2
Roughing Flange KF40 Accessory Flange 2 ¾" flange, 3 /8" thick Purge Tube ½" Ultra-Seal fitting. Viton O-ring Includes blank and 0.33" bored tailpieces Pressure Relief 5 psig poppet valve with KF40 flange Helium Connections ½" Aeroquip fittings Electrical Diode, 6-pin twist lock connector Refrigerator drive motor, 5-pin twist lock connector LN 2 Connections 2 ea ½" vacuum jacketed bayonets or 2 ea ½" NPT female fittings (specify when ordering) Interfaces LN2 Consumption 2 GPH steady state Operating Orientation Any (specify when ordering) Purge Tube Integral Instrumentation Silicon diode standard Hydrogen vapor bulb thermometer optional System Flange ANSI OD 27.5" ID 20.813" BC 25 Bolt Holes 20 ea 1.25" DIA O-Ring 21.95" ID × 0.210" thick Viton (supplied) Specifications Pumping Speed 10,500 Liters/sec. 13,000 Liters/sec. 30,000 Liters/sec. 8,500 Liters/sec. Type N 2 H 2 H 2 O Ar Capacity at 1 ×10 -6 Torr 12 std Liters 3,000 std Liters © 2016 PHPK Technologies 2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected] www.phpk.com * Crossover above 560 Torr Liters is possible. This results in a reduction of hydrogen capacity Ar Throughput Capacity at 20K 10 Torr Liters/sec. 790 scc/min. Weight 210 lbs. (95 kg) Crossover 560 Torr Liters of N2* Cooldown Time 120 min to 20K with CBST6.0 Compressor Cryopump 20" TM500 LN 2 ( ANSI ) (Performance data based on 60-HZ operation)

Cryopump 20 TM500 LN - Phpk Technologies* Crossover above 560 Torr Liters is possible. This results in a reduction of hydrogen capacity Ar Throughput Capacity at 20K 10 Torr Liters/sec

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Page 1: Cryopump 20 TM500 LN - Phpk Technologies* Crossover above 560 Torr Liters is possible. This results in a reduction of hydrogen capacity Ar Throughput Capacity at 20K 10 Torr Liters/sec

Roughing Flange KF40

Accessory Flange 2 ¾" flange, 3/8" thick

Purge Tube ½" Ultra-Seal fitting. Viton O-ring Includes blank and 0.33" bored tailpieces

Pressure Relief 5 psig poppet valve with KF40 flange

Helium Connections ½" Aeroquip fittings

Electrical Diode, 6-pin twist lock connector Refrigerator drive motor, 5-pin twist lock connector

LN2 Connections 2 ea ½" vacuum jacketed bayonets or 2 ea ½" NPT female fittings (specify when ordering)

Interfaces

LN2 Consumption 2 GPH steady state

Operating Orientation Any (specify when ordering)

Purge Tube Integral

Instrumentation Silicon diode standard Hydrogen vapor bulb thermometer optional

SystemFlange

ANSI

OD

27.5"

ID

20.813"

BC

25

Bolt Holes

20 ea 1.25" DIA

O-Ring

21.95" ID × 0.210"thick Viton(supplied)

Specifications

Pumping Speed

10,500 Liters/sec.

13,000 Liters/sec.

30,000 Liters/sec.

8,500 Liters/sec.

Type

N2

H2

H2O

Ar

Capacity at 1 ×10-6 Torr

12 std Liters

3,000 std Liters

© 2016 PHPK Technologies

2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]

* Crossover above 560 Torr Liters is possible. This results in a reduction of hydrogen capacity

Ar Throughput Capacity at 20K 10 Torr Liters/sec. 790 scc/min.

Weight

210 lbs.(95 kg)

Crossover

560 Torr Litersof N2*

Cooldown Time

120 min to 20Kwith CBST6.0 Compressor

Cryopump 20" TM500 LN2 (ANSI)

(Performance data based on 60-HZ operation)

Page 2: Cryopump 20 TM500 LN - Phpk Technologies* Crossover above 560 Torr Liters is possible. This results in a reduction of hydrogen capacity Ar Throughput Capacity at 20K 10 Torr Liters/sec

20" TM500 LN2 (ANSI)

© 2016 PHPK Technologies

2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]

1 1/4" DIA HOLESON 25" BC

O-RING GROOVE21.953" ID × 9/32"" WIDE × 11/64" D

20 3/4" ID

12 3/4"

11"

27 1/2" OD

21 1/2" DIA

7 1/2"

7 1/2"3 5/8"

7 1/2"

AUX PORT

5 5/16"5 5/16"

5 5/16"

5 5/16"

17 3/16"

24 5/32"

6 31/32"

25 7/8"

3/4"

1/2" GHeINLET

LN2 INLET LN2 OUTLET

ELECTRICALCONNECTOR

PURGE TUBE

KF40PUMP-OUT PORT

1/2" GHeOUTLET

INSTRUMENTFEED-THRU

5 PSIG RELIEFVALVE WITH

KF40 FLANGE

Cryopump 20" TM500 LN2 (ANSI)