February 2010 L. Wilson 1

2010 UpdatePreparations and Formats

• NEW Look for the ITRS• The ITRS is now all electronic

– ALL Tables will stay in Excel files :

• Focus ITWGS files

• CrossCut ITWGs files

• ORTC file

– Links to the 2009 ITRS chapters files

– Links to other chapter files

– Text for chapters will link to the tables’ files

– Figures will stay in the chapters.

• WEBSITE– ITRS website working group login is

“2010 ITRS”, “roadmap”. These are case sensitive.

• ITRS Media Partner – Future Fab International

• NEW Look for the ITRS• The ITRS is now all electronic

– ALL Tables will stay in Excel files :

• Focus ITWGS files

• CrossCut ITWGs files

• ORTC file

– Links to the 2009 ITRS chapters files

– Links to other chapter files

– Text for chapters will link to the tables’ files

– Figures will stay in the chapters.

• WEBSITE– ITRS website working group login is

“2010 ITRS”, “roadmap”. These are case sensitive.

• ITRS Media Partner – Future Fab International

NEW LOOK : ELECTRONIC ROADMAPNEW LOOK : ELECTRONIC ROADMAP

February 2010 L. Wilson 3

Forums sites for ITWGs are being built– Hosted by the SRC– Download and upload files– Post discussions– Receive email notifications when your

team posts files or messages.

Required contact information for ITWG team members [domestic and international members]:– Name– Affiliation– Email– City– State/Province– Zip– Country

ITWG chairs: Please send contact information to Linda Wilson

ITRS WORKING GROUPS’FORUMS SITESITRS WORKING GROUPS’FORUMS SITES

February 2010 L. Wilson 4

► 2010 Update Guidelines

► Tables only are updated

► Potential solutions updated if corrections are needed.

► Maintain the TIMEFRAME as with the 2009 ITRS

► WAS-IS formatting is OPTIONAL

► 2010 Update Guidelines

► Tables only are updated

► Potential solutions updated if corrections are needed.

► Maintain the TIMEFRAME as with the 2009 ITRS

► WAS-IS formatting is OPTIONAL

2010 UPDATE KICK-OFF2010 UPDATE KICK-OFF

February 2010 L. Wilson 5

► Difficult Challenges Table Guidelines

► Near-term ( ≥16nm)

► Long-term (<16nm)

► TEN Total Challenges ONLY

Target the Top 5 most difficult challenges for near-term ( ≥16nm) and the Top 5 most difficult challenges for long-term (<16nm)

► Difficult Challenges Table Guidelines

► Near-term ( ≥16nm)

► Long-term (<16nm)

► TEN Total Challenges ONLY

Target the Top 5 most difficult challenges for near-term ( ≥16nm) and the Top 5 most difficult challenges for long-term (<16nm)

2010 UPDATE KICK OFF—DIFFICULT CHALLENGES TABLES2010 UPDATE KICK OFF—DIFFICULT CHALLENGES TABLES

February 2010 L. Wilson 6

► Table files are available as starting point for update – Sent to all ITWG Chairs and posted online.

► Timeframe REMAINS AS 2009—2024

► Numbering for Tables, Figures, and Citations are self-consistent within each chapter. ► Tables and Figures keep the assigned prefix for

each chapter, e.g., FEP tables start at FEP1; Lithography tables start at LITH1

2010 UPDATE KICK OFF—TECHNOLOGY REQUIREMENTS TABLES2010 UPDATE KICK OFF—TECHNOLOGY REQUIREMENTS TABLES

February 2010 L. Wilson 7

► Technology Requirements Guidelines:

► Yellow cannot exist in next 1 year (2009)

► Red cannot exist in next 3 years (2009, 2010, 2011**)

** An ITWG can have an exception approved through the IRC:

“Solution NOT known, but does not prevent production manufacturing.”

Manufacturable solutions exist, and are being optimized

Manufacturable solutions are known

Interim solutions are known Manufacturable solutions are NOT known

Manufacturable solutions exist, and are being optimized

Manufacturable solutions are known

Interim solutions are known Manufacturable solutions are NOT known

2010 UPDATE KICK OFF—TECHNOLOGY REQUIREMENTS TABLES2010 UPDATE KICK OFF—TECHNOLOGY REQUIREMENTS TABLES

February 2010 L. Wilson 8

Potential Solutions Guidelines

► Potential Solutions are NOT UPDATED unless to correct

► Review solutions for assessed needs– do not select only one solution; provide for innovative answers

► Template for Potential Solution is provided as an EXCEL worksheet with the timeframe 2009-2024.

Research Required

Development Underway

Qualification / Pre-Production

Continuous Improvement

2010 UPDATE KICK OFF—POTENTIAL SOLUTIONS CHARTS2010 UPDATE KICK OFF—POTENTIAL SOLUTIONS CHARTS

February 2010 L. Wilson 9

TABLES TEMPLATESSent to each ITWG chair and ONLINE at the

Working Group siteThe EXCEL files for ALL 2009 tables will be

used as a starting point. – ALL tables and notes will be in the excel

file. [even text tables]CHART TEMPLATES• A EXCEL template will be provided for

Potential Solutions figures in case these need to be updated

TABLES TEMPLATESSent to each ITWG chair and ONLINE at the

Working Group siteThe EXCEL files for ALL 2009 tables will be

used as a starting point. – ALL tables and notes will be in the excel

file. [even text tables]CHART TEMPLATES• A EXCEL template will be provided for

Potential Solutions figures in case these need to be updated

2010 UPDATE KICK OFF— AVAILABLE TEMPLATES2010 UPDATE KICK OFF— AVAILABLE TEMPLATES

February 2010 L. Wilson 10

2010 ITRS Events—Mark your Calendar !

SPRING 2010• Host – ESIA• ---DATES

– April 8-9, 2010 ITRS ITWG/IRC Spring Workshop• ---LOCATION

– Casa Don Guanella

SUMMER 2010• Host -- SIA• ---DATES

– July 11-13, 2010 ITRS ITWG/IRC Summer Workshop – July 14, 2010 Summer Public Conference

• --- LOCATION– Marriott Hotel, San Francisco

WINTER 2010 • Hosts – JEITA and SEMI Japan• ---DATES

– December 1-2, 2010 ITRS ITWG/IRC Winter Workshop• LOCATION

– Tsukuba International Congress Center, “EPOCHAL TSUKUBA”

– December 3, 2010 ITRS Winter Public Conference• LOCATION

– “MAKUHARI-Messe”

SPRING 2010• Host – ESIA• ---DATES

– April 8-9, 2010 ITRS ITWG/IRC Spring Workshop• ---LOCATION

– Casa Don Guanella

SUMMER 2010• Host -- SIA• ---DATES

– July 11-13, 2010 ITRS ITWG/IRC Summer Workshop – July 14, 2010 Summer Public Conference

• --- LOCATION– Marriott Hotel, San Francisco

WINTER 2010 • Hosts – JEITA and SEMI Japan• ---DATES

– December 1-2, 2010 ITRS ITWG/IRC Winter Workshop• LOCATION

– Tsukuba International Congress Center, “EPOCHAL TSUKUBA”

– December 3, 2010 ITRS Winter Public Conference• LOCATION

– “MAKUHARI-Messe”

February 2010 L. Wilson 11

The ITRS teams thank the following for their support for the ITRS :

FRIENDS of the ITRSFRIENDS of the ITRS