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Czerny-Turner Monochromator Analysis of Diffraction Efficiency Optical Metrology > Monochromator

Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

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Page 1: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Czerny-Turner Monochromator − Analysis of Diffraction Efficiency

Optical Metrology > Monochromator

Page 2: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Task/System Illustration

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diffraction efficiency

?

intensity

?

Page 3: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Highlights

• high-performance analysis of complex optical systems• full vectorial analysis of gratings by using rigorous algorithm (FMM)

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Page 4: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Specification: Light Source

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Parameter Description / Value & Unittype plane wavewavelengths 463 nm, 496 nm, 535 nmpolarization linear in x-direction (0°)

here

Page 5: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Specification: Apertures

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here

here

Parameter Description / Value & Unitwidth of entrance aperture 500 µmwidth of detector aperture 649 µm

Page 6: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Specification: Parabolic Mirrors

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Parameter Description / Value & Unittype parabolic mirrormaterial ideal high-reflective materialfocal length 100 mmdiameter 20 mmtilt angle 5°reflectance 100%

here

Page 7: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Specification: Grating

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Parameter Description / Value & Unitgrating period 833 nmgrating height 282.4 nm (optimized for -1st order efficiency)blaze angle 18.7°grating material silver (Ag)substrate material silver (Ag)

here

gratingheight

grating periodblaze angle

Page 8: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Specification: Detectors

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b

Position Modeling Technique Detector / Analyzerfull system

3D ray tracing 3D ray tracing system visualization

a Fourier modal method rigorous diffraction efficiency calculationb field tracing 2D intensity (real color view)

a

Page 9: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Result: 3D Ray Tracing

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source screen gratingdetectoraperture

parabolicmirror 1

entrance aperture

parabolicmirror 2

Page 10: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Result: Grating Diffraction Efficiency

grating efficiency for 1st diffraction order:

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Page 11: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Result: Grating Diffraction Efficiency

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463 nm: 496 nm: 535 nm:

intensity variations caused by different diffraction efficiency

Page 12: Czerny-Turner Monochromator Analysis of Diffraction … Grating Diffraction Efficiency 11 463 nm: 496 nm: 535 nm: ... Czerny-Turner Monochromator − Analysis of Diffraction Efficiency:

Document & Technical Info

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code MONO.0002version of document 1.0

title Czerny-Turner Monochromator − Analysis of Diffraction Efficiency

category Optical Metrologycreated by Rui Shi (LightTrans)used VL version 7.0.0.29

Specifications of PC Used for SimulationProcessor i7-4700MQ (1 CPU cores)RAM 16 GBOperating System Windows 8