Emulsion and Hydrothermal

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    Synthesis ofNanoparticles

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    Hydrothermal/Solvothermal SynthesisIn a sealed vessel (bomb, autoclave, etc.), solvents can be broughtto temperatures well above their boiling points by the increase in

    autogenous pressures resulting from heating. Performing achemical reaction under such conditions is referred to assolvothermal processing or, in the case of water as solvent,hydrothermal processing.

    Yu, J. C. et al. J. Solid State Chem. 2005 , 178, 321; Cryst. Growth Des. 2007 , 7 , 1444

    TiO2 ZnIn 2S4

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    Microwave-Assisted Synthesis

    Microwaves are a form of electromagnetic energywith frequencies in the range of 300 MHz to 300

    GHz. The commonly used frequency is 2.45G Hz.

    Interactions between materials and microwavesare based on two specific mechanisms: dipoleinteractions and ionic conduction. Bothmechanisms require effective coupling betweencomponents of the target material and the rapidlyoscillating electrical field of the microwaves.

    Dipole interactions occur with polar molecules. Thepolar ends of a molecule tend to re-orientatethemselves and oscillate in step with the oscillatingelectrical field of the microwaves. Heat isgenerated by molecular collision and friction.Generally, the more polar a molecule, the moreeffectively it will couple with the microwave field.

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    Conventional Heating by Conduction

    conductive heat

    heating byconvection currents

    slow and energyinefficient process

    The temperature on the outside surface is

    in excess of the boiling point of liquid

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    Heating by Microwave Irradiation

    inverted temperature gradients !

    Solvent/reagentabsorbs MW energy

    Vessel walltransparent to MW

    Direct in-core heating

    Instant on-off

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    Microwave (MW) rapid heating hasreceived considerable attention as a newpromising method for the one-potsynthesis of metallic nanostructures insolutions.

    In this concept, advantageous applicationof this method has been demonstrated byusing some typical examples for thepreparation of Ag, Au, Pt, and AuPdnanostructures. Not only sphericalnanoparticles, but also single crystalline

    polygonal plates, sheets, rods, wires,tubes, and dendrites were preparedwithin a few minutes under MW heating .Morphologies and sizes of nanostructurescould be controlled by changing variousexperimental parameters, such as theconcentration of metallic salt andsurfactant polymer, the chain length ofthe surfactant polymer, the solvent, andthe reaction temperature. In general,nanostructures with smaller sizes,narrower size distributions, and a higherdegree of crystallization were obtained

    under MW heating than those inconventional oil-bath heating.

    Tsuji M. et al.

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    Example: Microwave-assisted synthesis of ZnO nanoparticles

    OH 2

    ZnH2O

    OAcOAc

    O

    ZnO

    O

    O

    ZnO

    OODEG

    Microwave ( )Nucleation Aggregation

    Cluster NanocrystalCrystal structure

    Schematic representation and transmission electron microscope (TEM) imagesof ZnO-cluster nanoparticles prepared by microwave irradiation

    Yu, J. C. et at., Adv. Mater . 2008, in press.

    1 mm 100 nm

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    Sonochemical Synthesis

    Ultrasound irradiation causes acoustic cavitation -- the formation,growth and implosive collapse of the bubbles in a liquid

    The implosive collapse of the bubbles generates a localized hot

    spots of extremely high temperature (~5000K) and pressure(~20MPa).

    The sonochemical method is advantageous as it is nonhazardous,rapid in reaction rate, and produces very small metalparticles.

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    Examples: sonochemical synthesis of mesoporous TiO 2 particles

    Mesoporous TiO 2

    20 kHz sonochemical processor

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    Formation of mesoporous TiO 2 by sonication

    UIA

    TIP

    Hydrolysis/Condensation

    ))))

    UIA: Ultrasound Induced Agglomeration

    UIA

    Titanium Oxide Sol Particle

    UIAAcetic acid modified TIP

    Hydrolysis/

    Condensation))))

    TIP : Titanium isopropoxide

    Yu J. C. et al., Chem. Commun. 2003 , 2078.

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    MicroemulsionMicroemulsions are clear, stable, isotropic liquidmixtures of oil, water and surfactant, frequently in

    combination with a cosurfactant.The aqueous phase may contain salt(s) and/or otheringredients, and the "oil" may actually be a complexmixture of different hydrocarbons and olefins.

    The two basic types of microemulsions are direct (oildispersed in water, o/w) and reversed (water dispersedin oil, w/o).

    Nanosized CdS-sensitized TiO 2 crystalline photocatalyst prepared by microemulsion.(Yu, J. C. et al. Chem. Commun . 2003 , 1552.)

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    What happens at the surfaces?

    The physical properties of molecules at the interface or surface are different

    than those of the molecules in bulk.

    Surface molecules have surface free energy (unbalanced)

    Bulk molecules very stable

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    Interface

    When two phases meet, the boundary between them is calledan interface.

    Surface or interfacial tension can be defined as the force

    needed to oppose the natural pull of the molecules in the

    surface or interface to minimize the size of that surface or

    interface.

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    Cohesion and Adhesion forces

    Cohesion Force hold two similar molecules together

    Adhesion Force hold two different molecules together

    The difference in strength between cohesive forces and adhesive forces

    determine the behavior of a liquid in contact with a solid surface.

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    The cohesive (strong intermolecular attractive forces)

    forces between liquid molecules are responsible for

    the phenomenon known as surface tension.

    The surface tension of a liquid results from an

    imbalance of intermolecular attractive forces,

    the cohesive forces between molecules.

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    Water does not wet waxed surfaces because the cohesive

    forces within the drops are stronger than the adhesive forces

    between the drops and the wax.

    Water wets glass and spreads out on it because the adhesive

    forces between the liquid and the glass are stronger than the

    cohesive forces within the water.

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    Different Interfacial phases

    Phases in contactExamples fromcommon use

    Gas - Gas No interface possible

    Gas - liquidSurface of your drink (foams

    and aerosels)

    Gas - SolidTop of your desk ( tabletsand capsules)

    Liquid - liquidOil and Vinegar Saladdressing (emulsion)

    Liquid - solid Water on lotus leaf

    Solid - SolidPowder particle are incontact

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    Contact Angle

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    Factors affecting surface tension

    The surface energy may altered by the addition

    of solutes that migrate to the surface and

    modify the molecular forces there.

    The surface tension decrease with increase

    temperature

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    Surfactants

    A surfactant is briefly defined as a material that can greatly reduce the

    surface tension of water when used in very low concentrations.

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    Introduction to surfactants

    The name surfactant refers to molecules that are surface -active, usually in

    aqueous solutions. Surface-active molecules adsorb strongly at the water air

    interface and, because of this, they substantially reduce its surface energy.

    Surfactant molecules are amphiphilic , that is, they have both hydrophi l ic and

    hydrophobic moieties , and it is for this reason that they adsorb so effectively at

    interfaces.

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    How it works? Surfactants reduce the surface tension of water by adsorbing at the liquid-

    gas interface. They also reduce the interfacial tension between oil and water by adsorbing

    at the liquid-liquid interface.

    Surfactants may act as: detergents, wetting agents, emulsifiers, foamingagents, and dispersants.

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    Surface activity

    Materials such as short-chain fatty acids and alcohols are soluble in both water and

    oil (e.g. paraffin hydrocarbon) solvents. The hydrocarbon part of the molecule is

    responsible for its solubility in oil, while the polar COOH or -OH group has

    sufficient affinity to water to drag a short-length non-polar hydrocarbon chain intoaqueous solution with it.

    If these molecules become located at an air-water or an oil-water interface, they are

    able to locate their hydrophilic head groups in the aqueous phase and allow the

    lipophilic hydrocarbon chains to escape into the vapour or oil phase

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    Adsorption of surface-active molecules as an orientated monolayerat air-water and oil-water interfaces.

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    The strong adsorption of such materials at surfaces or interfaces in the form of an

    orientated monomolecular layer (or monolayer) is termed sur face activity .

    Surface-active materials (or surfactants) consist of molecules containing both polar and

    non-polar parts (amphiphilic).

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    Classification

    Dependent on the nature of the hydrophilic part the surfactants are

    classified as an-ionic, non-ionic, cat-ionic or amphoteric.

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    Nonionic surfactants

    A surfactant with a non-charged hydrophilic part, e.g. ethoxylate, is non-

    ionic.

    These substances are well suited for cleaning purposes and are not sensitive

    to water hardness.

    They have a wide application within cleaning detergents and include

    groups like fatty alcohol polyglycosides, alcohol ethoxylates etc.

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    Cationic surfactants

    For this category the hydrophilic part is positively charged e.g. with a

    quaternary ammonium ion.

    This group has no wash activity effect, but fastens to the surfaces where

    they might provide softening, antistatic, soil repellent, anti bacterial or

    corrosion inhibitory effects.

    The most typical applications are for softeners and antistatics.

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    Chemical Vapor

    Deposition (CVD)

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    Family of CVD Technologies

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    What is CVD? Chemical vapor deposition (CVD) is a

    chemical process used to produce high-purity, high-performance solid materials. Theprocess is often used in the semiconductorindustry to produce thin films . In a typicalCVD process, the wafer (substrate) isexposed to one or more volatile precursors ,which react and/or decompose on the

    substrate surface to produce the desireddeposit. Frequently, volatile by-products arealso produced, which are removed by gasflow through the reaction chamber.

    http://en.wikipedia.org/wiki/Chemical_processhttp://en.wikipedia.org/wiki/Semiconductor_industryhttp://en.wikipedia.org/wiki/Semiconductor_industryhttp://en.wikipedia.org/wiki/Thin_filmhttp://en.wikipedia.org/wiki/Wafer_(electronics)http://en.wikipedia.org/wiki/Volatility_(chemistry)http://localhost/var/www/apps/conversion/tmp/scratch_10//en.wiktionary.org/wiki/precursorhttp://en.wikipedia.org/wiki/Chemical_reactionhttp://en.wikipedia.org/wiki/Chemical_decompositionhttp://en.wikipedia.org/wiki/By-producthttp://en.wikipedia.org/wiki/By-producthttp://en.wikipedia.org/wiki/By-producthttp://en.wikipedia.org/wiki/By-producthttp://en.wikipedia.org/wiki/Chemical_decompositionhttp://en.wikipedia.org/wiki/Chemical_reactionhttp://localhost/var/www/apps/conversion/tmp/scratch_10//en.wiktionary.org/wiki/precursorhttp://en.wikipedia.org/wiki/Volatility_(chemistry)http://en.wikipedia.org/wiki/Wafer_(electronics)http://en.wikipedia.org/wiki/Thin_filmhttp://en.wikipedia.org/wiki/Thin_filmhttp://en.wikipedia.org/wiki/Thin_filmhttp://en.wikipedia.org/wiki/Semiconductor_industryhttp://en.wikipedia.org/wiki/Semiconductor_industryhttp://en.wikipedia.org/wiki/Semiconductor_industryhttp://en.wikipedia.org/wiki/Chemical_processhttp://en.wikipedia.org/wiki/Chemical_processhttp://en.wikipedia.org/wiki/Chemical_process
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    CVD Process Applications Microfabrication processes widely use CVD

    to deposit materials in various forms,including: monocrystalline , polycrystalline ,amorphous , and epitaxial . These materialsinclude: silicon , carbon fiber , carbonnanofibers , filaments , carbon nanotubes ,SiO 2, silicon-germanium , tungsten , siliconcarbide , silicon nitride , silicon oxynitride ,

    titanium nitride , and various high-k dielectrics .The CVD process is also used to producesynthetic diamonds .

    http://en.wikipedia.org/wiki/Microfabricationhttp://en.wikipedia.org/wiki/Monocrystallinehttp://en.wikipedia.org/wiki/Polycrystallinehttp://en.wikipedia.org/wiki/Amorphoushttp://en.wikipedia.org/wiki/Epitaxyhttp://en.wikipedia.org/wiki/Siliconhttp://en.wikipedia.org/wiki/Carbon_(fiber)http://en.wikipedia.org/wiki/Carbon_nanofibershttp://en.wikipedia.org/wiki/Carbon_nanofibershttp://en.wikipedia.org/wiki/Electrical_filamenthttp://en.wikipedia.org/wiki/Carbon_nanotubehttp://en.wikipedia.org/wiki/Silicon_dioxidehttp://en.wikipedia.org/wiki/Silicon_carbidehttp://en.wikipedia.org/wiki/Silicon-germaniumhttp://en.wikipedia.org/wiki/Tungstenhttp://en.wikipedia.org/wiki/Silicon_carbidehttp://en.wikipedia.org/wiki/Silicon_carbidehttp://en.wikipedia.org/wiki/Silicon_nitridehttp://en.wikipedia.org/wiki/Silicon_oxynitridehttp://en.wikipedia.org/wiki/Titanium_nitridehttp://en.wikipedia.org/wiki/High-k_dielectrichttp://en.wikipedia.org/wiki/Synthetic_diamondhttp://en.wikipedia.org/wiki/Synthetic_diamondhttp://en.wikipedia.org/wiki/Synthetic_diamondhttp://en.wikipedia.org/wiki/Synthetic_diamondhttp://en.wikipedia.org/wiki/High-k_dielectrichttp://en.wikipedia.org/wiki/High-k_dielectrichttp://en.wikipedia.org/wiki/High-k_dielectrichttp://en.wikipedia.org/wiki/High-k_dielectrichttp://en.wikipedia.org/wiki/High-k_dielectrichttp://en.wikipedia.org/wiki/Titanium_nitridehttp://en.wikipedia.org/wiki/Titanium_nitridehttp://en.wikipedia.org/wiki/Titanium_nitridehttp://en.wikipedia.org/wiki/Silicon_oxynitridehttp://en.wikipedia.org/wiki/Silicon_oxynitridehttp://en.wikipedia.org/wiki/Silicon_oxynitridehttp://en.wikipedia.org/wiki/Silicon_nitridehttp://en.wikipedia.org/wiki/Silicon_nitridehttp://en.wikipedia.org/wiki/Silicon_nitridehttp://en.wikipedia.org/wiki/Silicon_carbidehttp://en.wikipedia.org/wiki/Silicon_carbidehttp://en.wikipedia.org/wiki/Silicon_carbidehttp://en.wikipedia.org/wiki/Tungstenhttp://en.wikipedia.org/wiki/Silicon-germaniumhttp://en.wikipedia.org/wiki/Silicon-germaniumhttp://en.wikipedia.org/wiki/Silicon-germaniumhttp://en.wikipedia.org/wiki/Silicon_dioxidehttp://en.wikipedia.org/wiki/Silicon_dioxidehttp://en.wikipedia.org/wiki/Carbon_nanotubehttp://en.wikipedia.org/wiki/Carbon_nanotubehttp://en.wikipedia.org/wiki/Carbon_nanotubehttp://en.wikipedia.org/wiki/Electrical_filamenthttp://en.wikipedia.org/wiki/Carbon_nanofibershttp://en.wikipedia.org/wiki/Carbon_nanofibershttp://en.wikipedia.org/wiki/Carbon_nanofibershttp://en.wikipedia.org/wiki/Carbon_(fiber)http://en.wikipedia.org/wiki/Carbon_(fiber)http://en.wikipedia.org/wiki/Carbon_(fiber)http://en.wikipedia.org/wiki/Siliconhttp://en.wikipedia.org/wiki/Epitaxyhttp://en.wikipedia.org/wiki/Amorphoushttp://en.wikipedia.org/wiki/Polycrystallinehttp://en.wikipedia.org/wiki/Monocrystallinehttp://en.wikipedia.org/wiki/Microfabrication
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    Chemical Vapor Deposition

    CVD => Chemical Vapor Deposition PE-CVD => Plasma Enhanced CVD MO-CVD => Metal Organic CVD Atmospheric pressure CVD (AP-CVD) Low-pressure CVD (LP-CVD) Ultrahigh vacuum CVD (UHV-CVD) Aerosol assisted CVD (AA-CVD) Direct liquid injection CVD (DLICVD)

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    Horizontal APCVD Reactor

    CVD Reactors

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    Thermal CVD Reactor

    Chemical Vapor Deposition Apparatushttp: / /en.wikipedia.org/wiki/Chemical_vapor_deposit ion

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    Epitaxy is a kind of interface between a thin film and asubstrate. The term epitaxy (Greek; epi "above" and taxis "inordered manner") describes an ordered crystalline growth ona monocrystalline substrate. Epitaxial films may be grownfrom gaseous or liquid precursors. Because the substrate

    acts as a seed crystal, the deposited film takes on a latticestructure and orientation identical to those of the substrate.This is different from other thin-film deposition methodswhich deposit polycrystalline or amorphous films, even on

    single-crystal substrates. If a film is deposited on a substrateof the same composition, the process is called homoepitaxy;otherwise it is called heteroepitaxy.

    Epitaxy

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    This technology is quite similar to what happens inCVD processes, however, if the substrate is anordered semiconductor crystal (i.e. silicon, galliumarsenide), it is possible with this process to continuebuilding on the substrate with the samecrystallographic orientation with the substrate actingas a seed for the deposition. If anamorphous/polycrystalline substrate surface is used,the film will also be amorphous or polycrystalline.

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    Homoepitaxy is a kind of epitaxy performed withonly one material. In omoepitaxy, a crystalline film isgrown on a substrate or film of the same material.This technology is applied to growing a more purifiedfilm than the substrate and fabricating layers withdifferent doping levels.

    Heteroepitaxy is a kind of epitaxy performed with materialsthat are different from each other. In heteroepitaxy, acrystalline film grows on a crystalline substrate or film ofanother material. This technology is often applied to growing

    crystalline films of materials of which single crystals cannot beobtained and to fabricating integrated crystalline layers ofdifferent materials. Examples include gallium nitride (GaN) onsapphire or aluminium gallium indium phosphide (AlGaInP) on

    gallium arsenide (GaAs).

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    Methods

    Epitaxial silicon is usually grown using VaporPhase Epitaxy (VPE). A modification ofChemical Vapor Deposition.

    Molecular-beam and liquid-phase epitaxy(MBE and LPE) are also used, mainly forcompound semiconductors.

    Metal Organic CVD (MOCVD)

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    Epitaxial Growth

    Deposition of a layer on asubstrate which matchesthe crystalline order of thesubstrate

    Homoepitaxy Growth of a layer of the same

    material as the substrate Si on Si

    Heteroepitaxy Growth of a layer of a

    different material than thesubstrate

    GaAs on Si

    Ordered,crystallinegrowth;NOTepitaxial

    Epitaxialgrowth:

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    Motivation

    Epitaxial growth is useful for applications that placestringent demands on a deposited layer:

    High purity Low defect density Abrupt interfaces Controlled doping profiles High repeatability and uniformity Safe, efficient operation

    Can create clean, fresh surface for device fabrication

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    General Epitaxial DepositionRequirements

    Surface preparation Clean surface needed Defects of surface duplicated in epitaxial layer Hydrogen passivation of surface with water/HF

    Surface mobility High temperature required heated substrate Epitaxial temperature exists, above which deposition is ordered Species need to be able to move into correct crystallographic

    location

    Relatively slow growth rates result Ex. ~0.4 to 4 nm/min., SiGe on Si

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    Kinetics Growth rate controlled by kinetic

    considerations Mass transport of reactants to surface Reactions in liquid or gas Reactions at surface Physical processes on surface

    Nature and motion of step growth Controlling factor in ordering

    Specific reactions depend greatly on methodemployed

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    Kinetics Example

    Atoms can bond to flat surface, steps,or kinks.

    On surface requires some critical radius Easier at steps Easiest at kinks

    As-rich GaAs surface

    As only forms two bonds to underlyingGa Very high energy

    Reconstructs by forming As dimers Lowers energy Causes kinks and steps on surface

    Results in motion of steps on surface

    If start with flat surface, create steponce first group has bonded Growth continues in same way

    http://www.bnl.gov/nsls2/sciOps/chemSci/growth.asp

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    Vapor Phase Epitaxy Specific form of chemical vapor deposition (CVD) Reactants introduced as gases Material to be deposited bound to ligands Ligands dissociate, allowing desired chemistry to reach

    surface Some desorption, but most adsorbed atoms find proper

    crystallographic position Example: Deposition of silicon

    SiCl4 introduced with hydrogen

    Forms silicon and HCl gas Alternatively, SiHCl 3, SiH2Cl2 SiH4 breaks via thermal decomposition

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    Precursors for VPE

    Must be sufficiently volatile to allowacceptable growth rates

    Heating to desired T must result in pyrolysis Less hazardous chemicals preferable

    Arsine highly toxic; use t-butyl arsine instead

    VPE techniques distinguished by precursorsused

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    Doping of Epitaxial Layers

    Incorporate dopants during deposition Theoretically abrupt dopant distribution Add impurities to gas during deposition Arsine, phosphine, and diborane common

    Low thermal budget results High T treatment results in diffusion of dopant

    into substrate Reason abrupt distribution not perfect

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    Properties of Epitaxial Layer

    Crystallographic structure of film reproduces that ofsubstrate

    Substrate defects reproduced in epi layer

    Electrical parameters of epi layer independent ofsubstrate Dopant concentration of substrate cannot be reduced Epitaxial layer with less dopant can be deposited

    Epitaxial layer can be chemically purer than substrate Abrupt interfaces with appropriate methods

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    Applications

    Engineered wafers Clean, flat layer on top of less

    ideal Si substrate On top of SOI structures Ex.: Silicon on sapphire Higher purity layer on lower

    quality substrate (SiC) In CMOS structures

    Layers of different doping Ex. p- layer on top of p +

    substrate to avoid latch-up

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    More applications

    Bipolar Transistor Needed to produce buried

    layer

    III-V Devices Interface quality key Heterojunction Bipolar

    Transistor LED Laser

    https://reader010.{domain}/reader010/html5/0612/5b1fdddcce8e1/5b1fddf3ecc8f.jpg

    http://www.search.com/reference/Bipolar_junction_transistor

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    VPE Advantages/Disadvantages

    Low temperature process High purity (low defect density) material Readily automated for mass production Ability to grow thin layers with precise

    composition, doping density, thickness O onan atomic scale for advanced systems)

    Well suited to research has opened newphysics

    Di d

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    Disadvantages

    Toxic gases are used must have gas monitors andstainless steel plumbing.

    The exhaust pump system includes a scrubber thatbreaks down toxic end products before atmosphericrelease.

    Research systems are expensive, as are many of theprecursors (purchased as pressurized gases incylinders or as bubblers VPE works well with Si andGaAs (usually not used) and related elemental andcompound semiconductors