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© 2014-2015 California Institute of Technology
Caltech / CEA-LETI
Gen-1 Nanoprobes for Ephys
( Details of 2014-2015 Run )
© 2014-2015 California Institute of Technology
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 1
A. General images.
1. INITIAL LAYOUTS (with new probe-architecture identifier)
N.B. – Above, “N.A.” denotes a pattern that was not used for the Gen-1 run.
G1-P01
N.A.
G1-P10 N.A. G1-P03 G1-P08
G1-P11 G1-P06 G1-P07 G1-P09
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 2
2. FINAL STEPPER FIELD EMPLOYED
Reticle size = 21.7 mm × 21.7 mm
G1-P01
G1-P08
G1-P10
G1
-P0
6
G1-P09
G1
-P0
7
G1
-P1
1
G1
-P0
3
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 3
3. PROBE HEAD / 256-CONTACT-PAD ARRAY
256 contacts in a 16 × 16 array; total size of field = 3.1mm × 3.1mm
4. MAGNIFIED VIEW / CONTACT PAD ARRAY
contact pad diameter = 100μm; array pitch = 200μm
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 4
3. MISCELLANEOUS IMAGES
Magnified views:
Shank tip detail:
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 5
B. Electrode Details.
6μm × 14μm; ovoid.
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 6
C. Probe Layouts. G1-P01 (Original ID: Probe_LETI_001) Single shank; shank length = 6.5mm; single line of edge electrodes ~5.5μm from
edge; electrodes distributed over 5.126mm of shank length;
electrode dimensions = 6μm × 14μm; 256 electrodes; electrode pitch = 20μm
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 7
G1-P03 (Original ID: Probe_LETI_003) 4-shank array; shank length = 6mm; inter-shank separation = 1.0mm
Each shank: single line of edge electrodes – 5.0μm from edge; over 3.2mm length;
electrode dimensions = 6μm × 14μm; electrode pitch = 50μm
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 8
G1-P06 (Original ID: Probe_LETI_006) 4-shank array; shank length = 5mm; inter-shank spacing = 500μm
Each shank: single line of edge electrodes – 5.0μm from edge; over 3.2mm length;
electrode dimensions = 6μm × 14μm; electrode pitch = 30.5μm
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 9
G1-P07 (Original ID: Probe_LETI_007) 4-shank array; shank length = 5mm; shank pitch = 250μm Each shank: 64 electrodes as an interleaved double column of edge electrodes;
5.0μm and 21μm from edge; spanning 782μm length; electrode dimensions = 6μm ×
14μm; electrode pitch = 24.0μm in column, 16μm between columns.
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 10
G1-P07, cont’d (Original ID: Probe_LETI_007)
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 11
G1-P08 (Original ID: Probe_LETI_008) 8-shank array; shank length = 5mm; shank pitch = 500μm Each shank: single line of edge electrodes – 5.0μm from edge; over 1.567mm length;
32 electrodes/shank; electrode dimensions = 6μm × 14μm; electrode pitch = 50μm
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 12
G1-P09 (Original ID: Probe_LETI_009) 8-shank array; shank length = 5mm; shank pitch = 250μm Each shank: 32 electrodes as an interleaved double column of edge electrodes;
5.0μm and 21μm from edge; spanning 376μm length; electrode dimensions = 6μm ×
14μm; electrode pitch = 24.0μm in column, 16μm between column; staggered.
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 13
G1-P10 (Original ID: Probe_LETI_010) 4-shank array; shank length = 5mm; shank pitch = 500μm. Each shank: Alternating electrode patterns on each shank. Specifically, from the tip:
a) a single line of 10 edge electrodes ~5.0μm from edge on a 96μm pitch; distributed
over an 864μm length; followed by a 82μm gap between the next pattern.
b) Pattern “a” (above) is then followed by a pair of offset electrode columns, each with
22 electrodes that are distributed over a 504μm length with a 24μm pitch.
The electrode pattern for “b” above has the following layout:
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 14
c) After pattern “b” above, there is a 90.5μm gap to next pattern “d”, shown below.
d) Pattern “b” above is followed by a single line of 10 edge electrodes ~5.0μm from edge on a 96μm pitch; distributed over an 878μm length.
e) A detailed view of the third and final electrode pattern.
Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)
© 2014-2015 California Institute of Technology 15
G1-P11 (Original ID: Probe_LETI_011) 4-shank array; shank length = 6mm; shank pitch = 500μm Each shank: single line of 64 edge electrodes – 5.0μm from edge; over 4.109mm
length; electrode dimensions = 6μm × 14μm; electrode pitch = 65μm