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Smart Pixel OptoElectronic Connections (ESPRIT MEL-ARI) Heriot-Watt University (Co-ordinators) Supelec, France CSEM University of Glasgow Trinity College, Dublin email [email protected] www.phy.hw.ac.uk/resrev/SPOEC

Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

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Page 1: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

Heriot-Watt University (Co-ordinators)Supelec, France

CSEMUniversity of GlasgowTrinity College, Dublin

email [email protected]/resrev/SPOEC

Page 2: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec Eng)Project Co-ordination - Professor Andy Walker (Dept. of Physics)Silicon design, Optics, Optomechanics, Micro-opticsUniversity of GlasgowInGaAs device design, growth and fabricationSUPELEC, Metz / ParisSilicon design, PCB design, OpticsTrinity College, DublinAdvanced InGaAs device designCSEM, Zürich (formerly Paul Scherrer Institute)VCSEL design, growth and fabrication

AN ESPRIT-LTR PROJECT - PART OF THE MEL-ARI OPTO CLUSTER

Page 3: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

MEL-ARI Opto Cluster of Projects 1996-1999

OIIC Polymer waveguide interconnects

RODCI Reconfigurable planar interconnects

SIBLE Silicon light emitters, quantum dots

MONOLITH Conformal growth of GaAs on Si

SPOEC 3-D Free Space Crossbar with Tbit i/o

Page 4: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

A free-space optically connected crossbar demonstrator with Tbit/s io to Si

Motivation Interconnect Bottleneck

Features hybrid Si/InGaAssmart-pixel logic

Optical clock distribution

Header decoding in Silicon

8x8 VCSEL array input

Page 5: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

Page 6: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

8

8

Hybrid Optoelectronic“Smart Pixel” Array

64 replica images of the 64 inputs are incident onmatching receivers. Each block electronically routesthe required signal (1 of the 64 inputs) to its opticaloutput. Thus any of the 64 outputs can select anyinput. Path decoding is carried out within each block, electronically, according to the header..

Page 7: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

High contrast input devices for SPOECMOVPE at CSEM ZurichStrained AlGaAs/GaAs/InGaAs250µm pitch, 10µm aperture

Performance• 8x8 array, �=960nm• >500Mbit/s• ��<0.4nm (ie 0.1%)• cw power of >1.5mW per device• Vth=1.9V, Ith 2.6mA

12345678 1 2 3 4 5 6 7 8

975

976

977

978

emis

sion

wav

elen

gth

[nm

]

sapphire8 x 8 VCSEL array(CSEM)

Sapphire substrate(CSEM)

2.8 mm

PCB with VCSEL drivers(SUPELEC)

Page 8: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

Microlens Array

VCSEL Array

Wire Connectors

Channel Channel

Allignment Ring Allignment Ring

Focused Alignment Spots

f/3 f/6.7 collimated

VCSEL

•Efficient collection of divergent VCSEL emission

•Refractive microlenses (Heriot-Watt University)

Page 9: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

960 s,p 1047 s

1047 p

Wavelength (nm)

Ref

lect

ivity

0

0.2

0.4

0.6

0.8

1

880 920 960 1000 1040 1080 1120

SP

Experimental PExperimental SDesign PDesign S

•27 layers of TiO2 and SiO2 at 450

•Incident Angle > ±7.50

•Binary DOEs for 8x8 and 8x16 fanout

•Uniformity to within 2%

•Low zero-order (<0.1%) to reduce xtalk

Page 10: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

•Custom Multi-Element Lenses designed using CodeV

•Custom Optomechanical Lens Assembly and Baseplate

•Image field 17.5mm (Lens 2)

•Near-diffraction limited

•Barrel mounted for stability

•Dual-wavelength (Lens 2)

Page 11: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

Stable mounting systemSemi-kinematic slot plate system with magnetsComponents are centred in cells

Page 12: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

Channel 63 decoderOpticalreceiver 63

Opticalemitter

Cyclic numbergenerator

Clock

6

Multiplexeur

663

Opticalreceiver 1

clockgenerator

Channel 2 decoderOpticalreceiver 2

Arbitrationlogic

Optical

inputs

Opticaloutput

Circuit Silicium

Circuit AsGa

Circuit AsGa

Is

Ie

Ie

Ie

Ie

Opticalreceiver 0

•0.6 micron CMOS (AMS)

•optical clock input

•header decoding

•Analogue design- sensitivity 5 µA optical input ~10 µW

•Clock receivers based ontransconductance-transimpedance amp.Forbes and Walker Electron Lett 34(6) 1998

HWU/Supélec

Page 13: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

Quantum Confined Stark Effect Electro-absorption Modulators

0

5 00 0

1 0 00 0

1 5 00 0

1 0 3 0 1 0 4 0 1 0 50 1 0 60 1 07 0 1 08 0 1 09 0 11 0 0 11 1 0 1 1 20 1 1 30

Wave le ngth (nm)

abso

rptio

n co

effic

ient

(c

m-1)

0.0 kV/cm36.7 kV/cm73.4 kV/cm110.1 kV/cm146.8 kV/cm183.6 kV/cm

(Thanks to Lucy Wilkinson for these example results)

Page 14: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

Modulator

DetectorIsolation trench

n+-contact rail to modulators

In0.135Ga0.865As p++

In0.135Ga0.715Al0.15As p+

MQW 95 PeriodsIn0.23Ga0.77As 8.6nm iGa0.85Al0.15As 6.2nm i

In0.135Ga0.715Al0.15As n+

Graded buffer layerGaAs to In0.135Ga0.715Al0.15As

GaAs Substrate (SI)

(Univ. of Glasgow)

Page 15: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

Wettablepads

Passivationlayer

GaAs substrate(transparent)

MQWSolder bumps

Si substrateCMOS output buffer

CMOS input receiver

Flip-Chip solder-bump bonding

(GMMT Caswell)

Page 16: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

•Flip-Chip Integration of Smart Pixel chips (end 1998)

•Opto-mechanical assembly (end 1998)

•Initial Construction (early 1999)

•Full System Operation (mid 1999)

Development Work

•Optimised Modulators (Trinity College/ Glasgow Univ)

•Improve modulator performance using AFPM

•Design finalised, testing ongoing

Page 17: Heriot-Watt University (Co-ordinators) Supelec, France ...oic.eps.hw.ac.uk/Projects/SPOEC/LEOS1998/LEOS1998.pdf · Heriot-Watt University, Edinburgh (Depts of Physics, Comp and Elec

Smart Pixel OptoElectronicConnections (ESPRIT MEL-ARI)

• Target is optical i/o to Si-CMOS chip at � 1 Tbit/s.

• Data input by 960nm 8x8VCSEL arrays at 250 MHz.

• Optical distribution of clock signals to smart pixel cells.

• Decoding of header routingdata in Silicon.

• Operation of a 64 x 64 optoelectronic crossbar.

Switching Chip

VCSELsOutput Chip

30cm

AN ESPRIT-LTR PROJECT - PART OF THE MEL-ARI OPTO CLUSTER