EDAX TEAM User manual - Keio University Analysis Flow 1. Check SEM Condition 2. Log in to EDAX TEAM 3. Create A “New Project” for New Analysis and Insert Specimen Name 4. Language

EDAX TEAMUser manual

EDX Analysis Flow

1. Check SEM Condition

2. Log in to EDAX TEAM

3. Create A “New Project” for New Analysis and Insert Specimen Name

4. Language Selection (if required)

5. Cooling EDX Detector

6. Select “Spectrum Only” and Run It

7. Analyze Your Specimen

8. Create Report

9. Export Raw Data and Report into SEM-F EDX Datastation

10. Close TEAM Software

Select appropriate EHT WD of SEM = 10mm

ID : EDAX PW: EDAX

Default setting is Japanese

Confirm CPS count is more than 10000

Dead time must be less than 30-40%

Make sure cooling of EDX detector is now off

It will take approx. 5 min.

Point Analysis

Mapping

Line scan

EDX Analysis Flow








8. Create Report



Select appropriate EHT WD of SEM = 10mm


Acceleration voltage

Acceleration voltage = 15 kV ~

*Select an appropriate acceleration voltage for your material.*Confirm the energy shell of K, L and M of elements of interest. *Select elements with appropriate energy shells that do not overlap each other.

Aperture

Aperture size =6

*Do not change the aperture size of SEM. Aperture 6 is the most appropriate setting for imaging and EDX analysis.

Spot Size

Spot size is 5.0 to 6.0, depending on the acceleration voltage.

*See [ 6. Select spectrum only and run it].You have to confirm CPS and Dead Time after you set up an acceleration voltage; CPS must be more than 10000 and Dead time must be less than 30-40 %.

WD

Make sure WD of SEM must be 10mm.

EDX Analysis Flow








8. Create Report



ID : EDAX PW: EDAX


1. Click and open [Team] software

2. [Log in] after enter [User ID] and [Password]

User ID : edax

Password : edax

Log in Window

User ID

Password

Log in Cancel

Enter ID and PW. Then, click log in button

*Japanese is a default language setting. You are able to select language next step at [4. The Language Selection]. We are really sorry for this inconvenience.

EDX Analysis Flow



3. Create A “New Project” for New Analysis and Input Specimen Name





8. Create Report





1. Create a new project for new analysis

How to create a new project1) Click the [Project]

2) Enter the [project name] and the [name of the specimen].

3) Click [OK]

New projectDelete projectOpen project

Project Window

Select a project from this list when you find your past project

1)Project

“Create a new project” window

Project name

Specimen name

2)

EDX Analysis Flow



3. Create A “New Project” For New Analysis and Input Specimen Name

4.Language Selection (if required)




8. Create Report

9. Export Raw Data and Report Into SEM-F EDX Datastation




2. Confirm

(a)the [Project Content]

(b)the [Environmental Monitor] are now activated

(c)the [Activity Bar],

(d)the [Advanced Properties] and

(e)the [User Setting] are also appeared.

(a) Project content

(c) Activity bar

(b) Environmental monitor

(d)Advanced properties

(e)User setting

User interface after a new project is created

(d)Advanced properties

EDX Analysis Flow






6. Select “Spectrum Only” and Run it


8. Create Report



Default setting is Japanese

4. Language Selection

1. Click the[edax]

2. Select language that you prefer to use from Germany, English, French, Korean, Russian, Chinese and Japanese. Then, click OK.

language

Germany(GR)

English (US)

French(FR)

Japanese(JP)

Korean (KR)

Russian(RUS)

Chinese (Chi)

User Profile

EDX Analysis Flow








8.Create Report

9. Export Raw Data and Report Into SEM-F EDX Datastation


It will take approx. 5 min.


Cooling down EDX detector is compulsory before analysis. There are two approaches to complete this process.

Approach 1. Advanced Property

Approach 2. Environmental Monitor

Approach 1. Through the [Advanced Property]

1. Click the [Advanced Property] →the [EDS Detectors]→ the [Det1- Detector Status].

2. Click the red[Cooling off] button.

3. Wait until the indication becomes the green.

Approach 2. Through the environmental monitor

1. Click the red icon of the [thermometer]2. Wait until the indication becomes the green.

1

2

State of the detector that is indicated by the thermometer

Red: UnusableYellow: Middle of cooling processGreen: Usable

State of the detector that is indicated by the Cooling on/off button

Red: UnusableYellow: Middle of cooling processGreen: Usable

EDX Analysis Flow








8. Create Report



Confirm CPS count is more than 10000

Dead time must be less than 30-40%


Before analysis, it is important to confirm whether appropriate volume of X-ray can be reached to the EDX detector at the current condition. You are able to confirm it through CPS counts and Dead Time.

1. Click the [Spectrum only].

2. Click the [Collect Spectrum]*Check the CPS counts and Dead time of spectrum.

Subjects Appropriate condition Check point

CPS More than 10000 counts • WD=10mm• Acceleration voltage• Spot sizeDead time Less than 30-40%

EHT=10kV,Spot size=6.0WD=10.0mm

EDX Analysis Flow








8. Create Report



Point Analysis

Mapping

Line scan


Basic procedures of Point Analysis, Mapping and Line Scan are more or less similar.

2. Set points / a mapping frame / a bar for line scan, on the image.

3. Set up details of the analytical conditions

5. Confirm the elements

4. Start analysis

6. Create the report

1. Activate the [Image] menu* Confirm the SEM condition is loaded properly.

*Please be aware when you set up fine analytical conditions, it will take enormous amount of analytical time. It is necessary to consider the damage to the sample and the sample drift, due to long-term analysis.

EDX Analysis Flow








8. Create Report



Point Analysis

Mapping

Line scan

7. Analyze Your Specimen / Point Analysis / Mapping / Line Scan

1. Activate the [Image Area] ① Select the [Drift Correction]② Select the[Matrix size] ③ Confirm the displayed [Conditions of SEM] accords

with the actual SEM conditions④ Click the [Load] when ③is not accurately reflected.

2. Set points or frames for the area analysis on the image.

3. Select ①the [Point Mode]②the [Auto Beam – OFF ] and ③the [Seconds]

② ③ ④①

①

② ③


4. Click the [Collect Spectrum]

5. Identify the element *There are two approach to confirm the elements of the spectrum. ① Move the green plus cursor into the peak you are interested

in. The [?] icon will be appeared after you did left click on the peak of the spectrum. Then, select an appropriate element from the list.

② Select the [Automated qualitative analysis mode] from the list which is on the left side of the spectrum.

Automated quantitative analysis mode

「?」mark

Home view

Re-apply element identification

Show quantification result

Manually adjust spectrum background region

Modify element list

Background and deconvolution

Create Phase from spectra

Send data to the project tree

Print the spectrum

Save changes

Normalize


6. Click the [Holder] mark (to add the produced data to the data tree)

7. Create the report (See 8. Create Report)

EDX Analysis Flow








8. Create Report



Point Analysis

Mapping

Line scan

7. Analyze your specimen / Point Analysis / Mapping / Line Scan

1. Activate the[Image Area] menu. ①Select the[Drift Correction] ②Select the [Matrix Size] ③Confirm the displayed [Conditions of SEM] accords with the actual SEM conditions④Click the [Load] when ③is not accurately reflected.⑤Select the [Resolution] and [Dwell time] in the [Advanced]

2. Set a mapping frame on the image. *The size of the frame can be changed when the cursor is on the green square

① ② ③ ④⑤

*Analysis time will be increased when the high resolution of the [Quality], the large number of the [Frames] and the long [Dwell time] are selected.*The number of the [Frames] can be changed when the [Manual] is selected from the [Quality].

⑤

*This mark allows changing the size of frame

7. Analyze your specimen / Point Analysis /Mapping / Line Scan

4. Activate the [Collect Map]①Select the [Auto Beam-Off]②Select the[Display Option]

*Chose the [Assign element colours] when you need to change the colours.

• ③ Indicated Resolution size is equal as the one that have been selected already in the [Advanced] menu.

• ④ Except the [Manual], the number of frames is not able to select .

5. Click the [Collect Map]

6. Click the [holder] mark*Add mapping result to the [Project tree].

7. Click the[Finish] button

8. Create the report (see 8. Create Report )

① ③ ②④

EDX Analysis Flow

1. Check SEM condition


3. Create a “new project” for new analysis and input specimen name





8. Create Report

9. Export Law Data and Report into SEM-F EDX Datastation


Point Analysis

Mapping

Line scan

7. Analyze your specimen / Point Analysis /

Mapping / Line scan

1. Activate [Image Area] menu①Select the [Drift Correction] ②Select the [Matrix Size]③Confirm the displayed [Conditions of SEM] accords with the actual SEM conditions④Click the [Load] when ③is not accurately reflected⑤Select the [Resolution] and the [Dwell time] in the [Advanced]

2. Set a bar on the image.

*Analysis time will be increased when the high resolution of the [Quality], the large number of the [Frames] and the long [Dwell time] are selected.*The number of the [Frames] can be changed when the [Manual] is selected from the [Quality].

① ② ③ ④⑤

7. Analyze Your specimen / Point Analysis / Mapping / Line scan

4. Activate the [Collect line]. ①Select the [Resolution] *Then, the [number of points] will be automatically indicated. ②Change the colour through the [Assign element colours] of the [Display Option]*③ Indicated number of Frames and Dwell time are already selected in advanced menu previously .

①

②

③

②

5. Click the [Collect Line].

6. Click the [holder] mark*Add the mapping result to the [Project tree].

7. Click the [Finish] button

8. Create the report (see 8. Create report )

EDX Analysis Flow








8. Create Report



8. Create Report

There are slight differences of the report menu among the analytical modes; although, the process to create a report is same. ① Activate the [Report] ② Select the [quick Report] or the [ Current Data Report] ③ Save the report

*Save location for the file: the [FE-SEM-F Datastation].

Point Analysis

Mapping

Line Scan

Quick Report

Report Format

Current Data Report

EDX Analysis Flow








8. Create Report




1. Select the[Export] in the [Project Content]

2. Select data you wish to save and click [OK].

3. Save the [ZIP file] as the raw data at the [SEM-F-Datastation].

Basic Rules for data saving• Create your own holder in the[SEM-F- EDX Datastation] and save your

data. Do not leave your data in the EDX-PC. • Take away your data on the day of your experiment or within a few

days from your experiment. • Please be aware that we will delete any data in EDX-PC without notice.

EDX Analysis Flow








8. Create Report


10. Close TEAM Software Make sure cooling on switch of EDX detector is now off

10. Close TEAM

1. Stop cooling the detector① Click the[Cooling On] of the [Advanced] menu or② Click the [green thermometer] icon.

2. Close the [TEAM] software and shut down PC.

* Confirm the colour is changed from green to red.

3. When you finish the SEM observation at the same time as EDX, do not forget to close SEM as well.

* Confirm the colour is changed from green to red.

Documents

EDAX TEAM User manual - Keio University Analysis Flow 1. Check SEM Condition 2. Log in to EDAX TEAM 3. Create A “New Project” for New Analysis and Insert Specimen Name 4. Language