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Lyon, France June 12, 2007 | Christophe Yamahata Electrical & Mechanical characteristics of DNA bundles revealed by Silicon Nanotweezers C. Yamahata, T. Takekawa, M. Kumemura, M. Hosogi, G. Hashiguchi, D. Collard & Hiroyuki Fujita The University of Tokyo Institute of Industrial Science Kagawa University Faculty of Engineering

E lectrical & M echanical characteristics of DNA bundles revealed by S ilicon N anotweezers

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E lectrical & M echanical characteristics of DNA bundles revealed by S ilicon N anotweezers C. Yamahata , T. Takekawa, M. Kumemura, M. Hosogi, G. Hashiguchi, D. Collard & Hiroyuki Fujita. . The University of Tokyo Institute of Industrial Science. Kagawa University - PowerPoint PPT Presentation

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Page 1: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Electrical & Mechanical characteristics of

DNA bundles revealed by

Silicon Nanotweezers

C. Yamahata, T. Takekawa,

M. Kumemura, M. Hosogi, G. Hashiguchi,

D. Collard & Hiroyuki Fujita

The University of TokyoInstitute of Industrial Science

Kagawa UniversityFaculty of Engineering

Page 2: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Electrical & Mechanical characteristics of DNA bundlesrevealed by Silicon Nanotweezers

Scope of the research

Working principle & Microfabrication of the Silicon Nanotweezers

DNA trapping by dielectrophoresis

Electrical & Mechanical characterization of DNA bundles

Conclusion & Outlook

Page 3: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Scope of the research

Page 4: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Scope of the research

Biophysical tools used for molecular manipulation

• Optical tweezers • Magnetic tweezers • AFM probes

* D. Collard et al., IEEJ Trans 2: 262–271, 2007

Page 5: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Scope of the research

Biophysical tools used for molecular manipulation

• Optical tweezers • Magnetic tweezers • AFM probes

* D. Collard et al., IEEJ Trans 2: 262–271, 2007

Page 6: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Scope of the research

Biophysical tools used for molecular manipulation

• Optical tweezers • Magnetic tweezers • AFM probes

* D. Collard et al., IEEJ Trans 2: 262–271, 2007

Page 7: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Scope of the research

Biophysical tools used for molecular manipulation

• Optical tweezers • Magnetic tweezers • AFM probes

and

• Silicon nanotweezers

* D. Collard et al., IEEJ Trans 2: 262–271, 2007

Page 8: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Working principle& Microfabrication

of the Silicon Nanotweezers

• Working principle• Microfabrication technology

Page 9: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Working principle of the Silicon Nanotweezers

External dimensions:4.5 mm × 5.5 mm

SOI wafer The different elements are:

• Electrically insulated• Mechanically locked with each other

Page 10: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Working principle of the Silicon Nanotweezers

Page 11: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Working principle of the Silicon Nanotweezers

Differential capacitive sensor

Page 12: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Working principle of the Silicon Nanotweezers

Differential capacitive sensor

MS3110 Universal Capacitive Readout™ (Irvine sensors, CA, USA)

Page 13: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Working principle& Microfabrication

of the Silicon Nanotweezers

• Working principle• Microfabrication technology

Page 14: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

(1) Si3N4 deposition (LPCVD) + patterning(2) Silicon etching (RIE)(3) SiO2 oxidation (LOCOS)(3) SiO2 oxidation (LOCOS) + Si3N4 removal(4) KOH anisotropic etching of Silicon <111> facets

Microfabrication technology

(5) HF removal of buried oxide

Si

Si3N4

SiO2

(6) Backside etching by deep-RIE (with Al mask)

SOI wafer

• (100)-Si layer: 25 µm

• Oxide layer: 2 µm

• Handling wafer: 380 µm

Page 15: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Microfabrication technology

Si

Si3N4

SiO2

(1)

(2)

(3)

(4)

(5)

(6)

SOI wafer

• (100)-Si layer: 25 µm

• Oxide layer: 2 µm

• Handling wafer: 380 µm

Page 16: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Microfabrication technology

Page 17: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

DNA trappingby dielectrophoresis

Page 18: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

DNA trapping by dielectrophoresis (DEP)

Droplet:• λ-DNA: 12 nmol/L• DI water: 5 µL

Dielectrophoresis (DEP): 30 sec @ 1 MHz, 40 Vpp (20 µm gap)

Page 19: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

λ-DNA bundle20 µm gapdiameter ~ 380 nm

DNA trapping by dielectrophoresis (DEP)

Page 20: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Electrical & Mechanical characterization

of DNA bundles

• Electrical characterization• Mechanical characterization

Page 21: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Humidity generator

Ambient air Pump

Gas washing

bottle

Mixer

Temperature and humidity sensor

Glove box

Faraday cage

Keithley 6487 Picoammeter / Voltage Source

chassis

desiccant

saturator

Electrical characterization of DNA bundles

Experimental setup

Page 22: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Electrical characterization of DNA bundles

~ 20 GΩ

~ 5 TΩ

Measurements for different DNA bundles diametersQuasi-ohmic behavior

Measurements on “wet” DNA bundles

(various diameters)

T = 25 °C rh ~ 55% humidity

Page 23: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Measurements on “wet” DNA bundles

(various diameters)

Conductivity bundle section

Electrical characterization of DNA bundles

Measurements for different DNA bundles diametersEffect of DNA bundle diameter

Page 24: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Electrical characterization of DNA bundles

Effect of humidityExponential dependence with relative humidity

Transient current recording for a 5V step.

Data recorded at 21 °C (1°C overall fluctuation) for different humidity levels (rh 0.2% for each curve)

Page 25: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Electrical characterization of DNA bundles

Effect of humidityExponential dependence with relative humidity

Data extracted from previous measurements (5V step) after 60 sec. (rh was decreased from 75% to 45% in 6 hours)

Page 26: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Electrical & Mechanical characterization

of DNA bundles

• Electrical characterization• Mechanical characterization

Page 27: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Mechanical characterization of DNA bundles

Displacement: ~ 3 µm Cmax 200 fF

Sensitivity: 2 V/pF 150 mV/µm

Error: ε <1 mV

5 nm resolution

Characterization of empty tweezersMeasurements performed with the MS3110 Universal Capacitive Readout™

Page 28: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Sensitivity of the capacitive sensor enables the measurement of few nN forces

(single DNA ~ 80 pN)

Bundle stretching can be observed

Mechanical characterization of DNA bundles

Measurements after DNA bundle trappingMeasurements performed with the MS3110 Universal Capacitive Readout™

Page 29: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Conclusion & Outlook

Page 30: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Conclusion & Outlook

• Efficient trapping of DNA by dielectrophoresis

• Extensive electrical characterization of DNA bundles

• Displacement: 2-3 µm range / few nm resolution

• Force: few nN sensitivity

High potential for biophysical characterization of long macromolecules. e.g.: DNA bundle, microtubules, actin filament, etc.

A new type of biophysical tool has been proposed:

Page 31: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Acknowledgments

Page 32: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Swiss National Science Foundation (SNSF)

Japan Society for the Promotion of Science (JSPS)

Japan Science and Technology Corporation (JST)

Centre National de la Recherche Scientifique (CNRS)

Acknowledgments

Page 33: E lectrical &  M echanical  characteristics of DNA  bundles  revealed by S ilicon  N anotweezers

Lyon, France June 12, 2007 | Christophe Yamahata

Thank you for your attention.Thank you for your attention.