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Implementing Split Cylinder Resonator for Dielectric Measurement of Low Loss Materials
June 19 2008
Implementing the Split Cylinder Resonator Method
for Measuring Complex Permittivity of Low Loss Materials
Implementing the Split Cylinder Resonator Method
for Measuring Complex Permittivity of Low Loss Materials
Shelley Blasdel Begley
Group/Presentation TitleAgilent Restricted
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Outline
• Overview of the Split Cylinder Method
• A Walk Through the Process
Qo
fo
f
Qs
fs
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Sensitive Resonant method for measuring complex permittivity
Useful for thin film and low loss sheet materials.
Originally proposed by Gordon Kent, improved by NIST Boulder, CO.
Adopted as IPC Standard TM-650 2.5.5.13
Overview of the Split Cylinder Method
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Split Cylinder Resonator System
Split Cylinder Resonator with
sample
connected between ports.
Network Analyzer
GP-IB or LAN
Computer
(not required for PNA)
NIST or Agilent
Software
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Overview of the Split Cylinder Method
NIST fixture Agilent fixture
Sample
Group/Presentation TitleAgilent Restricted
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Measure Empty and Sample filled Resonator
Real part of permittivity is a function of Frequency shiftLoss tangent is a function of decrease in Q factor Also needed: Sample thickness
Overview of the Split Cylinder Method
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Group/Presentation TitleAgilent Restricted
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Process Flow
Qo
fo
f
Qs
fs
Start
Measure
Empty SCR
Frequency & Q
Measure
Sample Thickness
Measure
Sample Filled SCR
Frequency & Q
End
Calculate
Permittivity
New Sample Same Sample
Higher Order Mode
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Process Flow
Qo
fo
f
Qs
fs
Start
Measure
Empty SCR
Frequency & Q
Measure
Sample Thickness
Measure
Sample Filled SCR
Frequency & Q
End
Calculate
Permittivity
New Sample Same Sample
Higher Order Mode
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Measure Empty Split Cylinder Resonator
Group/Presentation TitleAgilent Restricted
Month ##, 200X
S21 of TE011 Mode
Resonator should be loosely coupled
Adjust peak between 55-65dB
Measure Empty Split Cylinder Resonator
Agilent SoftwareAgilent Software guide
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Frequency and Quality Factor determination
Cycleper t Energy Los
Resonancein StoredEnergy 2π=Q
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Frequency and Quality Factor determination
Scalar Techniques
• 3dB Bandwidth
• Weighted Least Squares (WLS)
• Resonant Curve Area (RCA)
S21
f
fQ
∆= 0
∆f
3dB
f0
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Frequency and Quality Factor determination
Vector Technique
• Circle Fit
S21
fo
o
o
l
j
f
fft
tjQ
deLfT
−=
++=
−
2
1)(
2 δ
Group/Presentation TitleAgilent Restricted
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Frequency and Quality Factor determination
Method 3dB WLS RCA Circle Fit
Average 75073.28 74082.27 74120.70 74241.30
Standard Dev. 760.37 239.12 221.78 113.04
Percent of SD 1.01 0.32 0.30 0.15
Method Comparison
• 3dB Bandwidth
• Weighted Least Squares (WLS)
• Resonant Curve Area (RCA)
• Circle Fit
Group/Presentation TitleAgilent Restricted
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Process Flow
Qo
fo
f
Qs
fs
Start
Measure
Empty SCR
Frequency & Q
Measure
Sample Thickness
Measure
Sample Filled SCR
Frequency & Q
End
Calculate
Permittivity
New Sample Same Sample
Higher Order Mode
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Sample is assumed to be a uniform known thickness
Best results: 0.1 to 3mm thick, ideally ~1mm
Thickness uncertainty <0.02mm
Minimize imperfections due to:
Flatness
Straightness
Parallelism
Measure Sample Thickness
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Sample thickness measurement
Conforming samples such as thin films and PCBs
• Samples will be straightened out by
cylinders.
• Recommend Agilent built in micrometer or
mean of multiple thickness measurements.
Rigid samples such as Ceramics
• Samples will not be straightened out by
cylinders.
• Recommend mean of multiple thickness
measurements.
fixed cylinder
half
adjustable cylinder
halfcoupling loop
sample
coupling loop
z
fixed cylinder
half
adjustable cylinder
halfcoupling loop
sample
coupling loop
z
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Process Flow
Qo
fo
f
Qs
fs
Start
Measure
Empty SCR
Frequency & Q
Measure
Sample Thickness
Measure
Sample Filled SCR
Frequency & Q
End
Calculate
Permittivity
New Sample Same Sample
Higher Order Mode
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Measure Sample Filled Resonator
f0
fsQ
o
fo
f
Q
s
fs
=
Group/Presentation TitleAgilent Restricted
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Estimate Sample Filled Frequency
Three ways to come up with initial guess:
• Theoretical or Design Value
• Independent Measurement
• Measure TE111 mode
NIST Software –CalcFoInput.dat
Number of TE0n Modes in Model
Radius of Split-Cylinder Resonator (m)
Length of Upper or Lower Split-Cylinder Resonator Section (m)
Substrate Thickness (m)
Initial Guess for Relative Permittivity of Substrate
Group/Presentation TitleAgilent Restricted
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Calculate Sample Filled Frequency
TE111 mode is the
dominant mode when
03.22 >radius
lengthTE111
0'
2cot
'
'
2tan
'
03.2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
=
−−−
−−
>
a
mn
c
h
a
mn
c
a
mn
c
e
a
mn
c
a
h
χωχω
χωε
χωε
h = the total length of the closed cavity, or in this case where the cylinders are equal length, 2x the length of one cylinder.
a = the radius of the cylinders.
χ’mn = the mth root of Bessel function of nth order
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Calculate Sample Filled Frequency
TE111 mode
Agilent Software
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Measure Sample Filled Frequency and Q
Agilent Software
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Process Flow
Qo
fo
f
Qs
fs
Start
Measure
Empty SCR
Frequency & Q
Measure
Sample Thickness
Measure
Sample Filled SCR
Frequency & Q
End
Calculate
Permittivity
New Sample Same Sample
Higher Order Mode
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Calculate Permittivity
Agilent Software
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Process Flow
Qo
fo
f
Qs
fs
Start
Measure
Empty SCR
Frequency & Q
Measure
Sample Thickness
Measure
Sample Filled SCR
Frequency & Q
End
Calculate
Permittivity
New Sample Same Sample
Higher Order Mode
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Higher Order Modes
TE011
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Double Peak in Search Span
Group/Presentation TitleAgilent Restricted
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Interfering Modes
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Interfering Modes
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Split Cylinder Resonator Results
Real Part of Permittivity (Dk)
Teflon® PTFE
1.9
1.95
2
2.05
2.1
2.15
2.2
5 10 15 20 25 30
GHz
Expected Value Measured Value
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Split Cylinder Resonator Results
Loss Tangent (Df)
Teflon® PTFE
-0.001
-0.0005
0
0.0005
0.001
0.0015
0.002
5 10 15 20 25 30
GHz
Expected Value Measured Value
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Thank You for listening
Qo
fo
f
Qs
fs
Start
Measure
Empty SCR
Frequency & Q
Measure
Sample Thickness
Measure
Sample Filled SCR
Frequency & Q
End
Calculate
Permittivity
New Sample Same Sample
Higher Order Mode More information atwww.agilent.com/find/materials
Group/Presentation TitleAgilent Restricted
Month ##, 200X
References[1] M.D. Janezic, ‘‘Nondestructive Relative Permittivity and Loss Tangent Measurements using a Split-Cylinder Resonator,’’Ph.D.
Thesis, University of Colorado at Boulder, 2003.
[2] IPC-TM-650 Test Methods Manual Relative Permittivity and Loss Tangent Using a Split-Cylinder Resonator” Number
2.5.5.13 January, 2007.
[3] R.N. Clarke (Ed.), “A Guide to the Characterization of Dielectric Materials at RF and Microwave Frequencies,” Published by
The Institute of Measurement & Control (UK) & NPL, 2003
[4] P.G. Bartley, S.B. Begley “Quality Factor Determination of Resonant Structures” IMTC 2006 – Instrumentation and
Measurement Technology Conference Sorrento, Italy 24-27 April 2006
[5] M.T. Ali, M.K.M. Salleh, Md.M.Md. Zan “” Air-Filled Circular Cross Sectional Cavity for Microwave Non-Destructive Testing
Transactions on Engineering, Computing and Technology Volume 18 December 2006, pg 107-112, ISSN 1305-5313
[6] M.D. Janezic, J.Krupka “Split-Post and Split-Cylinder Resonator Techniques: A Comparison of Complex Permittivity
Measurement of Dielectric Substrates”. CICMT 2008 pgs 156-159.
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Appendix
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NIST Software Inputs
CalcFoInput.dat
Number of TE0n Modes in Model
Radius of Split-Cylinder Resonator (m)
Length of Upper or Lower Split-Cylinder Resonator Section (m)
Substrate Thickness (m)
Initial Guess for Relative Permittivity of Substrate
SplitCInput.dat
Number of TE0n Modes in Model
Radius of Split-Cylinder Resonator (m)
Length of Upper or Lower Split-Cylinder Resonator Section (m)
Substrate Thickness (m)
Conductivity of Split-Cylinder Resonator (S/m)
Resonant Frequency of TE0np Mode (Hz)
Quality Factor of TE01np Mode
Initial Guess for Relative Permittivity of Substrate
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Definition of Permittivity
"'
0rrr jεεε
ε
εκ −===
storage loss
'rε
Measure of how much
energy from an external
electric field is stored in the
material.
"rε
Measure of how much
energy from the electric field
is lost.
Permittivity describes the interaction of a material in the presence
of an electric field.
Group/Presentation TitleAgilent Restricted
Month ##, 200X
Definition of Loss Tangent
'
"
tan
r
r
ε
εδ =
CycleperStoredEnergy
CycleperLostEnergy
QD ===
1tanδ
Dissipation FactorD Quality FactorQ
rε
'
rε
''
rε