Edge Measurement Sensors - Azbil

The usual method is based on the change in PD linear output when the received light level drops due to blocking of the light. However, the output will also change if the received light level drops due to dirt on the lens (or greater opacity of the target object). This method requires air purging to prevent accumulation of dirt.

Reduced light level due to dirt

Conventional (Photoelectric Diode) method

Azbil’s linear image sensor method

Linear image sensor

Repeatability ±1 μm*High-accuracy measurement of the true edge position

*Repeatability is ±1 μm for PBZ-CL007V and ±5 µm for PBZ-CL030H/V.For measurement conditions, refer to the specifications on page B-007.

**Working distance (WD): the distance between the receiver and the film

Azbil’s unique FDN algorithm enables high-accuracy measurement of the true edge position at any working distance (WD).**

Less loss of accuracy due to dirt on the sensing face

The receiver uses our linear image sensor method to reduce the effects of dirt on the sensing face. Also, a light level drop detection function tells when the sensor requires maintenance.

The edge position is determined based on the brightness level of each pixel. Even when the overall received light level drops, the light received by each pixel changes uniformly, thus having no direct effect on measurement.

PBC-201VN0for 7 mm sensor head

Controller catalog listing



—

�

—

—

�

—

�

�

�

Measurement details

Edge position measurement (transparent and opaque objects)

Gap measurement

Shadow width measurement

Measurement and detection capabilities vary depending on the condition of the measurement target, the installation environment, and other factors. Before use, be sure to conduct sufficient checks and evaluations of the sensor’s operation in the actual situation.

What is the FDN algorithm?

Target object

Lig

ht in

tens

ity

Emitter

WD

The position where the intensity of received light is 25% of the total intensity is the true edge position.

Fresnel diffractionLight is diffracted by the edges of thin objects such as knives and films. The intensity distribution of diffracted light at the receiver depends on the working distance between the target object and the receiver.

Receiver: linear image sensor

25%

Film

Fresnel diffraction

FEATURES

MEASUREMENT PRINCIPLE

Edge Measurement SensorsEdge position sensing for film, wafers, and glass substrates

Integrated FDN algorithmEnables high accuracy and reliable edge measurement.*1

Linear image sensor system with light level drop detectionImproved countermeasures against dirt buildup on the sensing surface, previously a major problem for reliable detection

Integrated algorithm for transparent object detectionReliable measurement of transparent objects

Standard 2-channel input controllerReduces time needed for wiring, saves space, allows two-measurement computations.

RS-485 communications (PBC-201VN2 and PBC-203VN2)Enables data transmission to a PLC or touch panel.

Includes a variety of built-in functionsNoise cancellation,*2 a countermeasure for protrusions on films computation*3 for glass substrate alignmentPosition change detection*3 for glass substrate chip detection

*1. Repeatability: PBZ-CL007V ±1 µm, PBZ-CL030m ±5 µm or less*2. PBC-201VNm only *3. PBC-203VN2 only

PBZ Series

1

Sensors 1 and 2

are used to compute �.

Sensor 1

Sensor 2

Sensor 3

Wafer irregularity and notch position measurement

Film meander measurement

If the crack measurement function is needed, please consult with an Azbil salesperson or distributor.

The lineup includes models with an additional function for measuring cracks, etc.

Both chips and edge defects can be detected.

XY� measurement of glass substrates

Fluctuation when a notch is detected

Fluctuation due to irregularity

0500

1000150020002500300035004000450050005500600065007000

2000 400 600 800 1000 1200 1400 1600 1800 2000Time [ms]

Po

sitio

n [m

m]

when the set value is exceeded

Event output

The lineup includes models

Edge defect

Chip

Nick

Burr

Thickness measurement for films and sheets

Detection of burrs and nicks on film and sheets

Two sensors can be connected per controller, enabling multiple-point calculations and simultaneous sensing of the roller and sheet material for highly accurate thickness measurement.

Highly transparent glass or gallium arsenide wafers can be reliably measured with high accuracy.Linear image sensors enable measurement through a view port.

Burrs and nicks on a meandering film or sheet material can be detected by the same sensor. The sensor can be set in increments of 500 µs. For example, when using the PBC-201VN2, sheet material fed at a speed of 50 m/min can be measured at intervals of approx. 0.4 mm. The sensor can detect a size of several tens of micrometers or more.

Glass substrate X and Y measurements can be computed from edge measurements from three pairs of sensor heads, and then � can be determined by internal computation.

Measurement error caused by eccentricity and vibration of the roller can be cancelled out by using 2 pairs of sensor heads.

By computing the input from 2 pairs of sensors, meander and film width can be measured at the same time.

Using simple arithmetic, the thickness of the sheet, t, can be calculated from the values measured by Sensor 1 and Sensor 2.

If vibration occurs, X and Y behave the same way. The effects can be reduced by calculating the offset.

Sensor 1

Sensor 1 X

Measurement pointsSensor 2

Sensor 2 Y

Sensor 1: Measures the roller’s surface...XSensor 2: Measures the sheet’s surface...Y

Sheet material

Roller

Thickness of the sheett=X-Y

Calculating the thickness from the measured values

Whether measurement or detection is possible depends upon target object conditions, installation environment, and other factors. Before use, carefully check sensor operation in the actual situation.

APPLICATION EXAMPLES

Detection of chips and cracks in glass substratesPosition change detection can be used to detect chipped glass edges during transfer.

1 2

SENSOR HEADS

*1 Working distance: the distance between the target and the receiver Accuracy specifications are measured at an ambient temperature of 23±2 °C under the conditions described below. *2 Average of 32 trials, with emitter and receiver 20 mm apart, WD = 10 mm, and the object at the center (3.5 mm) of the measurement beam*3 With emitter and receiver 20 mm apart and WD = 10 mm, the object is moved ±0.5 mm from the center of the measurement beam.*4 Average of 32 trials, with emitter and receiver 100 mm apart, WD = 50 mm, and the object at the center (15 mm) of the measurement beam*5 With emitter and receiver 100 mm apart and WD = 50 mm, the object is moved ±0.5 mm from the center of the measurement beam.

Compatiblecontrollers

Detection type

Sensing distance

WD*1

Sensing width

Light source

Standard target

Repeatability

Moving accuracy

Temperature characteristics of sensor

Indicator lamp

Operating temperature

Storage temperature

Operating humidity

Vibration resistance

Protective structure

Connection type

Material

Mass

PBC-201VN0PBC-201VN2

PBZ-CL007V PBZ-CL030H PBZ-CL030V

Opaque knife edge

±1 µm or less*2

±20 µm or less*3

Operation indicator: green LED

Connector cable 2.4 m(can be extended to 5 m)

Case: PPS. Window: glass

Emitter and receiver: 100 g or less each

(including connector cable)

10 to 300 mm

10 to 290 mm

7 mm

10 to 500 mm

10 to 490 mm

30 mm

±5 µm or less*4

±50 µm or less*5

20 cm connector cable (can be extended to 20 m)

Case: aluminum. Window: glass

Emitter: 300 g or less (including connector cable)Receiver: 270 g or less (including connector cable)

PBC-203VN2

� PBZ-CL007V (Sensor heads) � PBZ-CBL02R (Extension cable for PBZ-CL007V)

Operatingindicator(Green LED)

Emitter

3.2 dia. hole (3)

8

8

2013.2

5.8

8

10 18

20

Serial No.

3.2 dia. hole (3)

13.2

Code

Connector

Emitting window

(3) Laseremitting range

4 4

(9)

La

ser

emitt

ing

rang

e

(9)

Las

erem

ittin

g ra

nge

×××× ××××

Receiver

5.8

508.

824

00

Serial No.

Code

Connector

Receiving window

(3) Laseremitting range

8

0100

+

8.8

5028.3

10.3

240

0010

0+

Controller side Sensor head side

Heat-shrinkable tube

Heat-shrinkable

tube50100

Dia

. 7.4

2000

Catalog listing

Shape

−

3.4 3.428

.310

.3

Thru-scan

0 to 50°C

-20 to 70 °C (without freezing)

30 to 85 % RH (without condensation)

9.8 m/s2 (10 to 55 Hz), 2 h each in X, Y and Z directions

IP40 (IEC standard)

Red semiconductor laser (light emission peak 670 nm), JIS Class 1

10 to 300 mm PBZ-CL007V

Detection method and shape

Sensor heads

Sensor heads

Controllers

Controllers

Sensingdistance

7 mm

Sensingwidth

±1 µm

10 to 500 mm

PBZ-CL030H

PBZ-CL030V

30 mm ±5 µm

Repeatability Cataloglisting

0.1%F.S./°C

Compatible sensor

Output update cycle

Analog output

Digital output

Digital input

Communications

Supply power

Power consumption

Operating temperature

Storage temperature

Operating humidity

Vibration resistance

Protection circuit

Material

Mass

PBC-201VN0PBC-201VN2

PBZ-CL007V

1 µm

0 to 7 mm or -3.5 to +3.5 mm

can be selected

500 µs

1 µm

0 to 30 mm or -15 to +15 mm can be selected

10 ms

6 W or less 12 W or less

PBZ-CL030HPBZ-CL030V

Catalog listing

Shape

0 to 45 °C (0 to 35 °C if gang-mounted)

-20 to 70 °C (without freezing)

30 to 85 % RH (without condensation)

2 m/s2 (10 to 55 Hz), 2 h each in X, Y and Z directions

Power reverse connection protection

Case: polycarbonate (PC)

Approx. 350 g

Voltage outputs (2), 1–5 VDC or -5 to +5 VDC

Transistor outputs (4), 21.6–26.4 VDC, 50 mA max.Outputs for judgment, hold, dirt (maintenance)

Off-delay (can be set from 0–70 ms in 10 ms increments)(PBC-201VN2 and PBC-203VN2)

Non-voltage or open collector inputs (2)PBC-201VN0: start input

PBC-201VN2: start input, bottom hold, laser ON/OFF, or center adjustment (selectable)PBC-203VN2: laser ON/OFF (terminal No. 4),

center adjustment (terminal No. 5)

RS-485 (9600/19200/38400/115.2 kbps)

DC21.6 to 26.4V

PBC-203VN2

Min. display unit

Displayrange

PBZ-CL007V PBC-201VN0

PBZ-CL007V PBC-201VN2

PBZ-CL030HPBZ-CL030V PBC-203VN2

Shape Compatible sensor head

24 VDC power, 2-channel connection for sensor head

I/O: 2 A.O., 4 D.O., 2 D.I.

24 VDC power, 2-channel connection for sensor head

I/O: 2 A.O., 4 D.O., 2 D.I.RS-485 communications

Specifications Cataloglisting

Reading

CATALOG LISTINGS

SPECIFICATIONS

(Unit: mm)

3

� PBC-2��VN�

1 10

2 11

3 12

4 13

5 14

6 15

7 16

8 17

9 18

19

PV

SP

OUT

EV1 EV2 OT AT

DISP

OK/READY

SP/EV

PARA ENTLOADER

96

91.5

x 4

4.5

48 100M3.5 terminal screws Preleaded connector cable: approx. 270 mm

Preleaded connector cable: approx. 220 mm

� PBZ-CL030V (Sensor head)

� PBZ-CL030H (Sensor head)

� PBZ-CBL��S-E (Extension code for PBZ-CL030� emitter) � PBZ-CBL��S-R (Extension code for PBZ-CL030� receiver)

* The digits represented by �� are for code length (3 m = 03, 5 m = 05, 7 m = 07, 10 m = 10, and 20 m = 20). Example: a model with a 3 m cable would be written PBZ-CBL03S-�

Emitter Receiver

Terminal arrangement

Emitter Receiver

Controller side Sensor head side Controller side Sensor head side



508

Dia

. 7.4

2020

50 20

L



50

L

208

Dia

. 6

2020

50

Effective beam width

150

8

24

Effe

ctiv

e be

am w

idth

34

Beam axiscenter

15

110 303

5

5010

70

5.5 dia. hole (3)

Effe

ctiv

e re

ceiv

ed li

ght w

idth34

Beam axis center

15

110 30

35

5010

70

5.5 dia. hole (3)


Effectivereceived light width

150

0.6

24

Eff

ect

ive

bea

m w

idth

150

8

24

Eff

ect

ive

bea

m w

idth

34

12.8110 30

35

5010

70

5.5 dia. hole (3)

12.8

Eff

ect

ive

rece

ive

dlig

ht w

idth

34

110 30

35

5010

70

5.5 dia. hole (3)

Eff

ect

ive

rece

ive

dlig

ht w

idth

150

0.6

24

Beam axis center




For PBC-201VN0, CH1 or CH2 start input can be selected. For PBC-201VN2, in addition, bottom hold, laser ON/OFF or center adjustment can be selected. Terminal Nos. 4 and 5 are dedicated for laser ON/OFF and center adjustment respectively, for both channel 1 and channel 2 of the PBC-203VN2.

Terminal No. Signal Terminal No. Signal123456789

Power, 24 VdcPower, 0V

FGDigital inputDigital input

Digital output 1Digital output 2Digital output 3Digital output 4

CH1 connector cableCH2 connector cable

RS-485 SDARS-485 SDBRS-485 RDARS-485 RDBRS-485 SG

CH1 analog outputCH2 analog output

Analog GND

10111213141516171819

CONTROLLER (Unit: mm)

3 4

Documents

Edge Measurement Sensors - Azbil