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ICT Project E-STARS [ICT-223927]
2
Outline
• Background and state of Art• Scope • Consortium • Project flow chart and Work Packages• Timing and deliverables• Systems requirements• Results• Summary
ICT Project E-STARS [ICT-223927]
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Background• Applications convergence ==>
functions integration (passive, sensor, MEMs, transceive, microsystems);
• The size of such microsystem and micromachining shrink year over year;
• Conventional energy storage devices ( Battery, super cap) do not scale down sufficiently to meet the need of micro electronics system;
• Solid state Thin Film Energy Cell built from semiconductor process offers a revolutionary way of storing energy for micropower devices;
Wireless sensor module
battery
battery
Swallow able camera capsule
Relative density improvement in laptop computing since 1990
ICT Project E-STARS [ICT-223927]
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State of Art : Solid state Thin Film Energy Cell
• Lithium battery– Physics is the same to classical lithium battery
• Solid state battery– No liquid: Solid electrolyte with Lithium– High temperature capability (lead free solder reflowable)
• Thin film battery– Overall thickness : x00µm– Flexible– Embeddable– manufactured with thin film deposition equipments
• High life time and reliability
X00µm
CEA-Liten
ICT Project E-STARS [ICT-223927]
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Outline
• Background and state of Art• Scope • Consortium • Project flow chart and Work Packages• Timing and deliverables• Systems requirements• Results• Summary
ICT Project E-STARS [ICT-223927]
6
Scope: from 2D toward 3D
State of Art E-Star objective
Architecture
Battery Capacity 100µAh/cm² 500 to 1000µAh/cm²
Battery power Capability
5mW/cm² 25 to 50mW/cm²
ICT Project E-STARS [ICT-223927]
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Breakthrough
• Increasing the capacity density by texturing the substrate (3D);
• Moderate ratio (2:1): Improve state of Art PVD process to accelerate 5x the deposition rate and to reach 50% of minimum coverage;
• High aspect ratio (10:1) represents the breakthrough of the E-stars project;• Investigate alternative deposition technics
ICT Project E-STARS [ICT-223927]
8
Outline
• Background and state of Art• Scope • Consortium • Project flow chart and Work Packages• Timing and deliverables• Systems requirements• Results• Summary
ICT Project E-STARS [ICT-223927]
10
Outline
• Background and state of Art• Scope • Consortium • Project flow chart and Work Packages• Timing and deliverables• Systems requirements• Results• Summary
ICT Project E-STARS [ICT-223927]
11
Work packages and program structure
• WP1: Program mgt;• WP2:Requirements definition;• WP3:System architecture
design;• WP4:Micro battery layers
technology development;• WP5: Assessment of the
battery• WP6: System integration• WP7 : Dissiminetion and
exploitation
Fundamental
research
Inte
grat
ion
Batterymanufacturing
IdeaSales
Existing techno New techno
System component definition based on end
users requirements (WP2 & WP3)
Microbattery development and
assesmment (WP4 &WP5)
Dissemination (WP7)
System Integration (WP6)
ICT Project E-STARS [ICT-223927]
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Outline
• Background and state of Art• Scope • Consortium • Project flow chart and Work Packages• Timing and deliverables• Systems requirements• Results• Summary
ICT Project E-STARS [ICT-223927]
13
Phasing
New PVD200 mm
3D deposition methods
Breadboard realizations
Individual layer process
3D Microbattery
Systemrequirements
definition
System architecture
design
System assessment
PVDlab tool
Phase 1
Phase 3
Phase 2
SYSTEMSYSTEM
TECHNOLOGYTECHNOLOGY
ICT Project E-STARS [ICT-223927]
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Outline
• Background and state of Art• Scope • Consortium • Project flow chart and Work Packages• Timing and deliverables• Systems requirements• Results• Summary
ICT Project E-STARS [ICT-223927]
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WP2: system requirementsBioage
PARTNER: BIOAGEKIND: END USERDEVICE 1: Diagnostic FieldDEVICE 2: Aerospace Field
Aerospace Aerospace DeviceDevice
QCM QCM REFREFQCM MEASQCM MEAS
ANTENNAANTENNA
MICRO SOLAR CELL
Dimensions: 3mm x 3mm
Weight: 0.1 gr
Max Power: 0.82 mW
3D BATTERY
Capacity: 1000 ua/cm2
Power: 50 mW/cm2
N.B.: E-STARS final goal
QCM
Sensitivity: 0.36ng
Frequency: 20MHz
Range: +/-360ug
RF RADIO-NETWORK
Frequency ISM 2.4GHz
RF Data Rate: 250.000 bps
Standard: IEEE 802.15.4(ZigBee)
CARBON HOUSINGCARBON HOUSING
MICRO SOLAR PANELMICRO SOLAR PANEL
EXAMPLE OF APPLICATIONS
Characterization of Dust Flux of Atmosphere
Characterization of Comet Tail
Characterization of Spacecraft “Outgas”
Characterization of Spacecraft Contamination
Characterization of Interstellar Material
ICT Project E-STARS [ICT-223927]
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WP2: System requirements CTT/Kelsius
Time/Temperature/Location monitoring –Bulk goods in transit
Solutions based on mobile telephony are costly for all but the largest loads. Tariff free wireless sensors offer an appropriate
solution.
Module travels with bulk goods package. Data logging is continuous.
Wireless sensor periodically polls for data connection.
Typically data is transferred at depot. Vibrational energy harvesting + E-STARS
battery provides power source.
ICT Project E-STARS [ICT-223927]
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Outline
• Background and state of Art• Scope • Consortium • Project flow chart and Work Packages• Timing and deliverables• Systems requirements• Results• Summary
ICT Project E-STARS [ICT-223927]
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Substrate texturation
Low Aspect ratio substrates
High Aspect ratio substrates
Scalloping(issue for TFB active layers)
Scalloping(issue for TFB active layers)
ICT Project E-STARS [ICT-223927]
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PVD deposition on textured substrates
Current collector LiCoO2 positive electrode
ICT Project E-STARS [ICT-223927]
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Electrodeposition method
Electrodeposited LiCoO2
5 µ m 5 µ m 5 µ m 5 µ m 5 µ m
20 µ m
Ti/Pt LiCoO 2 LiPON Ti
Ti/Pt
LiCoO 2 LiPON Ti
Ti/Pt
LiCoO 2 LiPON
Ti
All solid state microbattery with electrodeposited LiCoO2 on LAR substrate
ICT Project E-STARS [ICT-223927]
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Electrosprayed method
Electrosprayed LiNiMnO4
Nozzle
Cone
Jet
Droplet aerosol
Si wafer with patternedElectrodeposited LiNiMnO4
ICT Project E-STARS [ICT-223927]
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MOCVD electrolyte
d:\Mes documents\Projets\Eloge3D\TECHNIQUE\caractérisation\impédance\PLP-09-0025\Cell06-EIS_15.mpr
-Im(Z) vs. Re(Z)
Re (Z) /Ohm30 00020 00010 0000
-Im
(Z)/
Oh
m
30 000
28 000
26 000
24 000
22 000
20 000
18 000
16 000
14 000
12 000
10 000
8 000
6 000
4 000
2 000
0
Inorganic electrolyte on HAR substrate and impedance measurements
ICT Project E-STARS [ICT-223927]
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Outline
• Background and state of Art• Scope • Consortium • Project flow chart and Work Packages• Timing and deliverables• Systems requirements• Results• Summary