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Institute of Solid State Physics
Professor Horst Cerjak, 19.12.20051
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Manfred LeischInstitute of Solid State Physics
Graz University of Technology, Austria
HYDROGEN OUTGASSING OF STAINLESS STEEL
OUR PRESENT KNOWLEDGE
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.20052
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Graz
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.20053
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Background
Accelerators
Mainspring forachieving extremlylow pressures (XHV)
(Images copyright CERN)
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.20054
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
The Material
Austenitic stainless steel (Type AISI 304 and 316) is one of themost important construction materials in UHV and XHV
– corrosion resistant and chemically inert – nonmagnetic– standard machining and welding procedures
– relatively cheap– negligible vapor pressure at room temperature– negligible permeation of atmospheric gasses (fcc lattice)
but ….
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.20055
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Hydrogen as impuritySolubility of Hydrogen in stainless steel
The H content in standard austeniticstainless steel is about 1 ppm in weight(~ 56 at ppm).
Amount equates ~ 0.1 mbar·l / cm3 ,at typical outgassing rates of10-11 mbar.l/cm2.s from 2 mm wall source for more than 50 years
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.20056
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Is essential for obtaining ultimate pressures
Actions performed:
– Surface treatments to reduce surface roughness (electropolishing, surface machining…)
– Surface treatments to create oxide or other films to act as a barrier for diffusion of H from the bulk.
– High temperature bakeout (vacuum firing) to reduce amount of dissolved H.
[1] P. A. Redhead: Extreme high vacuum, CERN Report No 99-05, 213 (1999)[2] R. Dobrozemsky: Our present understanding of outgassing, EVC-9, Paris (2005)
Reduction of outgassing
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.20057
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Mechanism for H2 outgassing
Polany – Wigner Equation:
- dN/dt = ν (Θ)2 exp (-Edes / kT)
Diffusion in the bulk– Recombinative desorption from surface
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.20058
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Outgassing modelsDiffusion limited outgassing (DLM)described by Fick‘s equation
Recombination limited outgassing(RLM)Flat bulk concentration in pure RLM
with recombination coefficient
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.20059
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Documented work
Calder and Lewin (1969):[R. Calder and G. Lewin, Brit. J. Appl. Phys. 18, 1459 (1969)]
– poor correlation between experiment and calculation (diffusion limited outgassing expected)
Moore (1995):[B. C. Moore, J. Vac. Sci. Technol. A 13(3), 545 (1995)]
– Calculations of H concentration profile support recombination limited outgassing
L. Westerberg (1997):[L. Westerberg et al., Vacuum 48, 771 (1997)]- Assignment of difference in the outgassing rate to different transport properties
due to bulk states .
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200510
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Documented work
Jousten (1998):[K. Jousten, Vacuum 49, 359 (1998)]
– There is a significant influence of the surface on outgassing
Fremery (1999):[J. K. Fremery, Vacuum 53, 197 (1999)]
– At low H concentration in the bulk outgassing is limited by surface recombination
B. Zajec, V. Nemanic (2001):[B. Zajec, V. Nemanic, Vacuum 61, 447 (2001)]
- neither DLM nor RLM fits, most H strongly bound in traps, precipitates, surface states , just a fraction in the interstitial state
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200511
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
J.-P. Bacher et al. JVST A21(2003)167
J.P. Bacher et al. (2003):[J.-P. Bacher et al. JVST A21(2003)167]
- TDS study (up to 1200°C) on different SS types and treatments (vac firing, air bake, vac bake) gives reason for oxide-layer traps, lattice defects due to precipitates, recrystallization
Paolo Chiggiato, CAS 2006 Platjo d‘Aro, Spain
The outgassing of H aftervacuum firing can be reasonabledescribed by a diffusion modelonly if the pressure of H duringthe treatment is taken intoaccount
Documented work
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200512
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Documented work
J. Setina (2006)[53rd AVS Symposium, San Francisco
2006 ]
- Outgassing measurements(250°C, 300 h) and modelcalculations solved with FEM support RLM
© janez.setina @imt.si
1.0E-12
1.0E-11
1.0E-10
1.0E-09
1.0E-08
1.0E-07
1.0E-06
Out
gass
ing
rate
mba
rl/s/
cm^2
0 100 200 300 400 Time / hours
Diffusion model Recombination model
T=250 C
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200513
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Surface characterization
Recombination process strongly relates on surface morphology
• surface structure after vacuum firing?• surface composition after vacuum firing?
Goal :
Surface characterization after vacuum firing on atomic level
by AFM, STM and Atom Probe
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200514
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Experimental setup
PreparationChamber• QMA• sample
heating stage• Sputtergun• Auger CMA
STM • OMICRON
STM 1
Atom Probe• FIM• TOF
Main Chamber• Tip heating
stage• Tip sputter
gun• Vacuum
lock for transfer
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200515
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Samples for AFM and STM study304L stainless steel
-8-1218-20<0.75<0.03<0.045<2<0.03
MoNiCrSiSPMnC
In situ thermal treatment:– Low temperature bakeout
– Vacuum firing at 1000°C
(e-beam bombardment, temperature measurement by micro pyrometer and thermocouple)
2-310-1416-18<1<0.03<0.045<2<0.03
MoNiCrSiSPMnC
316L stainless steel
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200516
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
AFM images after vacuum firing
100 nm200nm
Surface morphology after low temperature bakeout and after vacuum firing
100 nm
3hours@300°C 15min@1000°C
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200517
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
AFM images after vacuum firing
1086420
600
500
400
300
200
100
0
X[µm]
Z[n
m]
15min@1000°C3hours@300°C
3.532.521.510.50
200
150
100
50
0
X[µm]
Z[n
m]
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200518
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
STM images after vacuum firing304L 15min@1000°C
(1000x1000nm², U=-0.5V, I=0.1nA) (1000x1000nm², U=-0.5V, I=0.1nA)
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200519
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
STM images after vacuum firing304L 20min@1000°C
(500x500nm², U=-0.5V, I=0.1nA) (300x300nm², U=-0.5V, I=0.1nA)
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200520
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
STM images after vacuum firing304L 20min@1000°C
(10x10nm², U=-0.1V, I=0.1nA) (10x10nm², U=-0.1V, I=0.1nA)
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200521
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
STM after vacuum firing
100 nm200nm
Nanoprecipitate in reconstructed surface
100 nm
200 nm 200 nm
b c
20min@1000°C304L (1000x1000nm², U=-0.5V, I=0.1nA)
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200522
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
316L after vacuum firing
The different alloy compostion (addition of Mo) leads to a noticable different reconstruction of the surface
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200523
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
316L(Upp): vacuum bake 48h@450°C
AFM micrograph
(2.2x2.2 µm², derivated image)
Line profile show ∆h up to 25 nm
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200524
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
316L: vacuum fired 20min@1000°C
AFM micrograph
(10x10µm², derivated image)
876543210
140
120
100
80
60
40
20
0
X[µm]
Z[n
m]
1 µm
Line profile show ∆h up to 150 nm
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200525
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
316L(Upp): vacuum fired 1h@1100°C
AFM micrograph
(8.6x8,6µm², derivated image)
Line profile show ∆h up to 150 nm
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200526
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
316L: vacuum fired 20min@1000°C
AFM micrograph
(8x8µm², derivated image)
21.510.50
25
20
15
10
5
0
X[µm]
Z[n
m]
1 µm
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200527
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
316L: vacuum fired 20min@1000°C
AFM micrograph
(2x2µm², derivated image)
10008006004002000
100
80
60
40
20
0
X[nm]
Z[n
m]
0.5 µm
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200528
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
316L(Upp): vacuum fired 1h@1100°C
STM micrograph
(1x1 µm², 3D image, top view)
Line profile show ∆h up to 70 nm
10.80.60.40.20
70
60
50
40
30
20
10
0
X[µm]Z
[nm
]
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200529
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
316L: vacuum fired 20min@1000°C
250200150100500
6
5
4
3
2
1
0
X[nm]
Z[n
m]
150100500
2
1.5
1
0.5
0
X[nm]
Z[n
m]
(1000x1000nm², U=-0.5V, I=0.1nA)
STM
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200530
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
316L: vacuum fired 20min@1000°C
(50x50nm², U=-0.5V, I=0.1nA)
2520151050
2
1.5
1
0.5
0
X[nm]
Z[Å
]
STM
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200531
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Results from AFM and STM
• After vacuum firing the surface shows significant reconstructiondepending on alloy.
• Formation of (111) terraces with monoatomic steps and stacking faults and point defects (vacancies).
• Width of (111) terraces increases with annealing time, step bunching and formation of facets, corresponding to (110) and (100) planes.
• Grain boundaries became predominate as consequence of recrystallization (pronounced on 304L).
• From the look on the surface: still a high number of active sites like steps and vacancies remain.
An outgassing rate of 10-12 mbar.l /s.cm2 = 2.45x107 molecules /s.cm2
which corresponds to 10-8 of a monolayer at room temperature, RL according PW about 10-4 ML)
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200532
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Surface compositionFrom: Paolo Chiggiato, CAS 2006 Platjo d‘Aro, Spain
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200533
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Surface inspection by Auger
304L after bakeout 3h@300°C after vacuum firing 5min @1000°C
Enrichment: P, S, Fe, Ni Depletion: C, N, O, Cr
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200534
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Analysis of surface composition
AES gives sign for slight enrichment of Ni and depletion of Cr but due to information depth of thistechnique composition of topmost layer almostuncertain.
Atom probe provides true atomic layer composition. Quantitative analysis simply by counting of the fieldevaporated ions.
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200535
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Atom probe depth profiling analysis
SamplesSamples were cut by low speed diamond saw from stainless steel samples (needles 0.3mm x 0.3mm), electropolished to fine tips (tip radius >10nm) and mounted on Mo heating loop.
Thermal treatment:– vacuum firing in situ
by resistive heating– Temperature control
by micro pyrometer
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200536
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Field ion imaging and atom probe analysis
Field ion image of a vacuum fired 304 stainless steel (1.10-5mbar Ne, U=10kV, T=40K)
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200537
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Atom probe principle
Pulsed field desorption of individual ions, mass from time-of-flight, lateral positionfrom screen, 3D reconstruction of probed volume from data set
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200538
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Cr and Ni distribution in space (Fe matrix not displayed)Probed volume ca. 9x9x5 nm3
Combined features of Cr and Ni
• Cr• Ni
3D atom probe result before vacuum firing
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200539
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Depth profile of a 302 stainless steel sample without thermal treatment Measured bulk composition close to nominal composition.. (200 ions correspond to one atomic layer).
0 2 4 6 8 10 12 14 16 180
10
20
30
40
50
60
70
80
90
100
%
atomic layer
Cr Ni Fe
3D atom probe result before vacuum firing
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200540
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Depth profile of a 304 stainless steel sample after vacuum firing (20s@ 900°C).
0 2 4 6 8 10 120
10
20
30
40
50
60
70
80
90
100
%
atomic layer
Cr Ni Fe
3D atom probe result after vacuum firing
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200541
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Depth profile of a 316L stainless steel sample after 20s vacuum firing @ 900°C
3D atom probe result after vacuum firing
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200542
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Atom probe results
• After vacuum firing an enrichment of Nickel was found within thefirst atomic layer.
• The total amount of Chromium within the first 10 atomic layers decreases during vacuum firing.
• Thermodynamic model calculation of first atomic layer composition gives explanation for behavior qualitatively.
• Consequences of Ni enrichment on surface?
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200543
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Sticking coefficients from TDS
H.F. Berger et. al. Surface Sci 251/252(1991)882 A. Winkler et. al. I Rev Phys Chem 11(1992)101
Nearly 10x higher sticking coefficients on Ni! Recombination of H is promoted
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200544
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Role of stepped surface
The bunched steps and facets offer preferred surface sites for recombination promotedby segregated Ni
(111) terraces
(110) faceted
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200545
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Electronic structure on stepped surface
Tersoff (1981):Calculations for flat and stepped Ni (111) surfaces show that sites of highest coordination have a less completely filled d band and tend to be the most active sites on a surface.
0.04-0.08-0.0411atom c
0.11-0.19-0.0810atom d
0.32-0.50-0.187atom b
0.31-0.49-0.187atom a
step
0.18-0.29-0.119surface
00012bulk
∆nd∆nsp∆ntotalcoord. nr.Site
ab cd
[1] J. Tersoff and L. M. Falicov, Phys. Rev. B 24 (2), 754 (1981)
∆n… change in total electron occupation (with respect to the bulk) for s, pand d electrons
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200546
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Role of vacancies
Recently performed theoretical studies and simulationson the interaction of hydrogen with latticeimperfections by Alfredo Juan provide a new insight.
Energy calculations using ASED method (Atom Superposition and Electron Delocalization) result in lower energy levels in tetrahedral sites in Fe vacancies*.
Surface and subsurface defects are forming traps withlower energetic levels
* D. Rey Saravia, A. Juan, G. Brizuela, S. Simonetti, J Hydrogen Energy 34(2009)8302
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200547
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Role of vacancy
Alfredo Juan, 17th Conf. on Materials, Portoroz, 2009
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200548
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
STM close ups
304L (10x10nm², U=-0.1V, I=0.1nA) Comparison: Vanadium
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200549
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Comparison TDS on V (100) surface
G. Krenn et. al. Surface Sci 445(2000)343
Surface defects are channels for H desorption
∆Ev
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200550
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Conclusion
The AFM and STM clearly show that the surface reconstructs during vacuum firing to in order to minimize the surface free energy.
1 µm1 µm 0.3 µm
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200551
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
•Atom Probe show segregation of Ni accompanied by slight Cr depletion.•The steps and facets provide still a considerable number of active sites which can promote the recombination of hydrogen.•Vacancies give reason for subsurface states which act as traps for H.•This surface and subsurface states may control the outgassing behaviour.•From the look on the surface: In all probability diffusion to the surface may be the limiting process.
0.1 µm
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200552
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Contributions byTU Graz:A. Stupnik (STM, AP)F. Lackner (AP)P. Frank, H. Plank, E. List (AFM)A. Winkler (TDS)K.D. Rendulic (TDS)R. Schennach (SurfChem)
R. Dobrozemsky (TU Wien)J. Setina (IMT Ljubljana)E. Hedlund (Uppsala Univ.)L. Westerberg (Uppsala Univ.)A. Juan (Bahia Blanca, Argentina)
Zukunftsfonds des Landes SteiermarkProject No 119
WS&M Software by Nanotec (E)
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200553
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
The End
Thank you for yourattention
© Andréas M. Winter
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200554
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
OMICRON STM 1
• UHV (or air)
• room temperature
• piezo tripodOMICRON TS1 scannermax. scan size ~(1.2x1.2) µm²piezo sensitivity: 5nm/V
piezo tripod
tip carrier
sample
eddy current dampingmechanism
spring suspension
vibration insulation:
sampleslider
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200555
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Fully-predictive preparationof STM probe tip
• A control over tip geometry is essential
• Tips are field evaporated to desired end form and imaged by using Field Ion Microscopy (FIM).
• Tip with one single atom on top can be obtained. Shape can be documented in the FIM image.
Field ion micrograph of a W tip with a single atom at the apex position.(He, T=80K, R~10nm)
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200556
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
Vacuum firing
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200557
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
CAS
Institute of Solid State Physics
Professor Horst Cerjak, 19.12.200558
Manfred Leisch 1st Vacuum Symposium UK February 11, 2010
CAS (P.G.)