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Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split Cylinder Resonator Method for Measuring Complex Permittivity of Low Loss Materials Implementing the Split Cylinder Resonator Method for Measuring Complex Permittivity of Low Loss Materials Shelley Blasdel Begley

Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

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Page 1: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials

June 19 2008

Implementing the Split Cylinder Resonator Method

for Measuring Complex Permittivity of Low Loss Materials

Implementing the Split Cylinder Resonator Method

for Measuring Complex Permittivity of Low Loss Materials

Shelley Blasdel Begley

Page 2: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Outline

• Overview of the Split Cylinder Method

• A Walk Through the Process

Qo

fo

f

Qs

fs

Page 3: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Sensitive Resonant method for measuring complex permittivity

Useful for thin film and low loss sheet materials.

Originally proposed by Gordon Kent, improved by NIST Boulder, CO.

Adopted as IPC Standard TM-650 2.5.5.13

Overview of the Split Cylinder Method

Page 4: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Split Cylinder Resonator System

Split Cylinder Resonator with

sample

connected between ports.

Network Analyzer

GP-IB or LAN

Computer

(not required for PNA)

NIST or Agilent

Software

Page 5: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Overview of the Split Cylinder Method

NIST fixture Agilent fixture

Sample

Page 6: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Measure Empty and Sample filled Resonator

Real part of permittivity is a function of Frequency shiftLoss tangent is a function of decrease in Q factor Also needed: Sample thickness

Overview of the Split Cylinder Method

Qo

fo

f

Qs

fs

Page 7: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Process Flow

Qo

fo

f

Qs

fs

Start

Measure

Empty SCR

Frequency & Q

Measure

Sample Thickness

Measure

Sample Filled SCR

Frequency & Q

End

Calculate

Permittivity

New Sample Same Sample

Higher Order Mode

Page 8: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Process Flow

Qo

fo

f

Qs

fs

Start

Measure

Empty SCR

Frequency & Q

Measure

Sample Thickness

Measure

Sample Filled SCR

Frequency & Q

End

Calculate

Permittivity

New Sample Same Sample

Higher Order Mode

Page 9: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Measure Empty Split Cylinder Resonator

Page 10: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

S21 of TE011 Mode

Resonator should be loosely coupled

Adjust peak between 55-65dB

Measure Empty Split Cylinder Resonator

Agilent SoftwareAgilent Software guide

Page 11: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Frequency and Quality Factor determination

Cycleper t Energy Los

Resonancein StoredEnergy 2π=Q

Page 12: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Frequency and Quality Factor determination

Scalar Techniques

• 3dB Bandwidth

• Weighted Least Squares (WLS)

• Resonant Curve Area (RCA)

S21

f

fQ

∆= 0

∆f

3dB

f0

Page 13: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Frequency and Quality Factor determination

Vector Technique

• Circle Fit

S21

fo

o

o

l

j

f

fft

tjQ

deLfT

−=

++=

2

1)(

2 δ

Page 14: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Frequency and Quality Factor determination

Method 3dB WLS RCA Circle Fit

Average 75073.28 74082.27 74120.70 74241.30

Standard Dev. 760.37 239.12 221.78 113.04

Percent of SD 1.01 0.32 0.30 0.15

Method Comparison

• 3dB Bandwidth

• Weighted Least Squares (WLS)

• Resonant Curve Area (RCA)

• Circle Fit

Page 15: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Process Flow

Qo

fo

f

Qs

fs

Start

Measure

Empty SCR

Frequency & Q

Measure

Sample Thickness

Measure

Sample Filled SCR

Frequency & Q

End

Calculate

Permittivity

New Sample Same Sample

Higher Order Mode

Page 16: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Sample is assumed to be a uniform known thickness

Best results: 0.1 to 3mm thick, ideally ~1mm

Thickness uncertainty <0.02mm

Minimize imperfections due to:

Flatness

Straightness

Parallelism

Measure Sample Thickness

Page 17: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Sample thickness measurement

Conforming samples such as thin films and PCBs

• Samples will be straightened out by

cylinders.

• Recommend Agilent built in micrometer or

mean of multiple thickness measurements.

Rigid samples such as Ceramics

• Samples will not be straightened out by

cylinders.

• Recommend mean of multiple thickness

measurements.

fixed cylinder

half

adjustable cylinder

halfcoupling loop

sample

coupling loop

z

fixed cylinder

half

adjustable cylinder

halfcoupling loop

sample

coupling loop

z

Page 18: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Process Flow

Qo

fo

f

Qs

fs

Start

Measure

Empty SCR

Frequency & Q

Measure

Sample Thickness

Measure

Sample Filled SCR

Frequency & Q

End

Calculate

Permittivity

New Sample Same Sample

Higher Order Mode

Page 19: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Measure Sample Filled Resonator

f0

fsQ

o

fo

f

Q

s

fs

=

Page 20: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Estimate Sample Filled Frequency

Three ways to come up with initial guess:

• Theoretical or Design Value

• Independent Measurement

• Measure TE111 mode

NIST Software –CalcFoInput.dat

Number of TE0n Modes in Model

Radius of Split-Cylinder Resonator (m)

Length of Upper or Lower Split-Cylinder Resonator Section (m)

Substrate Thickness (m)

Initial Guess for Relative Permittivity of Substrate

Page 21: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Calculate Sample Filled Frequency

TE111 mode is the

dominant mode when

03.22 >radius

lengthTE111

0'

2cot

'

'

2tan

'

03.2

2

2

2

2

2

2

2

2

2

2

2

2

2

2

2

2

=

−−−

−−

>

a

mn

c

h

a

mn

c

a

mn

c

e

a

mn

c

a

h

χωχω

χωε

χωε

h = the total length of the closed cavity, or in this case where the cylinders are equal length, 2x the length of one cylinder.

a = the radius of the cylinders.

χ’mn = the mth root of Bessel function of nth order

Page 22: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Calculate Sample Filled Frequency

TE111 mode

Agilent Software

Page 23: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Measure Sample Filled Frequency and Q

Agilent Software

Page 24: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Process Flow

Qo

fo

f

Qs

fs

Start

Measure

Empty SCR

Frequency & Q

Measure

Sample Thickness

Measure

Sample Filled SCR

Frequency & Q

End

Calculate

Permittivity

New Sample Same Sample

Higher Order Mode

Page 25: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Calculate Permittivity

Agilent Software

Page 26: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Process Flow

Qo

fo

f

Qs

fs

Start

Measure

Empty SCR

Frequency & Q

Measure

Sample Thickness

Measure

Sample Filled SCR

Frequency & Q

End

Calculate

Permittivity

New Sample Same Sample

Higher Order Mode

Page 27: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Higher Order Modes

TE011

Page 28: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Double Peak in Search Span

Page 29: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Interfering Modes

Page 30: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Interfering Modes

Page 31: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

Month ##, 200X

Split Cylinder Resonator Results

Real Part of Permittivity (Dk)

Teflon® PTFE

1.9

1.95

2

2.05

2.1

2.15

2.2

5 10 15 20 25 30

GHz

Expected Value Measured Value

Page 32: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Split Cylinder Resonator Results

Loss Tangent (Df)

Teflon® PTFE

-0.001

-0.0005

0

0.0005

0.001

0.0015

0.002

5 10 15 20 25 30

GHz

Expected Value Measured Value

Page 33: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Thank You for listening

Qo

fo

f

Qs

fs

Start

Measure

Empty SCR

Frequency & Q

Measure

Sample Thickness

Measure

Sample Filled SCR

Frequency & Q

End

Calculate

Permittivity

New Sample Same Sample

Higher Order Mode More information atwww.agilent.com/find/materials

Page 34: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

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References[1] M.D. Janezic, ‘‘Nondestructive Relative Permittivity and Loss Tangent Measurements using a Split-Cylinder Resonator,’’Ph.D.

Thesis, University of Colorado at Boulder, 2003.

[2] IPC-TM-650 Test Methods Manual Relative Permittivity and Loss Tangent Using a Split-Cylinder Resonator” Number

2.5.5.13 January, 2007.

[3] R.N. Clarke (Ed.), “A Guide to the Characterization of Dielectric Materials at RF and Microwave Frequencies,” Published by

The Institute of Measurement & Control (UK) & NPL, 2003

[4] P.G. Bartley, S.B. Begley “Quality Factor Determination of Resonant Structures” IMTC 2006 – Instrumentation and

Measurement Technology Conference Sorrento, Italy 24-27 April 2006

[5] M.T. Ali, M.K.M. Salleh, Md.M.Md. Zan “” Air-Filled Circular Cross Sectional Cavity for Microwave Non-Destructive Testing

Transactions on Engineering, Computing and Technology Volume 18 December 2006, pg 107-112, ISSN 1305-5313

[6] M.D. Janezic, J.Krupka “Split-Post and Split-Cylinder Resonator Techniques: A Comparison of Complex Permittivity

Measurement of Dielectric Substrates”. CICMT 2008 pgs 156-159.

Page 35: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

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Appendix

Page 36: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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NIST Software Inputs

CalcFoInput.dat

Number of TE0n Modes in Model

Radius of Split-Cylinder Resonator (m)

Length of Upper or Lower Split-Cylinder Resonator Section (m)

Substrate Thickness (m)

Initial Guess for Relative Permittivity of Substrate

SplitCInput.dat

Number of TE0n Modes in Model

Radius of Split-Cylinder Resonator (m)

Length of Upper or Lower Split-Cylinder Resonator Section (m)

Substrate Thickness (m)

Conductivity of Split-Cylinder Resonator (S/m)

Resonant Frequency of TE0np Mode (Hz)

Quality Factor of TE01np Mode

Initial Guess for Relative Permittivity of Substrate

Page 37: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

Group/Presentation TitleAgilent Restricted

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Definition of Permittivity

"'

0rrr jεεε

ε

εκ −===

storage loss

'rε

Measure of how much

energy from an external

electric field is stored in the

material.

"rε

Measure of how much

energy from the electric field

is lost.

Permittivity describes the interaction of a material in the presence

of an electric field.

Page 38: Implementing the Split Cylinder Resonator Method€¦ · Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials June 19 2008 Implementing the Split

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Definition of Loss Tangent

'

"

tan

r

r

ε

εδ =

CycleperStoredEnergy

CycleperLostEnergy

QD ===

1tanδ

Dissipation FactorD Quality FactorQ

'

''