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Vacuum news which receives the materials to be coated and contains the evaporator, is approxi- mately 1500 mm long. High vacuum pump- ing is by a 1200 litre/sec diffusion pump and this is part of a fully automatic pump- ing system which, including the high vacuum valve (NW 500), is controlled by the recently developed Vacumatic 2P pump- set controller. Cycle time is reduced by a cold trap, requiring 15 litres of liquid nitrogen as coolant. The cooling may also be performed by a 3-stage refrigerator (- 110°C) after fitting a suitable low tem- perature trap. Rapidity and simplicity of the recharging and changing operations is ensured by mounting the evaporator on a sliding carrier. Total pressures of 2x IO-” torr are measured by a combination gauge system covering the range 100 to 5x IO-* torr and having an automatic range switch. All control equipment is located in a separate cabinet of dimensions 550 x 1760 x 505 mm. Facilities are provided for the fitment of accessories such as glow dis- charge devices, dosing valves and radiation heaters. Easy access to all components is an inherent design feature, simplifying maintenance and operation. Leybold-Heraeus Ltd, UK Circle number 49 on Reader Enquiry Service card Nude Bayard-Alpert ion gauge bead Vacuum Generators Ltd have introduced a new ion gauge head, the VIGIO. The nude type of gauge head is essential for accurate pressure measurement at a site near the experimental region. The VIGIO is of com- pact design and combines a low X-ray limit with high sensitivity. It is available on FC 38 or ocher I J-inch- (38 mm) nominal bore flanges. Risk of gauge failure during an experiment is virtually eliminated by the provision of two tungsten filaments as a standard fitting. The filaments are easily Bir- Vat TIM5 control head TIM5 control unit Torr Plan film thickness monitor Bir-Vat Ltd have announced the avail- ability of their new TIM5 film thickness monitor based on measurement of the change in inductance of an encapsulated coil due to the coating of a sample sub- strate with an evaporant. The sample sub- strate is a standard glass microscope slide which clips over the sensing head. Advan- tages claimed for this system over conven- tional resistance monitors include: ease of cleaning and replacement of the sample substrate; protection of the sensing head from the evaporant eliminating costly cleaning procedures; and there is no prob- lem of connection to the evaporated film. Accuracy is within _t3 per cent full scale. In operation, the required film thickness is set by a control knob. When the indicator needle of the meter reaches the required position a relay operates to cut off the evaporation supply or to operate a shutter. The meter may then be zeroed and succes- sive films evaporated. The glass slide need only be replaced when the maximum thick- ness range of the instrument is reached. This depends on the resistivity of the evapo- rant and some typical thickness ranges are: copper, 500-8000 A; gold, 75s20,000 A; aluminium, lOO-30,000 A; and chromium, 150&100,000 A. The TIM5 control unit is a compact transistorized oscillator receiver which reacts to signals from the tuned in- ductive coil in the water-cooled sensing head. Bir-Vat Ltd, UK Circle number 48 on Reader Enquiry Service card High vacuum coating plant The Leybold-Heraeus A.8OOH high vacuum coating plant is designed to cater for all types of coating processes on industrial scale operation. The vacuum chamber, VIG IO ion gauge head 285

High vacuum coating plant: Leybold-Heraeus Ltd, UK Circle number 49 on Reader Enquiry Service card

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Vacuum news

which receives the materials to be coated and contains the evaporator, is approxi- mately 1500 mm long. High vacuum pump- ing is by a 1200 litre/sec diffusion pump and this is part of a fully automatic pump- ing system which, including the high vacuum valve (NW 500), is controlled by the recently developed Vacumatic 2P pump- set controller. Cycle time is reduced by a cold trap, requiring 15 litres of liquid nitrogen as coolant. The cooling may also be performed by a 3-stage refrigerator (- 110°C) after fitting a suitable low tem- perature trap. Rapidity and simplicity of the recharging and changing operations is ensured by mounting the evaporator on a sliding carrier. Total pressures of 2x IO-” torr are measured by a combination gauge system covering the range 100 to 5x IO-* torr and having an automatic range switch. All control equipment is located in a separate cabinet of dimensions 550 x 1760 x 505 mm. Facilities are provided for the fitment of accessories such as glow dis- charge devices, dosing valves and radiation heaters. Easy access to all components is an inherent design feature, simplifying maintenance and operation. Leybold-Heraeus Ltd, UK Circle number 49 on Reader Enquiry Service card

Nude Bayard-Alpert ion gauge bead Vacuum Generators Ltd have introduced a new ion gauge head, the VIGIO. The nude type of gauge head is essential for accurate pressure measurement at a site near the experimental region. The VIGIO is of com- pact design and combines a low X-ray limit with high sensitivity. It is available on FC 38 or ocher I J-inch- (38 mm) nominal bore flanges. Risk of gauge failure during an experiment is virtually eliminated by the provision of two tungsten filaments as a standard fitting. The filaments are easily Bir- Vat TIM5 control head

TIM5 control unit

Torr Plan film thickness monitor Bir-Vat Ltd have announced the avail- ability of their new TIM5 film thickness monitor based on measurement of the change in inductance of an encapsulated coil due to the coating of a sample sub- strate with an evaporant. The sample sub- strate is a standard glass microscope slide which clips over the sensing head. Advan- tages claimed for this system over conven- tional resistance monitors include: ease of cleaning and replacement of the sample substrate; protection of the sensing head

from the evaporant eliminating costly cleaning procedures; and there is no prob- lem of connection to the evaporated film. Accuracy is within _t3 per cent full scale. In operation, the required film thickness is set by a control knob. When the indicator needle of the meter reaches the required position a relay operates to cut off the evaporation supply or to operate a shutter. The meter may then be zeroed and succes- sive films evaporated. The glass slide need only be replaced when the maximum thick- ness range of the instrument is reached. This depends on the resistivity of the evapo- rant and some typical thickness ranges are: copper, 500-8000 A; gold, 75s20,000 A; aluminium, lOO-30,000 A; and chromium, 150&100,000 A. The TIM5 control unit is a compact transistorized oscillator receiver which reacts to signals from the tuned in- ductive coil in the water-cooled sensing head. Bir-Vat Ltd, UK Circle number 48 on Reader Enquiry Service card

High vacuum coating plant The Leybold-Heraeus A.8OOH high vacuum coating plant is designed to cater for all types of coating processes on industrial scale operation. The vacuum chamber,

VIG IO ion gauge head

285