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3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 1
DIAMOND SMART WINDOWS FOR X-RAY TUBES
Colin DELFAUREFrench Atomic Energy Commission
LIST Institute, Diamond Sensors Laboratory France
DIAMOND SMART WINDOWS FOR X-RAY TUBES
C. Delfaure, P. Bergonzo,N. Tranchant, S. Saada
J-P. Mazellier
P. Ponard
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 2
X-Ray tube fabricationLeading market
MOTIVATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 3
• Medical Imaging• Radiotherapy• Non-destructive Control
X-Ray tube fabricationLeading market
MOTIVATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 4
• Medical Imaging• Radiotherapy• Non-destructive Control
Micro/nano focus tubes
50 mm
X-Ray tube fabricationLeading market
MOTIVATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 4
• Medical Imaging• Radiotherapy• Non-destructive Control
Micro/nano focus tubes
Radiography of cavitation phenomenon in a micro heat-pipe device (taken with a µfocus tube)
X-Ray tube fabricationLeading market
MOTIVATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 4
Ultra high resolution
• Medical Imaging• Radiotherapy• Non-destructive Control
Micro/nano focus tubes
50 mm
Radiography of cavitation phenomenon in a micro heat-pipe device (taken with a µfocus tube)
X-Ray tube fabricationLeading market
MOTIVATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 4
Micro/nano focus tubes
Ultra high resolution
• Medical Imaging• Radiotherapy• Non-destructive Control
In-line dose measurement
50 mm
Radiography of cavitation phenomenon in a micro heat-pipe device (taken with a µfocus tube)
X-Ray tube fabricationLeading market
MOTIVATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 4
Over heatingUltra high resolution
In-line dose measurement
• Medical Imaging• Radiotherapy• Non-destructive Control
Micro/nano focus tubes
50 mm
Radiography of cavitation phenomenon in a micro heat-pipe device (taken with a µfocus tube)
X-Ray tube fabricationLeading market
MOTIVATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 4
Over heatingUltra high resolution
In-line dose measurement
• Medical Imaging• Radiotherapy• Non-destructive Control
15µm
Micro/nano focus tubes
Thermal damages on the target of a µfocus tube
X-Ray tube fabricationLeading market
MOTIVATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 4
Over heating
Current instability
Ultra high resolution
• Medical Imaging• Radiotherapy• Non-destructive Control
15µm
Micro/nano focus tubes
Thermal damages on the target of a µfocus tube
In-line dose measurement
X-Ray tube fabricationLeading market
MOTIVATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 4
Over heating
Current instability
Solution : diamond smart window[PATENTED]
Ultra high resolution
• Medical Imaging• Radiotherapy• Non-destructive Control
Diamond thermal conductivity
Real-time detection functionality
15µm
Micro/nano focus tubes
In-line dose measurement
Thermal damages on the target of a µfocus tube
THERMAL MODELISATION
How much better is a diamond window ?
Development of an analytical thermal model
Predict the temperature distribution
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 5
How much better is a diamond window ?
Development of an analytical thermal model
Predict the temperature distribution
Reliable : multiple FEM comparisons
0 1 2 3 4 5 6 7 8 9 100
200
400
600
800
1000
1200
1400
1600
1800
2000
Model
Model
FE Simulation
FE Simulation
linear
T
max (
°)
Q (W)
Non-linear
THERMAL MODELISATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 5
Diameter : 1cm Thickness : 100µm
Maximal T° increase in a diamond window versus the power of the tube
THERMAL MODELISATION
How much better is a diamond window ?
Development of an analytical thermal model
Predict the temperature distribution
Reliable : multiple FEM comparisons
Realistic :•Non-linear conductivities•Gaussian e- beam• Radiation/convection
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 5
0 1 2 3 4 5 6 7 8 9 100
200
400
600
800
1000
1200
1400
1600
1800
2000
Model
Model
FE Simulation
FE Simulation
linear
T
max (
°)
Q (W)
Non-linear
Diameter : 1cm Thickness : 100µm
Maximal T° increase in a diamond window versus the power of the tube
How much better is a diamond window ?
Model results
T° benefit when using diamond instead of Be
THERMAL MODELISATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 6
FE simulation of temperature distribution within a 100µm diamond window
subjected to a 8.5W microfocus spot
293 2500 K
How much better is a diamond window ?
Model results
T° benefit when using diamond instead of Be
THERMAL MODELISATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 6
293 2500 K
Top surface :
Detector working temperature
FE simulation of temperature distribution within a 100µm diamond window
subjected to a 8.5W microfocus spot
How much better is a diamond window ?
Model results
T° benefit when using diamond instead of Be
THERMAL MODELISATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 6
293 2500 K
Beryllium Diamond
Analytical model results
FE simulation of temperature distribution within a 100µm diamond window
subjected to a 8.5W microfocus spot
λ ≈ 2000 W/m/Kλ≈200 W/m/K
Top surface :
Detector working temperature
How much better is a diamond window ?
Model results
T° benefit when using diamond instead of Be
THERMAL MODELISATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 6
293 2500 K
- 260K on the top surface
Beryllium Diamond
FE simulation of temperature distribution within a 100µm diamond window
subjected to a 8.5W microfocus spot
Analytical model resultsλ ≈ 2000 W/m/Kλ≈200 W/m/K
Top surface :
Detector working temperature
How much better is a diamond window ?
Model results
T° benefit when using diamond instead of Be
THERMAL MODELISATION
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 6
293 2500 K
- 260K on the top surface
Beryllium Diamond
- 940K under the e- beam
FE simulation of temperature distribution within a 100µm diamond window
subjected to a 8.5W microfocus spot
λ ≈ 2000 W/m/Kλ≈200 W/m/K
Top surface :
Detector working temperature
Under e- beam
Modelling the mechanical behavior
Critical thickness : 9µm for 1cm diam. windows
MECHANICAL BEHAVIOR
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 7
Modelling the mechanical behavior
Critical thickness : 9µm for 1cm diam. windows
MECHANICAL BEHAVIOR
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 7
Safety coeff. x10
Modelling the mechanical behavior
Critical thickness : 9µm for 1cm diam. windows
Bulging test on fabricated windows
Measure of the fracture strength :
MECHANICAL BEHAVIOR
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 7
σstrength= 380 MPa0 1 2 3 4 5 6
0
200
400
600
800
1000
Fra
ctu
re s
trength
(M
Pa)
Sample #
Safety coeff. x10
Modelling the mechanical behavior
Critical thickness : 9µm for 1cm diam. windows
Bulging test on fabricated windows
Measure of the fracture strength :
Cyclic bulging (0-1000mbar) on brazed windows
MECHANICAL BEHAVIOR
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 7
Mechanical resilience above 104 cycles
UHV sealing abilities
σstrength= 380 MPa0 1 2 3 4 5 6
0
200
400
600
800
1000
Fra
ctu
re s
trength
(M
Pa)
Sample #
Safety coeff. x10
GROWTH OF DIAMOND WINDOWS
What properties for a diamond window ?
Optimization of the process
Classical 100µm diamond film
• Large grains
• High roughness
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 8
Top view
GROWTH OF DIAMOND WINDOWS
What properties for a diamond window ?
Optimization of the process
Classical 100µm diamond film
• Large grains
• High roughness
Target deposition ?
Deformed X-Ray beam ?
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 8
Top view
GROWTH OF DIAMOND WINDOWS
What properties for a diamond window ?
Optimization of the process
Classical 100µm diamond film
• Large grains
• High roughness
Target deposition ?
Deformed X-Ray beam ?
Textured 100µm diamond film• Large grains
High thermal conductivity
• Texture {100}{111}<100>Low roughness
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 8
Top view
Top view
GROWTH OF DIAMOND WINDOWS
What properties for a diamond window ?
Optimization of the process
Classical 100µm diamond film
• Large grains
• High roughness
Target deposition ?
Deformed X-Ray beam ?
Textured 100µm diamond film• Large grains
High thermal conductivity
• Texture {100}{111}<100>Low roughness
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 8
0 2 4 60.0
0.1
0.2
0.3
0.4
Specula
r re
flectivity
t (h)
0.000
0.005
0.010
0.015
Diffu
se r
eflectivity (u
.a.)
In situ laser monitoring of the surface roughness
GROWTH OF DIAMOND WINDOWS
What properties for a diamond window ?
Optimization of the process
Classical 100µm diamond film
• Large grains
• High roughness
Target deposition ?
Deformed X-Ray beam ?
Textured 100µm diamond film• Large grains
High thermal conductivity
• Texture {100}{111}<100>Low roughness
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 8
Simultaneous synthesis of 10
optimized windows in 50h
YAG laser post processingGrowth rate : 2µm/h @1,5kW, 90mbar
0 2 4 60.0
0.1
0.2
0.3
0.4
Specula
r re
flectivity
t (h)
0.000
0.005
0.010
0.015
Diffu
se r
eflectivity (u
.a.)
In situ laser monitoring of the surface roughness
Make it smart !
Polycrystalline diamond detector
SMART DIAMOND WINDOWS
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 9
Make it smart !
Polycrystalline diamond detector
SMART DIAMOND WINDOWS
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 9
Top view
Doped
diamond
back
contact
Metal
top
contact
Make it smart !
Polycrystalline diamond detector
Characterized under ebeam
SMART DIAMOND WINDOWS
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 9
Top view
Doped
diamond
back
contact
Metal
top
contact
20keV electron beam direct characterization in progress..
RX
e-
Make it smart !
Polycrystalline diamond detector
Characterized under ebeam
SMART DIAMOND WINDOWS
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 9
Top view
Doped
diamond
back
contact
Metal
top
contact
20keV electron beam direct characterization in progress..
RX
e-
0 50 100 150 200
0
1
2
3
4
5
6
I (n
A)
t (s)
Make it smart !
Polycrystalline diamond detector
Characterized under ebeam
SMART DIAMOND WINDOWS
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 9
Top view
Doped
diamond
back
contact
Metal
top
contact
20keV electron beam direct characterization in progress..
RX
e-
0 50 100 150 200
0
1
2
3
4
5
6
I (n
A)
t (s)
Make it smart !
Polycrystalline diamond detector
SMART DIAMOND WINDOWS
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 10
Material to optimize
Make it smart !
Polycrystalline diamond detector
Monopoly window
Single crystal : higher detection properties
Polycrystalline matrix : large area
SMART DIAMOND WINDOWS
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 10
Material to optimize
PolyMono
Make it smart !
Polycrystalline diamond detector
Monopoly window
Single crystal : higher detection properties
Polycrystalline matrix : large area
SMART DIAMOND WINDOWS
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 10
PolyMono
Material to optimize
Top view
Make it smart !
Polycrystalline diamond detector
Monopoly window
Single crystal : higher detection properties
Polycrystalline matrix : large area
Pre-tested under X-Ray exposure
SMART DIAMOND WINDOWS
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, 10
Optimal detection signal
0 20 40 60 80 100
0,01
0,1
1
10
I (n
A)
t (s)
X-Ray ON X-Ray ON
Material to optimize
PolyMono
Top view
• Submicrofocus tubes : thermal issues and current instabilities
Diamond smart windows
• 100µm windows gives a substantial T° benefit
• Diamond smart windows can be brazed
mechanical resilience above 104 cycles + UHV sealing abilities
• 10 optimized and textured windows in 50h
• Qualification of a diamond smart windows under e-beam
• First step of monopoly characterization under X-Ray exposure
SUMMARY
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, | 11
• Submicrofocus tubes : thermal issues and current instabilities
Diamond smart windows
• 100µm windows gives a substantial T° benefit
• Diamond smart windows can be brazed
mechanical resilience above 104 cycles + UHV sealing abilities
• 10 optimized and textured windows in 50h
• Qualification of a diamond smart windows under e-beam
• First step of monopoly characterization under X-Ray exposure
Contact : [email protected]
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, | 11
• Submicrofocus tubes : thermal issues and current instabilities
Diamond smart windows
• 100µm windows gives a substantial T° benefit
• Diamond smart windows can be brazed
mechanical resilience above 104 cycles + UHV sealing abilities
• 10 optimized and textured windows in 50h
• Qualification of a diamond smart windows under e-beam
• First step of monopoly characterization under X-Ray exposure
Thank you for your attention
Contact : [email protected]
3rd ADAMAS Collaboration Meeting, ECT, 11/19-20, 2014, | 11
