Fully Automatic Laser Saw 7000 Series DFL7160 - TaraSemi€¦ · Fully Automatic Laser Saw 7000 Series DFL7160 ... Semiconductor Manufacturing Equipment). ... The mechanical clamp

SSKA14R001

STANDARD SPECIFICATION Fully Automatic Laser Saw 7000 Series

DFL7160

Engineering R&D Division

Prepared on March 31, 2014

・Each item of this document and the specification are subject to change without prior notification in order to make improvements.

・International System of Unit is adopted to express any unit. Also, all the pressure values are expressed in gauge pressure.

・The contact list of the DISCO offices and agent offices is available on the Internet. DISCO home page http://www.disco.co.jp/

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TABLE OF CONTENTS

1. OUTLINE.................................................................................................................1 2. FEATURES..............................................................................................................2

Processing Using Laser ....................................................................................................................................2 Software Developed with Ease of Use in Mind ...............................................................................................2 Safety Emphasizing Design -Laser Product Class- ..........................................................................................2 X-/Y-axis ..........................................................................................................................................................3 Z-axis ...............................................................................................................................................................3 θ-axis ................................................................................................................................................................3 Transport Section .............................................................................................................................................3 Automatic Alignment .......................................................................................................................................3 Spinner Cleaning Unit ......................................................................................................................................3 Inspection Function ..........................................................................................................................................3 Large-capacity Memory Enables Handling of Multiple Devices .....................................................................4 USB Port ..........................................................................................................................................................4 Other Functions ................................................................................................................................................4

3. BASIC STRUCTURE...............................................................................................5 Cassette Elevator Section .................................................................................................................................5 Frame Loading/Unloading Section (Push-pull Arm)........................................................................................5 Frame Transfer Section (Upper Arm)...............................................................................................................6 Frame Transfer Section (Lower Arm) ..............................................................................................................6 Pre-alignment Section ......................................................................................................................................6 Alignment Section............................................................................................................................................6 Processing Section ...........................................................................................................................................7 Spinner Section ................................................................................................................................................8 Operation Section.............................................................................................................................................9 Status Indicator.................................................................................................................................................9 Laser Oscillator (Type-A Laser).......................................................................................................................9 Chiller Unit (for Type-A Laser)......................................................................................................................10

4. ACCURACY...........................................................................................................11 Chuck Table Upper Surface Parallelism (when Measuring at 22°C) .............................................................11 Y-axis Index Positioning Accuracy ................................................................................................................11 Z-axis Positioning Repeatability ....................................................................................................................11

5. UTILITIES..............................................................................................................12 Power Requirements ......................................................................................................................................12 Air ..................................................................................................................................................................12 Clean Air ........................................................................................................................................................13 Water ..............................................................................................................................................................13 Rinse Water [Optional Accessory] .................................................................................................................13 Duct................................................................................................................................................................13 Water Drainage...............................................................................................................................................13 Machine Main Body Dimensions...................................................................................................................14 Machine Dry Mass .........................................................................................................................................14 Paint Color .....................................................................................................................................................14

6. CAUTIONS FOR LASER.......................................................................................15 Cautions for Laser ..........................................................................................................................................15 Precautions for Periodic Maintenance............................................................................................................16 Precautions for the Customer Who Wants to Use N2 Gas...............................................................................16

7. OPERATING ENVIRONMENT ..............................................................................17 8. INSTALLATION......................................................................................................19

Standard Delivered Packing Style ..................................................................................................................19 Terms of Delivery...........................................................................................................................................19 Transport ........................................................................................................................................................19 Installation and Layout...................................................................................................................................19 Piping and Wiring Connections......................................................................................................................20

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Piping and Wiring Connection Parts to be Furnished by Customer ...............................................................20 Air Piping.......................................................................................................................................................21 Water Piping...................................................................................................................................................22 Duct and Drain Piping....................................................................................................................................22 Electrical Wiring ............................................................................................................................................23 Water Piping and Electrical Wiring when Vacuum Unit Is Used [Optional Accessory].................................24

9. STANDARD ACCESSORIES ................................................................................25 10. ELECTIVE ACCESSORIES.................................................................................26 11. OPTIONAL ACCESSORIES ................................................................................28

Optional Accessories List...............................................................................................................................28 1 . Tape Frame................................................................................................................................................29 2 . Cassette .....................................................................................................................................................29 3 . Chuck Table (Spare)..................................................................................................................................29 4 . Spinner Table (Spare)................................................................................................................................29 5 . Rinse Cleaning Specification ....................................................................................................................29 6 . Maintenance Parts Kit ...............................................................................................................................30 7 . Tool Set .....................................................................................................................................................30 8 . Lifting Jig Set ............................................................................................................................................30 9 . Axis Metal Fixture (Spare) ........................................................................................................................31 10 . Machine Anchoring Bracket....................................................................................................................31 11 . Power Cables...........................................................................................................................................31 12 . Braided Hose Joint ..................................................................................................................................31 13 . Braided Hose...........................................................................................................................................31 14 . One-touch Joint .......................................................................................................................................32 15 . Polyurethane Tube...................................................................................................................................32 16 . Pipe Band ................................................................................................................................................32 17 . Uninterruptible Power Supply (Internal Type) ........................................................................................32 18 . Transformer for Use Outside Japan (Internal Type) ................................................................................33 19 . Duct Fan Unit (Internal Type) .................................................................................................................33 20 . Spare Manuals .........................................................................................................................................33 21 . Export Packing Hardware .......................................................................................................................33 22 . Spare Inspection Cassette ........................................................................................................................34 23 . 2/3" CCD Camera (Micro) ......................................................................................................................34 24 . 1.5× Microscope (Micro) ........................................................................................................................34 25 . Ionizer .....................................................................................................................................................34 26 . Laser Oscillator Selection .......................................................................................................................35 27 . Handy Barcode Reader............................................................................................................................36 28 . EMO Guard Ring ....................................................................................................................................37 29 . USB flash drive (Spare) ..........................................................................................................................37 30 . Stylus Pen................................................................................................................................................37 31 . Chiller Anchoring Bracket.......................................................................................................................37 32 . Vacuum Unit............................................................................................................................................38 33 . Vacuum Unit Anchoring Bracket.............................................................................................................39 34 . Selection of Circuit Breaker ....................................................................................................................39 35 . Shielding Partitions .................................................................................................................................39 36 . SECS Communication Software .............................................................................................................39 37 . Frame Protrusion Detection Function .....................................................................................................40 38 . Compliance with the Machinery Directive (CE Marking) ......................................................................40

12. WARRANTY ........................................................................................................41 13. ATTACHED DRAWINGS .....................................................................................43

Overall View ..................................................................................................................................................43 Installation Diagram (Standard) .....................................................................................................................44 Installation Diagram (Optional Accessory) ....................................................................................................45 Piping Connection Diagrams (Rear Side) ......................................................................................................46

14. NOISE DATA .......................................................................................................47 Measurement Conditions................................................................................................................................47 Measurement Points .......................................................................................................................................47 Noise Level ....................................................................................................................................................47

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1. OUTLINE The DFL7160 is a fully automatic laser saw to cope with φ300 mm workpieces using a laser for the processing engine.

The DFL7160 carries out the following operations automatically to process a workpiece.

(1) Loading a frame mounted with a workpiece from the cassette. (2) Transferring the workpiece to the chuck table using the transfer arm. (3) Perform alignment for process point positioning. (4) Perform laser processing. (5) Perform cleaning and drying at the spinner section.

(6) Unloading the frame to the same cassette slot after processing completed

Formal name: Fully Automatic Laser Saw Model number: DFL7160

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2. FEATURES

Processing Using Laser

The DFL7160 utilizes short pulse laser technology for processing.

It is adapted for the main applications in ablation processing*, such as Low-k grooving, laser full cut, etc., and enables high-quality processing.

Furthermore, it maintains high processing quality by being equipped with a laser oscillator status display function and laser power management function.

* Ablation processing: This is one type of laser processing method, which sublimates and ablates individual objects by concentrating laser energy in a minute area for a short time.

Software Developed with Ease of Use in Mind

Thanks to the LCD touch panel and GUI (Graphical User Interface), the operation of the DFL7160 can be more intuitive and less stressful.

An operator can operate this machine simply by selecting data when prompted by the LCD touch panel. Therefore, the operator can use the machine after taking very simple training.

In addition to the standard cutting mode, user modes are fitted as standard. The machine is also capable of handling special cutting sequences. Data for processing programs, operation sequences and laser may also easily be input.

In addition, software is designed so that adjustments to the various axes may be performed during cutting simply by following the guidance given on the touch panel. This, to an extremely high extent, prevents operational mistakes.

When an error occurs, guidance is displayed, and cause of the trouble can be located and dealt with easily.

The guidance language on the touch panel can be switched and chosen from Japanese, English, and Chinese.

Safety Emphasizing Design -Laser Product Class-

Complying with the IEC Publ.60825-1: Safety of Laser Products Part 1 and the CDRH: 21CFR1040 Performance standards for Laser Products Source, the machine meets any conditions required for laser products and is designed with a focus on user safety.

In addition, although this machine incorporates a Class-4 laser unit, which is defined by IEC Publ.60825-1: Safety of Laser Products Part 1, the laser beam emission area is covered with shielding covers and the exclusive interlock systems are installed on the opening/closing covers, so that this machine meets the safety standards for a Class-1 laser product.

Furthermore, this machine complies with the safety standards required for laser products in each country (CE marking, IEC, ANSI, FDA/CDRH, JIS).

To avoid any danger to operators, hardware interlocks are installed at the inherently dangerous locations other than laser-related ones. In addition, the machine configuration conforms to CE marking (machine directive/EMC directive) as well as SEMI S2 and S8 (Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment).

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X-/Y-axis

The XY stage structure, where the X-axis is arranged at a right angle on the Y-axis, is used.

The feed mechanism performs stable feed operations through the combination of the AC servomotor and precision ball screw. In addition, the linear guide, which has an especially small vibration at the time of high-speed cutting with good straightness, is adopted.

Y-axis adopts a closed loop using a linear scale with high resolution and low coefficient of expansion so that highly accurate and stable positioning can be demonstrated.

The feed speed can be adjusted by the data setting from the touch panel. The feed speed can be set freely from low to high.

Z-axis

This is the axis to perform focus positioning for the laser and alignment microscope.

This axis performs closed loop control, which permits highly accurate positioning repeatability and more stable focusing operation.

θ-axis

The chuck table is equipped with a rotation mechanism to index the cutting direction of the workpiece.

The rotation mechanism uses a direct-drive motor, and in addition to driving the chuck table directly, closed loop control is carried out by a rotary encoder, thus achieving high reliability.

Transport Section

The 2 linear arms (upper arm and lower arm) and a push-pull arm transport the workpiece. The upper and lower arms used for the workpiece transport respectively before and after the cleaning, and thereby the cleaned workpieces are prevented from becoming re-contaminated.

Automatic Alignment

The machine performs teaching for each device (target, light level and cut position registration work) in advance. Thus alignment can be performed just by selecting the device data.

By switching between high and low magnification automatically, the time for target search is shortened and alignment can now be performed easily.

Spinner Cleaning Unit

Optional settings can be made with regard to the spinner revolutions and cycle time during cleaning, rinsing and drying, and highly-reliable cleaning can be carried out despite the increased density of devices. Equipped with the atomizing cleaning mechanism utilizing cleaning water and clean air as standard, the machine provides high effective cleaning.

Inspection Function

This function transports a workpiece to the inspection cassette in the lower section of the cassette at the optional timing during full auto operation. An operator can use this function to inspect processing quality of the workpiece.

This function enables the operator to perform a sampling inspection without ending the full automation.

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Large-capacity Memory Enables Handling of Multiple Devices

Regarding the various cutting and alignment conditions of the various devices, memory inside the large-capacity SSD (Solid State Drive) is available for 5,000 types, and multi-device devices can be controlled easily.

USB Port

The machine is equipped with the USB port. The USB flash drive can be used as an external storage device during data loading or saving.

Other Functions

・Ability to handle multi-index data Input of parameters for up to 16 indexes per channel for each workpiece is possible. Also, up to 10 sequences can be set up for a street cut sequence data.

・Cleaning user program A series of cleaning work consisting of up to 15 sequences can be performed. Either one of cleaning, rinsing or drying is selected for every sequence, and a series of cleaning work is programmed after setting the time and revolution speed. Thus it makes possible cleaning which is suitable for each device.

・Condition monitoring function Numeric information such as for the laser condition and utilities (e.g., pressure and vacuum) is displayed on the touch-panel monitor for monitoring.

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3. BASIC STRUCTURE The DFL7160 roughly consists of the following 11 sections:

・Cassette elevator section ・Frame loading/unloading section (push-pull arm) ・Frame transfer section (upper arm/lower arm) ・Pre-alignment section ・Alignment section ・Processing section ・Spinner section ・Operation section ・Status indicator ・Laser oscillator ・Chiller unit

Cassette Elevator Section

The elevator axis indexes workpieces in the cassette.

Drive system Ball screw drive using an AC servomotor Suitability of various cassettes By setting the values for the cassette in the FRAME SIZE

REGISTER screen, a DISCO standard or kinematic cassette can be used.

Number of cassettes 2-8 type: 2 (direct loading) 300 mm 13-slot standard cassette: 2 (direct loading) 300 mm 13-slot kinematic cassette: 1 300 mm 25-slot kinematic cassette: 1 ・When using the kinematic cassette, the kinematic cassette and 2-8

type cassette cannot be double-stacked. Frame sensing Sensing by a reflective-type sensor Cassette size determination function

It is possible to determine whether the cassette placed on the cassette stage is either "a" or "b" described below (except the user-specified specification cassettes): a. Cassette for 300 mm b. Any cassette other than "a" ・It is impossible to determine the cassette type of "b. Any cassette

other than the "a".

Frame Loading/Unloading Section (Push-pull Arm)

The mechanical clamp finger loads/unloads frames between the cassette and pre-alignment section. Workpiece positioning in the front-back direction is performed with the push-pull arm.

Drive system Motor: AC servomotor Transfer mechanism: Ball screw drive Slide mechanism: Linear guide

Means of holding a workpiece Frame pinching mechanism using air cylinder Frame sensing Sensing by a reflective-type sensor

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Frame Transfer Section (Upper Arm)

Upper arm transfers a workpiece from the centering guide to the chuck table, as well as transfers the cleaned workpiece from the chuck table to the centering guide.

Drive system Drive by air cylinder Means of holding a workpiece Vacuum clamp Universal pad Universal arm with a one-touch switching capability to switch the

300 mm or 8" frames

Frame Transfer Section (Lower Arm)

Lower arm transfers a workpiece from the chuck table to the spinner table.

Drive system Drive by air cylinder Means of holding a workpiece Vacuum clamp Universal pad Universal arm with a one-touch switching capability to switch the

300 mm or 8" frames

Pre-alignment Section

During workpiece loading and unloading, while the centering guide performs frame centering in the right-left direction.

Drive system Motor: Stepping motor with reducer Transfer mechanism: Belt drive Slide mechanism: Linear guide

Frame size switching Variable by data setting

Alignment Section

System Pattern matching system based on the target patterns from the CCD camera Micro/Macro pattern matching Magnification Low: 0.75× (pixel size: 0.01 mm)

High: 7.5× (pixel size: 0.001 mm) Direct and external ring lighting Kerf check ・Compensation on a hairline standard

・Kerf width MAX/MIN ・Check setting of arbitrary locations ・Check setting for each cut line number

Automatic light intensity adjustment Auto focus

Functions

Teach Microscope With dual objective

lens and dual camera

Low monitor magnification: Approx.30× High monitor magnification: Approx. 300×

Device type change Alignment conditions can be switched automatically at the same time when the device data are changed.

Alignment accuracy ± 0.001 mm Alignment available chip size 0.2 mm or more

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Processing Section

The processing section consists of X-, Y-, Z-, and θ-axes.

X-axis Slide and drive system Motor: AC servomotor

Transfer mechanism: Ball screw Guide: Linear guide

Cutting range 310 mm 155 mm to the left and 155 mm to the right from the laser irradiation position

Workpiece width setting range Up to 300 mm Step: 0.001 mm

Moving speed Input range: 0.1 to 600 mm/s Return speed: 600 mm/s

Control system Closed loop system using AC servomotor

Y-axis Slide and drive system Motor: AC servomotor


Cutting range 310 mm 155 mm to the front and 155 mm to the rear from the laser irradiation position

Workpiece width setting range Up to 300 mm Step: 0.001 mm

Index setting range Input: 0 to 300 mm Step: 0.0001 mm Moving speed: 180 mm/s

Control system Closed loop system using a linear scale Scale resolution 0.0001 mm

Z-axis Slide and drive system Motor: Stepping motor


Input range for defocus amount -2.000 to 5.000 mm Step: 0.001 mm

Moving speed 50 mm/s Control system Closed loop system using a rotary encoder Moving resolution 0.00005 mm

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Processing Section (Continued)

θ-axis Drive system Motor: Direct drive motor

Transfer mechanism: Direct drive Maximum rotating angle 380°

320° in the positive (+) direction and 60° in the negative (-) direction from the origin position when seeing from above the table base.

Positive (+) direction Origin position

Negative (-) direction

Control system Closed loop system by a rotary encoder Motor resolution 0.039" (angle)

Spinner Section

For a workpiece cleaning, revolution speed and time for cleaning, rinsing and drying can be set on individual device data. An atomizing nozzle cleaning system, which uses mixed flow of cleaning water and clean air, is equipped as standard.

Spinner table Drive system Drive by the AC servomotor Revolution range 100 to 3,000 min-1 Setting time input range 0 to 999 sec (The data can be set for individual processes of cleaning,

rinsing and drying.) Stop positioning accuracy ± 1°

Cleaning nozzle Drive system Drive by the Stepping motor Moving speed 20°/s fixed

・When the equal efficiency cleaning function is used, the setting values from 4.5 to 20°/s are available.

Cleaning range Max. Approx. φ420 mm (variable)

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Operation Section

Touch panel Touch panel A 15" color LCD is employed to display alignment operation,

processing data and error messages. It is also possible to operate the machine by directly touch the LCD.

Operation screens Easy operation is realized by adopting GUI (Graphical User Interface).

Display language of guidance Can be selected from Japanese, English, and Chinese.

USB port Connector type USB type A connector (receptacle) Electrical/mechanical specification

USB Rev.2.0 compliant

Transfer rate 480 Mbps (maximum) Supported USB devices USB Mass Storage Class compliant flash memory Number of ports 1 Verified USB flash drive for use Maker: Hagiwara Sys-Com Co., Ltd.

Model: HUD-2GLD-BK-0104A Precautions Do not use a USB flash drive which is equipped with security

functions. Also, please note that DISCO shall not guarantee any machine operation if you use other than the USB flash drive of the optional accessory and verified USB flash drive described above.

Status Indicator

Lighting and flashing of the status indicator and turning on and off of the buzzer are programmable.

・The alarm and laser emission settings cannot be changed. Red flashing and white light are fixed to the buzzer alarm and laser standby, respectively.

Color Red/yellow/green/white Standard specification Green light: The machine is operating in the full-auto mode.

Yellow flashing: The full-auto operation completes. Yellow light: The machine is on stand-by. Red flashing: An alarm (error or emergency) condition has occurred.White light: Laser emission (laser irradiation is possible) White flashing: Laser maintenance

Laser Oscillator (Type-A Laser)

Oscillator model Semiconductor laser diode (LD) excitation Q-switch solid laser Oscillation formation Pulse Laser wavelength 355 nm

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Chiller Unit (for Type-A Laser)

This is the unit to supply cooling water to the laser oscillator.

・The chiller unit included with this machine uses the water circulating system. ・Distilled water is used as cooling water. ・The power to the chiller unit is supplied from and controlled by the DFL7160.

Caution:

・Deterioration of the water quality may damage the chiller unit and laser oscillator. To keep the circulating water quality high, it is necessary to replace the circulating water periodically (60-day intervals are recommended).

・Do not use deionized water for cooling water. Use of deionized water may damage the chiller unit and/or laser oscillator.

・In order to keep the cooling performance of the chiller unit, secure a space of at least 100 mm in the right/left sides of the chiller unit.

Cooling system Forced-air cooling system Temperature setting range 10 to 60°C (Use the unit under the condition that there is no

condensation.) Temperature measurement range -9.9 to 80°C Use environment Temperature: 10 to 35°C

Humidity: 35 to 80%RH Atmosphere: No corrosive gas, solvent such as thinner, or

combustible gas Temperature adjustment performance

Display temperature: within ± 0.2°C

Cooling capacity Approx. 230 W (when setting temperature is 25°C and ambient temperature is 25°C)

Cooling water Distilled water Tank capacity: Approx. 1.2 L Pump: Maximum pressure 0.09 MPa

Dimensions 270 (W) × 436 (D) × 393 (H) mm Mass (dry mass) Approx. 17.5 kg

Mass including the chiller rack: Approx. 22.5 kg

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4. ACCURACY

Chuck Table Upper Surface Parallelism (when Measuring at 22°C)

0.008 mm/210 mm

0.008 mm/310 mm

Y-axis Index Positioning Accuracy

Single error: 0.002 mm or less/5 mm

Positioning accuracy: 0.003 mm or less/310 mm

Z-axis Positioning Repeatability

0.002 mm (range)

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5. UTILITIES

Power Requirements

Standard 200-240 V AC ± 10%, 3-phase Voltage With transformer

380-415 V AC ± 10%, 3-phase

Frequency 50/60 Hz Power consumption

Standard When processing: Approx. 1.2 kW When waiting: Approx. 1.1 kW The above values are just for reference and differ depending on various conditions.

Standard 6.9 kVA Maximum power With vacuum

unit 10.4 kVA

Standard 17 mA or less ・If an earth leakage breaker is used for the plant facilities for

protection purpose, use a breaker whose sensed current is 30 mA or more.

・The leakage current may exceed 17 mA depending on machine specifications.

With UPS 23 mA or less ・If an earth leakage breaker is used for the plant facilities for


Leakage current

With vacuum unit

30 mA or less ・If an earth leakage breaker is used for the plant facilities for


Standard 20 A With transformer

20 A Machine main breaker rating

With vacuum unit

30 A

Wiring configuration 3 wire + GROUND

Air

Air is mainly consumed for driving the actuator and as a vacuum source, and is passed through the filter in the machine.

Supplied pressure 0.5 to 0.8 MPa Fluctuation range: ± 0.01 MPa

Maximum flow rate 275 L/min (ANR) The above values are just for reference and differ depending on various conditions.

Mean flow rate during running 90 L/min (ANR) The above values are just for reference and differ depending on various conditions.

Connection port Rc1/4

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Clean Air

Clean air is used for drying workpiece by blowing. There is no filter inside the machine.

・When you do not use clean air for air supply, the air piping will be branched off inside the machine.

・If you use N2 gas for air supply for the machine, the laser optical system and processing point section may be deteriorated or damaged. When you need to use N2 gas, please consult your nearest DISCO sales office or DISCO service office beforehand.


Maximum flow rate 200 L/min (ANR) (except for the use of air blower) The above values are just for reference and differ depending on various conditions.

Mean flow rate during running 70 L/min (ANR) The above values are just for reference and differ depending on various conditions.

Connection port Rc1/4

Water

Water is used for spinner cleaning.


Maximum flow rate 1 L/min Connection port Rc1/4

Rinse Water [Optional Accessory]

Rinse water is the secondary cleaning water to be used for the spinner cleaning.


Maximum flow rate 1 L/min Connection port Rc1/4

Duct

Laser processing vaporizes removed substances and sends them flying around the processing point. Such air must be exhausted from the duct.

Duct capacity 5 m3/min Consult your nearest DISCO sales office or DISCO service office, if the duct capacity is smaller than above.

Connection port Duct hose 101.6 mm ID

Water Drainage

Wastewater as a result of the workpiece cleaning by the spinner is discharged here.

Connection port Duct hose 32 mm ID

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Machine Main Body Dimensions

1,200 (W) × 1,550 (D) × 1,800 (H) mm (without protrusion and status indicator (364 mm))

・For installation, it is necessary to secure the space for the maintenance work and mounting the status indicator. (Refer to Fig. 13-2: Installation Diagram (Standard))

Machine Dry Mass

Approx. 1,750 kg

・When selecting the uninterruptible power supply (UPS) or transformer for use outside Japan as an optional accessory, the accessory mass is added to the machine mass.

Approx. 50 kg (UPS) Approx. 120 kg (Transformer for use outside Japan)

Paint Color

Cream (Munsell No. 2.5 GY 8.0/0.5) Black (Munsell No. N2.4)

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6. CAUTIONS FOR LASER

Cautions for Laser

Laser class [Class 1]

This machine incorporates a laser oscillator classified as Class 4 in the CDRH: 21CFR1040 Performance standards for Laser Products Source and the IEC Publ.60825-1: Safety of Laser Products Part 1. However, by shielding the laser irradiation area with lightproof covers and installing interlock systems to openable/closable covers, the machine satisfies the requirements of the safety standards for use of a Class-1 laser product.

Laser class [Class 4]

The DFL7160 during laser maintenance is classified as Class 4 in the CDRH: 21CFR1040 Performance standards for Laser Products Source and the IEC Publ.60825-1: Safety of Laser Products Part 1. ・The laser maintenance operation requires removing the cover

which shields the laser irradiation and irradiating with the cover removed.

・All of laser maintenance operations will be conducted by DISCO laser service engineers. The following operations are included in the laser maintenance. - Optical axis adjustment at the time of machine installation and

maintenance - Laser head replacement

Laser safety training Before purchase of the machine, DISCO asks customers to receive safety training. Please make sure to participate in the training since risks specific to laser will be explained. After the training, DISCO also asks the customers to sign an acknowledgment sheet for the completion of the training. The training includes: ・Influence of the laser beam on the human body ・Regulatory/statutory and standard requirements ・Safety structure of the DFL7160 ・Maintenance of the DFL7160 ・Safety assurance during laser maintenance ・Safety assurance requested to customers

Maintenance of laser The laser oscillator is a consumable and must be periodically replaced.・The time for replacement varies depending on the frequency of

use. ・If you want to replace your laser oscillator with a refurbished one,

DISCO will buy the replaced laser oscillator as a trade-in. ・The laser oscillator must be replaced by DISCO laser service

engineers. ・Shielding partitions are installed to protect laser lights from

leaking out of the working area while operating the machine under the class 4 environment. It is recommended to purchase shielding partitions at the same time when purchasing the DFL7160. Mass of the shielding partition and necessary space to store it is as follows. - Mass: Approx. 200 kg - Necessary space: Approx. 900 (W) × 1,600 (D) mm

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Precautions for Periodic Maintenance

To use the machine, it is necessary to perform the periodic maintenance operations described below.

・The inspection procedure, maintenance procedure, and maintenance cycle differ depending on the use frequency of the customer, type of the processing point nozzle mounted, and specification of the machine. For details, contact your nearest DISCO sales office or DISCO service office.

Cleaning the processing point nozzle

Dispersed material generated by ablation processing may adhere to and accumulate on the processing point nozzle. Also, leaving this situation for a long time may deteriorate the processing capability. Clean the processing point nozzle periodically.

Cleaning the exhaust duct system

・The exhaust duct system includes all the ducts installed in the inside and outside of the DFL7160.

Dispersed material generated by ablation processing is discharged by the suction mechanism mounted on the processing point nozzle. The discharged material may accumulate on the discharge path up to the machine duct section and the ventilation path connected to the machine outside. Also, if ignitable material accumulates there, an accident may occur. Perform periodic maintenance such as checking, cleaning, and replacing of the hoses.

Precautions for use of the coating function [user-specified specification]

Water soluble protective film solution is used. Periodically clean the parts where water soluble protective film solution adheres to and accumulate.

Precautions for the Customer Who Wants to Use N2 Gas

If you use N2 gas for air supply for the machine, the laser optical system and processing point section may be deteriorated or damaged. Do not use N2 gas on the machine. If you want to use N2 gas for any parts other than the above (such as the spinner cleaning mechanism), it is necessary to change the air piping system. For details, contact your nearest DISCO sales office or DISCO service office.

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7. OPERATING ENVIRONMENT

Operating Environment

Use the DFL7160 within the following conditions:

Required floor area Refer to Fig. 13-2: Installation Diagram (Standard). Installation site ・Ease of operation and maintenance must be taken into account.

There needs to be an area for the shielding partition to be installed at the time of laser maintenance work. (Refer to Fig. 13-2: Installation Diagram (Standard).)

・If the machine is used or kept in the environment where dirt and dust float around, precision parts of the machine may be worn out or get dirty quickly, which could shorten the part life or adversely affect processing and part quality. If you need to use or keep the machine in the environment where dirt and dust float around, consult your nearest DISCO sales office or DISCO service office.

Treatment for waterproof and drainage

If water leakage should occur, the floor surface and downstairs might be damaged. Therefore, provide the floor surface with an appropriate treatment for waterproof and drainage. (The water leakage detection system by adding the drain pan will be available soon. Contact your nearest DISCO sales office or DISCO service office for the detailed specification.)

Ambient temperature (room temperature)

20 to 25°C (fluctuation range: within ± 1°C)

Ambient relative humidity 55% ± 15% non-condensing Power requirements Standard: 200-240 VAC, 3-phase ± 10%

With transformer for use outside Japan: 380-415 VAC, 3-phase ± 10%・Leakage current: 17 mA or less

If the earth leakage breaker is used for the plant facilities for protection purpose, use a higher harmonic-measured breaker whose sensed current is 30 mA or more. - The leakage current may exceed 17 mA depending on machine

specifications. ・Significant voltage vibrations must be avoided. ・Use the power supply without any momentary interruption. ・Do not use the machine in electrically noisy environments.

The tests listed below are conducted for this machine. Standards IEC: 61000-4-4 Electrical fast transient/burst immunity test (JIS: C61000-4-4 Electrical fast transient/burst immunity test) Outline of test ± 2.0 kV (Charge voltage)

・Leakage current may increase according to the customer's power environment (such as noise), which may activate the earth leakage breaker. DISCO can provide a special-specification breaker whose sensed current is 50 mA. For details, contact your nearest DISCO sales office or DISCO service office.

Power cable When a power cable is prepared by customers, a cable with the protective conductor (PE line) which has a cross-sectional area of at least 10 mm2 Cu, or 16 mm2 Al should be prepared. The power cable for this machine is prepared as an optional accessory.

Grounding Facility-side ground connection must be made according to the local regulations.

SSKA14R001 - 18 -

Operating Environment (Continued)

Air Filtration rating: 0.00001 mm/99.5% or more Residual oil: 0.1 mg/m3 or less Atmospheric dew point: -15°C or less

Clean air Use clean air suitable for workpiece drying. Spinner cleaning water temperature

20 to 25°C

Spinner cleaning water quality Consult your nearest DISCO sales office or DISCO service office when using other than deionized water.

Rinse water quality [optional accessories]

Consult your nearest DISCO sales office or DISCO service office when using other than deionized water.

Duct Rated exhaust amount: 5 m3/min Consult your nearest DISCO sales office or DISCO service office, if the duct capacity is smaller than above.

Altitude Altitude of 1,000 m or lower When the altitude of the site is higher than 1,000 m, consult your nearest DISCO office or DISCO service office.

Others ・Use the cleaned piping hoses and joints. ・Avoid locations where noise, vibrations, heat, and oil mist are

generated, as well as locations close to fans, and ventilation outlets.

・Since materials removed by the laser process of this machine evaporate and scatters around the process point, the exhaust system should be provided. Also, washing causes the need of drainage. As for exhaust and drainage, dispose them in the way suitable for the characteristics of the removed materials and comply with the relevant local/national government standards/regulations applied to the site where this machine is installed.

・Do not use this machine at any place other than an industrial or commercial facility. This machine is designed for industrial use and its EMC performance has been evaluated as EN55011, Group 1, Class A. Therefore, there is a possibility that electromagnetic noise may exceed the limit defined by standards for residential environments.

SSKA14R001 - 19 -

8. INSTALLATION For installation procedures, follow the description in the Installation Manual packed with the machine. The DFL7160 is a super-precision machine, and especially vibration and impact to the laser optical system can create a serious problem. Even if only moving the machine a short distance within the building, there are some vibrations and/or impact during the movement, and the machine needs to be readjusted, or it may be damaged or fail. When reinstalling or relocating the machine, contact nearest your DISCO sales office or DISCO service office.

Standard Delivered Packing Style

Machine main body dimensions 1,200 (W) × 1,550 (D) × 1,800 (H) mm (without protrusion and status indicator (364 mm))

Machine dry mass Approx. 1,750 kg ・When selecting the uninterruptible power supply (UPS) or

transformer for use outside Japan as an optional accessory, the accessory mass is added to the machine mass. Approx. 50 kg (UPS) Approx. 120 kg (Transformer for use outside Japan)

Terms of Delivery

The delivery of the DFL7160 will basically be FCA. If any other terms of delivery are desired, consult your nearest DISCO sales office or DISCO service office.

Transport

Hoisting ・Use designated lifting components. ・The weight of the lifting jig is added to the dry of the machine dry

mass described above. A crane/elevator having capacity of 2,200 kg or more must be used with the appropriate wire and other hoisting the machine.

Transport ・Before moving or relocating the machine already installed, be sure to contact your nearest DISCO sales office or DISCO service office.

・In order to pass the machine through, the space for safety work should be secured. (FYI: The space where an engineer can work while sitting is 690 mm)

Installation and Layout

・For the installation floor withstanding load, refer to Fig. 13-2: Installation Diagram (Standard).

・Ensure that there are an air source, a water source, drain pipes, and a power source near the machine.

・Install valve which can be locked out for the air supply at the facility-side. This should be prepared by the customer.

・Facility-side ground connection must be made according to the local regulations.

・Avoid places where the temperature greatly varies. (See Section [Ambient temperature (room temperature)] of Chapter 7 OPERATING ENVIRONMENT)

・In order to protect personnel/machine during disasters such as an earthquake, the machine anchoring bracket [optional accessory] are available. It is recommended that the machine be secured with these brackets.

SSKA14R001 - 20 -

Piping and Wiring Connections

This machine needs the piping for water and air sources, exhaust and drain to be used and wiring for the power supply. For the piping connection port locations, see the included drawings (Fig. 13-4 Piping Connection Diagram). For the part numbers and quantities of DISCO standard hookup accessories, see Table 9-1 Standard Accessories.

Piping and Wiring Connection Parts to be Furnished by Customer

For the connections of utilities to this machine, air piping, water piping, duct piping, drain piping, and electrical wiring should be arranged. Among those, the customer is requested to arrange hoses, tube, joints and power cable as well as connection ports at the plant facility, except for ducts and drain hoses.

FULLY AUTOMATIC LASER SAW DFL7160

Plant Facility Arrangement

Supplied from DISCO Arranged by the customer

Water piping

Duct piping

Water connection port

Electricity connection port

Hose･Fitting

Power supply

Drain piping

Air connection port

Duct connection port

Drain connection port

Air piping

Hose･Fitting

Hose･Fitting

Hose･Fitting

Power cable

Fig. 8-1: Piping and Wiring Connection Parts

・DISCO arranges the air piping to the connection ports of the DFL7160. The customer is requested to arrange hoses and joints as well as plant facility connection ports.

・DISCO arranges water piping to the connection ports of the DFL7160. The customer is requested to arrange hoses and joints as well as plant facility connection ports.

・DISCO arranges duct and drain piping to the hoses of the DFL7160. The customer is requested to arrange the plant facility connection ports.

・DISCO arranges electrical wiring to the connection port of the DFL7160. The customer is requested to arranged power cable and plant facility connection port.

・When a power cable is prepared by customers, a cable with the protective conductor (PE line) which has a cross-sectional area of at least 10 mm2 Cu, or 16 mm2 Al should be prepared. The power cable for this machine is prepared as an optional accessory.

SSKA14R001 - 21 -

Air Piping

DISCO arranges the air piping to the connection ports of the DFL7160. The customer is requested to arrange hoses and joints as well as plant facility connection ports. There are following 2 types of piping specification whether clean air is used or not. Arrange applicable hoses and joints suitable for your situation.

a. When clean air is used

DFL7160 Plant Facility Arrangement

Air IN (Rc1/4)

Clean Air IN (Rc1/4)

Air (Rc1/4) Pressure: 0.5 to 0.8 MPa

Clean Air (Rc1/4) Pressure: 0.5 to 0.8 MPa

Utility flow direction

Hose･Joint

Air

Clean air

Filter


b. When clean air is not used

Air IN (Rc1/4) Air (Rc1/4) Pressure: 0.5 to 0.8 MPa

Air

Clean air


Hose･Joint

Filter



Fig. 8-2: Air Piping Connection Parts

・DISCO can provide all the hoses and joints to be arranged by the customer as optional accessories.

・DISCO can provide a braided hose and polyurethane tubes as optional accessories. If you need them, specify the amount and length necessary to contact your nearest DISCO sales office or DISCO service office.

・DISCO arranges braided hose joints and one-touch joints as optional accessories. It is necessary to determine the type in accordance with the hose selection and screw diameter. If you need them, specify the amount and length necessary to contact your nearest DISCO sales office or DISCO service office.

・In the case of the connection b) in Fig. 8-2, the maximum air flow rate of 475 L/min (ANR) needs to be assured. Supply the primary pressure at 0.6 MPa or more.

SSKA14R001 - 22 -

Water Piping

DISCO arranges the water piping to connection ports of the DFL7160. The customer is requested to arrange hoses and joints as well as plant facility connection ports. Arrange appropriate hoses and joints suitable for your situation.


Cleaning water IN (Rc1/4)

Deionized water (Rc1/4) Pressure: 0.2 to 0.4 MPa

Rinse IN (Rc1/4) [optional accessory]

Rinse (Rc1/4) Pressure: 0.2 to 0.4 MPa


Hose･Joint


Fig. 8-3: Water Piping Connection Parts

・DISCO can provide all the hoses and joints to be arranged by the customer as optional accessories.

・DISCO can provide the braided hose and polyurethane tube as optional accessories. If you need them, specify the amount and length necessary to contact your nearest DISCO sales office or DISCO service office.

・DISCO arranges braided hose joint and one-touch joint as optional accessories. It is necessary to determine the type in accordance with the hose selection and screw diameter. If you need them, specify the amount and length necessary to contact your nearest DISCO sales office or DISCO service office.

Duct and Drain Piping

DISCO arranges the piping to the duct and drain of the DFL7160. The customer is requested to arrange the plant facility connection ports.

・If a duct hose longer than 3 m is necessary, contact your nearest DISCO sales office or DISCO service office.

: Air

Duct hose 101.6 mm ID (length 3 m) (Both-end duct cuffs with pipe band) Duct Exhaust port



Duct hose 32 mm ID (length 3 m) (Both-end duct cuffs with pipe band) Drain Duct port

: Liquid

: Dirty water and mist Fig. 8-4: Duct Piping Connection Parts

SSKA14R001 - 23 -

Electrical Wiring

DISCO arranges the wiring to the connection port of the DFL7160 and the customer is requested to arrange power cable and connection to the plant facility port.

M5 screw terminal PE line is M4 screw

M5 screw terminal (200-240 V AC ± 10%, 3-phase)

Power cable



Fig. 8-5: Wiring Connection Parts

・DISCO can provide power cable as optional accessory. If you need it, contact your nearest DISCO sales office or DISCO service office.

・The table below shows the specification of the power cable.

- The cable length is approximate estimate of the distance from the machine outer cover. Prepare a power cable which length is long enough considering the distance to the primary connection section.

Nominal cross - sectional area

Specification Length(m)

AWG mm2

equivalent

Number of

terminals

Terminal for power

line

Terminal for PE line

3 12 4 4 M5 M4 5 12 4 4 M5 M4 For 20 A 7 12 4 4 M5 M4 3 8 10 4 M5 M4 5 8 10 4 M5 M4 For 30 A 7 8 10 4 M5 M4

SSKA14R001 - 24 -

Water Piping and Electrical Wiring when Vacuum Unit Is Used [Optional Accessory]

For the space to install the vacuum unit, see Fig. 13-3: Installation Diagram (Optional Accessory).

Cooling water OUT

Power (30 A:10.4 kVA:M5 screw

terminal, PE line is M4 screw)

Drain port

DFL7160 Vacuum unit Plant Facility

Exhaust port Duct port

Exhaust port Processing duct

Utility Flow Direction

1

Arranged by the Customer

Arranged by DISCO

Power connection Power 2

Cooling water INTap water or general industrial water

Drain port

Drain port

3

4

5

6

Dirty water and mist Air Liquid

Power supply (30 A,:10.4 kVA, M6 screw terminal, PE line is M4 screw)

Piping/wiring parts (among DFL7160, and units) Piping/wiring parts (among factory, DFL7160 and units)

Item Hose diameter

(mm) Length

(m) Item Hose diameter (mm)

Length (m)

1 Pressure-resistant hose

39 × 32 3 3 Duct hose 38 ID 5

2 Power cable - 3 4 Braided hose 22 × 15 5 5 Duct hose 38 ID 5 6 Braided hose 18 × 12 5

Fig. 8-6: Piping and Wiring Connection Parts (Vacuum Unit)

SSKA14R001 - 25 -

9. STANDARD ACCESSORIES

Standard Accessories

This machine contains the standard accessories in Table 9-1.

Table 9-1: Standard Accessories

Item Designation Specifications Qty. Part No. Glass 15 A 3 Glass 6.3 A 2

1 Fuse

Glass 4 A 2 2 Halogen lamp 7.5V, 50 W 2

101.6 mm ID, 3 m 1 3 Duct hose 32 mm ID, 3 m 1 100 mm 2 4 Duct cuffs 32 mm 2 100-110 mm 2 5 Hose clamp (wire) 32-35 mm 2

6 Axis metal fixture For transfer arm 1 set 7 Distilled water 0.5 L/bottle 4 8 USB flash drive - 1 9 Product information files ・Accuracy test certificate for fully

automatic laser saw ・Laser oscillator inspection sheet at

exit port ・Laser oscillator inspection sheet at

process point ・Admission criterion for initial

quality survey and the Results ・License certificate

(Windows XP, Info ZIP) And other.

1 set

HKAN00002

SSKA14R001 - 26 -

10. ELECTIVE ACCESSORIES

Elective Accessories

In order for customers to use this machine to meet the requested specifications, the elective accessories are prepared as standard. Customers are asked to choose one of the alphabet items from each category of accessories in Table 10-1.

Table 10-1: Elective Accessories

Item Specification Selection Specifications Qty. Part No. A For 300 mm Stainless steel grooved type 1 Standard B For 8" Stainless steel grooved type 1 YFKA01-01AC For 300 mm Porous type 1 YFKA01-02A

1 Chuck table selection

D For 8" Porous type 1 YFKA01-03AA For 2-12 frame Aluminum grooved type 1 Standard B For 2-8-1 frame Aluminum grooved type 1 YFKA02-01AC For 2-12 frame Porous type 1 YFKA02-02A

2 Spinner table selection

D For 2-8-1 frame Porous type 1 YFKA02-03AA For 2-12 frame - 1 Standard 3 Inspection cassette

selection B For 2-8-1 frame - 1 YFKA03-01A

A For standard cassette

For 300 mm 13-slot standard cassette and the 2-8 type 1 YFKA04-01A

4 Cassette stage selection

B For kinematic cassette

For 300 mm 13-/25-slot kinematic cassette 1 YFKA04-02A

A Japanese

・Moving parts ・Rotating spinner ・Hot surface ・Hazardous voltage ・Line voltage always present ・Laser warning label

1 set Standard

B English

・Moving parts ・Rotating spinner ・Hot surface ・Hazardous voltage ・Line voltage always present ・Laser warning label

1 set YFKA05-01A

C German YFKA05-03AD French YFKA05-04AE Italian YFKA05-05A

F Chinese (Simplified) YFKA05-06A

G Chinese (Traditional) YFKA05-07A

H Portuguese YFKA05-08A

5 Label selection

I Korean

・Moving parts ・Rotating spinner ・Hot surface ・Hazardous voltage ・Line voltage always present＊

・Laser warning label

1 set

YFKA05-09A

・For 5 [Label selection], the language of labels to be affixed on machine outer covers is selected. The labels to be affixed in the machine interior (marked with *) is written in either Japanese or English.

SSKA14R001 - 27 -

Elective Accessories (Continued) Item Specification Selection Manual Language Qty. Part No.

Safety Manual Installation Manual Operation Manual Data Maintenance Manual Maintenance Manual

A Japanese Set Manuals

Technical Reference

Japanese 1 set YFKA06-01A

Safety Manual Installation Manual Operation Manual Data Maintenance Manual Maintenance Manual

B English Set Manuals

Technical Reference

English 1 set YFKA06-02A

The manuals in the following languages are also available as optional accessories.

Safety Manual German Installation Manual English Operation Manual German Data Maintenance Manual English

Maintenance Manual English

6 Attached manual selection

C

German Set Manuals [optional accessory]

Technical Reference English

1 set YFKA19-17A

SSKA14R001 - 28 -

11. OPTIONAL ACCESSORIES

Optional Accessories List

The optional accessories are not included with shipment. If you select any of optional accessories, the item will be charged separately. For details, contact your nearest DISCO sales office or DISCO service office.

No. Item 1 Tape Frame 2 Cassette 3 Chuck Table (Spare) 4 Spinner Table (Spare) 5 Rinse Cleaning Specification 6 Maintenance Parts Kit 7 Tool Set 8 Lifting Jig Set 9 Axis Metal Fixture (Spare) 10 Machine Anchoring Bracket 11 Power Cables 12 Braided Hose Joint 13 Braided Hose 14 One-touch Joint 15 Polyurethane Tube 16 Pipe Band 17 Uninterruptible Power Supply (Internal Type) 18 Transformer Unit for Use Outside Japan (Internal Type) 19 Duct Fan Unit (Internal Type) 20 Spare Manuals 21 Export Packing Hardware 22 Spare Inspection Cassette 23 2/3" CCD Camera (Micro) 24 1.5× Microscope (Micro) 25 Ionizer 26 Laser Oscillator Selection 27 Handy Barcode Reader 28 EMO Guard Ring 29 USB flash drive (Spare) 30 Stylus Pen 31 Chiller Anchoring Bracket 32 Vacuum Unit 33 Vacuum Unit Anchoring Bracket 34 Selection of Circuit Breaker 35 Shielding Partitions 36 SECS Communication Software 37 Frame Protrusion Detection Function 38 Compliance with the Machinery Directive (CE Marking)

SSKA14R001 - 29 -

1. Tape Frame

When ordering, please confirm your frame type to your nearest DISCO sales office or DISCO service office.

2-12 type 2-8-1 type

2. Cassette

When ordering, please confirm your cassette type to your nearest DISCO sales office or DISCO service office. Please select a cassette suitable for the cassette stage selected in Elective Accessories [Cassette stage selection].

Specification Available cassette stage 300 mm, 13-slot standard cassette 2-8 type

Standard cassette

300 mm, 13-slot kinematic cassette 300 mm, 25-slot kinematic cassette

Kinematic cassette

3. Chuck Table (Spare)

The items listed below are spare chuck tables. Please select one of them if you need it as a spare in addition to the chuck table you have selected in the elective accessory category.

Specification Part No. Stainless steel grooved type for 300 mm YFKA07-01A Stainless steel grooved type for 8" YFKA01-01A Porous type for 300 mm YFKA01-02A Porous type for 8" YFKA01-03A

4. Spinner Table (Spare)

The items listed below are spare spinner tables. Please select one of them if you need it as a spare in addition to the spinner table you have selected in the elective accessory category.

Specification Part No. Aluminum grooved type for 2-12 frame YFKA08-01A Aluminum grooved type for 2-8-1 frame YFKA02-01A Porous type for 2-12 frame YFKA02-02A Porous type for 2-8-1 frame YFKA02-03A

5. Rinse Cleaning Specification

The pipe specification for when secondary cleaning liquid is used in the spinner cleaning process.

Part No. YFKA09-01A

SSKA14R001 - 30 -

6. Maintenance Parts Kit

Select the maintenance parts kit from the following 3 types: basic, recommended, and extended.

・These maintenance parts kits are provided for the standard specification machine. Depending on the user-specified specifications you requested, the contents of the maintenance parts kits may be unsuitable for your machine. For the maintenance parts kits for user-specified specifications, your nearest DISCO sales office or DISCO service office.

Maintenance Parts Kit Part No. Basic YFKA10-01A Recommended YFKA10-02A Extended YFKA10-03A

7. Tool Set

General Tool Set Part No. ・Plastic case ・Phillip screwdriver (Middle) ・Phillip screwdriver (Large) ・Flat blade screwdriver ・Allen wrench set

8-piece: 1.5, 2, 2.5, 3, 4, 5, 6, 8 mm ・Double-head wrench set

6-piece: 5.5 × 7, 7 × 8, 8 × 10, 10 × 14, 14 × 17, 17 × 19

YFKF46-01A

Advanced Tools Part No. Advanced tools set YFKF46-02A Oilstone

Arkansas stone 100 × 25 × 13 mm YFKF46-03A

Precision screwdriver set (6-piece) Phillips screwdriver (Large, Middle, Small) Flat blade screwdriver (1.8 × 0.3, 2.3 × 0.35, 3.0 × 0.4 mm)

YFKF46-04A

Adjustable wrench 200 mm YFKF46-05A

Dial gauge Dial gauge (Scale: 2 μm, Measurement range: 0.28 mm） Magnet stand

YFKF46-06A

Grease injector unit Grease injector unit Micro hose

YFKF46-07A

8. Lifting Jig Set

The lifting jig includes the tools necessary for lifting the machine when transporting and/or moving it.

Part No. YFJK10-01A

SSKA14R001 - 31 -

9. Axis Metal Fixture (Spare)

This is a metal fixture to fix the drive axis of the machine when transporting and/or moving it. When shipping from the factory, this is installed as standard. This item is for spare in case of loss.

Part No. YFKA11-01A

10. Machine Anchoring Bracket

This is a metal device to fix the machine to the installation floor to protect personnel/machine during disasters such as an earthquake. Always select this specification when it is necessary to comply with SEMI S2.

You can choose between 2 types of anchor metals: "Anchoring before installing the machine" which requires anchoring before installing the machine and "Anchoring after installing the machine" which allows anchoring after installing the machine.

・For installation of machine anchoring bracket, see Fig. 13-3: Installation Diagram (Optional Accessory).

Specification Part No. Anchoring before installing the machine YFKA12-01A Anchoring after installing the machine YFKA12-02A

11. Power Cables

The power cable length is the length from the machine outer cover.

Specification Part No. 3 m YFKA28-01A 5 m YFKA28-02A For 20A 7 m YFKA28-03A 3 m YFKA28-04A 5 m YFKA28-05A For 30A 7 m YFKA28-06A

12. Braided Hose Joint

This joint is used for connecting between the customer’s primary side and the machine utility port. Designate the necessary quantity.

・This specification is valid for the connection of braided hose. When polyurethane tube is selected, use one-touch joint.

Applicable Hose Diameter (mm) Part No. For 15 × 9 YFJT27-02A

13. Braided Hose

This hose connects the customer’s primary side and the machine utility port. Designate the necessary hose length and number of hoses.

・If this specification is selected, obtain necessary amount of braided hose joint. If polyurethane tube is selected, use one-touch joint.

Hose Diameter (mm) Part No. For 15 × 9 YFJT29-02A

SSKA14R001 - 32 -

14. One-touch Joint


・This specification is valid for the connection of polyurethane tube. When braided hose is selected, use braided hose joint.

Applicable Hose Diameter (mm) Part No. For 12 × 8 YFJT27-03A

15. Polyurethane Tube


・If this specification is selected, obtain necessary amount of one-touch joint. If braided hose is selected, use braided hose joint.

Application Tube Diameter (mm) Part No. ・Air IN For 12 × 8 (Transparent) YFJT29-03A ・Deionized water IN ・Rinse IN [optional accessory]

For 12 × 8 (Blue) YFJT29-04A

・Clean air IN For 12 × 8 (Black) YFJT29-05A

16. Pipe Band

Use this band when the hose nipple is used at the customer’s primary side.

Applicable Hose Diameter (mm) Part No. For 15 OD YFJT33-02A

17. Uninterruptible Power Supply (Internal Type)

<1> When the duration of the voltage drop of the power supply or power interruption is within 2 seconds, the uninterruptible power supply immediately provides backup power which has been stored in its battery.

<2> After the duration of <1>, uninterruptible power supply provides backup power for the machine to protect data, and then turn off the main power.

Machine dry mass: Approx. 50 kg

Specification Part No. Uninterruptible power supply YFKA16-01A Instruction manual (Japanese) YFKA16-03A Instruction manual (English) YFKA16-04A

SSKA14R001 - 33 -

18. Transformer for Use Outside Japan (Internal Type)

When the power supply voltage of the facility is out of 200-240 V AC, the transformer for use outside Japan transforms the voltage to the permissible one so that the power can be fed to the machine.

・When the vacuum unit is used or when the machine is overloaded by selecting some user-specified specifications, a 30 A transformer unit for use outside Japan becomes necessary. Contact your nearest DISCO sales office or DISCO service office.

Machine dry mass: Approx. 120 kg

Voltage Part No. 380-415 V AC (for Japan/CE/SEMI: for 20 A) YFKA17-01A

19. Duct Fan Unit (Internal Type)

If the duct capacity of the installation site is smaller than the value specified by DISCO (less than 5 m3), connecting this unit will enable efficient discharge of mist.

・In order to ensure performance of sucking debris around the process point, it is recommended to install this unit to the machine.

Part No. YFKA18-01A

20. Spare Manuals

These are the manuals sold separately in addition to the manuals supplied as standard accessories. There also is "Knack for Alignment," which explains the auto alignment.

・"Knack for Alignment" is explained using the operation screens and operational method of the DFD600 series.

The part numbers of spare manuals are as follows.

Japanese English German Safety Manual YFKA19-01A YFKA19-08A YFKA19-15A Installation Manual YFKA19-02A YFKA19-09A － Operation Manual YFKA19-03A YFKA19-10A YFKA19-16A Data Maintenance Manual YFKA19-04A YFKA19-11A － Maintenance Manual YFKA19-05A YFKA19-12A － Technical Reference YFKA19-06A YFKA19-13A － Knack for Alignment YFKA19-07A YFKA19-14A －

21. Export Packing Hardware

This is a machine fixation metal used for overseas transport.

Part No. YFKA20-01A

SSKA14R001 - 34 -

22. Spare Inspection Cassette

This is the cassette to be used in an inspection. As the standard accessories, one of the following is included. If you need different size or extra cassette for spare, select the applicable specification.

Specification Part No. For 2-12 frame YFKA24-01A For 2-8-1 frame YFKA24-02A

23. 2/3" CCD Camera (Micro)

This is the specification to decrease the magnification on the monitor so that the application can be checked in the case where the target size or street width to be used is 0.4 mm or more.

Item Specification Monitor magnification High magnification: Approx. 163× Alignment accuracy ± 0.002 mm Alignment available die size 0.4 mm or more

Part No. YFKA21-01A

24. 1.5× Microscope (Micro)

This is the specification for making the magnification of micro side microscope 1.5× to secure the field of view of 2.5 mm square. This is effective for the application when a large target is used which cannot be handled by the standard specification.

Item Specification Monitor magnification High magnification: Approx. 60× Alignment accuracy ± 0.005 mm Alignment available die size 1.0 mm or more

Part No. YFKA22-01A

25. Ionizer

The ionizer effectively removes electrostatic charged on a workpiece to avoid static electricity problem such as electrostatic discharge damage. The ionizer is installed on the transfer section to perform neutralization upon workpiece delivery.

・Periodical cleaning and replacement of the electrode probe are necessary to maintain the ability to remove electricity.

・Ionizer's ability to remove electricity may not be sufficient depending on the type of workpiece to be processed and the environments in which the machine is installed. If that is the case, contact your nearest DISCO sales office or DISCO service office.

Item Specification Cleavage/power voltage Pulse AC/± 5,500 V Ion generation method Colona discharge Ion balance ± 30 V Current consumption 450 mA or lower

Specification Part No. Ionizer (transfer section) YFKA25-01A

SSKA14R001 - 35 -

26. Laser Oscillator Selection

DISCO will select the most suitable laser oscillator for the customer's application. As for details, contact your nearest DISCO sales office or DISCO service office.

Type-B, C, D and F laser Oscillator model Semiconductor laser diode (LD) excitation Q-switch solid laser Oscillation formation Pulse Laser wavelength 355 nm

Specification Part No. Type-B YFKA23-01A Type-C YFKA23-02A Type-D YFKA23-03A Type-F YFKA23-04A

[Chiller unit (for type-B, C, D, and F laser)] This is the unit to supply cooling water to the laser oscillator.

・The chiller unit included with this machine uses the water circulating system. ・Distilled water is used as cooling water. ・The power to the chiller is supplied from and controlled by the DFL7160.

Caution: ・Deterioration of the water quality may damage the chiller unit and laser oscillator. To keep the

circulating water quality high, it is necessary to replace the circulating water periodically (60-day intervals are recommended).

・Do not use deionized water. Use of deionized water may damage the chiller unit and laser oscillator.

Item Specification Cooling performance 300 W Liquid inlet/outlet connection port

Exclusive fitting

Liquid temperature range 5 to 30°C Power requirements 200 V, 208 V, 220 V, 230 V, 240 V, single phase

Power supply is received from the machine’s main unit. Tap switching is set by DISCO based on the power supply voltage before shipment.

Usable liquid Distilled water Tank capacity Approx. 1.3 L Dimensions 447 (W) × 530 (D) × 410 (H) mm Mass (dry mass) Approx. 60 kg

SSKA14R001 - 36 -

27. Handy Barcode Reader

The handy barcode reader connected to the machine reads the barcode labels affixed on the cassette. Depending on the customer's needs, readout barcode information can be utilized or stored as useful device information.

・Data processing of scanned barcode information is a user-specified specification. Contact your nearest DISCO sales office or DISCO service office.

・Operation check is necessary to confirm that this specification detects bar codes correctly. Please prepare a sample barcode.

Barcode reader

[Handy barcode reader attached figure]

Front side Right side

Item Specification Scan width (as reference) 60 mm (when narrow bar width is 0.127 mm)

200 mm (when narrow bar width is 0.33 mm) Minimum resolution 0.076 mm Light source Red LED Symbol Code 39

Code 93 Code 128 NW-7

Interleaved 2 of 5 (ITF) MSI UPC EAN/JAN

Part No. YFKA26-01A

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28. EMO Guard Ring

The guard ring is installed around the EMO switch to prevent malfunction of the EMO switch.

・When selecting this specification, the EMO switches located at the front and rear of the machine will come with the guard rings. The EMO switch located inside the cover on the left side of the machine will not be equipped with the guard ring.

・The guard ring section is made of polyamide resin (PA6). It is not antistatic.

[View of the EMO guard ring]

Guard ring section ・Material: polyamide resin (PA6) ・Color: yellow

Part No.

YFKA27-01A

29. USB flash drive (Spare)

This is an external storage device to store data such as device data or log data. If you use other than a USB flash drive described below, DISCO shall not guarantee any machine operation.

Part No. YFKA31-01A

30. Stylus Pen

This is a pen to operate the touch panel. Compared to operating the touch panel with your fingers, the stylus pen allows you to perform delicate maneuvers and also prevents the panel from getting dirty.

・Do not use the stylus pen for any purposes other than the operation of the touch panel.

Part No. YFKA30-01A

31. Chiller Anchoring Bracket

This is a quakeproof metal fixture to fix the chiller unit to the installation floor. The chiller anchoring bracket is protecting operators and the machine against disasters such as an earthquake.

・For installation of the chiller unit, see Fig. 13-3: Installation Diagram (Optional Accessory).

Specification Part No. B-type chiller (for type-B, C, D, and F laser) YFKA34-01A A-type chiller (for standard) YFKA34-02A

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32. Vacuum Unit

This is a unit to suck particles around the process point under the full cutting specification.

・Secure a maintenance space around the vacuum unit. (100 mm in the right/left sides and 600 mm in the front/rear sides)

・When this unit is connected the DFL7160, the power requirement becomes 30 A. When selecting this unit, 30 A should be chosen as the specification of the following optional accessories: Circuit breaker and power cable

・Make sure to connect an exhaust hose from the unit to the plant facility exhaust system.

・For installation of the vacuum unit, refer to Fig. 8-6: Piping and Wiring Connection Parts (Vacuum Unit) and Fig. 13-3: Installation Diagram (Optional Accessory).

Maximum exhaust discharge rate

20 m3/h (50 Hz) 28 m3/h (60 Hz) ・When the pressure is -70 kPa (when the temperature of supplied water is

15°C; flow rate of supply water is 1 L/min; and atmospheric pressure is 101325 Pa)

Ultimate pressure -90 kPa (when the temperature of supplied water is 15°C; flow rate of supply water is 1 L/min; and atmospheric pressure is 101325 Pa)

Supplied water Tap water or general industrial water Supplied water pressure 0.05 to 0.45 MPa

Fluctuation range: ± 0.01 MPa

Supplied water temperature

10～30°C

Supplied water flow ・1.0 L/min (when the temperature of supplied water is between 10°C and 22°C)

・1.5 L/min (when the temperature of supplied water is higher than 22°C but equal to or lower than 25°C)

・2.0 L/min (when the temperature of supplied water is higher than 25°C but equal to or lower than 30°C )

Dimensions 242 (W) × 765 (D) × 500 (H) mm (excluding the protrusions) Mass Approx. 73 kg (When it is dry)

Approx. 84 kg (during operation)

・To prevent the machine parts/hoses from corroding/clogging, the city water or tap water to be used should meet the following water quality criteria. If water contains any dirt, install a filter whose mesh size is 30 μm or less.

pH 6.5 to 7.5 (when water temperature is 25°C) Electricity conductivity 300 μS/cm or less Total zinc 1.0 ppm or less Chlorine ion 1.5 ppm or less Total hardness 200 ppm or less Sulfate ion 50 ppm or less Sulfide ion 0 Total iron 1.0 ppm or less Ammonium ion 1.0 ppm or less M alkalinity 100 ppm or less Silica 50 ppm or less

Specification Part No. Vacuum unit YFKA33-01A Instruction manual (Japanese) YFKA33-02A Instruction manual (English) YFKA33-03A

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33. Vacuum Unit Anchoring Bracket

This is a quakeproof metal fixture to fix the vacuum unit to the installation floor. The vacuum unit anchoring bracket will protect operators and the machine against disasters such as an earthquake.

・For installation of the vacuum unit, see Fig. 13-3: Installation Diagram (Optional Accessory).

Part No. YFKA35-01A

34. Selection of Circuit Breaker

This is a circuit breaker for 30 A. When connecting the vacuum unit to the machine, this breaker should be selected.

・When the vacuum unit is selected or when the machine is overloaded by selecting some user-specified specifications, the specification of the circuit breaker should be changed from 20 A to 30 A.

Specification Part No. For 30 A YFKA29-01A

35. Shielding Partitions

The shielding partitions prevent laser lights from leaking out of the working area while performing maintenance or adjustment work. They are installed around the machine during the work.

Reference: Weight of the shielding partition and necessary space to store it

・Weight: Approx. 200 kg ・Necessary space: Approx. 900 (W) × 1,600 (D) mm

Part No. YFKA36-01A

36. SECS Communication Software

This specification installs SECS/GEM-compliant communication software on the machine.

This is a specification to connect the host computer with the machine through a network so as to collect and control data of the machine.

・Only the machine (client) side software is included in this specification. The host side system is not included.

・If you wish any of the following services, they are available as user-specified specifications. Contact your nearest DISCO sales office or DISCO service office..

- Support for system construction, connection tests, etc. - Changes to communication specification (addition of commands, etc.).

・The communication specification can be downloaded from the DISCO’s web site. A password is required for downloading.

Part No. YFKA37-01A

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37. Frame Protrusion Detection Function

When the elevator is in operation, a sensor monitors if the frame protruding from the cassette. If the sensor detects the protruded frame, stops the operation and an error is issued.

Specification Part No. For type-A laser YFKA39-01A For type-B, C, D, and F laser YFKA39-02A

38. Compliance with the Machinery Directive (CE Marking)

Selecting this specification makes the machine conform to the EN ISO13849-1:2008. Also, the CE marking will be affixed on the machine and the Declaration of Conformity will be packaged with it.

If the machine is delivered to a CE area, be sure to select this specification.

If the machine is made conform to the EN ISO13849-1:2008, the main changes in operation and maintenance work will be as follows:

- Interlocks will be added to any covers having hazards inside them but no interlocks.

- Specification of the power switch

- Indexing operation in maintenance mode

・The machines with no CE marking affixed guarantee the same safety as that of the machines which conform to the harmonised standard EN954-1:1997 for the Machinery Directive, which expired on December 31, 2011.

Part No. YFKA38-01A

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12. WARRANTY

Warranty Coverage

DISCO CORPORATION (hereinafter referred to as "DISCO") repairs any failure free of charge within the warranty period, in case of any failure caused by DISCO's liability under normal operation. However, we follow the condition if any condition between DISCO and customers is provided. Also, warranty period will not be applied to the following cases.

・Any case caused by operation of the machine in erroneous environment, condition, or methods.

・Any case replacement of lifetime parts and consumables is required due to exhaustion, abrasion, deterioration, etc.

・Any damage derived from transportation or transfer of the machine by customers

・Any case the machine is repaired or modified by any other than DISCO engineers

・Any failure caused by application of parts other than genuine DISCO brand

・Any failure caused by machine, other than DISCO designated products, connected to DISCO products

・Any secondary damage caused by insufficient measures for waterproofing and drainage on the floor where the machine is to be installed

・Any failure caused by external factors, that DISCO are not responsible, such as fires, earthquakes, smoke hazards, gas hazards, power-voltage abnormality, pollution (air, etc.) and other act of providence

・Any case triggered by causes that were unforeseeable from perspective of science and technology standards at the time of shipment from DISCO side

・Any case with evidence of that the package of the specific sections of the laser (laser oscillator, laser optical section, laser specific consumable parts, etc.) are unsealed or of that any contact was made deliberately to the sealed sections.

In addition, any problem or failure resulting from the customer’s use of accessories, which are not genuine DISCO standard accessories, elective accessories, or optional accessories will be repaired at the customers' expense even within the warranty period.

Warranty Period for Machine

Warranty period for component parts of the machine or products included with shipment is as follows:

If the parts are replaced free of charge during the warranty period, the warranty period of the parts before the replacement is applied. No extension is provided for the warranty period of the parts after the replacement.

Please refer to the next page for the warranty period for parts purchased individually.

Parts Type Warranty Period

Laser oscillator 365 days from the invoice date

Electrical parts having contact points 180 days from the day of receiving inspection executed

Consumable parts Not covered

Parts other than the above 365 days from the day of receiving inspection executed

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Warranty Coverage (Continued)

Warranty Period for Parts Purchased Individually

Warranty period for parts purchased individually is specified below. The warranty period of the parts purchased individually will be applied only to the parts purchased.

■Warranty Period for Laser Oscillator Purchased Individually

Category Warranty Period

New parts 365 days from the invoice date

Refurbished parts (Type-A, B, C, D, and F laser)

Refurbished parts are: the used parts which are repaired and adjusted to the same quality as that of new parts. When customers prefer refurbished parts, returning the oscillator to DISCO side is required for the repair and adjustment.

365 days from the invoice date

■Warranty Period for Parts Purchased Individually Other than Laser Oscillator

Category Warranty Period

New parts 90 days from the delivery date

Repaired parts Repaired parts are: the parts which are returned to customers after repaired at DISCO side

90 days from the delivery date

Minimum Retention Period of Maintenance Functional Parts

DISCO, in principle, retains the maintenance functional parts required for repair or modification for at least 7 years after production of the maintenance functional parts is stopped.

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13. ATTACHED DRAWINGS

Overall View

(Unit: mm)Front side Right side

Top side

Fig. 13-1: Overall View

The

mark indicates the center of gravity position of the standard machine. The center of gravity position may vary from the above for machines equipped with optional accessories or user-specified specifications.

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Installation Diagram (Standard)

・In installation site selection, ease of operation and maintenance must be taken into consideration. ・Avoid places where the temperature greatly varies. ・For the height to install the machine, 510 mm or more is required for the maintenance area from the

upper surface of the machine to the ceiling (2,310 mm or more from the floor). ・The maintenance area is described with the recommended values that are based on SEMI S8. ・The chiller unit (A-type) is fixed to the machine main body with a bracket. ・Shielding partitions are installed to protect laser lights from leaking out of the working area while

operating the machine under the class 4 environment. It is recommended to purchase shielding partitions at the same time when purchasing the DFL7160.

(Unit: mm) Fig. 13-2: Installation Diagram (Standard)

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Installation Diagram (Optional Accessory)

・The chiller shown in Fig. 13-3: Installation Diagram (Optional Accessory) is for laser type-B, C, D and F.

・For the installation locations of machine anchoring bracket [optional accessory], refer to the figure below. The customer is requested to arrange taps on the floor and the 8 bolts (M12).

(Unit: mm) Fig. 13-3: Installation Diagram (Optional Accessory)

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Piping Connection Diagrams (Rear Side)

(Unit: mm)

1

2

3

4

5

6

Fig. 13-4: Piping Connection Diagram

No. Name Connection Diameter 1 Main duct* Duct hose 101.6 mm ID 2 Main drain* Duct hose 32 mm ID 3 Air IN Rc1/4 4 Clean air IN Rc1/4 5 Deionized water IN Rc1/4 6 Rinse water IN [optional accessory] Rc1/4

* Discharges dirty water and mist containing cutting material particles.

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14. NOISE DATA

Measurement Conditions

Test Procedure SEMI S2-0200 Sect. 27 Test Instrument RION NA-20 Machine Testing Condition Full auto mode Calibration Data 0 dB (A) Noise Level (Background) 45 dB (A)

Measurement Points

Layout Drawing Measurement points: 1-meter distance from the machine and 1.5 meter height from the floor.

(Unit: mm)

Noise Level

The values below are the measurement data using the standard specification machine. If any optional accessories or user-specified specification is installed, there is a case where the value is different.

Measurement Points Noise Level at Sound Source dB (A) A 63 B 66 C 63 D 62

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