular Eyepiece Tube

LV-SUB Stage LV-SUB Stage 2

C-N6 Nosepiece(Brightfield)

L-NBD5 Nosepiece(Bright/darkfield)

L-NU5Nosepiece(Universal)

C-OA 15mm AdapterLU objective Adapter M32-25

LV-NU5A MotorizedNosepiece (Universal)

LV-S6 6x6 Stage LV-S64 6x4 Stage LV-S32 3x2 Stage

L-S6WH WaferHolder

For LV-S6 6x6 Stage For LV-S32 3x2 Stage

L-S6PL ESD Plate LV-S32SGHSlideglass Holder

LV-S32PLESD Plate

Simple Polarizing

UV polarizing epi-fluorescence

YM-POPolarizer

LV-UVPolarizer

LV-FLAN FLAnalyzer

L-DIC DICPrism

L-DICHHigh-contrastDIC Prism

L-ANAnalyzer

YM-POPolarizer

L-ANAnalyzer

LV-POPolarizer

LV-FLAN FLAnalyzer

LV-�P� Plate

Observation with first-order compensator

DIC

LWDAchromat

C-C Abbe DF (Dry)Slide (Swing-out??)Achromat 2-100x

C-C Achro

CFI LU PLAN FLUOR EPI series

CFI LU PLAN FLUOR BD series

CFI L PLAN EPI CR series

LV-UEPI

LV-UEPI2

Eyepieces

16 17

Digital cameras for microscopes

The Digital Sight series is a powerful imaging system for monitoring/capturing images taken under brightfield,

darkfield, DIC, epi-fluorescence, and other observation methods.

Ultrahigh-definition Digital Camera

Digital Camera

The DXM1200F produces true-to-life, extremely high-quality images with up to approximately 12 million output pixels. It meets

the demanding requirements of professional users and is excellent for image analysis in advanced R&D fields.

• Approx. 12 million output pixels comparable to filmhigh-end cameras, thanks to Nikon’s exclusive micro-step high-density imaging technology

• Live image display at a frame rate of 12 fps max.

• The wide exposure latitude produces true-to-lifeimages regardless of brightness level.

Standalone type

This type comes with an LCD monitor, making itconvenient for on-screen monitoring without a PC and inapplications that require long/multiple exposures.

Real imaging camera—DS-2Mv-L1• Live image display at 30fps max.• Image size: 1600 x 1200 pixels• 6.3” TFT monitor• Analog RGB output• CompactFlash card slot• USB mass-storage-class

compatible• Direct print function (Pict

bridge compatible)optional*1

• Ethernet (100BASE/TX) port*2

*1: A CP900DC dedicated printerand C-mount adapter arenecessary. Provided with real 10mode (10X printing).

*2: FTP Client/Server, HTTP Server Telnet Server functions provided.

PC-connection type

This type requires connection to a PC and allowsobservation on a PC monitor, image capture,measurement and analysis when special applicationsoftware, ACT-2U, is used.

Real imaging camera—DS-2Mv-U1• Live image display at 12fps (800 x 560)• Image size: 1600 x 1200 pixels• PC connection via USB2.0• Dedicated application software—ACT-2U

Camera headsSelect the best type to match your sample and use.

For brightfield, darkfield, DIC observationsFor fluorescence observations (that require long exposure)

A host of measuring tools

*Dedicated ACT-2U camera control software is necessary when using the DS-U1.

DS-2MBW• Image size: 1600 x 1200 pixels

• 15 fps (30 max.)

• Superb movie

DS-5M• Image size: 2560 x 1920 pixels

• True-to-life recording of minute

images

DS-2MBWc• Image size: 1600 x 1200 pixels

• Sensitivity approx. 5 times greater

than predecessors

• Includes a Peltier device

• Brilliant images with minimum noise

DS-5Mc• Image size: 2560 x 1920 pixels

• Includes a Peltier device

• Brilliant images with minimum noise

Cross scale (DS-L1 only)

Option: camera control software

ACT-2The optional ACT-2U software offers the followingarrays of convenient measurement tools.

Camera control software

ACT-1Minimizes fatigue during large-volume, extendedtime shooting.All essential sections, including � live image preview, �captured image window, � thumbnail, and � imagecapture parameter setting panel, are simultaneouslydisplayed on a single screen, enabling users to easilyunderstand image capture procedures. The size of theparameter setting panel has been reduced to leave morespace for image display.

� �

� �

Dedicated camera controlsoftware ACT-2U

Wafer/IC chip

Two-point distance

Area (DS-U1 only) XY scaleScreen pattern (crossline, circle)

Scale Point to line distance Intersection angle Circumference/diameter

Metal/ceramics PCB

Camera control software for DS-L1/DS-U1Scene mode—optimal imaging with a single mouse clickOptimal imaging parameters have been preset for each sample type, therefore anyone, regardless of experience, can easily performphotography of the highest level. Two-point distance

Scale

Point to line distance

Intersection angle

Circumference/diameter

Area

XY scale

Screen pattern (crossline, circle)

1918

Dimensional diagrams

LV-UEPI Universal Epi-illuminator LV-UEPI2 Universal Epi-illuminator 2

LV-DIA Dia Dase

100

IN

0

0

100

OUT

95.5

267.090

508.5

387.2

326

193

78.1

341456.8

134.5

36

250

25.5

JAPAN

341

495

391

326

193

92

15176

250

140.5

95.5

122 122

76.5

88 88

26.5

5 4.7

155 35

114

35

336295

27660

13

130

61

25

57

29

100

φ48

336295

27660

13

130

61

25

105

95

Cable length 220mm (cord bush exit to connector exit)

54

φ40

40

45°

410.5370

11025.5

300.5113.3

81.3

10079.3

φ48

5712

φ21φ51

65 516

54

φ40

40

45°

410.5370

11025.5

300.5113.3

81.3

79.3

φ21φ51

65 516

105

95

Cable length 220mm (cord bush exit to connector exit)

48

10°

110

28

111

(182)

ケーブル長:固定部より160mm

6915

φ127φ43.5

15°

14993.755.7(8

9)

48

88

100

171.5

171.5

φ60

φ48

φ62

250

167.5

71

127

55341

367

250

115 73.5116

JAPAN

JAPAN

205

317

317

109

φ34

357

40 31 217 25.5

129 299

205.5

205.5

140.5

188

188

φ34

45.5

25.5

299

φ34 φ34109 109

140.5227

181

186

174

31 25.5

174

111

129

45.5

φ34

8445.5

25.5

134

134

φ34

140.5

100

IN

0

0

100

OUT

118

100

153

192.7 65.5

20°

20°

96.8

φ10

E.P.

137.3 138.3

φ60φ50

φ51 φ51

60 67 202.5

118

73.7103

92.582

54.5

5

59

E.P.

264.6 66 31

φ52

104

98.5

75

35 26.544

70 74 507430.5 13

8-M4

4-M4

( 39)

100

50

3054106

94

1206696

LV-TI3 TrinocularTube ESD

LV-TT2 TiltingTrinocular Tube

LV-CR Column Riser 35

LV-S6 6x6 Stage LV-S64 6x4 Stage

LV-SUB Stage

LV-NU5ANosepiece

LV-NCNT NosepieceController

LV-SUB Stage 2 LV-S32PLESD Plate

LV-S32SGH SlideglassHolder

LV-S32 3x2 Stage

LV150A/LV150

LV100D

20 21

LV150/150A

Main specifications

Main body Baseless type (spacer insertable between arm and stand); Max. sample height 47mm (when configured with 3x2 stage/6x4 stage),82mm with column riser, 116.5mm with Suruga Seiki B23-60CR; 12V-50W brightness control transformer built in

Focusing section Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 40mm, coarse 14.0mm/rotation (torque adjustable, withrefocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)

Nosepiece C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece(universal quintuple, with flare prevention), LV-NU5A Nosepiece (for LV150A, high-durability motorized universal quintuple, withflare prevention)

Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); Field (centerable) and aperture diaphragms synchronized with B/D LV-U EPI changeover; ø25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer mountable

Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); 120W high-intensity mercury-fiber illuminator (with brightness LV-U EPI2 control, no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover;

f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable

Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (invertedimage, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22)

Stage LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate), ESD-applied (excluding glass plate)LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate), ESD-applied (excluding glass plate)LV-S6 6x6 Stage (stroke: 150x150 mm; only for episcopic illumination)

Eyepiece CFI eyepiece series

Objective lens CFI60 series

Electrostatic decay time 1000-10V, within 0.2 sec.

Power consumption 1.2A/75W

Weight Approx. 8.6kg

LV100DMain body Baseless type (spacer insertable between arm and stand); Max. sample height 29mm, 64mm with column riser; 12V-50W

brightness control transformer built in

Focusing section Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 30mm, coarse 14.0mm/rotation (torque adjustable, withrefocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)

Nosepiece C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece(universal quintuple, with flare prevention)

Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); Field (centerable) and aperture diaphragms synchronized with B/D LV-U EPI changeover; f25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable

Episcopic illuminator 12V-50W high-intensity halogen lamp (ESD-applied); 120W high-intensity mercury-fiber illuminator (with brightness control,LV-U EPI2 no centering necessary) mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; f25mm filter

(NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable

Diascopic illuminator 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; Filters(ND8, NCB11) insertable

Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF Trinocular (invertedimage, F.O.V 22/25), Y-TB Binocular (inverted image, F.O.V 22), C-TE Tilting Binocular (inverted image, F.O.V 22)

Stage LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate) LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate)

Eyepiece CFI eyepiece series

Objective lens CFI60 series

Electrostatic decay time 1000-10V, within 0.2 sec.

Power consumption 1.2A/75W

Weight Approx. 9.4kg

Polarizers/analyzers/�plate

YM-PO Polarizer LV-PO Polarizer

LV-FLAN FL Analyzer LV-�P �Plate

LV-UVPO Polarizer L-AN Analyzer

47113.5

79

903030

30

36.5

7.5

307.5

10

45°±'

λ板の方位

6.5

6.5

90

30

85.479

85.4 85.479

30

φ29

φ20 φ17.5 φ9

φ23.8

φ29

φ23.8

φ29

φ23.8M25x0.75 M25x0.75 M25x0.75

M25x0.75 M25x0.75

36.5

60.2

60.2

60.1

60.3

(0.5)

(0.5)

(0.7)

49.1

42 45

35

51

60 60

3 3

60 60 60

54 54

0.2

0.2

0.2

0.5

0.5

6.7

3.95

56.1

58.7

10.8

14.5

14.3

1322

6.2

25

(0.7)

14.3

1322

6.4

1.8

15.5

6.5

3.13

11.7

13

21.1

5

55

55.5

5

595

595

5 5

42.5

55.5 59 5947.5 47.5

4.5

4.5

2.3

3.5

5 5 5

45°

50°

45°30°

W.D.=23.5

W.D.=17.5

4.5

60 60 60

60 60

CFI LU Plan Fluor EPI 5X CFI LU Plan Fluor EPI 10X

45°

CFI LU Plan Fluor EPI 20X φ30

φ23.8

φ30

φ23.8

40°

30°W.D.=1

W.D.=1

φ17.5φ21.8

φ24

CFI LU Plan Fluor EPI 50X

φ8.5

φ18φ21.8

φ24

φ8.8

CFI LU Plan Fluor EPI 100X

φ35

φ36φ34φ30.8

φ36φ34φ30.8

φ36φ34

φ35φ35

φ40φ40

φ30.8 φ30.8φ30.8

φ35.5φ25 φ26.2

(φ28.4) (φ28.4)φ37 φ37

φ33.5

φ27.6

φ33.5 φ35.5 φ35.5

φ19.8φ24.8

φ27φ32.5

φ29.5 φ29.5φ28.5φ23.8

φ28.5

φ34 φ34

φ13φ18.8φ23.3

φ31.5φ26

φ32φ29φ27φ23.8

φ33.5φ29.5

φ31.5

φ20

φ27.5

0.6(CG)

0.6(CG)

0.3(CG)

0.9(CG)

W.D.=10.5

W.D.=3.5

W.D.=1.1

58.2

5W.D.=1.2

11°

(45°）

CFI L PLAN EPI 20XCR

M25x0.75

CFI L PLAN EPI 50XCR

M25x0.75-6g M25x0.75

(7°)

45°

30°

(16°)

45°

6.5

25°

(16°)

45°

6.5

26°

φ11.5

φ19.8φ24.8

φ32.5φ27

φ14.5

CFI L PLAN EPI 100XCRA CFI L PLAN EPI 100XCRB

W.D.=18

W.D.=15

W.D.=4.5

W.D.=1

W.D.=1

M32x0.75 M32x0.75 M32x0.75 M32x0.75 M32x0.75

45°

45°

35°

35°

40.4(Over head screw) 40.4

(Over head screw)

CFI LU Plan Fluor BD 100XCFI LU Plan Fluor BD 50XCFI LU Plan Fluor BD 20XCFI LU Plan Fluor BD 10XCFI LU Plan Fluor BD 5X

CFI LU PLAN FLUOR

CFI L PLAN EPI CR

CFI LU PLAN FLUOR BD

JAPANJAPANJAPANJAPAN

JAPANJAPANL.UL.U

L.UL.U

L.UL.U23.5WD

15A5X /

JAPANJAPAN

L.UL.U

18WD15A5X /

JAPANJAPAN

L.UL.U

15WD30A10X /

JAPANJAPAN

L.UL.U

4.5WD45 A20X /

JAPANJAPAN

L.UL.U

1.0WD90 A100X /

JAPANJAPAN

L.UL.U

1.0WD80 A50X /

17.5WD30A10X /

4.5WD45A20X /

JAPANJAPAN

L.UL.U

1.0WD80A50X /

JAPANJAPANJAPANJAPAN JAPANJAPAN

L 100X / 0.35

JAPANJAPAN

L 100X / 0.35L 50X / 0.70L 20X / 0.45

JAPANJAPAN

L.UL.U

1.0WD90A100X /

Objective lenses

22 23

System diagram

LV150／LV150A LV100D

D-FB

ND4ND16

NCB11

λOUT

IN

F FE

AB

A

FE

B

II’

I’

I’

F E

O P

P'

T

Q

Q'

R

Q S

O

T Q'

R

S

*Not necessary on the LV150A as the operation unit has been built into the main body.

Fiber

External Power Supply

S

I

P

P'

POWER

MIN. MAX.

PhotomicrographicSystem FX-III Series ENG-mount CCTV Camera C-mount CCTV Camera

Camera Mount

V-T Photo Adapter

Projection LensesPLI 2xPLI 2.5xPLI 4xPLI 5x

ENG-mount CCTV Adapters0.45x0.6x

ENG-mount CCTV Adapter

Relay Lens 1x

ENG-mount Zooming Adapter

Zooming Lens

C-mount Zooming Adapter

C-mount CCTV Adapter

Relay Lens 1x

C-mount CCTV Adapters0.35x0.45x0.6x0.7x

C-mount CCTV AdapterVM2.54x

C-mount CCTV AdapterVM4x

C-mount Direct CCTV Adapter C-mount

Adapter A0.7x

DXM1200F

DS-5M DS-2M

LV-TV TV Tube

C-mount Adapter0.55x

0.5x 2nd Objective Y-TB

Binocular Tube

Other Eclipse series eyepiece tubes can be used.

LV-TI3 Trinocular Tube ESD

LV-TT2 Tilting Trinocular Tube

Eyepiece Tubes

Epi-fluorescence Accessories

C-FL Fluorescence Filter Block L-AN

AnalyzerYM-PO Polarizer

LV-FLAN FL Analyzer

LV-λP λPlate

LV-PO Polarizer

LV-UVPO Polarizer

D-FB Excitation Light Balancer

NCB Slider

ND Slider

Adapter

CFI UW10x

CFI UW10x M

F.N.ø25F.N.ø22

CFI15x

C-CTCentering

Telescope CFI

12.5xCFI

10xCMCFI

10xMCFI10x

L-W10xESD

Filar Micrometer10xN

Eyepieces

LV-SUB Substage

Surugaseiki B23-60CR LV-SUB

Substage 2

LV-CR Column Riser 35

C-ER Eyelevel Riser

Y-IDP Double Port (100：0 / 55：45)

Y-IDP Double Port (100：0 / 0：100)

LV-UEPI Universal Epi-Illuminator

LV-UEPI2 Universal Epi-Illuminator 2

Intermediate Modules

L-S6WH Wafer Holder

L-S6PL ESD Plate

LV-S32SGH Slidegalss Holder

LV-S32PL ESD Plate

LV-S6 6x6 Stage

LV-S64 6x4 Stage

LV-S32 3x2 Stage

StagesLV-LH50PC Precentered Lamphouse

D-LH 12V-100W Precentered Lamphouse (Requires TE2 External External Power Supply)

C-HGF Fiber Adapter

LV-HL50W 12V-50W-LL Halogen Lamp

12V-100W Lamp

100W TE2 Power Supply

Lamphouses

L-DIC DIC Prism

L-DIHC High Contrast DIC Prism LV-NU5A

Motorized Nosepiece

L-NU5 U5 Nosepiece

L-NBD5 DB5 Nosepiece

C-N C-N6 Nosepiece

P-N P-N5 Nosepiece

Adapter

LV-NCNT Nosepiece Controller*

LV-NCNT Nosepiece Controller Cable 10m

LU Plan Fluor BD Objective

LU Plan Fluor EPI Objective

LU Nosepiece AdapterM32-25

C-OA 15MM Adapter

DI Objective

CFI L/LU EPI P Objective

TI Objective Adapter

Nosepieces

C

D-FB

ND4ND16

NCB11

λOUT

IN

F FE

A

FE

B

I

F E

O P

P'

T

Q

Q'

R

Q S

I’O

T Q'

R

S

LV-S32 3x2 Stage

鏡筒

S

I

P

P'

A

B

I

C

カメラマウント

TE2-PS100W Power Supply (YM-EPI3 3-pin extension cord is required)

POWER

MIN. MAX.

POWER

MIN. MAX.

II’

I’

PhotomicrographicSystem FX-III Series ENG-mount CCTV Camera C-mount CCTV Camera

Camera Mount

V-T Photo Adapter

Projection LensesPLI 2xPLI 2.5xPLI 4xPLI 5x

ENG-mount CCTV Adapters0.45x0.6x

ENG-mount CCTV Adapter

Relay Lens 1x

ENG-mount Zooming Adapter

Zooming Lens

C-mount Zooming Adapter

C-mount CCTV Adapter

Relay Lens 1x

C-mount CCTV Adapters0.35x0.45x0.6x0.7x

C-mount CCTV AdapterVM2.54x

C-mount CCTV AdapterVM4x

C-mount Direct CCTV Adapter C-mount

Adapter A0.7x

DXM1200F

DS-5M DS-2M

LV-TV TV Tube

C-mount Adapter0.55x

0.5x 2nd Objective Y-TB

Binocular Tube

Other Eclipse series eyepiece tubes can be used.

LV-TI3 Trinocular Tube ESD

LV-TT2 Tilting Trinocular Tube

Eyepiece Tubes

Epi-fluorescence Accessories

C-FL Fluorescence Filter Block L-AN

AnalyzerYM-PO Polarizer

LV-FLAN FL Analyzer

LV-λP λPlate

LV-PO Polarizer

LV-UVPO Polarizer

D-FB Excitation Light Balancer

NCB Slider

ND Slider

Adapter

CFI UW10x

CFI UW10x M

F.N.ø25F.N.ø22

CFI15x

C-CTCentering

Telescope CFI

12.5xCFI

10xCMCFI

10xMCFI10x

L-W10xESD

Filar Micrometer10xN

Eyepieces

C-SP Simple Polarizing Polarizer

LV-CR Column Riser 35

C-ER Eyelevel Riser

Y-IDP Double Port (100：0 / 55：45)

Y-IDP Double Port (100：0 / 0：100)

LV-UEPI Universal Epi-Illuminator

LV-UEPI2 Universal Epi-Illuminator 2

Intermediate Modules

LV-S32SGH Slidegalss Holder

LV-S32PL ESD Plate

LV-S64 6x4 Stage

StagesLV-LH50PC Precentered Lamphouse

D-LH 12V-100W Precentered Lamphouse (Requires TE2 External Power Supply)

C-HGF Fiber Adapter

LV-HL50W 12V-50W-LL Halogen Lamp

12V-100W Lamp

100W TE2 Power Supply

Lamphouses

L-DIC DIC Prism

L-DIHC High Contrast DIC Prism L-NU5 U5

NosepieceL-NBD5 DB5 Nosepiece

C-N C-N6 Nosepiece

P-N P-N5 Nosepiece

External Power Supply

LU Plan Fluor BD Objective

LU Plan Fluor EPI Objective

LU Nosepiece AdapterM32-25

C-OA 15MM Adapter

DI Objective

CFI L/LU EPI P Objective

TI Objective Adapter

Adapter

Nosepieces

DF (dry)D-C Abbe

C-C Achromat

LWD Achromat

Slide (Swing-out??) Achromat 2-100x

Condensers