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DaCOS12 Lecture Part 14 Optical System Classification 114
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Design and Correction of optical Systems
Part 14: Optical system classification
Summer term 2012
Herbert Gross
1
Overview
1. Basics 2012-04-18
2. Materials 2012-04-25
3. Components 2012-05-02
4. Paraxial optics 2012-05-09
5. Properties of optical systems 2012-05-16
6. Photometry 2012-05-23
7. Geometrical aberrations 2012-05-30
8. Wave optical aberrations 2012-06-06
9. Fourier optical image formation 2012-06-13
10. Performance criteria 1 2012-06-20
11. Performance criteria 2 2012-06-27
12. Measurement of system quality 2012-07-04
13. Correction of aberrations 1 2012-07-11
14. Optical system classification 2012-07-18
2012-04-18
14.1 Overview and classification
14.2 Achromate
14.3 Collimator
14.4 Microscope optics
14.5 Photographic optics
14.6 Zoom lenses
14.7 Telescopes
14.8 Miscellaneous
14.9 Lithographic projection systems
Content
Field-Aperture-Diagram
0.20 0.4 0.6 0.80°
4°
8°
12°
16°
20°
24°
28°
32°
36°
NA
w
40°
micro100x0.9
doubleGauss
achromat
Triplet
micro40x0.6
micro10x0.4
Sonnar
Biogon
splittriplet
Distagon
disc
projectionGauss
diodecollimator
projection
Petzval
micros-copy
collimatorfocussing
photographic
projection constantetendue
lithographyBraat 1987
lithography2003
� Classification of systems with
field and aperture size
� Scheme is related to size,
correction goals and etendue
of the systems
� Aperture dominated:
Disk lenses, microscopy,
Collimator
� Field dominated:
Projection lenses,
camera lenses,
Photographic lenses
� Spectral widthz as a correction
requirement is missed in this chart
1. Photo objective lens
2. Microscope objective lens
3. Binocular
4. Infrared afocal system
Typical Example Systems 1
5. Relay optics
6. Scan-objective lens
7. Collimator objective lens
Typical Example Systems 2
possible surfaces under test
8. Projector lens
9. Telescope
10. Lithography projection
lens
Typical Example Systems 3
M1
M2
M3
11. Illumination collector system
12. Illumination condenser system
13. Head mounted display
Typical Example Systems 4
eyepupil
image
totalinternal
reflection
free formedsurface
free formed
surface
field angle 14°
14. Stereo microscope
15. Zoom system
Typical Example Systems 5
eyepiece
tube
system zoom
system objectplane
eye
common
axis
stereo
angle
common
objectivelens
f = 61
f = 113
f = 166
� Achromate:
- Axial colour correction by cementing two
different glasses
- Bending: correction of spherical aberration at the
full aperture
- Aplanatic coma correction possible be clever
choice of materials
� Four possible solutions:
- Crown in front, two different bendings
- Flint in front, two different bendings
� Typical:
- Correction for object in infinity
- spherical correction at center wavelength
with zone
- diffraction limited for NA < 0.1
- only very small field corrected
Achromate
solution 1 solution 2
Crown in
front
Flint in
front
Achromate: Realization Versions
� Advantage of cementing:
solid state setup is stable at sensitive middle surface with large curvature
� Disadvantage:
loss of one degree of freedom
� Different possible realization
forms in practice
Achromate : Basic Formulas
� Idea:
1. Two thin lenses close together with different materials
2. Total power
3. Achromatic correction condition
� Individual power values
� Properties:
1. One positive and one negative lens necessary
2. Two different sequences of plus (crown) / minus (flint)
3. Large ν-difference relaxes the bendings
4. Achromatic correction indipendent from bending
5. Bending corrects spherical aberration at the margin
6. Aplanatic coma correction for special glass choices
7. Further optimization of materials reduces the spherical zonal aberration
21FFF +=
0
2
2
1
1=+
νν
FF
FF ⋅
−
=
1
2
1
1
1
ν
νFF ⋅
−
=
2
1
2
1
1
ν
ν
case without solution,
only sperical minimum
case with 2 solutions
case with
one solutionand coma
correction
∆∆∆∆s'rim
R1
Achromate: Correction
� Cemented achromate:6 degrees of freedom:3 radii, 2 indices, ratio ν1/ν2
� Correction of spherical aberration:diverging cemented surface with positivespherical contribution for nneg > npos
� Choice of glass: possible goals1. aplanatic coma correction2. minimization of spherochromatism3. minimization of secondary spectrum
� Bending has no impact on chromaticalcorrection:is used to correct spherical aberrationat the edge
� Three solution regions for bending1. no spherical correction2. two equivalent solutions3. one aplanatic solution, very stable
Achomatic solutions in the Glass Diagram
Achromat
flint
negative lens
crown
positive lens
Achromate
� Achromate
� Longitudinal aberration
� Transverse aberration
� Spot diagram
rp
0
486 nm
587 nm
656 nm
0.1 0.2
∆∆∆∆s'
[mm]
1
axis
1.4°
2°
486 nm 587 nm 656 nm
λλλλ = 486 nm
λλλλ = 587 nm
λλλλ = 656 nm
sinu'
∆∆∆∆y'
Achromate
� Residual aberrations of an achromate
� Clearly seen:
1. Distortion
2. Chromatical magnification
3. Astigmatism
Collimation
D
source
θθθθG/2divergence
f
u
� Collimating source radiation:
Finite divergence angle is reality
� Geometrical part due to finite size :
� Diffraction part:
� Defocussing contribution to divergence
f
DG ====θ
DD
λθ ====
uf
zsin
2⋅⋅⋅⋅−−−−====
∆∆θ
Collimator Optics
spherical
coma
astigmatism
curvature
distortion
1 2 3 sum
-0.1
0
0.1
-5
0
5
-2
0
2
-2
0
2
-4
-2
0
2
4
4
� Monochromatic doublet
� Correction only spherical and coma:
Seidel surface contributions
Limiting : astigmatism and curvature
� Enlarged aperture : meniscus added
Collimator Optics
0.2
0.5
0.1
0
0.05
0.15
Wrms
w [°]0 0.1 0.2 0.3 0.4
diffraction limit
NA = 0.124NA = 0.187NA = 0.277
a) NA = 0.124
b) NA = 0.187
c) NA = 0.277
� Enlarging numerical aperture by aplanatic-concentric meniscus lenses
� Extreme good correction of spherical aberration
Microscopy - Image Planes and Pupils
� Upper row : image planes
� Lower row : pupil planes
� Köhler setup
Upright-Microscope
� Sub-systems:
1. Detection / Imaging path
1.1 objective lens
1.2 tube with tube lens and
binocular beam splitter
1.3 eyepieces
1.4 optional equipment
for photo-detection
2. Illumination
2.1 lamps with collector and filters
2.2 field aperture
2.3 condenser with aperture stop
eyepiece
photocamera
tube lens
objectivelens
lamp
lamp
collector
collector
condensor
intermediateimage
binocularbeamsplitter
object
film plane
Microscope Objective Lens
� Seidel surface contributions
for 100x/0.90
� No field flattening group
� Lateral color in tube lens corrected
5 10
-0.5
0
0.5
-0.02
0
0.02
-4
-2
0
2
4
-5
0
5
-2
0
2
-0.02
0
0.02
-1
0
1
spherical
coma
astigmatism
curvature
distortion
axial
chromatic
lateral
chromatic
1
518
11
13
sum
Microscope Objective Lens: Flattening
� Three different classes:
1. No effort
2. Semi-flat
3. Completely flatD
S
rel.field
0 0.5 0.707 1
1
0.8
0.6
0.4
0.2
0
diffractionlimit
plane
semiplane
notplane
Microscope Objective Lens
� Possible setups for flattening
the field
� Goal:
- reduction of Petzval sum
- keeping astigmatism corrected
d)achromatized
meniscus lens
a)single
meniscuslense
e)
twomeniscuslenses
achromatized
b)twomeniscus
lenses
c)symmetricaltriplet
f)
modIfiedachromatizedtriplet solution
Microscopic Objective Lens
mechanical
setup
� Families of photographic lenses
� Long history
� Not unique
Classification
Singlets
LandscapeAchromatic
Landscape
Petzval, Portrait
Petzval,Portrait flat R-Biotar
Petzval
PetzvalProjection
Quasi-Symmetrical Angle
Pleon
Panoramic
Lens
Extrem Wide Angle
Fish Eye
VivitarRetrofocus II
Wide Angle Retrofocus
Distagon
SLR
Flektogon
Retrofocus
PlasmatKino-Plasmat
Ultran
Noctilux
Quadruplets
Double Gauss
Biotar / Planar
Double Gauss II
Celor
Compact
Special
Plastic AsphericII
IR Camera Lens
Catadioptric
UV Lens
PlasticAspheric I
Telephoto
Telecentric II
Telecentric I
Super-Angulon
Hologon
MetrogonTopogon
Hypergon
Pleogon
Biogon
Triplet
Triplets
Inverse Triplet
Heliar Hektor
Pentac
Sonnar
Ernostar II
Less Symmetrical
Ernostar
Orthostigmatic
Symmetrical Doublets
Periskop
RapidRectilinear
Aplanat
Dagor
Dagor
reversed
Angulon
Protar
AntiplanetUnar
Quasi-Symmetrical Doublets
Tessar
� Tessar
� Double Gauss
� Super Angulon
Photographic Lenses
� Distagon
� Tele system
� Wide angle
Fish-eye
� Example lens 2
� Distagon
Retrofocus Lenses
� Nikon 210°
� Pleon
(air reconnaissance)
Fish-Eye-Lens
Change of Focal Length
� Distance t increased
� First lens fixed
moved
lenschanged
distance
t changed focal
length f
Change of Focal Length
� Distance t increased
� Image plane fixed
two lenses moved
t f
image
plane
Performance Variation over z
� System layout
f = 200 mm
f = 100 mm
f = 50 mm
f = 67 mm
f = 133 mm
f1 f
2f3 f
4
t2
Performance Variation over z
Seidel
surface
contrib.
coma distortion axial chromatical lateral chromatical
lens 1
lens 2
lens 3
sum
spherical aberration
1 2 3 4 5
1 2 3 4 5
1 2 3 4 5
1 2 3 4 5
-0.1
0
0.1
-0.1
0
0.1
-0.1
0
0.1
-0.1
0
0.1
1 2 3 4 5
1 2 3 4 5
1 2 3 4 5
1 2 3 4 5
-0.2
-0.1
0
0.1
0.2
-0.2
-0.1
0
0.1
0.2
-0.2
-0.1
0
0.1
0.2
-0.2
-0.1
0
0.1
0.2
1 2 3 4 5
-5
0
5
1 2 3 4 5
-5
0
5
1 2 3 4 5
-5
0
5
1 2 3 4 5
-5
0
5
1 2 3 4 5
-5
0
5
1 2 3 4 5
-5
0
5
1 2 3 4 5
-5
0
5
1 2 3 4 5
-5
0
5
1 2 3 4 5
-0.5
0
0.5
1 2 3 4 5
-0.5
0
0.5
1 2 3 4 5
-0.5
0
0.5
1 2 3 4 5
-0.5
0
0.5
� Zoom lens
� Three moving groups
Zoom Lens
e)f' = 203 mmw = 5.64°F# = 16.6
d)f' = 160 mmw = 7.13°F# = 13.7
c)f' = 120 mmw = 9.46°F# = 10.9
b)f' = 85 mmw = 13.24°F# = 8.5
a)f' = 72 mmw = 15.52°F# = 7.7
group 1 group 2 group 3
Basic Refractive Telescopes
� Kepler typ:
- internal focus
- longer total track
- Γ > 0
� Galilei typ:
- no internal focus
- shorter total track
- Γ < 0
Telescopepupil
intermediatefocus
Eyepiece
Eye pupil
telescope focal length fT
eyepiece focal length f
ETelescopepupil
Eye pupil
telescope focal length fT
eyepiece focal length f E
a) Kepler/Fraunhofer
b) Galilei
Catadioptric Telescopes
� Maksutov compact
� Klevtsov
M1
M2
L1
L2L3 L4, L5
M1
L1, L2
M2
Astronomical Telescope
Primary and
secondary mirror
Telecentric Systems
∆∆∆∆wtele
[°]
y'/y'max
0 0.2 0.4 0.6 0.8 1-0.1
0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
chiefray
centre ray
axis
3°
5°
486 nm 587 nm 656 nm
� Typical :
system layout with two groups
� Telecentricity error due to vignetting
� Telecentricity forces large diameters
Relay Systems: Endoscopes
� Transport over large distances
� Combination of several relay subsystems
� Large field-angle objective lens
� Applications: Technical or medical
� Different subsystems:
objective 1. relay 2. relay 3. relay
0.5
486 nm
587 nm656 nm
0.4
00 0.4
Wrms
[λλλλ]
0.8 1.2 21.6
y'[mm]
0.3
0.2
0.1
diffraction limit
Handy Phone Objective lenses
� Examples
Ref: T. Steinich
Beam Guiding Systems
ΓΓΓΓ = 5
ΓΓΓΓ = 5
ΓΓΓΓ = 4
ΓΓΓΓ = 50
ΓΓΓΓ = 4
a)
b)
c)
d)
e)
adjustment
� Transport of laser light over large
distances
� Adaptation of beam diameter
� Solutions :
Telescopes of Kepler or Galilei type
Beam Guiding Systems
dark colours : Kepler / bright colours : Galilei
-0.02
0
0.02
-0.01
0
0.01
-2
0
2
-2
0
2
-1
0
1
spherical
coma
astigmatism
curvature
distortion
sum4321
� Comparison:
Kepler:
- internal focus
- large overall length
Galilei:
- shorter length
- better correction
Navarro Eye Model
� Wide angle model for larger fields
� Parameters for all accomodations
� Description of chromatical aberrations
30°
20°
15°
0°
0°
459 nm 550 nm 632 nm
15°
20°
30°
Optical Illusion
The rings seems
to move
Abbe Orthoscopic Eyepiece
� Distortion corrected
� General problems with eyepieces:
- remote eye pupil
- typical eye relief 22 mm
-1.000 0.000 1.000
0.250
0.500
0.750
1.000
LONGITUDINALSPHERICAl ABER.
DIOPTER
-3.000 0.000 3.000
2.000
4.000
6.000
8.000
tan sag
ASTIGMATICFIELD CURVES
DIOPTER
-20.00 0.00 20.00
2.000
4.000
6.000
8.000
DISTORTION
Distortion (%)
0°
10°
18°
20 a
rcm
in
Scan System
� Non-telecentric
� Scan angle 2x30°
� Monochromatic
� F-θ-corrected
a) standard distortion
-10%
1
0.5
y/ymax
b) f-θθθθ-distortion
0 10% -0.2% 0 0.2%
1
0.5
y/ymax
0
0.1
0.08
0.06
0.04
0.02
0
Wrms
[λλλλ]
15° 30°θθθθ
c) wave aberration
0° 5° 10°
20°
15°
24° 28° 30.4°
Lithographic Lenses
System with
1. Illumination (horizonthal)
2. Mask projection (vertical)
Lithographic Lens Example Layouts
reticle
mask
stop
mask
reticle
stop
1. relay group
2. relay group
reticle
wafer
mirrorwith relay
group
intermediateimage
Lithographic Optics
� EUV α-Tool 2008
Summary of Important Topics
� A possible classification of optical systems is a sorting into field size and aperture size
� Aperture, field size and width of wavelength range are responsable for complexity
� Achromate: chromatical and spherical correction
� Achromate: additional degree of freedom allows for coma correction or reduction of
spherochromatism
� Achromate: different realization options possible
� There exist quite different types of optical systems with individual specific problems
50
Outlook
Next lecture: Special lectures and applications in the context of optical design
Date: Winter term / October 2012