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Product information
Characteristics
Physical data
Physical data
Product specification
GeH₄ mixtures primary role is as a Ge precursor in epitaxial growth of SiGe crystalline films in source and drain in logic and in deposition of poly-SiGe electrode in DRAM capacitors.
Colorless compressed gas with pungent odor.
→ Datasheet
Molecular weight 76.62
Boiling point at 1.013 bar [°C] -88.5 at 14.5 psi [°F] -127.3
Densityat 1.013 bar, 15 °C [kg/m³]
3.28 at 1 atm., 70 °F [lb/ft³] -127.3
Vapor pressure at 0 °C [bar] 26.5 at 32 °F [psi] 384.35
at 20 °C [bar] 45 at 70 °F [psi] 640
Flammability range in air (% volume) Pyrophoric
Molecular weight 2.016
Boiling point at 1.013 bar [°C] -252.76 at 14.5 psi [°F] -422.95
Densityat 1.013 bar, 15 °C [kg/m³]
0.0852 at 1 atm., 70 °F [lb/ft³] 0.0005
Vapor pressure at 0 °C [bar] - at 32 °F [psi] 0.0005
at 20 °C [bar] - at 70 °F [psi] 0.0005
Flammability range in air (% volume) 4.0 - 77.0
Purity grade Typical purity Typical impurities [ppm]
(by weight) ₄) Ge₂H₆ Ge₃H₈ Germoxanes Chloro- germanes
5.0N ≥99.999 % ≤5
Purity grade Typical purity Typical impurities [ppm]
H₂O CO O₂+Ar N₂ CH₄ CO₂
6.0N ≥99.9999 % ≤0.2 ≤0.1 ≤0.1 ≤0.4 ≤0.1 ≤0.1
Germane
Hydrogen
Germane as assay
Hydrogen as assay
Germane/Hydrogen. GeH₄/H₂Local Partner. Global Expertise.
SPECTRA® EM
Concentration Specification
1% 0.99 ~1.01
10% 9.9 ~ 10.1
Available in two concentrations of Germane in the hydrogen:
N₂ (THCCH
O₂+Ar
≤2
CO₂
≤0.5
H₂O
≤2
CO
≤1 ≤1 ≤1 ≤20 ≤1 ≤5
Page 2
April
, 201
7
→ Germane in Hydrogen Mixture. Product datasheet.
Packaging information
Additional information
Package options
Cylinder designation
Cylinder internal volume
Cylinder material
Cylinder diameter
Cylinder height to valve outlet
Cylinder tare weight
Fill contents
Pressure (psig) @ 35oC
Valve outlet
Valve material
Cylinder 29L 29L Aluminum 203 mm 1215 mm 21.9 kg 0.45 kg 2000 CGA632 SS
Cylinder 29L 29L Aluminum 203 mm 1215 mm 21.9 kg 0.9 kg 1230 CGA632 SS
1% GeH₄/H₂
10% GeH₄/H₂
The information, recommendations, and data contained in this publication are intended to give basic guidance for safe handling and use of gases. It is essential for the safe use of gases that personnel are properly trained and are fully aware of the possible hazards. Further information and advice on any matter relating to the safe handling or use of these products may be obtained from Linde LienHwa.
For different requests and more information, email us at [email protected].
Linde Electronicswww.linde.com/electronics© Linde LienHwa September 2019
