Illustrated Part Guide for Aviza/Watkins Johnson · G-30-036AH13 Rev 09 PO Box 217 Leander, TX USA 78646-0217 800-621-9598 A Resource for Semiconductor Manufacturers Illustrated Parts

G-30-036AH13 Rev 09

PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

A Resource for Semiconductor Manufacturers

Illustrated Parts Guide forAviza®/Watkins Johnson®

mailto:[email protected]

http://www.glemco.com

G-30-036AH13 Rev 092 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.


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Item P/N Description OEMs1 95007 Secondary Spider Tube Assembly, 12” Nitrogen Shield, 200mm 913056-001 2 95007B Secondary Spider Tube Assembly, 12” Nitrogen Shield, 200mm, VCO Terminal 911430-0013 95008 Primary Spider Tube Assembly, 12” Nitrogen Shield, 200mm 913056-0014 95008B Primary Spider Tube Assembly, 12” Nitrogen Shield, 200mm, VCO Terminal 911429-0015 95055GT 12” Nitrogen Shield w/ TSR Screen, Standard Tube Length, 200mm 918042-0016 95055MT 12” Nitrogen Shield w/ TSR Screen, Shorter Tube Length, 200mm 929342-001

Glemco TSR Nitrogen Shield

The Thermal Stress Resistant shield incorporates an engineered screen design that functions like a bellows, allowing the screen material to expand and contract without stressing the weld zones or buckling, both common failures in OEM shield designs.

Nitrogen Shields & Gas Tube Assemblies for12” Shield - Aviza / WJ 1000






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Item P/N Description OEMs1 95007A Secondary Spider Tube Assembly, 15.5” Nitrogen Shield, 150mm No OEM Reference2 95007D Secondary Spider Tube Assembly, 15.5” Nitrogen Shield, 200mm, VCO Terminal, MOD 911627-0013 95008A Primary Spider Tube Assembly, 15.5” Nitrogen Shield, 150mm No OEM Reference4 95008D Primary Spider Tube Assembly, 15.5” Nitrogen Shield, 200mm, VCO Terminal, MOD 911626-001 5 95010 15.5” Nitrogen Shield, 150mm 986665-0016 95010W 15.5” Nitrogen Shield w/ TSR Screen, 150mm 986665-0017 95010RN 15.5” Nitrogen Shield Assembly No OEM Reference8 95070W 15.5” Concave N2 Shield, TSR 929345-001

Glemco TSR Nitrogen Shield

The Thermal Stress Resistant Shield incorporates an engineered screen design that functions like a bellows, allowing the screen material to expand and contract without stressing the weld zones or buckling, both common failures in OEM shield designs.

Nitrogen Shields & Gas Tube Assemblies for15.5” Shield - Aviza / WJ 999






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Item P/N Description OEMs1 95031 Teflon Plug, One Hole 975462-0012 95032 Teflon Plug, Two Hole 962448-0003 95033 Teflon Plug, No Hole 975450-001

Item P/N Description OEMs1 95034 Air Knife, Brass 980429-0012 95034A Air Knife, SST 910211-007

Teflon Plugs & Air Knives






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Item P/N Description OEMs Qty1 82294 Nut 4-40 Hex 18-8 SST 5053-0001-0042 22 95080 Spring Assembly Flag 905443-001 23 99048 Retaining Ring 4300037 24 8A462 Bearing, 1/8 Id, 3/8 OD, 5/32 Wide, Double Sealed, SST No OEM Reference 45 8A467 Spring Energized Seal No OEM Reference 26 8B161 4-40 Hex Nut With Lock Washer, 18-8 No OEM Reference 27 95079 Dual Flag Spring Assembly, 3” T.O. No OEM Reference 1

Toroidal Orifice Rebuild KitK95079

3” Dual Flag T.O. Spring Assembly Replacement Kit (Detector Card Configurable)






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Item P/N Description OEMs Qty1 82294 Nut 4-40 Hex 18-8 SST 5053-0001-0042 12 95080 Spring Assembly Flag 905443-001 13 99048 Retaining Ring 4300037 24 8A462 Bearing, 1/8 Id, 3/8 OD, 5/32 Wide, Double Sealed, SST No OEM Reference 45 8A467 Spring Energized Seal No OEM Reference 26 8B161 4-40 Hex Nut With Lock Washer, 18-8 No OEM Reference 17 95079A Single Flag Spring Assembly, 3” T.O. No OEM Reference 1

Toroidal Orifice Rebuild Kit K95079A

3” Single Flag T.O. Spring Assembly Replacement Kit






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Item P/N Description OEMs Qty1 82294 Nut 4-40 Hex 18-8 SST 5053-0001-0042 12 95080 Spring Assembly Flag 905443-001 13 99048 Retaining Ring 4300037 24 8A462 Bearing, 1/8 Id, 3/8 OD, 5/32 Wide, Double Sealed, SST No OEM Reference 45 8B161 4-40 Hex Nut With Lock Washer, 18-8 No OEM Reference 16 95079B Single Flag Spring Assembly, 2” T.O. No OEM Reference 1

Toroidal Orifice Rebuild Kit K95079B

2” Single Flag T.O. Spring Assembly Replacement Kit






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Item P/N Description OEMs Qty1 82294 Nut 4-40 Hex 18-8 SST 5053-0001-0042 22 95080 Spring Assembly Flag 905443-001 23 99048 Retaining Ring 4300037 24 8A462 Bearing, 1/8 Id, 3/8 OD, 5/32 Wide, Double Sealed, SST No OEM Reference 45 8A467 Spring Energized Seal No OEM Reference 26 8B161 4-40 Hex Nut With Lock Washer, 18-8 No OEM Reference 27 95079C Dual Flag Extended 4” Spring Assembly, 3” T.O. No OEM Reference 1

3” Dual Flag T.O. Extended Spring Assembly Replacement Kit (Stacked Detector Card Configuration)

Toroidal Orifice Rebuild Kit K95079C






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Item P/N Description OEMs Qty1 82294 Nut 4-40 Hex 18-8 SST 5053-0001-0042 12 95080 Spring Assembly Flag 905443-001 13 99048 Retaining Ring 4300037 24 8A462 Bearing, 1/8 Id, 3/8 OD, 5/32 Wide, Double Sealed, SST No OEM Reference 45 8A467 Spring Energized Seal No OEM Reference 26 8B161 4-40 Hex Nut With Lock Washer, 18-8 No OEM Reference 17 95079D Single Flag Extended 4” Spring Assembly, 3” T.O. No OEM Reference 1

3” Single Flag T.O. Extended Spring Assembly Replacement Kit

Toroidal Orifice Rebuild Kit K95079D






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Item P/N Description OEMs Qty1 8A993 Motor, Gear, 1.9RPM, 24V, 60HZ, 20MFD 815004-243 12 95099-2 Orifice, Toroidal, 11/32 911356-001 13 95079A Spring Assembly, 3” T.O. No OEM Reference 14 95080 Spring Assembly Flag, 3” T.O. 905443-001 15 8A466 Orifice Bearing, 3” T.O., 80mm ID, 100mm OD, 10mm wide 815001-405 2

6-A 95099-9 MOD Spur Gear, Motor 087311-000 16-B 95099-10 Spur Gear, Orifice, 3” T.O. 911422-001 17 95099-7 Detector Card 911919-001, 905493-001 1

8-A 95099-1 Housing, Bottom, Assembly 911794-001 18-B 95099-3 Housing, Top 911350-001 1

3” Toroidal Orifice Refurbishment Components 95099R






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Base TO Repair Package Includes:

• Disassembly

• Thorough cleaning

• Inspection and testing of:

Motor

Orifice

Wiring

• Function Checks with Replacement of:

Spring assembly - spring, end pieces, energized seals, and flag bearings;

Flag, and associated hardware is cleaned and re-used or replaced if needed;

Current orifice bearings - will be replaced with new orifice bearings;

Gears;

Protective wiring sheath;

Integrated circuit and flag sensors.

Optional Repairs (not included in base TO repair package will be quoted separately):

Additional board repairs;

Motor replacement;

Wire harness and connector repair or replacement using hi-flex machine tool wire;

Orifice replacement;

Anodized entrance and exit housing replacements;

Toggle pin replacements.

Refurbishment testing includes:

• A six hour continuous run.

• Motor temperature and current draw monitoring throughout test cycle.

• Flag sensor detection to identify when flag is stopped in an open and closed state.

2” T.O. Refurbishment Services - P/N 95098R aren’t shown, but are available upon request

3” Toroidal Orifice Refurbishment Services 95099R






After

Before

Glemco offers refurbishment of worn and damaged IVA assemblies.

Standard refurbishment service includes removal and replacement of the IVA skirts, reconditioning of the mounting flange and any gasket services needed to restore it to proper specifications.

Repairs for Injector Vent Assemblies 95125R



Documents

Illustrated Part Guide for Aviza/Watkins Johnson · G-30-036AH13 Rev 09 PO Box 217 Leander, TX USA 78646-0217 800-621-9598 A Resource for Semiconductor Manufacturers Illustrated Parts