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Lynthorpe Consultancy Dry Pump Technology R Gordon Livesey

Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

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Page 1: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Lynthorpe Consultancy

Dry Pump Technology

R Gordon Livesey

Page 2: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Dry Pumping

• No oil backstreaming into

process chamber

• No contamination of

process stream

• Effluent/waste disposal

costs reduced or

eliminated

• Lower maintenance costs

• Tolerant to heat load

• Lower utility costs

• Solvent recovery

– Flavours, perfumes, fuel

vapours

• Deodorization

• Evaporation/distillation

• Drying

– Brake fluid, oils

• Desorption

• Seawater deaeration

• Steel degassing

• Semicon processes

• UHV

Page 3: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Dry Pump Technologies

Roots

Claw

Screw

Scroll

Page 4: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Scroll Pumps

• Comprises two opposing

scrolls

• One scroll is fixed and

the other orbits

• Each has a seal in the

scroll end

Page 5: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Scroll Mechanism

Page 6: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Scroll Pump

• Small exhaust stage

– Low power at ultimate

• Progressive compression

– No sudden opening and closing of trapped volumes until final

exhaust port

• Concentric arrangement of “stages”

– Compact mechanism

• Few & simple external seals

• Can be made completely dry with no dynamic seals between

lubricant and pump volume

• Reasonable light gas pumping

– He speed ~ 50% to 70% air speed

– H2 , mixed with N2 for safety reasons

Page 7: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Scroll Pump

• Difficult to extract heat from the exhaust stages

– Small size, located on axis

• Seal wear generates dust – Mainly in first 100 hours, not a major problem if no suckback

– Successfully used in electron microscopes which are very sensitive to dust

• Seals require frequent maintenance

• Highly vulnerable to solid material ingestion

• Clearances controlled at “whole pump level”

– Less easy to control critical exhaust clearances

• Only small capacity pumps available – difficult to scale to large sizes

Page 8: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Dry Pump Technologies

Roots

Claw

Screw

Scroll

Page 9: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 10: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 11: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 12: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 13: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 14: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 15: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 16: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 17: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 18: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 19: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

Page 20: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Ideal Compression Ratio

• If V = swept volume and

v = dead volume

• It might be thought that

the ideal compression

ratio CR = V/v

• However, the dead

volume re-expands into

the pump volume and

CR ~ (V/v)2

Page 21: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

• Good compression

• Compression through pump can

be controlled by sizing stages

– Relatively easy to produce

small capacity / low power

outlet stages

• Reversed claws allow straight

path – good dust handling

• Can handle liquid ingestion

• Can be scaled up to moderately

large capacities

• Self valving – can exhaust to high

pressure

INLET

EXHAUST

Page 22: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Claw Pumps

• Abrupt compression

– Exhaust gas re-expands into mechanism at each stage

• Tolerance build up across stages increases

clearance at one end of pump (usually inlet)

• Single pulse per rotation at discharge of claw stage

– High noise when used as an exhaust stage

• Valves and ports can increase power / reduce flow at

high pressure

• Lower capacity than same centres Roots

• Relatively poor light gas performance

Page 23: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Roots/Claw combination

Page 24: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Dry Pump Technologies

Roots

Claw

Screw

Scroll

Page 25: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Roots Pumping Cycle

Inlet

Exhaust

Page 26: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Roots Pumping Cycle

Inlet

Exhaust

Inrush

Page 27: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Roots Pumping Cycle

Inlet

Exhaust

Page 28: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Roots Pumping Cycle

Inlet

Exhaust

Page 29: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Roots Pumping Cycle

Inlet

Exhaust

Inrush

Page 30: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Roots performance

Roots No Flow Compression Ratio

0

10

20

30

40

50

60

0.01 0.10 1.00 10.00 100.00

Backing Pressure: mbar

K0

Air

Helium

Hydrogen

Page 31: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Root Trapping

Gas trapped

& compressed

Inlet

Exhaust

Page 32: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Effect of root trapping

Roots No Flow Compression Ratio

0

10

20

30

40

50

60

0.01 0.10 1.00 10.00 100.00

Backing Pressure: mbar

K0

Air

Helium

Hydrogen

Page 33: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Single Stage Rootes

• Can be scaled to very large capacities

– ~100 to 60,000 m3/h (750 rpm)

• Mainly used for boosting capacity of other primary pumps

– Decreases ultimate by about 1 decade

• Can be used as primary pumps exhausting to

atmosphere

– 2:1 compression ratio

• Tolerant of solid material

– Straight through path

Page 34: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Single Stage Rootes

• Above ~ 1 mbar need some kind of protection to avoid

excessive pressure difference & overheating

– Bypass valve (exhaust to inlet)

– Fluid coupling

– Inverter drive to motor

• Very high power when used as exhauster

• Large fast machines require protection against large

shock loads produced during LL cycle

Page 35: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Multi-Stage Rootes

• Complete control over compression “trajectory”

– via judicious selection of stage ratios

• Extended gas path can be used to assist thermal

control

– Interstage cooling

• Independent control of inlet and exhaust clearances

– Relatively easy to produce small capacity / low

power outlet stages

• Can be scaled up to moderately large capacities

Page 36: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Multi-Stage Rootes

• Relatively long ducting between stages can lead to

condensation, corrosion

• Extended gas path can be difficult to transport solid

material through

– May get accumulations

• Abrupt compression

– Exhaust gas re-expands into mechanism at each

stage

• Tolerance build up across stages increases clearance at

one end of pump (usually inlet)

Page 37: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Exhaust Cooling

Page 38: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Dry Pump Technologies

Roots

Claw

Screw

Scroll

Page 39: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Screw Mechanism

Comprises opposing synchronously rotating screws

Page 40: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Screw

• Excellent handling of solid

material

• Progressive compression

– With tapers, variable

pitch etc.

– No sudden re-

expansion until final

exhaust port

• Compression “trajectory”

can be designed

• Can be scaled up to

moderately large

capacities

• Tip clearance critical to

overall performance

– Direct “line of sight” from

outlet to inlet

– Performance can

depend on “history”

(temperature, flow)

• Clearances controlled at

“whole pump level”

• More difficult to make small

capacity machines /

machines with small

exhaust stages?

Page 41: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

• Second generation

– Variable pitch Quimby screw • Two separate screws bolted together (2-stage)

• Expensive to manufacture

• Typically 1.8:1 compression

• Lower power than constant pitch

[Power (kW) = Swept volume of stage (m3/s) x delta P (Pa)]

1st Generation – Single Pitch ‘Queen Bee’ or Quimby

cut

2nd Generation – Variable Pitch ‘Queen Bee’ or

Quimby cut

3rd Generation – Variable Pitch Square Cut screw with

no compression plate.

4th Generation – Tapered Variable Pitch Square Cut

screw with no compression plate.

• 1st generation: single pitch, Quimby screws: • Inherently well sealed screw profile – “conjugate screws”

• High swept volumes

• Generally machined on expensive Holroyd machines

• Matched rotor pairs

• Compression against exhaust valve plate very high exhaust

temperatures

• Third generation

– Square screw form • Easier to machine on mill turn using standard end mills

• Gradual compression

• No porting

• No valve plate

• Excellent dust and liquid

handling

Screw Generation Technologies

Taiko Develops “Queen

Bee” or “Quimby” screw

profile pump

Failure to register patents in

Korea leads to Kowel copies

(KDP Range)

Busch factors Taiko pump

as Cobra AC range

NC Range

developed

Nash believed to

be factoring

Busch NC range

2nd Generation Variable Pitch

developed as KDPH range

TC Range with

Variable Pitch

3rd Generation

“Square Cut Screw”

Semi ‘S’ series only

Rietschle factors Kowel

KDP series as ‚

Twister VSA Range

Kinney factored Korean

manufactured Kowel KDP

Reciprocal agreement see

Kowel factor Kinney LRP’s

Kinney factored Korean

manufactured Kowel KDPH

series as the SDV range.

Reitschle factors Kowel

KDPH series as

Twister VSB range

SIHI 3rd Generation

“Square Cut Screw” with

NO compression plate.

Edwards CDX 3rd

Generation Screw.

Parallel variable pitch

square screws, no

compression plate,

indirect cooling

Leybold 3rd Generation No

gas or water. Cheap,

innovative but not for

chemical plants

Screw

Generations

Page 42: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Square Screw Design

• Stepped changes of pitch –

don’t blend into each other

so harder to manufacture

• Tapered design

• Discrete variable pitch for

good thermal control

• Tip leakage limits pitch &

hence swept volume –

compromises light gas

performance

Page 43: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Tapered Quimby

• No limit to the length of pitch

• Greater throughput can be achieved using Quimby screw in the same stator as a square screw

• Conjugate screw form – good sealing hence relatively good light gas performance

• ‘Discrete variable pitch for good thermal control

• More expensive to manufacture than square form

Page 44: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Screw Machines

Screws

Tapered

screws for tight

clearances

without

coatings.

Screws not

matched pairs

Page 45: Dry Pump Technology Pump Technology Today.pdfatmosphere – 2:1 compression ratio • Tolerant of solid material ... cut 2nd Generation •– Variable Pitch ‘Queen Bee’ or Quimby

Finally

• Thanks to Edwards for information and illustrations

• However, presentation and any errors or omissions

are entirely my responsibility