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Rapid optimisation techniques for thin-film materials and devices Robert Treharne Functional Thin Films 16 th October, Coventry @robtreharne slideshare.net/RobertTreharne

for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

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Page 1: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Rapid optimisation techniquesfor thin-film materials and devices

Robert TreharneFunctional Thin Films16th October, Coventry

@robtreharne

slideshare.net/RobertTreharne

Page 2: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Rapid optimisation techniquesfor thin-film materials and devices

Robert TreharneFunctional Thin Films16th October, Coventry

@robtreharne

slideshare.net/RobertTreharne

Page 3: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Rapid optimisation techniquesfor thin-film materials and devices

Robert TreharneFunctional Thin Films16th October, Coventry

@robtreharne

slideshare.net/RobertTreharne

Page 5: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Outline

1) Capabilities

2) What I mean by “Combinatorial”

3) Case Study: Transparent Conductors

4) Other Applications

5) Other cool stuff

Page 6: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

AJA Phase II-JMulti-source RF sputtering systemZnOSnO2TiO2SiO2Al2O3

Ta2O5Nb2O5V2O5V2O3ZrO2

ZnSCdTeZnTeCdSeZnSe

CdSSb2Te3As2Te3

GeZnNbTeSn

AgTiAlCuBi

MgO

Page 7: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Optical Characterisation● UV-VIS-IR (250 – 2000 nm): Shimadzu

● Variable Angle Ellipsometry: Woollam

● Both units have scanning capabilities

Page 8: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Electrical Characterisation● Hall Effect – carrier conc & mobility

● 4PP – Sheet resistance – Scanning!

Page 9: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Shhh! Don't say the C-word“Combinatorial” is sometimes a code term used to describe uncontrolled non-uniform deposition.

Page 10: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Controlled Non-Uniformity● Profile from each gun described by 2D gaussian● Excellent control over deposition parameters● High run-to-run reproducibility● Can predict multi-gun profiles

Page 11: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Case Study: Transparent Conductors● Essential materials for PV and consumer electronics● Combinatorial doping study: Si doped ZnO● Sample hundreds of compositions in a single sample● Mapping opto-electronic properties vs dopant composition● Extrapolation!

Page 12: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Can do this in 1 day(that's a big deal)

Can also extract some fundamental physics

Page 13: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Going deep!● Effective Mass – dependent on dopant conc.● Transport mechanisms: Scattering – new physical models!● Electronic structure: Shape of conduction band● ALL WITH ONE CONSISTENT SAMPLE!

Page 14: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Further ApplicationsOptimising Thin-Film PV CdTe, CZTS, perovskites

Transparent Electronics ZnO TFTs

Page 15: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Example: Cd(1-x)ZnxS layers for CdTe TFPV● Can investigate x = 0.1 – 0.7 in one device● Mapping performance with respect to x● Optimum x~0.6 identified● Improvement in Voc identified● Highly consistent data sets

Page 16: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe
Page 18: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Other StuffFilm S.T.A.R Thin-film optical database Multi-layer modelling Currently developing public webapp

Page 19: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Perovskite!● Ellipsometry of perovskite film● n and k extracted● Multi-layer model to determine

optimum thickness for device

Page 21: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

EPSRC CDT in PhotovoltaicsStarts in November! 8m investment£ 7 University partners 65 PhD students Publically available resources

Page 22: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Rapid optimisation techniquesfor thin-film materials and devices

Robert TreharneFunctional Thin Films16th October, Coventry

@robtreharne

slideshare.net/RobertTreharne