Gallium Nitride & Related Wide Bandgap Materials & Devices

A Market and Technology Overview 1998-2003

Second Edition

ELSEVIER ADVANCED TECHNOLOGY

Contents

List of Tables

List of Figures

Chapter 1 Introduction 1.1 1.2

Report Methodology Executive Summary

Chapter 2 Market Forecasts 1998-2003 2.1 2.2 2.3 2.4

2.5 2.6 2.7 2.8 2.9 2.10 2.11

2.12

Introduction Expansion of the Wide Bandgap Device Optoelectronic Devices Wide Bandgap LEDs as a Fraction of the Total LED Market Blue-Green LEDs White LEDs UV-LEDs Violet Diode Lasers Detector Devices Electronic Devices The Competitive Marketplace for Wide Bandgap Semiconductors The Future for Companies in the Wide Bandgap Semiconductor Marketplace

ix

xi

1 1 2

5 5 7 9

11 12 14 17 19 26 28

29

31

Chapter 3 Applications Market Overview 33 3.1 Introduction 33 3.2 Worldwide Market for Wide Bandgap Semiconductors 33 3.3 The Wide Bandgap Semiconductor Device Business 34

3.3.1 Consumer Markets for Wide Bandgap Semiconductor Devices 36

3.3.2 Present Products I 38 3.3.2.1 LEDs 38 3.3.2.2 White LEDs 40 3.3.2.3 UV-LEDs 43

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3.3.3 Present Products II 3.3.3.1 Laser Diodes 3.3.3.2 UV Detectors and Sensors 3.3.3.3 Microelectronics Devices for

Consumer Applications 3.4 Automotive Markets for Wide Bandgap

Semiconductor Devices 3.4.1 Present Products

3.4.1.1 LEDs 3.4.1.2 Microelectronic Device Applications

for Wide Bandgap Semiconductors in the Automotive Sector

3.4.2 The Automotive Electronics Marketplace 3.4.2.1 Electric Vehicles

3.5 Industrial Marketsfor Wide Bandgap Semiconductor Devices 3.5.1 Microelectronics Applications for Wide

Bandgap Semiconductors in Industrial Markets 3.5.1.2 Power Station Control Systems 3.5.1.3 Food Processing 3.5.1.4 Printed Circuit Boad Manufacturing

3.6 Computer Markets for Wide Bandgap Semiconductor Devices 3.6.1 Microelectronic Device Applications in the

Computer Equipment Sector 3.7 Military and Aerospace Markets for Wide Bandgap

Semiconductor Devices 3.8 Communications Markets for Wide Bandgap

Semiconductor Devices 3.9 Other Markets for Wide Bandgap Semiconductor

Devices 3.9.1 Medical 3.9.2 Nuclear Energy 3.9.3 Agriculture/Horticulture

Chapter 4 Materials Technology Overview 4.1 4.2 4.3 4.4 4.5 4.6 4.7 4.8

Introduction Wide Bandgap Materials The Nitrides Gallium Nitride Silicon Carbide ll-VIs Diamond Polymeric Materials

46 46 48

50

53 60 60

63 63 67

71

74 82 83 83

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95

99 100 102 103

105 105 106 110 111 118 121 123 125

Chapter 5 Crystal Growth and Processing of Wide Bandgap Semiconductors 127 5.1 Introduction 127 5.2. Crystal Growth 130 5.3 Dissimilar Substrates 136 5.4 ELOG 139

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5.5 Epitaxial Growth 141 5.5.1 Introduction 141 5.5.2 MOVPE 143 5.5.3 Epitaxial Precursor Materials 145 5.5.4 Commercial MOVPE Reactors 148

5.5.4.1 Introduction 148 5.5.4.2 The Nichia MOVPE System 148 5.5.4.3 TheAIXTRON Planetary Reactor™

System 150 5.5.4.4 The EMCORE TurboDisc™ Systems 154 5.5.4.5 The Thomas Swan Epitor System 157 5.5.4.6 The Nippon Sanso MHR-8000

System 159 5.5.4.7 The EpigressSiC CVD System 159

5.5.5 Molecular Beam Epitaxy 161 5.5.5.1 Introduction 161 5.5.5.2 TheDCA450 162 5.5.5.3 EPIMBE 162 5.5.5.4 The RiberSAMBE32 162 5.5.5.5 The VG Semicon VG80 163

5.6 Growth Enhancements 163 5.6.1 Introduction 163

5.7 In-Situ Monitoring 164 5.8 Alternative Fabrication Processes 170 5.9 Device Processing 170

5.9.1 Introduction 170 5.9.2 Rapid Thermal Annealing of Widegap

Semiconductors 171 5.10 Etching of Wide Bandgap Semiconductors 173 5.11 Packaging of Wide Bandgap Semiconductors 175

Chapter 6 Research Collaborations 179

Chapter 7 7.1

)any Profiles Introduction 7.1.1 7.1.2 7.1.3 7.1.4 7.1.5 7.1.6 7.1.7 7.1.8 7.1.9 7.1.10 7.1.11 7.1.12 7.1.13 7.1.14 7.1.15 7.1.16 7.1.17

Agilent Technologies Inc AIXTRON AG APA Optics Inc AdvancedTechnology Materials Inc (ATMI) American Xtal Technology (AXT) CreeInc Crystar DCA Instruments Oy Eastman Kodak Co EMCORE Corp Epichem Ltd EpigressAB EPI MBE Products Group EPISTAR Corp Excellence Optoelectronics Inc Fujitsu Ltd Hitachi Ltd

193 193 193 197 201 203 206 208 213 214 215 219 223 224 226 227 227 228 230

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7.1.18 7.1.19 7.1.20 7.1.21 7.1.22 7.1.23 7.1.24 7.1.25 7.1.26 7.1.27 7.1.28 7.1.29 7.1.30 7.1.31 7.1.32 7.1.33 7.1.34 7.1.35 7.1.36 7.1.37 7.1.38 7.1.39 7.1.40 7.1.41 7.1.42 7.1.43 7.1.44 7.1.45 7.1.46 7.1.47 7.1.48 7.1.49 7.1.50

Honeywell Solid State Electronics Center Implant Sciences Corp Lite-On Technology Matsushita Electric Industrial Co Ltd Nichia Chemical Industries Ltd Nippon Sanso Corp Nitres Ine Osram Opto Semiconductors GmbH Oxford Applied Research P1 Ltd Phys-Tech-WBG Pioneer Corp RiberSA Rohm Co Ltd Royal Philips Electronics NV Samsung Group Sanyo Electric Co Ltd SDLInc Sharp Corp Shin-Etsu Chemical Co Ltd SOITEC Sony Corp Sterling Semiconductor Ine Sumitomo Electric Industries Ltd Teledyne Lighting & Display Thomas Swan Scientific Equipment Ltd Toshiba Corp Toyoda Gosei Co Ltd United Epitaxy Co Ltd Uniroyal Technology Corp VG Semicon Vishay Intertechnology Ine Xerox Corp

231 233 234 235 238 244 245 246 250 251 252 253 255 256 259 262 264 266 268 271 273 275 277 277 280 281 284 285 287 287 288 289 292

Chapter 8 Geographical List of Universities and Selected Industrial Laboratories Involved in Research 8.1 8.2 8.3 8.4 8.5 8.6 8.7 8.8 8.9 8.10 8.11 8.12

. 8.13 8.14 8.15 8.16

Introduction Australia Belgium Canada China Denmark Finland France Germany Greece India Ireland Israel Italy Japan Korea

295 295 296 298 299 300 301 301 302 304 311 311 312 312 313 313 321

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Chapter 9 Directory of Leading Suppliers 361

8.17 8.18 8.19 8.20 8.21 8.22 8.23 8.24 8.25 8.26 8.27 8.28

The Netherlands Norway Poland Russia Singapore South Africa Spain Sweden Switzerland Taiwan UK USA

10 Appendices 10.1 Acronyms 10.2 Selected Bibliography

10.2.1 Introduction 10.2.2 General 10.2.3 Gallium Nitride 10.2.4 Silicon Carbide 10.2.5 Diamond Films 10.2.6 Chalcogenides

10.3 Exchange Rates Against the US$ (Annual Average)

437 437 443 443 443 444 445 445 445 446

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