Cryopump Equipmentfile.yizimg.com/303559/2008122711312464.pdf · pump relay coil. •Display: 32 character LCD for display of pressure, temperatures, set points and status. •Output

Cryopump EquipmentGuide 2004

AustinScientific

Austin Scientific Cryopumps

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Pumping SpeedAir 1500 l/sWater 4000 l/sHydrogen 2500 l/sArgon 1200 l/s

ThroughputArgon 700 scc/min.

Cryo-Plex® 8Capacity

Argon 1000 std. litersHydrogen 18 std. liters(at 5 x 10-6 torr)

Crossover150 torr liters

Cooldown Time1.5 hours

Inlet Flange6 inch ANSI(11.0 inch O.D.)ISO NW 20010 inch CF

DimensionsHeight 20.7 inchesWeight 45 pounds



Cryo-Plex® 8LPCapacity





DimensionsHeight 7.03 inchesLength 22.6 inchesWeight 42 pounds









Austin Scientific Toll free: 800.611.8871 Phone: +1.512.441.6893 FAX: 512.443.6665 email: [email protected]

Austin Scientific Cryopumps

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Inlet Flange16 inch CVC(17.7 inch O.D.)ISO NW 40010 inch CF


Call to inquire about your custom cryogenic applications. We have created abroad range of innovative and custom designs.

Custom Applications


Cryo Coolers

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*Loads applied simultaneously, with radiation shields in place.

Model 350 CS Cold Head

Performance (Refrigeration Capacity)* 20 watts at 77 K; 5 watts at 20 K

Weight 22 lb. (10 kg.)

Typical cool-down time to 20 K 50 min. (60 Hz), 65 min. (50 Hz). with no load Each pound (.45 kg) mass at cold end

increases cool-down time 25 min.



Weight 30 lb. (13.5 kg.)





Weight 30 lb. (13.5 kg.)




Cryopump Cryo-Absorbing Arrays

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*Registered Trademark of HelixTechnology Corp.

Mfgr. Pump Fig. Mfgr. P/N ASC P/N

ASC Cryo-Plex® 8 G 15KCA-CP8 15KCA-CP8 ASC Cryo-Plex® 10 H 15KCA-CP10 15KCA-CP10 ASC Cryo-Plex® 16 J 15KCAA-400 15KCAA-400 ASC Cryo-Plex® 8LP I 15KCA-CP8LP 15KCA-CP8LP CTI Cryotorr® - 8* A 8080002K010 15KCA-8 CTI Cryotorr® - 10* B 8080007K010 15KCA-10 CTI Cryotorr® - 100* E 8080006K003 15KCA-100 CTI Cryotorr® - 8F* C 8080007K010 15KCA-8F CTI Cryotorr® - 400 * J 8080004K003 15KCA-400 CTI On-Board® - 8* A 8080010K008 15KCA-8 CTI On-Board® - 10* B 8080012K003 15KCA-10 CTI On-Board® - 400* J 8080013K004 15KCA-400

Note: All array kitsinclude gasket set,

fasteners, tool,gloves, o-ring and

instructions.

Contact Austin Scientificfor pricing on

models not listed.

A B C D

E G

H I J


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M600 Helium Compressor

Helium Flow (At 300 psi supply pressure, 100 psi return pressure)

Minimum required water Flow

Envelope

Static Charge

Weight

Cold Head Drive

Power Input (3 phase)

Power Consumption

60 SCFM

1.5 Gallons/Minute

21” tall x 17.25” wide x 19.75” deep

220 psi

220 lbs

Options available for driving a varietyof cold heads

High Voltage Unit:380V, 415V +/- 10% @ 50 Hz +/- 3%480V +/- 10% @ 60 Hz +/- 3%Low Voltage Unit:200V +/- 10% @ 50 Hz +/- 3%200V, 230V +/- 10% @ 60 Hz +/- 3%

8-9 kW

Specifications

M600 Features

• High and low voltage units available for use at both 50 Hz and 60 Hz

• Water flow meter provides user feed back to ensure adequate water supply

• Adsorber can be replaced from the front of the unit,permitting convenient rack or cabinet installation

• Both high and low side pressure gauges• Compressor can be controlled remotely• Electrical box is a field replaceable unit• Quiet, low vbration


7

Austin Scientific Compressors

Air or Water Cooled

Air Cooled only


Helium Throughput12.5 SCFM

DimensionsLength 19.0 inchesWidth 19.5 inchesHeight 16.0 inches

Weight160 pounds

Model 125 Electrical Power208/230 VAC10, 60 Hz, 1.5 KW

190/210 VAC10, 50 Hz, 1.5 KW

210/240 VAC10, 50 Hz, 1.5 KW

Largest compatibleCryopump

CTI Cryo-torr 8*ASC Cryo-Plex 8

CoolingAir or Water

Helium Throughput45 SCFM

DimensionsLength 23.6 inchesWidth 23.6 inchesHeight 27.6 inches

Weight310 pounds

Model 450 Electrical Power208/230 VAC30, 50/60 Hz, 5 KW

460 VAC, 3060 Hz, 5 KW

380 VAC,3050 Hz, 5 KW

Largest compatibleCryopump

CTI Cryo-torr 500*ASC Cryo-Plex 16

CoolingAir or Water


Cryopump Compressor Adsorbers

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A B C D E

F G H I J K

Austin Scientific replacement adsorbers are fabricated using new dehydrated charcoal, glass, wool, felt pads and Aeroquipcouplings. All units are carefully cleaned, packed, leak checked, decontaminated and charged with 99.999% pure helium.

Manufacturer Compressor Fig. Mfg. P/N ASC P/N ReplacementModel Interval

CTI-Cryogenics 9600 A 8080300K001 AD-9600 3 yearsCTI-Cryogenics 8500/8510 A 8080275K001 AD-8500 3 yearsCTI-Cryogenics 8200 A 8080255K001 AD-8200 1 yearCTI-Cryogenics 8300 B 8080280K001 AD-8300 1 yearCTI-Cryogenics 1020 C 8080260K001 AD-1020 1 yearCTI-Cryogenics SC A 8080255K001 AD-SC 1 yearCTI-Cryogenics MC D 8080265K001 AD-MC 1 yearAPD Cryogenics HC-2/4 F 256390D AD-HC 1 yearAir Products 1L02W/1R02W E 202530C AD-202 1 yearVarian 202 E 9171010 AD-202 1 yearVarian (Ebara) 313/323/2.1 G 313-0200 AD-0200 1 yearLeybold RW3/RA3 H 89184 AD-RW3 2 yearsLeybold RW4000/6000 I 89354 AD-4000 2 yearsAustin Scientific 125W B 80034 AD-125W 1 yearAustin Scientific 125A J 80111 AD-125A 1 yearAustin Scientific 450 C 80025 AD-450 3 yearsAustin Scientific 600 K 800?? AD-600 3 years


Helium Lines and Fittings

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Austin Scientific helium lines and adapters arefabricated from stainless steel and equipped withAeroquip couplings. All assemblies are carefullycleaned, leak checked, decontaminated andcharged with 99.999% pure helium. Special configurations are also available.

1/2 in. Line with 1/2 in. CouplingsAny length available Call for part no.(Add -90 for elbow on one end)

3/4 in. Line with 1/2 in. Couplings(Add -90 for elbow on one end)

Helium TeeP/N T-MMF

Maintenace ManifoldP/N 10134

Helium Bulkhead UnionP/N BU-MM

Helium ElbowP/N EL-MF

Three Part ManifoldP/N 80075

Cryopump Helium FittingsItem Description P/N

A CT-8 Return 80021-1B CT-8 Supply 80021-2C CT-10 Supply 80021-3

(includes o-rings and screws)

Helium Charge LineP/N 1034610 ft. SS Charge Line

Helium RegulatorP/N HR-580Regulator Assy.

Helium Lines

Aeroquip FittingsItem Description P/N

A Coupling, Female 5400-S5-8B Dust Plug 5400-S8-8C Coupling, Male 5400-S2-8D Dust Cap 5400-S6-8E Flat Gasket 22008-8F O-ring 22546-17


Power Supplies, Splitters and Cables

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P/N 10142 Drives one ASC or CTI type cryopump with RC network, 115VAC input.

P/N 10349 Drives one CTI OnBoard®

cryopump with RC network, 208 - 230VAC input single phase.

P/N 10358 Drives one CTI OnBoard®

cryopump with coldhead drive inputfrom 8500 compressor or similar(adds OnBoard voltages for acces-sories, control), 208 - 230 VAC inputsingle phase.

P/N 10359, Three Cryo-Torr® typeoutput, input from ASC Model 450or CTI Model 8500.

P/N 10144-Length (Ft), Cryo-Torr® typefor CTI and ASC Cryopumps andCompressors.

P/N 10366, Three On-Board® typeoutputs, input from CTI Model 9600.

P/N 10350-Length (Ft), On-Board® typefor CTI On-Board Cryopumps andCompressors.

P/N 10355-Length (Ft), Drives Cryo-Torr® type pump from On-Board®

Compressor (8510).

Power Supplies

Splitter Boxes

Drive Cables


Model 2100 AutomaticCryopump Control

Model 310 and 320Cryopump Monitors

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• Dual silicon diode temperature digital readout with three adjustable set points.

• Thermocouple vacuum gauge digital readoutwith two adjustable set points.

• Programmable microprocessor based system for analysis and control.

• Stores parameters for last ten regenerations for review.• Automatically provides power for roughing valve, purge

gas valve, heaters, compressor relay coil and mechanical pump relay coil.

• Display: 32 character LCD for display of pressure, temperatures, set points and status.

• Output power: Roughing valve - 1 Amp @ 120VPurge gas valve - 1 Amp @ 120VHeaters (2) - 500 Watts, 120V (each)Compressor relay coil - 1 Amp @ 120VMechanical pump relay coil - 1 Amp @ 120V

• Relay contacts: Cold relay - N.O. and N.C., 5 Amps• External interlock: Provision for Hivac Valve position switch• Input power: 120VAC or 240VAC 50/60 Hz (specify)• Dimensions: Height 3.5 in., Width 19 in., Depth, 8 in.

Standard Items• Automatic Cryopump control unit• Power cord 6 ft.• Thermocouple cable 10 ft.• Silicon diodode cable 10 ft. (single)

Optional Items• Single relay contactor in NEMA enclosure 30A, 3 Pole forcompressor or mechanical pump control. P/N 55057 • Thermocouple gauge tube

P/N/ TGT-6000-NPT P/N/ TGT-6000-VCR

• Roughing valve P/N PAV-075-CP• Purge gas valve P/N PGV-115• Purge gas heater P/N PGH-100• Blanket heater P/N BH-(size)• RS-232 computer interface (factory installed)• Dual diode cable 10 ft. P/N 10348• Extra cable length

• LCD meter with 1/2 inch digits• Range to 320 Kelvin• Calibrated for CTI type diode• 10 ft. diode cable and connector included• Can be panel mounted or stand alone• Power: 120V or 240V, 50/60 Hz (specify)

Model 320 (with high and low setpoints)Size: 5 1/2 in. W x 2 3/4 in. H x 6 3/4 in. L

Model 310 (without setpoints)Size: 3 3/4 in. W x 1 7/8 in. H x 6 3/4 in. L

Features and Specifications

Features and Speecifications


Replacement Parts & Accessories

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Roughing Valve115 VACP/N 10191 Purge Gas Valve

115 VACP/N 10185

UHV Burst Disc1.33 Mini CFP/N BD-133

CT-500 Mylar Kit(equal to CTI #8080005K007)P/N MK-500

Compressor Valve Plate KitFor CTI Model 1020 and 8500(equal to CTI #8031085)includes gaskets, etc.P/N 60190

Oil Injection Filter(used on all compressors)(equal to CTI #3543606)P/N 50086

Purge Gas Heater115 VAC, 100WP/N 10340

SC/8300/8200 SwitchesItem P/N

SC Comp. Switch 50083SC Coldhead Switch 501528300 Comp. Switch 501808200 Comp. Switch 50238

1020/8500/8510 ElectricalItem P/N

Phase Monitor 500971020 Comp. Switch 500848500 Comp. Switch 502258510 Comp. Switch 50226Thermostat, Gas 50122Thermostat, Water 50123

Compressor GaugesUsed On P/N

A. MC and late SC 55013B. 1020 and early SC 55012

Blanket HeaterPump P/N Watts

CT-100 BH-100 100CT-8 BH-8 175CT-8F BH-8F 190CT-10 BH-10 240CT-400 BH-16 230

A.B.


13Austin Scientific Toll free: 800.611.8871 Phone: +1.512.441.6893 FAX: 512.443.6665 email: [email protected]

Repair and Exchange Programs

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RepairThis applies to equipment sent to our service centers inrepairable condition andreturned to the customer com-pletely reconditioned. Pumpsand compressors are over-hauled and tested to exactingspecifications. Additionalcharges may apply to replacemissing parts or failed compo-nents such as drive motors,heat exchangers - customerswill be advised prior to workbeing completed.

ExchangeAustin Scientific endeavor tomaintain an exchange stock ofthe most common pumps andcompressors to reduce equip-ment downtime to a mini-mum. If an exchange pump orcompressor is available, wecan ship within 24 hours.Some metal sealed, OnBoardand non-standard units maynot be available for exchange.

Manufacturer Model Warranty

CTI-Cryogenics Cryotorr®-100* 6 monthsCTI-Cryogenics Cryotorr®-8* 12 monthsCTI-Cryogenics Cryotorr®-10* 12 monthsCTI-Cryogenics Cryotorr®-400* 12 monthsCTI-Cryogenics Cryotorr®-500* 12 monthsCTI-Cryogenics On-Board®-8*, 10*, 400* 12 monthsAustin Scientific CryoPlex®-8 12 monthsAustin Scientific CryoPlex®-10 12 monthsAustin Scientific CryoPlex®-16 12 monthsAir Products/APD DE202, AP-8 6 months

Complete Cryopumps

Vacuum Side1. Disassemble and clean parts to be reused.2. Replace 15K condensing array with new

assembly.3. If 80K condensing array and 80K radiation

shield are not in ‘as new’ condition, replacewith new or reconditioned parts.

4. Inspect and test silicone diode and hydrogen vapor bulb temperature indicatorand repair or replace if required.

5. Reassemble in clean room conditions using new indium gasket set.

6. Upgrade to new style relief valve and install‘standpipe’ filter.

7. Leak check using helium mass spectrometer.

Helium Circuit1. Replace all elastomers and all components

subject to wear, including top and bottom bushings, drive bearing, cam bearings, motor bearings, displacer seals and kap seals.

2. Inspect displacer regenerator and repack orreplace as necessary.

3. Inspect all parts for damage and replace as required, including scotch yoke, valves, valvestems, rocker arms, crankshaft, etc.

4. Set valve timing and test inlet valve for perfect seal.

5. Inspect motor shaft for cracks, replace shaftif required and remagnetize motor.

6. Leak check using helium sniffer probe.7. Perform cool down test and verify

conformance to specifications. Record test results for permanent record.

As an example of the scope of work performed in our standard overhaul, a CTI cryopump is repaired as follows:

Manufacturer Model Used On Warranty

CTI-Cryogenics 21 or 22 CT-100, CT-7 6 monthsCTI-Cryogenics 350CP CT-8/8F 12 monthsCTI-Cryogenics 1020CP CT-10 12 monthsCTI-Cryogenics 1050CP CT-400/500 12 monthsLeybold RGD 580/5100 RPK 5000/10000 12 months

Refrigerator Assy. (less vacuum vessel & arrays)

Manufacturer Model Warranty

CTI-Cryogenics SCW 12 monthsCTI-Cryogenics 8200 12 monthsCTI-Cryogenics 8300 12 monthsCTI-Cryogenics 1020R/RW 12 monthsCTI-Cryogenics 8500/8510 12 monthsAustin Scientific 125A/125W 12 monthsAustin Scientific 450A/450W 12 monthsLeybold RW3 12 monthsLeybold RW4000 12 monthsLeybold RW6000 12 months

Compressors


Replacement Parts & AccessoriesCTI Cryo-Torr® 100* Cryopump


15

Item Description CTI P/N ASC P/N Notes Item

1 80K Condensing Array 8080002K001 80KCA-100 Incl. O-Ring, Gloves, etc. 12 80K Radiation Shield 8080002K004 99-0002-100 Incl. I-CT100, O-Ring, etc. 23 15K Condensing Array 8080002K003 99-0004-100 Incl. I-CT100, O-Ring, etc. 34 Indium Gasket Set-Precut n/a I-CT100 99.99% Pure Indium 44a Indium Sheet 3" x 5" x .005" n/a I-3x5 99.99% Pure Indium 5 Pressure Relief Valve 8080250K045 1027 New Improved Design 56 Silicon Diode Temp. Sensor 8080250K012 99-0002-001 Inc. Block and Leads 67 Silicon Diode Retrofit Kit 8080250K009 99-0002-000 Incl. Flange/Connector 68 Relief Valve Seal Kit n/a SK-RV 89 Purge Fitting Seal Kit n/a SK-RPF 9

Refer to Page 26 for Helium Fitting information




16

Item Description CTI P/N ASC P/N Notes Item

1 80K Condensing Array 8080002K001 99-00018-008 Incl. I-CT8, O-Ring, etc. 12 80K Radiation Shield 8080002K004 80KRS-8F Incl. I-CT8, O-Ring, etc. 23 15K Condensing Array 8080002K010 15KCA-8 Incl. I-CT8, O-Ring, etc. 34 Indium Gasket Set-Precut n/a I-CT8 99.99% Pure Indium 44a Indium Sheet 3" x 5" x .005" n/a I-3x5 99.99% Pure Indium 5 Pressure Relief Valve 8080250K045 10127 New Improved Design 56 Regeneration Purge Fitting 8044041G002 80029-PTA8 Complete Assy. 67 Hydrogen Vapor Bulb Assy. 8080250K006 10162 Complete Kit 77a Silicon Diode Temp. Sensor 808025K012 99-00002-001 Incl. Block & Leads 8 Silicon Diode Retrofit Kit 8080250K009 99-00002-000 Incl. Flange/Connector 89 Inlet Flange O-Ring 586441 2-172V 9

10 Relief Valve Seal Kit n/a SK-RV 1011 Purge Fitting Seal Kit n/a SK-RPF 11

Refer to Page 26 forHelium Fitting information


Replacement Parts & AccessoriesCTI Cryo-Torr® 8F* Cryopump


17

Item Description CTI P/N ASC P/N Notes

1 80K Condensing Array 8080007K001 99-00018-008 Ind. I-CT10, O-Ring, etc.2 80K Radiation Shield 8080007K004 99-00025-008 Ind. I-CT10, O-Ring, etc.3 15K Condensing Array 8080007K010 15KCA-8F Ind. I-CT10, O-Ring, etc.4 Indium Gasket Set-Precut n/a I-CT8 99.99% Pure Indium4a Indium Sheet 3" x 5" x .005" n/a I-3x5 99.99% Pure Indium5 Pressure Relief Valve 8080250K045 10127 New Improved Design6 Silicon Diode Temp. Sensor 8080250K012 99-00002-001 Incl. Block & Leads7 Silicon Diode Retrofit Kit 8080250K009 99-00002-000 Incl. Flange/Connector8 Inlet Flange O-Ring 586441 2-172V 9 Relief Valve Seal Kit n/a SK-RV

Purge Fitting Seal Kit n/a SK-RPF





18

Item Description CTI P/N ASC P/N Notes

1 80K Condensing Array 8080003K001 99-00018-010 Incl. I-CT10, O-Ring, etc.2 80K Radiation Shield 8080003K004 80KRS-10 Incl. I-CT10, O-Ring, etc.3 15K Condensing Array 8080003K010 15KCA-10 Incl. I-CT10, O-Ring, etc.4 Indium Gasket Set-Precut n/a I-CT10 99.99% Pure Indium4a Indium Sheet 3" x 5" x .005" n/a I-3x5 99.99% Pure Indium5 Pressure Relief Valve 8080250K045 10127 New Improved Design6 Regeneration Purge Fitting 044041G003 80029-PTA-10 Complete Assy.7 Hydrogen Vapor Bulb Assy. 8080250K006 10162 Complete Kit7a Silicon Diode Temp. Sensor 8080250K012 99-00002-001 Incl. Block & Leads8 Silicon Diode Retrofit Kit 8080250K009 99-00002-000 Incl. Flange/Connector9 Inlet Flange 0-Ring 7011001P278 2-278V

10 Relief Valve Seal Kit n/a SK-RV 11 Purge Fitting Seal Kit n/a SK-RPF





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Item Item Description CTI P/N ASC P/N Notes

1 80K Condensing Array 8080004K001 99-00018-016 Incl. l-CT400, O-Ring, etc.2 80K Radiation Shield 8080004K004 15KCA-400 Incl. l-CT400, O-Ring, etc.3 15K Condensing Array 8080004K002 15KCA-400 Incl. l-CT400, O-Ring, etc.4 15K Cryo-Adsorbing Array 8080004K003 15KCAA-400 Incl. l-CT400, O-Ring, etc.5 Indium Gasket Set-Precut n/a l-CT400 99.99% Pure Indium5a Indium Sheet 3" x 5" x .005" n/a l-3x5 99.99% Pure Indium6 Pressure Relief Valve 8080250K045 10127 New Improved Design7 Regeneration Purge Fitting 8044043G003 80029-PTA16 Complete Assy.8 Hydrogen Vapor Bulb Assy. 8080250K006 10162 Complete Kit8a Silicon Diode Temp. Sensor 8080250K012 99-00002-001 Incl. Block & Leads9 Silicon Diode Retrofit Kit 8080250K009 99-00002-001 Incl. Flange/ Connector

10 Inlet Flange 0-Ring 8080004K005 2-462V 11 Relief Valve Seal Kit n/a SK-RV12 Purge Fitting Seal Kit n/a SK-RPF




20

Item Description CTI P/N ASC P/N Qty/Pump

Repair Kit (Items Marked*) n/a RK-CT7 11* Seal, No. 2 Displacer 3734143 602125 12 Expander Ring 3734173 4060-0012 13* Seal, No.1 Displacer 3734142 60218 14 Cap, No.1 Displacer 3734045 60332 15 Retaining Ring 56-02-57 3850-2000 16* Seal Assy., Yoke 8081203 2540-0003 17* Bushing n/a 1660-0009 18 Yoke Shaft & Pins 8104022 60290 19 Yoke Block n/a 60291 110 Valve Spring 57-96-97 4155-0072 211 Valve Spring 57-96-94 4155-0073 212* O-Ring, Valve 58-34-06 2-010B 213 Exhaust Valve Body 3734023 60195 114 Inlet Valve Body 3821077 60196 115* Seal Assy., Inlet Valve 3821084 60217 116* O-Ring 58-34-08 2-011B 117* Bushing n/a 1660-0010 118* O-Ring, Drive Rod Cap 58-34-07 2-012B 119* O-Ring, Plug 58-34-17 2-013B 220* Drive Bearing 3543128 1600-0047 121 Crankshaft 8104032 60194 122* Bearing, Cam 3543433 1600-0048 123* Retaining Ring 56-02-60 3850-2001 124 Valve Operator Assy. 8104050 60229 125* O-Ring, Motor 58-43-12 2-033B 126* O-Ring, Motor Housing 58-34-34 2-042B 127* Front Bearing, Motor 3543135 1600-0049 128* O-Ring, Bearing n/a 2-020V 129* Rear Bearing, Motor n/a 2-020V 130* Key, Motor Shaft 57-97-43 2670-0002 131* O-Ring, Cylinder 58-54-92 2-037B 1

CTI Cryo-Torr® 7/100*

Drive Unit/Displacer Assembly


CTI Cryo-Torr® 8/8F*



21


Repair Kit (Items Marked*) n/a RK-CT8 1 1* Seal, No.2 Displacer 3592009 L900698 1 2 Tool, Seal lnsertion 3592011 L900712 1 3 No.2 Displacer 3592076 L900727 1 4 Pin, No.2 Displacer 52-07-50 3320-0005 1 5 Trunnion Pin 3592069 L900713 1 6 Washer, Spring 52-16-89 4750-0031 1 7 Pin, No.1 Displacer 3592136 L900708 1 8 No. I Displacer 3592067 L900723 1 9* Seal, No.1 Displacer 8033109 L900697 1 10 Dowel Pin 52-01-01 3320-0009 3


CTI Cryo-Torr® 8/8F*


22


11 Collar Assy. 3695118 5400-0003 1 12 Cap, No.1 Displacer 3592304 L900720 1 13 Retaining Ring 56-02-10 3850-0036 1 14 Gland Washer 3588064 L900686 1 15* Kap-Seal, Gland 3592389 L900709 1 16 Gland, Scotch Yoke 3588011 L900702 1 17 O-Ring, Gland 58-03-10 2-111B 2 18* Bushing 51-03-43 60287 1 19 Valve Plate 8033013 10411 1 20* 0-Ring, Crankcase 58-03-35 2-234B 1 21* 0-Ring, Vessel 580322 2-140B 1 22 Scotch Yoke 3588300 L900684 1 23 Pin, Locating 52-07-52 3320-0012 1 24 Bracket, Rocker Arm 3588069 L900701 1 25 Adjusting Bolt 3588014 L900705 2 26 Crankcase 3588094G002 60191 1 27 Bushing, Rocker Arm n/a L900704 2 28 Rocker Arm & Bushing 3588013 1010-0001 2 29 Stop Nut 52-26-10 3160-0010 2 30 Compression Spring 8081139P0001 L900695 2 31 Valve Spring 8081139P0002 L900696 2 32 Valve Stem 3588017 L900680 2 33* 0-Ring, Valve 58-04-52 2-013B 2 34 Exhaust Valve Body 3588084 L900692 1 35 Inlet Valve Body 3588085 L900691 1 37* Seal, Inlet Valve 3588079 L900710 1 38* Bushing n/a 60288 1 39* O-Ring, Plug 1 0.5 58-14-10 2-014B 140 Plug 3588052 L900693 1 41 Plug 51-10-36 L900694 1 42 Relief Valve 51-24-19 10131 1 43* 0-Ring 58-04-60 2-012B 3 45 Guide Pin & Plug 3588055 L900707 1 46* 0-Ring, Sight Glass 58-04-56 2-129B 1 47 Sight Glass 3588056 L900685 1 48 Retainer, Glass 3588057 L900681 1 49* Retaining Ring 56-02-15 3850-0096 1 50* Drive Bearing 3543017 1600-0043 1 51 Crankshaft 3588037 L900689 1 52* Valve Bearing 3543016 1600-0044 2 53 Key 3588020 L900682 1 54 Valve Eccentric 3588066 L900688 1 55 Motor Front Plate 3588039 60188 1 56* 0-Ring 58-04-57 2-139B 1 57* Motor Bearing 3543017 1600-0042 2 58* 0-Ring, Motor 58-04-95 2-044B 2 59 Motor Housing 3588033 SS250-2026 160 Drive Motor Assy. 8033248 3100-0033 1


CTI Cryo-Torr® 10*



23


Repair Kit (Items Marked*) n/a RK-CT10 1 1* Seal, No. 2 Displacer 3657074P2 60372 1 2 Tool, Seal lnsertion 3657028P001 60443 1 3 No. 2 Displacer n/a 10174 1 4 Pin, No. 2 Displacer 3657066 60386 1 5 n/a5 n/a7 Pin, No. 1 Displacer 3657025P2 60213 1 8 No. I Displacer n/a 10175 1 9* Seal, No.1 Displacer 3657077 4060-0017 1 10 Dowel Pin 520101 3320-0009 3 11 Collar Assy. 3761113 5400-0003 1 12 Cap, No.1 Displacer 3761044 60232 1


CTI Cryo-Torr® 10*


24



13 Retaining Ring 56-02-10 3850-0036 1 14 Gland Washer 3588064 L900683 1 15* Kap-Seal, Gland 3592389 L900709 1 16 Gland, Scotch Yoke 3588011 L900702 1 17* O-Ring, Gland 58-03-10 2-111B 2 18* Bushing 51-03-43 60287 1 19 Valve Plate 8018077 10414 1 20* 0-Ring, Crankcase 58-03-35 2-234B 1 21* 0-Ring, Vessel 581442 2-232V 1 22 Scotch Yoke 3761009 60223 1 23 Pin, Locating 52-07-52 3320-0012 1 24 Bracket, Rocker Arm 3588069 L900701 1 25 Adjusting Bolt 3588014 L900705 226 Crankcase 3588094G002 60191 1 27 Bushing, Rocker Arm n/a L900704 2 28 Rocker Arm & Bushing 3588013 1010-0001 2 29 Stop Nut 52-26-10 3160-0010 2 30 Compression Spring 8081139P001 L900695 2 31 Valve Spring 8081139P002 L900696 2 32 Valve Stem 3588017 L900680 2 33* 0-Ring, Valve 58-04-52 2-013B 2 34 Exhaust Valve Body 3588084 L900692 1 35 Inlet Valve Body 3588085 L900691 1 37* Seal, Inlet Valve 3588079 L900710 1 38* Bushing n/a 60288 1 39* O-Ring, Plug 58-14-10 2-014B 1 40 Plug 3761026 L900693 1 41 Plug 51-10-36 L900694 1 42 Relief Valve 695538 10131 1 43* 0-Ring 58-04-60 2-012B 3 45 Guide Pin & Plug 3588055 L900707 1 46* 0-Ring, Sight Glass 58-04-56 2-129B 1 47 Sight Glass 3588056 L900685 1 48 Retainer, Glass 3588057 L900681 1 49* Retaining Ring 56-02-15 3850-0096 1 50* Drive Bearing 3543017 1600-0043 1 51 Crankshaft 3588037 60224 1 52* Valve Bearing 3543016 1600-0044 2 53 Key 8081351 L900682 1 54 Valve Eccentric 3588066 L900688 1 55 Motor Front Plate 3588039 40-00080-001 1 56* 0-Ring 58-04-57 2-139B 1 57* Motor Bearing n/a 1600-0042 1 58* 0-Ring, Motor 58-04-95 2-044B 2 59 Motor Housing n/a n/a 60* Motor Bearing n/a 1600-0045 1 61 Drive Motor Assy. 8004110 3100-0034 1 62* O-Ring, Cylinder 58-64-39 2-157-B 1





25


Repair Kit (Items Marked*) n/a RK-CT500 1 1* Seal, No. 2 Displacer 3592009 L900698 1 2 Tool, Seal lnsertion 3592011 L900702 1 3 No. 2 Displacer 3592076 10177 1 4 Pin, No. 2 Displacer 3657066 60386 1 7 Pin, No. 1 Displacer 3657025P2 60213 1 8 No. I Displacer n/a 10176 1 9* Seal, No.1 Displacer 3657077 4060-0017 1 10 Dowel Pin 52-01-01 3320-0009 3 11 Collar Assy. 3761113 5400-0003 1 12 Cap, No.1 Displacer 3761044 60232 1




26



13 Retaining Ring 56-02-10 3850-0036 1 14 Gland Washer 3588064 L900683 1 15* Kap-Seal, Gland 3592389 L900709 1 16 Gland, Scotch Yoke 3588011 L900702 1 17* O-Ring, Gland 58-03-10 2-111B 2 18* Bushing 51-03-43 60287 1 19 Valve Plate 8018077 10414 1 20* 0-Ring, Crankcase 58-03-35 2-234B 1 21* 0-Ring, Vessel 581442 2-232V 1 22 Scotch Yoke 3761009 60223 1 23 Pin, Locating 52-07-52 3320-0012 1 24 Bracket, Rocker Arm 3588069 L900701 1 25 Adjusting Bolt 3588014 L900705 2 26 Crankcase 3588094G002 60191 1 27 Bushing, Rocker Arm n/a L900704 2 28 Rocker Arm & Bushing 3588013 1010-0001 2 29 Stop Nut 52-26-10 3160-0010 2 30 Compression Spring 8081139P001 L900695 2 31 Valve Spring 8081139P002 L900696 2 32 Valve Stem 3588017 L900680 2 33* 0-Ring, Valve 58-04-52 2-013B 2 34 Exhaust Valve Body 3588084 L900692 1 35 Inlet Valve Body 3588085 L900691 1 37* Seal, Inlet Valve 3588079 L900710 1 38* Bushing n/a 60288 1 39* O-Ring, Plug 58-14-10 2-014B 1 40 Plug 3761026 L900693 1 41 Plug 51-10-36 L900694 1 42 Relief Valve 3695538 10131 1 43* 0-Ring 58-04-60 2-012B 3 45 Guide Pin & Plug 3588055 L900707 1 46* 0-Ring, Sight Glass 58-04-56 2-129B 1 47 Sight Glass 3588056 L900685 1 48 Retainer, Glass 3588057 L900681 1 49* Retaining Ring 56-02-15 3850-0096 1 50* Drive Bearing 3543017 1600-0043 1 51 Crankshaft 3588037 60224 1 52* Valve Bearing 3543016 1600-0044 2 53 Key 8081351 L900682 1 54 Valve Eccentric 3588066 L900688 1 55 Motor Front Plate 3588039 60219 1 56* 0-Ring 58-04-57 2-139B 1 57* Motor Bearing 3543017 1600-0042 1 58* 0-Ring, Motor 58-04-95 2-044B 2 59 Motor Housing n/a n/a 1 60* Motor Bearing n/a 1600-0046 1 61 Drive Motor Assy. 8004110 3100-0034 1 62* O-Ring, Cylinder 58-64-39 2-157-B 1


Austin Scientific4114 Todd LanePO Box 18863Austin, Texas 78760512.441.6893512.443.6665 [email protected]

Austin Scientific - a wholly owned unit of Oxford Instruments - is recognized as the value leader in the manufactureand supply of quality cryogenic equipment and services. Its line of cryopumps, helium compressors, helium lines, and adsorbers is used throughout the vacuum industry, by leading research laboratories and by MRI manufacturersand service groups. Additionally, Austin Scientific offers comprehensive refurbishment services for its own equipmentas well as for that of most of its competitors. Austin's products and services are available through its global networkof agents and dealers.

500 Lauralwood Rd. Number 9Santa Clara, California 95054408.496.0782408.496.0785 fax

Documents

Cryopump Equipmentfile.yizimg.com/303559/2008122711312464.pdf · pump relay coil. •Display: 32 character LCD for display of pressure, temperatures, set points and status. •Output