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DIGITALLY-TUNABLE MEMS FILTER USING MECHANICALLY-COUPLED
RESONATOR ARRAY
Hengky Chandrahalim and Sunil A. BhaveOxideMEMS Lab, Electrical and Computer Engineering, Cornell University, Ithaca,
New York, USA
Advisor : Cheng-Hsien Liu
Reporter : Ming-Yen Chen
Date : 2008/6/11
Background-1
S.A. Bhave, and R.T. Howe, “Silicon nitride-on-silicon bar resonator using internal electrostatic transduction,” Transducers’05, Seoul, Korea, June 5-9, 2005, pp. 2139-2142.
100nm SiN
3um SOI
Poly electrode
Background-2
f = (n/2L) (E/ρ)^1/2
E : effective elastic modulus for 2D expansion
ρ: density of the resonator respectively
n : harmonic order
Center frequency : 511 MHz
Experimental results-2
2. DC1=DC3=40V, DC2=DC4= -40V
resonator 1 and 2 : Out of plane
Lower sub-band filter
Conclusion
1. Digital tuning at 509 MHz with 1.4 MHz bandwidth and with sub-bands 700 kHz wide.
2. More resonators will provide finer
sub-bands.