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[ www.inf ineon.com/austr ia ]
Consolidated Environmental Statement 2009of the Villach site
bilduntertitel 8pt, line space 11pt, letter 0 pt
Issued by: Inf ineon Technologies Austria AG Inco-operationwithInf ineonTechnologiesAG, Corporate Environmental Af fairs & Operations Suppor tResponsible for the contents: Dr. Adolf Biedermann, Dr. Ingrid LawickaConcept and design: KANZIAN ENGINEERING & CONSULTING GmbHGraphics and layout: atelier CREmsner Paper: The Environmental Statement was printed on environmentally f r iendly paper.
Verified enVironmental
management
Content
1 Introduction by the Management Board 2 The Company 2.1 Company Profile of Infineon Technologies Austria AG 2.2 Site Description 2.3 Activities and Products
3 Company Policy: Environmental Protection, Occupational Safety and Health 4 Integratet Management for the Environmental Protection, Occupational Safety and Health 4.1 Organization of the Environmental Management System 4.2 Integration of Staff 4.3 Occupational Safety and Health 4.4 Observance of Legal Regulations Relevant to the Environment 4.5 Emergency Prevention and Management 4.6 Documentation of the Environmental Management 4.7 Environmental Company Audits
5EnvironmentalImpacts-Data,FactsandFigures 5.1 Input/Output Analysis 5.2 Direct Environmental Aspects 5.3 Indirect Environmental Aspects 5.4EnvironmentalAspectsandFocusPoints
6OverviewoftheEnvironmentalProgramsandEnvironmentalGoals2006-2010 6.1ImplementedMeasures2006-2009 6.2 Planned Measures 2009/10 6.3 Special Environmental Achievements 6.4 Important Changes since the Last Environmental Statement 7 Annex 7.1 Glossary 7.2 Validation 2010 7.3 Date for next Environmental Statement 7.4 Contact Persons
2
3 3 4 6
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14 14 16 17 20 22 23 24
25 25 28 47 49
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55 56 57 58 58 60 61 61
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2 3
Mag.MonikaKircher-KohlChief Executive Officer (CEO)
DI Reinhard Petschacher Chief Technology Officer (CTO)
1 Introduction by the Management BoardFordecades,ourthoughtsandactionsasanindustrialenterprisehavebeenconsistentlygearedtowards
sustainability in environmental protection and occupational safety. The Austrian Ministry of the
Environment recognized this commitment in conferring the EMAS Award 2009. Such an award spurs us on
intimesofeconomicinstability-andtheyear2009wasaparticularlydifficultonewithsignificantmarket
slumps, for Infineon and for the highly cyclical semiconductor industry.
The market setback and the associated reduction in capacity utilization of our production plant have had
an impact on some of the figures in this Environmental Statement. In the 2009 fiscal year, the production
volume of microchips stood at approximately 55 percent compared to the previous year. However, due to
the high fixed costs in ongoing operations, it is not possible for the consumption of materials or energy
to be reduced in equal measure.
Our commitment to environmental protection, to which we have devoted ourselves since our site was
establishedin1970,ismultifaceted:forinstance,ourproductionfacilitiesareequippedwithstate-of-
the-artenvironmentalandsafetytechnology;thenewofficebuildingopenedin2008issuppliedwith
geothermalenergyandusesInfineon’senergy-efficientproducts,e.g.inthelighting.
Power semiconductors, as developed, manufactured and marketed by Infineon Austria, make a significant
contribution to saving energy and hence to conserving resources. They are used, for instance, in industrial
plants, household appliances, motor vehicles or in consumer electronics. By means of our innovation
drivelaunchedin2008,wecreateconceptsforfuture,energy-efficientapplicationssuchasenergy-saving
solutionsforE-mobilitybynewsemiconductorproductsforelectricandhybridvehiclesornewenergy-
efficient customer solutions for the solar market. The manufacture of thin wafers, the silicon disks on
which the microchips are made, is a main area of expertise of the Villach innovation fab. As wafer thick-
ness is reduced, so the efficiency of the power semiconductors produced is increased. In 2009 Infineon
Technologies Austria received the Innovation and Research Award of Carinthia for the latest developments
of40-micrometerpowersemiconductors.ThisinnovationintroducedontothemarketbyInfineon
strengthens our leading position on the global market and makes a huge contribution to saving energy.
We are proud of this achievement and it encourages us to press ahead with improvements and
innovations, for the benefit of people and the environment.
Mag.MonikaKircher-Kohl,CEO DIReinhardPetschacher,CTO
The Infineon Management Board
2 3Company
InFInEOnTEChnOlOGIEsAG
Infineon Technologies AG offers semiconductor and system solutions addressing
three central challenges to modern society: energy efficiency, communications
and security. In the 2009 fiscal year (ending September), the company reported
sales of Euro 3.03 billion, with approximately 25,650 employees worldwide.
InfineonislistedontheFrankfurtstockExchange(tickersymbol:IFX)andin
theUsAontheover-the-countermarketOTCQXInternationalPremier
(tickersymbol:IFnnY).
2.1COMPAnYPROFIlEOFInFInEOnTEChnOlOGIEs AUSTRIA AG
Infineon Technologies Austria AG, headquartered in Villach, is a Group company
of the globally operating semiconductor manufacturer Infineon Technologies AG.
Semiconductor and system solutions for the automotive sector, industry and
communications are developed and manufactured at Infineon Austria. Drawing
on our technological expertise, we set trends and unfold our strengths along
the entire value chain. Our quest is to impress our customers by coming up with
high-quality,pioneeringproductsinaninnovativeenvironment.Thenumberof
employees working for Infineon throughout Austria is around 2,550, at Villach,
Klagenfurt, Graz, Vienna and Linz. Of this number, about 960 are engaged in
research and development (R&D).
In the 2009 fiscal year (ending September), the company generated sales of
Euro 908.2 million. The volume of output was 11 billion chips. R&D expenditure
was Euro 194.8 million, i.e. approximately 22 percent of sales.
2 The Company
4 5
InFInEOn’sVIllAChsITE
The workforce at Villach is around 2,100. Semiconductor and system solutions
addressing the three central challenges, energy efficiency, communications and
security, are developed and produced at the Villach site for Infineon’s
Automotive, Industrial & Multimarket, Wireless Solutions, Chipcard & Security
divisions.
2.2 SITE DESCRIPTIONThe company site at Villach, established in 1970, is characterized by the
combination of development, production and responsibility for business
performance.InfineonAustriahascommitteditselftoacross-divisionalinnovation
drive forging even closer ties between research, development and production.
The confidence which Infineon Technologies AG places in the Austrian site is
manifestedbythesubsidiary’sgrowingGroup-wideresponsibilities.Accordingly,
in recent years Infineon has expanded its activities in Austria particularly in the
Automotive, Industrial & Multimarket sectors. Responsibility for the global IT
management also rests with Austria. Infineon Austria is addressing a further
marketofthefuture-energyefficiency-bysettinguptheDC/DC
(DCconversion)CompetenceCenterinVillachtopooldevelopmentknow-howin
the power management sector. Villach is also home to the global reliability
product testing of automotive chips (RPT laboratory).
4 5
With 2,200 employees in Villach and Klagenfurt, Infineon Austria is the region’s
largestprivateemployer.Villachisregardedasthehigh-techhubofthe
Alpe-Adriaregionandoffersinternationalcompaniesaverygoodbusiness
environment. Infineon’s Villach site is located in the industry and business park
onthecity’ssouth-easternperiphery,intheimmediatevicinityofthetechnology
park which is home to the microelectronics education and research establishments.
Good transport connections are provided by the A2, the link to the southbound
rail line and Klagenfurt airport.
situatedinVillachisafront-endmicrochipfabmanufacturingchipsonwafersin
various technologies and complexities, in as many as 400 production steps. The
main focus is on automotive and industrial electronics and Infineon ranks among
the market leaders for these power semiconductors. The principle of leading the
way with innovations addressing markets of the future is very pertinent to
microchip production.
Experts are constantly on the search for innovative solutions along the entire
value chain, from the idea through the processes to the customer.
TheiFAB-top-level,radio-andultrasound-basedproductionlogisticsdeveloped
inAustriaanddeployedforthefirsttimeinVillach-istestamenttothestrong
pioneering spirit prevailing here. In this way, a significant contribution is made to
promotingthecompetitivenessoftheproductionsiteandtofuture-proofingit.
Site
The total site area, including leased areas, is 170,010 m2 of which 42,466 m2 are taken up with buildings.
2.3 ACTIVITIES AND PRODUCTS
HIGHTECH “MADE IN AUSTRIA“
InfineonAustria’shigh-techproductsaretobefoundinalargenumberof
applications and systems. These include sensors and controller chips for
anti-lockbrakingsystems(ABs),airbags,alternatorsorenginemanagement
systemsaswellaschipsforenergy-efficientpowersupply,whichareusedin
industrial applications, for computers, communication, consumer electronics
orlighting.Thedevelopmenttasksencompassmobilephonesoftware,RFand
baseband chips for GPRS, UMTS and for future mobile phone generations.
Another area of expertise is contactless chip technologies used, for example,
in new passports or in payment systems for debit and credit cards. Automotive
keylessentrysystems,tirepressuremonitoring,electronicticketsorRFID-based
solutions are other areas where this technology is deployed.
MICROCHIP PRODUCTION
Atthefront-endmanufacturingfacilityinVillachintegratedcircuits(microchips)
areproducedon6-inchand8-inchdiameterwafers.Theproductionofthese
semiconductor elements is technically highly complex and demanding.
The entire process from the pure silicon wafer to the finished chip on the wafer
can take as much as 50 days, requiring various mechanical, physical, chemical
and recurrent manufacturing steps.
ThechipsarethenassembledatInfineon’sback-endsitestoformfinished
semiconductor elements and solutions.
6 7
The Villach chip production offers a wide spectrum of microelectronic components
with about 1,300 basic product types. 98 percent of the site production capacity
is focused on automotive and industrial electronics. To maintain the edge in
termsofexpertiseandtouseresourcesefficiently,Villachformsthefront-end
cluster together with the Regensburg (Germany) and Kulim (Malaysia) sites.
THE CLEANROOM
During chip fabrication, even the tiniest particles can impact chip operability.
One single particle may be enough to render the chip unusable, wiping out the
work of as many as 400 process steps. Therefore the general principle applies
that the smaller the feature size of a chip, the more critical particles even of
microscopic size are. To minimize this risk, semiconductor manufacture takes
place in cleanrooms. The term describes rooms where a special atmosphere
with constant temperature and humidity prevails and where only an extremely
low number of dirt particles of defined diameter is allowed per cubic foot of air
(28.32 liters).
At the Villach site, production is carried out in class 1 and 10 cleanrooms.
Cleanroomclass1illustrateshowhighthestandardsare-nomorethanone
single particle with a maximum diameter of 0.5 microns is allowed per cubic foot
of air there. In comparison: air in a city contains millions of different particles,
and even in hospital operating rooms about 10,000 particles per cubic foot of air
are considered to be acceptable.
Products6 7
8 9
Thefront-endoperationsnecessaryforchipfabricationcanbesubdividedinto
essentially the following categories:
lAYERDEPOsITIOn
These processes include thermal processing, epitaxial growth, chemical vapour
and physical deposition. At thermal processing, for instance, gaseous precursor
materialisappliedinahigh-temperatureprocesstotheentirewafersurface.
At epitaxy, chemical vapour and physical deposition, the final layer material is
formedbychemicalandphysicalprocesses.Whethernon-conductive,
semiconductive or metal layers are deposited on the wafers depends on the
type of production process and the materials used.
lIThOGRAPhY
As chip structures become even smaller, semiconductor industry is faced with
new and greater photolithographical challenges. Lithography is used for trans-
ferring patterns onto the deposited layers. At first a photoresist is applied to
thewafersurfacewhichisalight-sensitivelayer.Theresistisexposedthrough
masksanddevelopedconsequently.Finally,manyareasofthewafersurfaceare
bare. Other areas are protected or covered by photoresist because they are to
remain untreated in the following work step or subsequent process steps.
ETCHING
The layers not covered by photoresist are removed from the wafer surface by wet
chemical or dry etch processes.
Wet chemical etch processes owe their name to the use of acidic or alkaline
etchants. Dry etch processes, on the other hand, are performed at high vacuum.
Gasesareusedwhicharedisassociatedintoreactivecomponentsinahigh-
frequency electromagnetic field.
8 9Operations
IMPLANTATION
Ion implantation, i.e. the introduction of foreign atoms into the crystal structure
of the silicon wafer, permits controlled change of the conductivity of the silicon
(doping). In performing ion implantation, atoms or molecules are ionized (ioning),
then separated by a mass separator, accelerated in an electric field (acceleration
path) and implanted into the silicon. After implantation of a specific layer a
thermal diffusion process is applied for defining the doping profile within the
layer and thus adjusting the conductivity.
Inthethermaltreatmentontheotherhand,theso-calledtemperingprocess,
layers are physically changed.
PHOTORESIST REMOVAL
After a layer is structured or implanted, the photoresist remaining on the wafer
is removed by wet chemical processes or by plasma ashing. In this process,
strongly oxidizing acids or oxygen are used.
PLANARIZATION AND BACKSIDE PROCESSING
Asaresultofincreasingdensityofelectroniccircuitcomponentsonahigh-
performance chip, the surface of a wafer becomes too “rough”. This would be
detrimental to the subsequent layer structuring and therefore these
unevennesses or topographical irregularities have to be flattened.
Thisisperformedinthechemical-mechanicalpolishingprocessusingaspecial
polishing table with special polishing pads and agents. This process category
also includes the treatment of the backsides of the wafers. By means of
mechanical or chemical layer removal, the necessary wafer thickness is
established and then metal layers are applied for the electrical contacting of
the chips.
CLEANING
The wafers have to be cleaned between many operating processes to remove
process chemicals or particles. Cleaning is therefore a recurrent step in chip
production, using mainly ultrapure water and chemical mixes.
The wafers undergo various functional checks and tests throughout the
manufacturing process to ensure the reliability and quality of the products.
To differentiate between flawless and inoperative chips on the wafer, those of
inadequate quality are marked to prevent their further processing.
INNOVATIONS IN PRODUCTION Hallmarks of Villach microchip production are innovative processes and
technologies that are unique the world over. Infineon is driving structural change
in microchip production and is following the route to the “innovation fab”.
In the course of the transition from mass production to the innovation fab, our
employeesfocusoninnovationsinproductionalongtheentirevaluechain-
from inception, through the processes, to the customer. In this way, an
importantcontributionismadetocompetitivenessandtofuture-proofingthe
production site.
One of the greatest challenges in the field of power semiconductors is
production on wafers as thin as 40 microns, an area for which Villach has
exclusive global responsibility. Correspondingly thinned wafers are flexible like
film and require particular care in the processing.
10 11
Innovations
The Villach production facility was the first in the world to control its production
units with the aid of various radio technologies. The software for this
project(dubbediFab)comesfromtheInfineonsubsidiaryinKlagenfurtwhilethe
complex chip technology comes from the Graz Development Center. Today this
logistics system is already being successfully used at the two other factories of
the manufacturing cluster in Regensburg and Kulim.
A smart automation solution has been used for logistics control and traceability
withintheproductionprocessinkeepingwithzero-defectphilosophy.
The quality of human work is raised, customers receive enhanced product
quality and optimized delivery reliability.
Forenvironmentalprotectionthismeans:Adefectivechipmustnotcomeonto
themarketandhastobedisposedof.Aproductthatisdefect-freeinthefirst
step, in our case a wafer with the chips on it, does not waste any environmental
resources.AnotheradvantageisthatiFabrenderspaperunnecessaryin
production.InthemeantimeiFabisinoperationattheRegensburgandKulim
sites.
10 11
12 13
3 Company Policy: Environmental Protection, Occupational Safety and Health ForInfineon,aresponsibleenvironmentalprotection,safetyandhealthpolicyisnotlimitedto
compliance with legal standards and regulatory requirements. It is much rather a process of
continuous improvement, for instance of our products and of the way in which our plants and
equipment are operated. In 2005 the company consolidatet environmental protection, safety and
health protection to form IMPRES (Infineon Integrated Management Program for Environment, Safety
and Health). The program covers all the processes, strategies and corresponding goals in the areas
of occupational safety, health and environmental protection worldwide.
Forus,compliancewithlegalandregulatoryrequirementsistakenasread.
Environmental protection is much rather a process of continuous improvement.
Source: Environmental Report 2003 of Infineon Technologies AG
Benef i t :Return, Social Prestige
Occ
upati
onal
Safe
ty
Healt
h
Envir
onm
enta
l Pro
tect
ion
Indust
rial
Safe
ty
Process-optimized Projects
BASIS:Compliance with all statutory requirements is fundamental
12 13Environmental Protection
The following guidelines of our environmental policy should elucidate how, among other things,
they promote achieving our high standards:
We continuously work toward reducing the burden on people and the environment, minimizing
associated risks and lowering resource consumption, above and beyond the legal requirements.
We apply energy efficiently and contribute to climate protection.
We evaluate and consider possible effects on people and the environment at the earliest possible
stage of product and procedure planning.
We take specific measures to prevent hazards to people and the environment and, when this is
not possible, minimize these as much as possible.
Forus,thepreventionofaccidentsisanaturalobligation.Included,isthedutytomotivateour
employees to actively support health promotion.
Wegobythegeneralprinciplethataforesightedestimateoflong-termeffectshastobepreferred
toashort-termadvantageorientation.Atthesametime,theprincipleofprecautionmustalways
beconsideredandintegral,process-integratedsolutionshavetobeourgoal.
We guarantee that our policy for environmental protection, safety and health is effectively
implemented. The required technical and organizational procedures are regularly checked and
continuously improved.
Forus,productivityandcosteffectivenessarenotcontradictorytotheprotectionofpeopleand
the environment. We reduce costs through integrated methods of circulation and reuse of
materials as well as by motivated employees who work in a safe environment. Our costumers
profit from such product properties as high performance or low energy consumption.
We inform the interested public and support an open information policy.
Every employee has the responsibility to support our goals of environmental protection, safety and
health. It is a constant duty of management to increase and encourage awareness of responsibility
at all levels.
We provide costumers information about environmental compliance of our products and promote
efficient communication to ensure the possibility, as well as the steady improvement of the
developmentandtheprovisionofenvironmentalharmlessproductswithinthevalue-addedchain.
We require our business partners to follow our guidelines. We work together with authorities and
non-governmentalorganizations.
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14 15
4 Integrated Management for the Environmental Protection,Occupationalsafetyandhealth-an Intregrated Approach
ImmediatelyafterInfineonTechnologiesAGwasestablished,acompany-wideenvironmentalma-
nagement system was introduced which is subject to continuous improvement.
Productionsitesworldwidearematrix-certifiedinaccordancewiththeEnIsO14001standard.In
addition,theAustriansiteofVillachisEMAs-validated.
Finally,in2005,IMPREs(InfineonIntegratedManagementProgramforEnvironment,safetyand
Health) was established across the Group, covering all the processes, strategies and corresponding
goals in the areas of the environment, occupational safety and health, and in the same year we
received matrix certification according to the ISO 14001 and OHSAS 18001 international standards.
As part of this Updated Environmental Statement, we will address the area of environmental
protection within IMPRES below.
4.1ORGAnIzATIOnOFThEEnVIROnMEnTAlMAnAGEMEnTsYsTEM
Forus,environmentalprotectionisnotanemptyphrase,butacorporateresponsibilitythatisan
integral part of our social accountability. To meet the high standards in environmental protection,
we have laid down detailed rules for this subject in the Infineon Group and have defined the
individual areas of responsibility for the various tasks. Our IMPRES forms the basis for this.
14 15IMPRES
The exercise of responsibilities in environmental protection, safety and health
is outlined in the following diagram:
Infineon Management BoardBusiness ContinuityEnvironment & Safety
Site Management
Superiors
Employees
Contractual Partners
I Strategy and leadershipF PutintoforceofenvironmentalpolicyandtheA management systemG Audit and Control Overall communication,...
Determination of environmental protection requirements Implementation of environmental targets relevant to the workplace, determining responsibilities, updating process instructions, encouraging employees to act consciously and so on
I Provision of resources,F Environmentalprograms,A Nomination of Internal ES Experts,T Nomination of environmental internal expert
Observanceofenvironmentally-relevantruleswrittendown in the work instructions, focusing on environmental pollution and risks
The general regulation of environmental related matters is in the responsibility of the corresponding department, the monitoring of environmental protection and occupa-tional safety aspects with regard to contractual partners is part of our vendor management
Figure:DiagramillustratingtheorganizationalstructureofInfineonTechnologiesinenvironmentalprotection(source: Consolidated Environmental Statement 2006)
Sit
eCor
por
ate
Man
agem
ent
Sta
te
Laws
Environ-mental
Policy andObjectives
Environmental Management System
and Manual
Environmental Relevant (Support) Processes and
Upstream (Business) Processes
Environmental-relevant codes of practice and records
16 17
4.2InTEGRATIOnOFsTAFF
About 2,100 staff at the Villach site contribute with their motivation, flexibility and
know-howtothelong-termcorporatesuccessofInfineonTechnologiesAustriaAG.
Permanent exchange of knowledge within the Group, learning from the best within the
Group,andcross-regionalteamworkaretakenforgrantedatInfineon,creatinghigh-level
cooperation based on trust.
Education and further training play an important role in all areas. With our continuous
training cycles for production personnel, our wide range of expert and management training
courses,technicaltalksandexternalin-serviceprograms,weaimtocontinuouslyincrease
knowledge. To maintain its high standard in research, Infineon promotes training of young
technicians.Ourlong-standingcooperationwithvocationalschools,Austrianuniversities
and technical colleges is at the center of these activities.
To ensure that Infineon can successfully meet the challenges of the market also in the
future,werelyonflexibility.Flexibleshiftmodelsorflex-timeallowthecompanytodeploy
itsstaffinatime-optimizedmanner.Individualmodels,suchasteleworking(workingfrom
aworkstationathome),part-timecontracts,maternityleave,etc.,allowourstafftoorganize
their time flexibly according to their life situation.
Soon after joining the company, our employees are briefed in their first systematic training
session and at the end of the following quarter in particular in the areas of occupational
safety, health and environmental protection.
The occupational safety committee meetings for managers, safety liaison officers, the
works council and staff regularly also discuss current health, environmental protection and
occupational safety issues. In addition, Intranet publications addressing environmental
protection,environment-relatedaspectsandtheEnvironmentalstatementalsokeepthe
employees up to date.
16 17
The potential for new ideas is a valuable asset for Infineon and an important way of
improving all the time. Ideas and suggestions for improvement pay off for our staff as
wellasforthecompanyandhaveanidealplatformin“YIP”(YourIdeaPays),
theInfineon-wideIdeasManagementProgram.Ofallthesuggestionsputintopractice
at Infineon Technologies Austria AG in the 2008/09 fiscal year, the suggestions for
improvement in energy, environmental protection and occupational safety alone brought
approx. 7% of the total savings.
4.3OCCUPATIOnAlsAFETYAnDhEAlTh
In consultation with the Management Board, the Company Medical Service initiated the
“Healthy and Active” project back in 2003. The objective of this project was to
promote and support health awareness among staff through suitable measures. The
topics addressed by the “Healthy and Active” project include nutrition, exercise,
preventivemedicalcheck-ups,addictionpreventionandstressmanagement.
Safety and Health
Nordic Walking, Running, Cycling, RowingEXERCISE
Workshops, Consulting Service, Factory canteenNUTRITION
Lung function X-rays, Blood sugar, Blood lipids, Cholesterol, Blood pressure, Skin protection
HEALTH CAREWorkshop giving support to stop smoking
ADDICTION
STRESS MANAGEMENT
18 19
Promoting health is part of the company culture at Infineon Technologies
Austria AG. The aim of occupational medicine is to prevent occupational
diseasesand,inparticular,job-relateddiseases.Awiderangeofinstrumentsis
available to us. Knowledge about workplaces, work sequences, work
equipment and, above all, working materials is the prerequisite of our work.
We offer integrated stress and conflict management to support our staff in
dealing with stress of psychoemotional origin.
As part of the company’s “Healthy and Active” health promotion project, we
continuouslyofferhealth-relatedevents:InthespringweorganizeanActivity
Day on the topic of health, which gives our employees the opportunity to learn
about new aspects of health promotion and take part in selective preventive
medicalcheck-ups.Intheareaofmentalhealth,weoffermediationasone
conflict management option.
In the area of physical health, we focus on “A healthy back”. Apart from the
well-attendedbacktrainingsessionsinthefitnesscenter,wealsooffer
in-housetrainingcoursesgivenbyPilates,yogaandfitnesstrainers,especially
designed for staff at PC workstations. Workplaces are continuously evaluated
and improved technically and ergonomically.
Uponstaffrequest,massagesarealsogivenin-house.Massagesandtraining
takeplaceoutsideworkinghoursandareverypopular.non-smokerprotection
at the workplace has been established in the entire company, and staff have
the opportunity to select a healthy menu composed according to nutritional
criteria from the range of dishes offered by the company canteen.
18 19Health
Foritsinvolvement,earnestnessandemphasisonsustainability,InfineonwasawardedtheQuality
sealforCorporatehealthPromotion2009-2011bytheorganizationFondsGesundesÖsterreichfor
its “Healthy and Active” program.
Great importance has been attached to occupational safety ever since the workplaces at the Villach
factorycameintobeing,notonlyonalegalbasisbutalsoonthebasisofthein-houserules,and
it is constantly developed further. This is also evident from the very low incidence rate of accidents
at work at the Villach site of Infineon Technologies Austria AG, compared with the electrical industry
figures in Austria.
*Since 2005, a new AUVA evaluation model based on “recognized accidents at work” has been in effect, while up to and including 2005 only “accidents at work subject to reporting requirements” were notified.
Page 120. August 2009 Copyright © Infineon Technologies 2006. All rights reserved.
Betriebsunfälle IFAT im Verhältnis zuvergleichbaren Betrieben Österreichs
Häufigkeit der Betriebsunfälle (per 1.000 Mitarbeiter)
0
5
10
15
20
25
30
35
40
45
50
Ind
us
trie
un
fälle
meldepflichtige Arbeitsunfälle 6 4 5 4 3
anerkannte Arbeitsunfälle* 9 5 8 5
Branchenwert 43 30 34 35 33 33 33 27 34
2001 2002 2003 2004 2005 2005 2006 2007 2008
Quelle: AUVA Statistik
2001 2002 2003 2004 2005 2005 2006 2007 2008
Accidents subject to reporting requirements 6 4 5 4 3
Recognized occupational accidents* 9 5 8 5
Industry figures 43 30 34 35 33 33 33 27 34
50
45
40
35
30
25
20
15
10
5
0
Incidence of occupational accidents in industrial enterprises (per 1000 employees)
20 21
Legal regulations and other relevant regulatory requirements (decisions) are
observed by the company. This also includes requirements from approvals and,
where appropriate, regulatory directives and matters pertaining to insurance law.
Current legal regulations that affect occupational safety, health and environmental
protection at the site are listed in a law directory. This applies analogously to
voluntary commitments, requirements from approvals and regulatory directives, etc.
The departments managing the documents have been exactly defined at the Villach
site. The law directory is regularly reviewed and is, among other things, the basis
for the process descriptions and further company regulations in occupational safety,
health and environmental protection.
4.4OBsERVAnCEOFlEGAlREGUlATIOnsRElEVAnTTO THE ENVIRONMENT
Figure:Illustrationofthelegalregulationsrelevanttoenvironmentalprotectioninthelawdatabase
Staff at the Villach site should be aware of the risks of their work to man and the
environment. The company regulations define the duties at the workplace.
Executives are obligated to identify those hazard spots and hazard sources within
theirfieldofworkandresponsibility-ortohavethemidentified-thatmayresult
in risks to staff, other people and the environment.
The executives’ sphere of responsibillity also includes taking precautions to prevent
damage and regularly checking their effectiveness. In the event of deviations,
their cause must be determined, and adequate measures for corrective action and
prevention must be taken.
RechtsregisterZur Sicherstellung der Legal Compliance
Der wachsende Umfang und die teils hohe Komplexität von Rechtsvorschriften, vor allem in den Be-reichen Umwelt und Arbeitssicherheit, stellen für viele Betriebe eine große Herausforderung dar. Den Überblick über relevante Rechtsvorschriften zu bewahren und ständig am Laufenden zu sein, ist meist mit einem großen Aufwand verbunden.
Durch unsere Unterstützung, vor allem durch die Erstellung und laufende Aktualisierung von Rechts-registern, wird dieser Aufwand für Sie minimiert. Wir stimmen gemeinsam mit Ihnen das Rechtsregister auf Ihre rechtlichen Rahmenbedingungen ab (P ichten gemäß den einzelnen relevanten §§ aus den kun-denspezi schen Gesetzen, Verordnungen, Verträgen, etc.).
Standortbezogene Standortbezogene RechtsvorschriftenRechtsvorschriften
EinreichprojekteVerhandlungsschriften
BescheideAnzeigen
Nationale & regionale Nationale & regionale und EUund EU--VorschriftenVorschriften
Gesetze
Verordnungen
Normen
Legal ComplianceLegal Compliance
Standortbezogene Standortbezogene RechtsvorschriftenRechtsvorschriften
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20 21Legal Regulations
COnsOlIDATIOnOFPlAnTAPPROVAls
The Environmental Management Act (§ 22 UMG) gives companies that employ an
environmental management system according to EMAS the opportunity to combine all
federal law approvals for a plant in a single certificate. The Consolidation of Certificates
process, which is done on a voluntary basis and goes beyond the provisions prescribed
by law, was successfully completed by Infineon Technologie Austria AG in May 2005.
Thus, the aim of combining all plant approvals issued for operation at the Villach site in
a single certificate has been achieved, satisfying the latest statutory documentation and
monitoring requirements in the interest of legal compliance. In the 2008/09 fiscal year,
an update of the “Consolidation of Certificates” was filed with the authorities.
In addition to making the administrative procedures much easier, both with the
authorities’ management procedures and the decision management, consolidation
has given the site further advantages:
Legal compliance as a result of the approval consensus being reviewed by the
authorities
Easier future modification procedures due to the consolidation of certificates
Combining all federal law approvals in a single certificate
Clearly organized decision structure
Cutting red tape and paperwork with the authorities
Figure:Excerptfromtheapprovaldocuments
■
■
■
■
■
22 23
Protection of man and the environment is given priority at Infineon. This is why
the company has set up a professional emergency management. In collaboration
with the respective emergency and rescue services, all required safety and
precaution measures have been taken to prevent any possible incident or limit its
consequences as far as possible. In addition, all vital processes relevant to the
environment are monitored via the control system and by carrying out continuous
measurements. Previously, training was carried in relation to a specific event,
but for the calendar year 2010 further training within a routine fire brigade
exercise is planned as part of the protection concept.
In addition to the shift and standby personnel, the company fire brigade of
Infineon Villach and the company medical service are also available for dealing
with any emergencies that may arise. In the event of serious incidents which
can no longer be rectified in normal operating procedure, the site Disaster
Control Organization (BKO) is deployed. Moreover, clear and detailed alarm and
hazard defense plans have been drawn up to limit the consequences of
emergencies and accidents outside the factory premises.
Raising the alarm
Accident / MAjoR incident
emergency force and assistants
Technical Off icer-. in-charge(fire brigade, police, Red Cross, etc.) onsite
disaster preparedness organization
necessity for official measuresUse of private companies
official authority leadership
consult independent
experts
involvement of the carinthian
Government
Private companiesother
Public Relations
4.5EMERGEnCYPREVEnTIOnAnDMAnAGEMEnT
Source: Information folder for neighbors/residents 2005
22 23Documentation
hAnDlInGOFhAzARDOUsMATERIAls
In accordance with their hazardous properties, the required materials are stored at the Villach
site, transported and used in a safe manner. They are delivered in vehicles and shipping containers
specifically approved for this purpose. To reliably prevent accidental leakage of liquids, there
areleakageandretentionbasinswithspecialbasecoatingsatthesite.In-housetransports,for
example of stored chemicals and gases to the supply units of production, are carried out under
stringent safety precautions.
Theirfurthertransporttotheproductionplantstakesplacethroughdouble-walledpipelines
monitored by sensors and the like for tightness. Our production plants are equipped with extensive
safetyandemergencyswitch-offsystems,whichareswitchedbythecontrolcenter,whichis
manned 24 hours a day and seven days a week. In the event of an incident, the required emergency
measures are initiated from there within the shortest possible time.
4.6DOCUMEnTATIOnOFThEEnVIROnMEnTAlMAnAGEMEnT
The documetnation of Infineon`s environmental protection, safety and health management includes
not only the IMPRES manual, but also the complete process descriptions and work instructions
relevanttooccupationalsafety,healthandenvironmentalprotection,andfurtherIMPREs-relevant
documents.
Coordination of the relevant documents at the site is the responsibility of the officer for corporate
occupational safety and environmental protection, but the updating of the documents is the
responsibility of the authors.
The Villach site keeps and maintains a list of relevant records (process and work instructions,
etc.) in environmental protection, occupational safety and health. The records comply with
internal specifications and legal regulations.
24 25
bilduntertitel 8pt, line space 11pt, letter 0 pt
4.7EnVIROnMEnTAlCOMPAnYAUDITs
Environmental certifications of Infineon Technologies Austria AG in chronological order:
Since 1997Infineon AG Villach (then under the name of Siemens Bauelemente OHG) validated as EMAS site and certified to EN ISO 14001.
Since 1999Villach site integrated into the matrix certification of Infineon Technologies Austria AG to ISO 14001.
Since 2005Occupational safety, health and environmental protection were consolidated to form IMPRES (Infineon Integrated Management Program for Environment, Safety and Health).Infineon receives matrix certification according to ISO 14001 and OHSAS 18001.
As part of IMPRES, the entire Villach site is reviewed regularly through internal audits. They audit
especially processes, activities, services and service providers that may give rise to increased risks at
the site. Should any defects or gaps be detected, corrective measures have to be taken.
Deviations are identified using the following methods among others:
Auditsandon-siteinspections
Monitoringofsafety-relevantprocesses,systemsandinstallations,includingmonitoringreports
Risk analyses of the site
Allaudits,includingon-siteinspections,aredocumentedinreportsalongwiththedeviations,
recommendations and persons in charge.
Regular verification and assessment of the implementation of the company’s occupational safety,
health and environmental protection policy and of the objectives and individual goals derived from
it takes place in accordance with the requirements of EMAS, EN ISO 14001 and OHSAS 18001 as
part of a management review.
■
■
■
24 25Analysis
5EnvironmentalImpacts-Data,FactsandFigures
Environmental impact is every positive or negative change to the environment
that occurs entirely or partly as a result of the activities, products or services
of an organization. Infineon is aware of the presence of various environmental
impacts and is pledged to identify new aspects and to take corresponding action
where necessary.
5.1InPUT-/OUTPUT-AnAlYsIs
In order to minimize the environmental impacts of the Villach site, processes are
optimized on the basis of systematic recording and evaluation of energy and
material flows. In particular, resources are used as efficiently as possible by
means of targeted treatment and recycling.
Activities monitoring the efficiency of the specific policies and regulations for
minimizingdirectandindirectenvironmentalaspectsincludethoseofthein-plant
Disaster Control Organization (BKO), strategic and practical exercises involving
the company’s action force, as well as audits and site inspections.
The company has an influence on direct environmental aspects and can control
them. On the other hand, indirect aspects over which the company has no or
limited control may result in significant environmental impact.
0 0 1 0 1 0 1 11 0 0 1 1 1 0 01 0 1 0 0 1 0 11 0 0 0 0 1 0 00 1 1 0 1 0 1 10 0 0 1 0 0 1 0
1 0 0 1 1 0 1 11 1 0 1 0 1 0 00 0 0 0 0 1 0 11 0 1 0 0 1 1 00 0 1 0 1 1 1 11 0 1 1 0 0 1 0
0 0 0 0 1 0 1 01 0 0 0 0 0 0 11 0 1 0 0 0 0 10 0 1 1 0 1 1 00 1 1 0 1 1 1 10 0 0 0 0 0 1 1
26 27
However, added significance is to be given to direct environmental aspects due to the potential
impacts on the environment. The sections below report on the direct environmental aspects applying
to the Villach site, such as the energy, fresh air, water, chemicals and other materials required, and
the waste heat, waste gases, waste water and other waste produced.
Source: Consolidated Environmental Statement 2006
Waste Water Disposal
Waste Water
Waste Water Purif icationRecycling of Chemicals
Waterrecycling
Waste Separation
Waste
Recycling of Waste
Waste Disposal
Wafer withChips
FRONTEND-PRODUCTION
Noise Protection Activities
NoiseEmissions
Emissionsto the Air
Exhaust Air Treatment
Heat Recycling
Rec
ircu
lating
Air
Raw Wafers
Energy
Fresh/Recirculationg Air
Water
Gases &Chemicals
OtherMaterials
Input-Output26 27
Raw materials and supplies 2006/07 2007/08 2008/09
2,107,200
Energy
Production waste 2006/07 2007/08 2008/09
Emissions to the air
Waste water
INPUT 2006/07, 2007/08 and 2008/09 fiscal years
INPUT
OUTPUT
Raw materials and supplies 2006/07 2007/08 2008/09
2,107,200
Energy
Production waste 2006/07 2007/08 2008/09
Emissions to the air
Waste water
OUTPUT 2006/07, 2007/08 and 2008/09 fiscal years
1) Data correction due to transcription error 2)Approx.65-70%ofultrapurewaterproductionbyrecoveryfromcoolingwater3)Theincreaseinvolumeisduetotheramp-upofanewultrapurewaterproductionplant4) Approx. 1,460 GJ (heat) from renewable energy (geothermal heat Building 06)
5) Decrease of approx. 90 t in commercial scrap6) In the 07/08 and 08/09 f iscal years without externally recycled solvents7) Including the volume of waste gas from cleanroom areas and the volume of waste gas collected from other site areas
28 29
Compared with previous years, the significant reduction in the total input of resources for the
2008/09fiscalyearresultsmainlyfromextensiveunder-utilizationofsemiconductorproduction
capacity due to market conditions. As a result, the specific consumption of resources, which is
reportednormalizedto8-inchwaferManufacturedlayer(Ml)-theseareprocessedwafers,taking
intoconsiderationtheproduct-specificnumberoflithographylayers-increasedconsiderablyfor
energy and consumable media (chemicals, gases, water).
The interrelationship between consumption of input materials / resources and utilization of the
production capacity available will be discussed in the section below on energy, as an example for
the input variables concerned.
In the area of emissions, however, the specific CO2-equivalentemissionswereagainsubstantially
constant in the last fiscal year due to the CO2 reduction program being consistently carried
forward. The emissions as such also decreased in total.
5.2 DIRECT ENVIRONMENTAL ASPECTS
Direct environmental aspects are under the company’s immediate control and are directly linked
with the activities, products and services. Examination of legal regulations and material flows are
used for identification of environmental aspects. The most obvious direct environmental aspects
are emissions into the air and into water, waste and use of resources and energy.
EnERGY EnergyandsavingenergyistakenveryseriouslyatInfineonAustria,whichiswhy-alongsidethe
issueofgreenhousegasemissions-greatattentionispaidtotheresponsibleuseofenergy.
The processes are optimized by systemically recording and evaluating the energy and material
flows so as to implement measures targeted at maximizing the efficiency of consumption.
Asinpreviousyears,therewasagainafocalpointintheareaofemployeemotivation(YIP).
28 29Saving
Inthiswide-rangingscheme,allemployeesarecalledupontosubmitideasthat
contribute to cutting energy consumption in an endeavor to find and implement
areas of potential, however small they may be.
The suggestions relevant to energy accounted for the largest proportion of the
environmental suggestions submitted by the employees.
EnERGYsAVInGWIThInFInEOnPRODUCTs
Infineon products promote energy efficiency along the entire supply chain.
They reduce energy consumption in households and industry, for instance in IT
servers,lighting,television,cookers,allthewaytolarge-scaleindustrialplants.
AttheVillachsite,InfineonTechnologiesAustriaAGmanufacturesenergy-saving
productse.g.fromtheCoolsET™andCoolMOs™familyandfromtheso-called
Smart Ballast IC product range. The use of Infineon products in industrial lighting,
which accounts for 15% of global energy consumption, significantly reduces
electric power consumption.
On top of our push to save energy at product level, we are strongly committed
totheinnovationareaofelectro-mobility.InfineonAustriaisinvolvedtogether
with top industry, research and energy management companies in the nationwide
“AustrianMobilePower”platformaimedatpromotingelectro-mobilityconcepts
andatputting100,000e-carsonAustrianroadsbytheyear2020.
The recent purchase of five electric bicycles also sets an example. On the one
hand they are at the disposal of the product development division and on the
other they give the employees the opportunity to test the suitability of the
bicycles for daily use.
30 31
nEWOFFICECOMPlEXWIThMODERnEnERGYCOnCEPT
A new building for research, development and innovation was opened in
June2008.Theenergyconceptofthenewbuildingmeetsstate-of-the-artenergy
efficiency standards. This building supplied with geothermal energy also uses the
Group’sowntechnologiesandproducts,suchasenergy-savingpowerelectronics
foroperatingtheventilationsystemsortheCoolMOs™high-performancepower
transistor for lighting control.
Another positive aspect is the successful implementation of the alternative energy
supply concept in Building 06, using geothermal energy for heating.
Using a probe and a carrier medium, warmth from the earth is conducted to the
heat pump and is there raised to a higher temperature level for the heating via
the refrigeration circuit. The same circuit is used for cooling in the summer.
With the concept of the new building, Infineon Austria demonstrates that high
importance is attached to energy efficiency not only at business level, but that
the company itself and its site management are geared to this goal.
Energy30 31
sITEEnERGYsTATIsTICs
Fortrendanalysisoftheenergyconsumption,theenergyconsumptionisreportedforthefirst
timeinaten-yearviewforobjectivepresentationoftheimpactofunder-utilizationontheenergy
consumption.
Forthefirsttime,aconsumptiontargetforthespecificpowerconsumptionofthesitewassetup
on the basis of the measures in the environmental program and the planned production capacity
utilization for the 2009/10 fiscal year.
As the above diagram of externally sourced energy shows, the positive reduction trend over the last
years was interrupted in the 2007/08 and 2008/09 fiscal years. In the last fiscal year there was a
distinct increase in the specific overall energy consumption. As mentioned at the outset, this increase
isaccountedforbyanextensiveunder-utilizationofproductioncapacity,particularlyinthe2008/09
fiscal year.
Energieverbrauch in kWh / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr
0
5
10
15
20
25
99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10Geschäftsjahr
0,000
0,300
0,600
0,900
1,200
1,500
1,800
2,100
2,400
2,700
3,000
Energie gesamt Strom Erdgas Erdöl EL
[kWh/ML] [kWh/ML]Strom, ErdgasEnergie gesamt Erdöl EL
Energy consumption in kWh/ML on 8-inch wafers normalized per fiscal yearElectricity, natural gastotal energy Domestic fuel oil
Total energy Electricity Natural gas Domestic fuel oil
Fiscal year
32 33
bilduntertitel 8pt, line space 11pt, letter 0 pt
As reported in international studies, a large percentage of the electric power and media consumption
(typically 50% for e.g. energy) in semiconductor manufacturing is unrelated to production volumes
and is used to maintain facilities and installed product capacities.
The necessity of a sustainable strategy for resource reduction becomes very clear if one considers
that the energy consumption of a semiconductor fab is basically unrelated to its capacity utilization.
In other words, the entire equipment, systems and subsystems need almost the same amount of
energyinthestand-bymodeaswhenfullydeployed.
Schematic representation of energy consumption in semiconductor manufacture for
varying capacity utilization
0
1
2
3
4
5
6
7
0 1 2 3 4 5
Zeitachse
Energieverbrauch Kapazitätsauslastung
normierterEnergie-verbrauch
normierteKapazitäts-auslastung
Energieverbrauch einer Halbleiterfertigung bei unterschiedlicher Auslastung (schematischer Verlauf)
0
1
2
3
4
5
6
7
0 1 2 3 4 5
Zeitachse
Energieverbrauch Kapazitätsauslastung
normierterEnergie-verbrauch
normierteKapazitäts-auslastung
Energieverbrauch einer Halbleiterfertigung bei unterschiedlicher Auslastung (schematischer Verlauf)
0
1
2
3
4
5
6
7
0 1 2 3 4 5
Zeitachse
Energieverbrauch Kapazitätsauslastung
normierterEnergie-verbrauch
normierteKapazitäts-auslastung
Energieverbrauch einer Halbleiterfertigung bei unterschiedlicher Auslastung (schematischer Verlauf)
0
1
2
3
4
5
6
7
0 1 2 3 4 5
Zeitachse
Energieverbrauch Kapazitätsauslastung
normierterEnergie-verbrauch
normierteKapazitäts-auslastung
Energieverbrauch einer Halbleiterfertigung bei unterschiedlicher Auslastung (schematischer Verlauf)
Normalized energy
consumption
Capacity utilization
Time line
Energy consumption Capacity utilization
32 33Energy Efficiency
The left diagram shows energy consumption plotted against capacity utilization in wafer
manufacturing. The electric power consumption remains almost constant despite the sharp
fluctuations in wafer manufacturing (capacity utilization). Since the semiconductor industry
in particular is often subject to sharp fluctuations in demand and capacity
utilization,itishugelyimportanttodeviseanenergy-optimizedandcost-optimizedstand-by
scenariofortheproductionfacilitiesforphasesofunder-utilization.
Theaimistokeeptheproductionequipmentreadyforproductioninsuchunder-utilization
phases, but at the same time to minimize the consumption of resources and energy.
To make the use of energy and resources as efficient as possible and to learn lasting
lessonsfromtimesofunder-utilization,asite-wideEnergyEfficiencyProjectwaslaunched
which, in addition to the focal areas mentioned, also deals with innovative approaches
through resource optimization.
Distribution of energy demand at the Infineon Villach site
0,2%
20,6%
10,0%
69,2%
Strom Energie aus Wärmepumpen und Wärmerückgewinnung Erdöl ErdgasElectricity Natural gasEnergy from heat pumps and thermal recovery Domestic fuel oil
0,2%
20,6%
10,0%
69,2%
Strom Energie aus Wärmepumpen und Wärmerückgewinnung Erdöl Erdgas
0.8%
68.3%
20.4%
20.4%
34 35
In a detailed analysis of the site energy statistics, a positive aspect in the
2008/09fiscalyearthatistobementionedisthat-despitetheunder-utilization
offactorycapacity-ahighpercentage(about20%)ofthetotalenergyrequired
was provided internally by way of waste heat utilization and heat recovery.
Theconsumptionofextra-light(El)heatingoilincreasedslightlyyear-on-year
because old reserves of heating oil were used up for cost reasons in order not to
have to purchase any additional energy.
Another major energy carrier at the site is natural gas, used 80% for operating
the heating and also for exhaust air cleaning (burn boxes).
Theconsumptionofnaturalgas,asthesite’ssecond-largestenergycarrier,
alsoincreasedfortheabove-statedreasons.
We need about 50% of the externally sourced energy for maintaining the
cleanrooms, operating the refrigeration and air conditioning plants in peripheral
areas, the office buildings as well as the ultrapure water and waste water plant.
Chemicals34 35
CHEMICALS AND GASES
In the area of chemicals and gases, the good level of specific consumption over
the last years was maintained in the 2008/09 fiscal year only for the process
gases used technically selectively. The specific consumption of solvents and
inorganic chemicals in production increased slightly. The increase in consumption
of basic gases in the last two years resulted from the provision of additional new
equipment.
Duetothemarket-relatedunder-utilizationofproductioncapacitymentioned,
basic gases and infrastructure chemicals had to be used in excess in order to
maintaintherespectiveoperationalstructuresinstand-bymode.Whatwe
understandbystand-bymodeisequipmentthatisnotinusebutisreadyfor
production, which is kept ready for operation by increased flushing with basic
gases such as nitrogen and with the least use of energy possible.
Verbrauch Chemikalien und Gase in kg / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr
-
1,0000
2,0000
3,0000
4,0000
5,0000
6,0000
7,0000
99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09Geschäftsjahr
0,000
0,100
0,200
0,300
0,400
0,500
0,600
Grundgase Infrastruktur Chemikalien anorganische Chemikalien Lösemittel Prozessgase
[kg/ML][kg/ML]
Grundgase
Infrastr. Chem., anorg. Chem.,Lösemittel, Spezialgase
Verbrauch Chemikalien und Gase in kg / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr
-
1,0000
2,0000
3,0000
4,0000
5,0000
6,0000
7,0000
99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09Geschäftsjahr
0,000
0,100
0,200
0,300
0,400
0,500
0,600
Grundgase Infrastruktur Chemikalien anorganische Chemikalien Lösemittel Prozessgase
[kg/ML][kg/ML]
Grundgase
Infrastr. Chem., anorg. Chem.,Lösemittel, Spezialgase
Basic gases
Basic gases
Infrastr. chem., inorg. chem., solvents, special gases
Infrastructure chemicals Inorganic chemicals Solvents Process gases
Fiscal year
Consumption of chemicals and gases in kg/ML on 8-inch wafers per fiscal year
36 37
bilduntertitel 8pt, line space 11pt, letter 0 pt
WASTE MANAGEMENT
Inthelastfiscalyear,thetotalamountofwasteandthebelow-indicatedfractions-whichconstitute
about 91% of the total waste – decreased considerably. However in the period under review there
was a distinct increase in the specific total amount of waste of the site (normalized to
Manufactured Layer) due to underutilization of production capacity, despite great efforts in the
re-useandrecyclingsector.
Furtherrecoveryandoptimizationpotentialintherecyclingareadidnotarise,despiteintensive
exchange of information with other industrial enterprises.
Intheinterestofhigh-qualitywastemanagementpracticedbyalltheemployees,Infineonattaches
greatimportancetoin-houserecoverynetworks.Toillustratethepoint,allemployeesareencouraged
to reduce the volume of residual waste by collecting and segregating waste and recyclable fractions.
In the area of hazardous waste, concentrated sulfuric acid and spent solvents in particular are
collected separately and recycled externally.
Themainfractionsofnon-hazardouswasteinthe2006/07,2007/08and2008/09fiscalyearswere:
2006/07 2007/08 2008/09
Slurries from water treatment plant 2,460 2,589 1,520 t
Domestic and commercial waste 438 363 254 t
Contents of grease separators (kitchen) 209 209 206 t
Iron and steel scrap (commercial scrap) 147 58 28 t
Waste paper 140 156 87 t
Biogenic waste 138 138 138 t
Waste from building sites and demolition wood 110 51 24 t
Waste wood 64 55 25 t
36 37Waste
The hazardous waste of the site was substantially made up of the following
components:
In the area of hazardous waste, the consistent continuation of the recycling
projects allowed a distinct reduction in particular of the solvent fractions.
2006/07 2007/08 2008/09
Solvent mixtures 643 357 179 t
Spent acids (sulfuric acid) 575 590 430 t
Other aqueous concentrates 141 187 156 t
Waste in kg/ML normalized to 8-inch wafers per fiscal yearAbfälle in kg / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr
0,0000
0,1000
0,2000
0,3000
0,4000
0,5000
99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09Geschäftsjahr
Summe Abfälle Ungefährliche Abfälle Gefährliche Abfälle mit Schwefelsäure Gefährliche Abfälle ohne Schwefelsäure
[kg/ML]
Intheareaofdisposaloftheabove-mentionedspentsolventmixtures,again
approx.42%oftheDMFandPGMEAsolventsrequiredinoperationcouldbe
provided by an internal recycling operation. The pilot project launched in the
2007/08 fiscal year for recycling cyclopentanone and NMP was successfully carried
forward in the 2008/09 fiscal year. Thus, in the last fiscal year it was possible
to recycle approx. 55% of the solvents cyclopentanone and NMP required, by
external recycling operations for the purposes of recycling management.
This makes our spent solvent mixtures not only valuable energy carriers in the
areaofthermalre-utilization,butalsoasourceofsecondaryrawmaterials.
Fiscal year
Total waste Non-hazardous waste Hazardous waste containing sulfuric acid Hazardous waste containing no sulfuric acid
38 39
WATER AND WASTE WATER TREATMENT
The Villach site covers a large portion of its water demand from four wells. In the
2008/09fiscalyearagainaboutonethirdofthissite-producedwaterwaspurified
using special treatment plants to obtain ultrapure water for use in production.
However there was a distinct increase in specific water consumption and in the
resultantamountofwaterduetounder-utilizationofproductioncapacityas
wet-chemicalsystemshavetobepermanentlyflushedinthestand-bymodeorat
part load. This increase in specific water consumption could not be compensated
even by consistent multiple use of cooling water. The water required for cooling
production and infrastructure installations is made available on site, while the
drinking water and the water for sanitary installations is obtained from the local
public utility.
The optimization project introduced last year in the field of fully deionized water
production was positively finalized when the new deionized water treatment plant
in Hall 14 went into operation. As a result, two old plants were disconnected
from the network. Therefore, at present the site is supplied with the technically
necessary ultrapure water by four plants. A consumption target was defined for
the specific water consumption of the 2009/10 fiscal year, along the same lines
as the power consumption.
Water consumption and amount of waste water from production in m3/ML normalized to 8-inch wafers per fiscal yearWasserverbrauch und Abwassermenge aus der Produktion in m3 / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr
0,00
0,10
0,20
0,30
0,40
0,50
0,60
99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09 09/10Geschäftsjahr
Wasserverbrauch m3 Abwasser aus der Produktion m3
[m3/ML]
Fiscal year
Water consumption m3
Waste water from production m3
Waste water38 39
WASTE WATER
Anewin-housewatertreatmentplant,equippedwithstate-of-the-artautomatic
online analysis and a suitable retention basin, purifies polluted waste water from
production. A reduced specific waste water volume was derived from the
above-statedreductiontargetofsite-specificwaterconsumptionasatargetfor
the 2009/10 fiscal year. Typical values for direct and indirect discharge of our
waste water can be found in the following tables.
As can be seen from these tables, they comply with the prescribed limit values
for both direct and indirect discharge and in most cases are even far below them.
Until July 2007 the waste water was discharged indirectly, i.e. into the urban
sewerage system, in compliance with the limit values prescribed by the authorities.
Waste water substances etc. Limit value 1) Measured value (average) 2)
Arsenic 0.1 <0.01 mg/l
Fluoride 50 31.9 mg/l
Sulfate 400 108.8 mg/l
sulfate-inspectionchamber 3) 400 30.1 mg/l
Filterablesubstances 250 78.6 mg/l
1) According to official stipulations (until 07.2007)2) Measured values 2006/07 fiscal year (10.2006 to 07.2007)3)Precipitationchange-precipitationwithouth2SO4
InAugust2007,afteracorrespondingtestrun,thego-aheadwasgivenfordirect
dischargeofnon-pollutedwastewaterthroughthenewwaterplantintotheGail
receiving water course.
40 41
Substance Limit value acc. to notification
Measured value 07/08
Measured value 08/09
Filterablesubstances mg/l 250 229 42
Ammonium-n(nh4) kg/d 240 102.1 39.2
Fluoride(F) mg/l 50.0 49.1 35.0
Phosphorus (P total) kg/d 60 59.6 27.1
Nitrogen (N total) kg/d 250 116.7 82.7
Sulfate (SO4) mg/l 400 136.0 56.4
AOX1) mg/l 0.5 0.027 0.021
Copper (Cu) mg/l 0.10 0.05 0.04
Molybdenum (Mo) mg/l 1.00 0.06 0.03
Nickel (Ni) mg/l 0.30 0.06 0.03
Zinc(Zn) mg/l 2.00 0.06 0.03
Boron (B) mg/l 1.00 0.17 <0.05
HC total 2) mg/l 3.00 <0.1 <0.1
POX3) mg/l 0.05 <0.01 <0.011) Adsorbable organically bound halogens2) Hydrocarbons3) Purgeable organically bound halogens
Sampling container AEV semiconductors indirect charge - external monitoring
Substance Limit value acc. to notification
Measured value 07/08
Measured value 08/09
pH value 6.5-8.5 7.9 8.3
Filterablesubstances mg/l 50 <10 36
Ammonium-n(nh4) mg/l 20 2.0 1.1
Fluoride(F) mg/l 50 3.0 1.8
Phosphorus (P ges) mg/l 2 0.6 0.5
TOC 1) mg/l 30 2.6 <0.5
CSB 2) mg/l 120 <15 <15
AOX3) mg/l 0.5 0.018 <0.010
Antimony (Sb) mg/l 0.10 <0.01 <0.01
Arsenic (As) mg/l 0.10 <0.01 <0.01
Lead (Pb) mg/l 0.10 <0.01 <0.01
Cadmium (Cd) mg/l 0.05 <0.001 <0.001
Chromium (Cr) mg/l 0.10 <0.01 <0.01
Copper (Cu ) mg/l 0.20 0.03 0.04
Molybdenum (Mo) mg/l 0.10 <0.01 <0.01
Nickel (Ni) mg/l 0.30 <0.01 <0.01
Selenium (Se) mg/l 0.10 <0.01 <0.01
Zinc (Zn) mg/l 1.00 <0.02 <0.02
Tin (Sn) mg/l 1.00 <0.01 <0.01
Boron (B) mg/l 1.00 <0.05 <0.05
HC 4) total mg/l 1.00 <0.01 <0.01
POX5) mg/l 0.10 <0.010 <0.01
Anionic surfactants mg/l 2.00 <0.001 <0.01
BTXE6) mg/l 0.10 <0.005 <0.005
non-ionicsurfactants mg/l 1.00 <0.10 <0.01
Sampling container AEV semiconductors direct charge - external monitoring
1) Total organically bound carbon2) Chemical oxygen demand3) Adsorbable organically bound halogens4) Hydrocarbons5) Purgeable organically bound halogens6) Sum of volatile aromatic hydrocarbons
Exhaust air40 41
EXhAUsTAIR
Forthefreshairsupplyofcleanrooms,largevolumesofairfromtheoutsidearesuckedin,cleaned
to remove particles, and, after several recirculation cycles (multiple circulation), filtered and released
intotheenvironment.Process-relatedimpuritiesoftheexhaustairareremovedfromtheexhaustair,
if necessary, by using purification plants. The values achieved by these plants are distinctly below
the limit values stipulated by the authorities. The classes of substances that are environmentally
relevant in the exhaust air sector are collected in defined exhaust air flows based on their chemical
properties.
In the area of acid/alkaline exhaust air (process exhaust air), wet scrubbers are used, the organic
componentsarepurifiedbymeansofafter-combustionplants,whileperfluorinatedcompounds
(PFCs)fromthefieldofsemiconductorproductionarecombustedinahigh-temperatureprocessand
subsequently cleaned by a wet chemical method. As can be seen from the following table, the
measured values are clearly below the allowed air emission values.
1) According to official stipulations, as of: f iscal year 06/07, 07/08 and 08/092) Data correction due to transcription error
Productionhall 14 Limit value 1)
2006/07 2007/08 2008/09
Hydrogen chloride ( HCl ) 30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3
hydrogenfluoride(hF) 3 mg/m3 0.62 mg/m3 0.45 mg/m3 0.35 mg/m3
Chlorine ( Cl2 ) 3 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3
Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 5.81 mg/m3 2) 4.61 mg/m3 2.44 mg/m3
Ammonia ( NH3 ) 30 mg/m3 ≤ 0.70 mg/m3 ≤ 0.70 mg/m3 ≤ 0.70 mg/m3
Hydrogen bromide ( HBr ) 3 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3
Arsine ( AsH3 ) 0.5 mg/m3 0.020 mg/m3 ≤ 0.017 mg/m3 ≤ 0.017 mg/m3
Phosphine ( PH3 ) 0.5 mg/m3 0.067 mg/m3 2) 0.044 mg/m3 0.028 mg/m3
Organic carbon 30 mg/m3 4.88 mg/m3 4.94 mg/m3 6.38 mg/m3
Carbon monoxide ( CO ) 100 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3
Measured values (average values)
Air emissions Hall 14 - Measured values in the 2006/07, 2007/08 and 2008/09 fiscal years
Substance Limit value acc. to notification
Measured value 07/08
Measured value 08/09
pH value 6.5-8.5 7.9 8.3
Filterablesubstances mg/l 50 <10 36
Ammonium-n(nh4) mg/l 20 2.0 1.1
Fluoride(F) mg/l 50 3.0 1.8
Phosphorus (P ges) mg/l 2 0.6 0.5
TOC 1) mg/l 30 2.6 <0.5
CSB 2) mg/l 120 <15 <15
AOX3) mg/l 0.5 0.018 <0.010
Antimony (Sb) mg/l 0.10 <0.01 <0.01
Arsenic (As) mg/l 0.10 <0.01 <0.01
Lead (Pb) mg/l 0.10 <0.01 <0.01
Cadmium (Cd) mg/l 0.05 <0.001 <0.001
Chromium (Cr) mg/l 0.10 <0.01 <0.01
Copper (Cu ) mg/l 0.20 0.03 0.04
Molybdenum (Mo) mg/l 0.10 <0.01 <0.01
Nickel (Ni) mg/l 0.30 <0.01 <0.01
Selenium (Se) mg/l 0.10 <0.01 <0.01
Zinc (Zn) mg/l 1.00 <0.02 <0.02
Tin (Sn) mg/l 1.00 <0.01 <0.01
Boron (B) mg/l 1.00 <0.05 <0.05
HC 4) total mg/l 1.00 <0.01 <0.01
POX5) mg/l 0.10 <0.010 <0.01
Anionic surfactants mg/l 2.00 <0.001 <0.01
BTXE6) mg/l 0.10 <0.005 <0.005
non-ionicsurfactants mg/l 1.00 <0.10 <0.01
Sampling container AEV semiconductors direct charge - external monitoring
42 43
1) Adsorbierbare organisch gebundene Halogene 2) Kohlenwasserstoffe 3) Ausblasbare organisch gebundene Halogene
BeprobungsbehälterAEVhalbleiterDirektFremdüberwachung
Productionhall 15 Limit value 1)
2006/07 2007/08 2008/09
Hydrogen chloride ( HCl ) 30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3 ≤ 0.30 mg/m3
hydrogenfluoride(hF) 3 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3
Chlor ( Cl2 ) 3 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3
Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 2.29 mg/m3 ≤ 0.82 mg/m3 ≤ 0.82 mg/m3
Ammonia ( NH3 ) 30 mg/m3 1.66 mg/m3 0.72 mg/m3 ≤ 0.70 mg/m3
Hydrogen bromide ( HBr ) 3 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3
Arsine ( AsH3 ) 0.5 mg/m3 n.a. n.a. n.a.
Phosphine ( PH3 ) 0.5 mg/m3 ≤ 0.007mg/m3 ≤ 0.007mg/m3 ≤ 0.007 mg/m3
Organic carbon 30 mg/m3 3.17 mg/m3 9.19 mg/m3 6.37 mg/m3
Carbon monoxide ( CO ) 100 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3
Productionhall 16 Limit value 1)
2006/07 2007/08 2008/09
Hydrogen chloride ( HCl ) 30 mg/m3 ≤ 0.30 mg/m3 0.31 mg/m3 ≤ 0.30 mg/m3
hydrogenfluoride(hF) Hall 16 2) 1 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3 ≤ 0.24 mg/m3
Chlorine ( Cl2 ) 3 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3 ≤ 0.50 mg/m3
Nitrogen oxides as nitrogen dioxide ( NO2 ) 200 mg/m3 5.18 mg/m3 4.62 mg/m3 8.47 mg/m3
Ammonia ( NH3 ) 30 mg/m3 1.71 mg/m3 ≤ 0.70 mg/m3 ≤ 0.70 mg/m3
Hydrogen bromide ( HBr ) 3 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3 ≤ 0.67 mg/m3
Arsine ( AsH3 ) 0.5 mg/m3 0.045 mg/m3 0.042 mg/m3 0.029 mg/m3
Phosphine ( PH3 ) 0.5 mg/m3 0.051 mg/m3 0.042 mg/m3 0.040 mg/m3
Organic carbon 30 mg/m3 9.28 mg/m3 ≤ 1.61 mg/m3 ≤ 1.61 mg/m3
Carbon monoxide ( CO ) 100 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3 ≤ 9.28 mg/m3
Measured values (average values)
Measured values (average values)
Air emissions Hall 15 - Measured values in the 2006/07, 2007/08 and 2008/09 fiscal years
Air emissions Hall 16 - Measured values in the 2006/07, 2007/08 and 2008/09 fiscal years
1) According to official stipulations, as of: f iscal year 06/07, 07/08 and 08/092) ThehFlimitvalueforhall16wasestablishedbyrulingoftheFederalMinistryofEconomicAffairs ofsept.8,1998,item318.956/3-III/A/2a/98,at1mg/m3
n.a. not applicable
42 43Emissions
Based on the requirements of the EMAS III Regulation (EC) No.1221/2009,
thenOX(nitrogenoxide),sO2 (sulfur dioxide) and dust emissions are reported
on for the first time in this Consolidated Environmental Statement.
ThenOXemissionsofthesiteareapprox.11,500kginthe2008/09fiscalyear,
about 11% of which come from the natural gas (2,389,199 m3)andextra-light
heating oil (18,420 kg) used. The emissions from the production areas were
evaluated using an assessment of the loads of the exhaust air streams and their
nOXcontamination.
ThenOXemissionsfromtheheatingmixusedwerecalculatedonthebasis
oftheannualemissiondeclarationforboilerplants(FederalGazetteII
No. 292/2007), which is communicated electronically to the Environment
Agency in the form of an annual report.
(InternalconversionfactorsfromRecknagel,sprenger,schramek;heizung-undKlimatechnik03/04).
The SO2 emission of the site was determined stoichiometrically as no SO2 is used
as process gas in production and sulfur dioxide emissions from the heating mix
used(naturalgasandextra-lightheatingoil)arelimitedbytheproduct
specifications (sulfur typically < 0.01 %).
Theemissionassessmentof<10kgsulfurdioxidefromnaturalgasandextra-light
heating oil was hence based on the product specifications of the heating mix
because no measured values exist in this regard.
In terms of dust emissions, an expert conducts an annual review with reference
to the regulatory requirements (max. 5 mg/Nm3) as part of the respective check
system. The measured values for the last fiscal year are between 0.1 and 3 mg/Nm3.
The assessment of site dust emissions is approx. 5.5 t per annum and again
results from an assessment of the load of the exhaust air streams.
0 0 1 0 1 0 1 11 0 0 1 1 1 0 01 0 1 0 0 1 0 11 0 0 0 0 1 0 00 1 1 0 1 0 1 10 0 0 1 0 0 1 0
1 0 0 1 1 0 1 11 1 0 1 0 1 0 00 0 0 0 0 1 0 11 0 1 0 0 1 1 00 0 1 0 1 1 1 11 0 1 1 0 0 1 0
0 0 0 0 1 0 1 01 0 0 0 0 0 0 11 0 1 0 0 0 0 10 0 1 1 0 1 1 00 1 1 0 1 1 1 10 0 0 0 0 0 1 1
44 45
Formanyyears,wehavedevotedparticularattentiontoreducingtheemissions
ofperfluorinatedcompounds(PFCs),whichareusednotonlyintheproduction
ofwafersbutalsointestingfacilities.ThecontributionofPFCstothegreen-
house effect exceeds by far that of carbon dioxide. In order to reduce the effect
of the emissions on climate, we paid special attention to sustainable reduction
measures-especiallyintheareaofexhaustairpurificationandtheuseofsulfur
hexafluoride(sF6) in testing facilities.
TheearnestnessofInfineon’saimtoreducePFCemissionsisdemonstrated,for
example, by its voluntary commitment in Europe. Thus, it was planned that by
theyear2010emissionofPFCscomparedwiththeyear1995shouldhavebeen
reducedbytenpercent-calculatedinCO2 equivalents. By taking holistic
measures to accomplish this challenging plan, we have succeeded in already
achieving this goal.
PFC emissions for Infineon in the EU 1995 to 2010 CO2-equivalents (%) PFC Emissionen in der EU
0
100
200
300
400
500
600
700
800
900
1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010
CO2
- Äqu
ival
ente
in
[%]
geschätzte Emissionen (Volumenwachstum 15% pro Jahr) reale Emissionen Ziel der freiwilligen Selbstverpflichtung
PFC Emissionen in der EU
0
100
200
300
400
500
600
700
800
900
1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010
CO2
- Äqu
ival
ente
in
[%]
geschätzte Emissionen (Volumenwachstum 15% pro Jahr) reale Emissionen Ziel der freiwilligen SelbstverpflichtungEstimated emissions (growth by volume 15% per year, without reduction measures)Actual emissionsGoal of voluntary self-commitment
CO2
equi
vale
nts
(%)
PFC Emissionen in der EU
0
100
200
300
400
500
600
700
800
900
1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010
CO2
- Äqu
ival
ente
in
[%]
geschätzte Emissionen (Volumenwachstum 15% pro Jahr) reale Emissionen Ziel der freiwilligen Selbstverpflichtung
PFC Emissionen in der EU
0
100
200
300
400
500
600
700
800
900
1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010
CO2
- Äqu
ival
ente
in
[%]
geschätzte Emissionen (Volumenwachstum 15% pro Jahr) reale Emissionen Ziel der freiwilligen Selbstverpflichtung
44 45Reduction
At the Villach site, in order to reduce the emissions of greenhouse gases as specified by the Kyoto
Protocol, we have opted for and implemented sustainable reduction measures, in particular in the
field of exhaust gas cleaning and use of sulfur hexafluoride. This has allowed us to achieve not only
a significant reduction of the emissions, but also comply, of course, with the Austrian Ordinance for
Industrial Gases, which stipulates a 30% reduction in CO2 equivalents.
Reduction in SF6 consumption at the Villach site
Giventoday’sstate-of-the-arttechnology,sF6 is a process gas that is essential to the semiconductor
industry.EventhoughthetechnicalpossibilitiesofoptimizingsF6 consumption are by now largely
exhausted,lastyearwemanagedtoachieveafurtherreductioninsF6 consumption by metrological
optimization. Reduction measures will continue to be constantly reviewed and, should it be possible
to identify measures, they will be implemented if they are technically and economically feasible.
SF6 Verbrauchsreduktion am Standort Villach
0,0
20,0
40,0
60,0
80,0
100,0
2000/01 2001/02 2002/03 2003/04 2004/05 2005/06 2006/07 2007/08 2008/09
%
SF6 Verbrauchsreduktion in [%]SF6 - Verbrauchsreduktion in [%]
Estimated emissions (growth by volume 15% per year, without reduction measures)Actual emissionsGoal of voluntary self-commitment
Reduction of SF6 consumption in [%]
Aspects46 47
CO2-Emissionen in kg / ML auf 8-Zoll-Wafer normiert je Geschäftsjahr
0,0
10,0
20,0
30,0
99/00 00/01 01/02 02/03 03/04 04/05 05/06 06/07 07/08 08/09Geschäftsjahr
0,00
0,50
1,00
1,50
2,00
2,50
3,00
CO2 Äquivalente Produktion (PFC, SF6, NF3) CO2 Emissionen Heizung (Notstromversorgung, PFC-Abreinigung)
[kg/ML] [kg/ML]
CO2-ÄquivalentePFC
CO2-EmissionenHeizung
Based on the new EMAS III Regulation (EC) No.1221/2009, the emissions of CO2
(carbon dioxide), CH4 (methane) and N2O (dinitrogen monoxide) related to CO2
equivalents are additionally examined for the first time in this Consolidated
Environmentalstatement.sincetheglobalwarmingpotentialoftheseabove-stated
process gases related to CO2 equivalents is relatively low and overall in fiscal
year 2008/09 is only approx. 1% of the total emissions, this component was not
takenintoaccountintheten-yeardiagramabovebytakinga“deminimis
approach” based on the 2004/156/EC guideline. The consumption of CO2-relevant
hydrofluorocarbons(hFCs)asrefrigerant,whichagainaccountsfordistinctly<1%
in the given CO2 emissions, can also be disregarded.
The slight increase in emissions in the area of heating, emergency power supply
and exhaust air purification results from the energy mix used. The emissions
related to CO2 equivalents from the production area range within the settled level.
NOISE
Infineonkeepsanupdatednoiseregister,andnoise-generatingmachines,such
as compressors, refrigerating machines and heat pumps, are housed in closed
supply rooms. This avoids any exposure of the residents living nearby to noise.
CO2 equivalents PFC CO2 emissions heating
CO2 equivalents PFC CO2 emissions heatingCO2 emissions in kg/ML to 8-inch wafers normalized per fiscal year
CO2equivalentsPFC CO2 emissions heating
Fiscalyear
Aspects46 47
5.3 INDIRECT ENVIRONMENTAL ASPECTS
In addition to the direct environmental aspects, consideration also has to be paid to the indirect
aspects which might result in significant environmental impact over which the organization has no
or only limited control. In the area of communication, for example, great importance is attached to
regular, open dialog with neighbors, customers, authorities and the media.
EnVIROnMEnTAllYsOUnDPROCUREMEnT
The environmental aspects in the procurement process are also considered within the company.
Alongside the company’s process descriptions for environmentally sound procurement of services
and equipment, the suppliers’ environmental performance is appraised using a rating scheme.
Consideration is also paid to whether suppliers have an environmental management system.
Almost 90% of our site’s suppliers have a certified environmental management system in place.
EnERGY-EFFICIEnTPRODUCTs
Infineon is committed to responsible use of natural resources not only in production. The company
also conducts ongoing research into more efficient use of the energy flows in the semiconductors
produced. Longer service life and improved recycling properties of the products are factored into
thedesignofInfineonchips.Furthermorethereisadevelopmentmanualspecificallygearedto
environmentally sound product design.
Infineon’s “Power Management Supply & Discretes” division concentrates on reducing power loss
in electronic equipment, and on efficient use of energy. Consumers benefit directly from Infineon’s
developments by saving money on energy. Microchips are used in a wide spectrum of applications
and their energy savings potential is vast. They reduce energy consumption in households and in
industry,forinstanceinITservers,lighting,TVsets,cookers,allthewaytolarge-scaleindustrial
plants.
To give a few examples: the CoolSET™ family of chips significantly reduces power consumption by
waking up a TV set from its standby mode more efficiently. Induction stoves equipped with Infineon
IGBT products are 25% more efficient and save as much as 70 percent electricity. Industrial lighting
accounts for a 15 percent share in the global electricity consumption. Various Infineon products
from the CoolMOS™ and Smart Ballast IC product range substantially reduce the power consumed
by lighting and therefore contribute to achieving the targets for CO2 emissions.
48 49
EnVIROnMEnTAlCOnDUCTOFCOnTRACTORsAnDOUTsIDECOMPAnIEs
Infineon’s global supplier management is an integral part of IMPRES. Infineon exercises responsibili-
ty for people and the environment even from the start of the design and production process. Ser-
vice providers and suppliers are also obliged to meet our standards in environmental protection,
occupational safety and health, and in working and social conditions. To support our suppliers
and service providers in this quest, the Infineon Group has formulated principles which are based
on our globally applicable “Business Conduct Guidelines” and form the basis for successful collabo-
ration with our suppliers. In addition to these principles and the environmental and occupational
safety aspects in the master purchase agreements, we have formulated the requirements to be met
bysuppliersinso-called“TechnicalTermsofDelivery”.Theyfollowacleardocumenthierarchyin
which the specific requirements are defined at different levels and in varying degrees of detail.
Beyond compliance with international and national statutory regulations, our requirements include
proof of the existance of an environmental protection, occupational safety and health management
system, and compliance with bans on substances and restrictions that surpass statutory
requirements. The implementation of standards and measures is promoted by stable partnerships
andopencommunication.Furthermore,ourglobalkeysuppliersarealsosurveyedandratedon
occupational safety, environmental protection and social responsibility by use of an eSupplier
Questionnaire,andtheyareindividuallydevelopedwhererequired.
LOGISTICS AND TRANSPORT
Traffic and transportation represent a very important indirect environmental impact of the company.
Constant optimization in dispatch and close attention to certified or validated logistics partners
ensure environmentally benign transportation.
48 49Aspects
6.2GEPlAnTEMAssnAhMEn2008-2009
5.4EnVIROnMEnTAlAsPECTsAnDFOCUsTOPICs
In the interest of a practiced environmental management system, it is a matter of course
for Infineon to register and assess potential environmental aspects of production and
auxiliary processes, such as use of resources, emissions, waste situation and recycling,
but also the environmental conduct of contractors and suppliers. Regulatory requirements,
internal regulations and processes assist in assessing these environmental impacts, along
withchecklists.Usingthisprocedure,continualimprovementandtop-levelenvironmental
protection is ensured.
In assessing the most important direct and indirect environmental aspects of facilities
(in specified normal operation or otherwise), goals are defined and associated measures
to prevent or mitigate significant environmental impact are adopted. In procuring e.g.
new production plant or peripheral installations, particular importance is attached to the
environmental friendliness of the process used and minimized emissions.
The company supports carpooling. Coordinating carpooling for business travel is among
the Travel Management options available on the Intranet, allowing significant savings in
distances traveled, fuel and even in related travel costs.
50 51
Summary: The assessment of the environmental aspects at Infineon Technologies Austria AG, Villach site, again confirmed the positive environmental situation for the 2008/09 fiscal year.
Plausibility Check of the Environmental Aspects of Infineon Technologies Austria AG
1) Adsorbierbare organisch gebundene Halogene2) Kohlenwasserstoffe 3) Ausblasbare organisch gebundene Halogene
Beprobungsbehälter AEV Halbleiter Direkt Fremdüberwachung
Impact on the environment YES NO Measures defined/started
Emissions into the atmosphere • C C C P/M Continuing optimization of the company exhaust air cleaning systems, taking into account the Kyoto aspects
Formation of waste water • C C C P Adaptation of the waste water treatment plants to operational requirements and state-of-the-art technology
Non-hazardous waste • B B B M Various conceptual studies in the area of waste management logistics / recycling
Hazardous waste • B B B M Various conceptual studies in the area of waste management logistics / recycling
Noise emissions • C C C M Selective noise measurements when required
Odor emissions • C C C M Analysis of problems when required (very rarely)
Formation of dust • B/C B/C B/C M Regular dust measurements by ext. institute
Consumption of resources
Water consumption / fully deionized water • B/C B B/C P/M Permanent optimization of consumption (waste water reduction), replace-
ment of two existing deionized water treatment plants by a new plant
Consumables, auxiliary materials • B/C B/C B/C M Continuous optimization of resources, processes and consumption of
fully deionized or ultrapure water
Chemicals, gases • B B B M Continuous optimization of resources, process and consumption, input/output analysis
Demand for other hazardous substances • B B B P/M Recycling of solvents
Media consumption • B/C B/C B/C P/MFurther reduction in transportation of hazardous materials through preparation of oxygen or nitrogen from the on-site fractionation plant Dilution of chemicals on site, central supply systems
Energy demand, waste heat • B B B/C P/MTypical heat recovery of approx. 20 - 25% of the total amount of energy used by means of heat pumps and heat exchangers Extensive energy reduction programs
Ground / Groundwater • C C C M Ground monitoring through regular groundwater tests
Other
Impacts on the environment in operation other than specified • B B B P/M
Continuation of the Disaster Control Organization (BKO)Maintaining a multi-site safety function plan and business continuity conceptsExplosion zone concept (VEXAT)Running a validated environmental protection laboratory
Legal compliance • B/C B/C B/C P/M
Keeping a legal databaseConsistent continuation of consolidationExtended safety concepts (VEXAT, ADR)Implementation of current EC directives
Sustainable development • B/C B/C B/C M
Segregation and recycling concepts in various areasTraining and education concepts on the areas of the environment, safety and healthCommissioning of projects, master thesesPromoting the YIP company suggestion schemeInnovations for E-Mobility and solar technology
New company premises • B B/C B/C P Test operation of new production lines
Process innovations • B B B/C P
Consistent and systematic evaluation of environmental and safety aspects and securing new technologies including, among others, the field of ion implantationForward-looking technologies including, among others, electrochemical plating, E-Mobility etc.
Health activities • B B/C B/C P/M
Continuation of company health promotion with an integrated approach Carrying out activities as required and in line with internal requirements,focusing on:
■ Health care ■ Exercise ■ Nutrition■ Mental health (stress management, mediation)
2006/0
7
2007/
08
2008/0
9
Pro
ject
/ Cu
rren
t M
easu
res
(P/M
)
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■
■■
■■
■■■■
■■
■■■
■
■
■
■■
Environmental aspectsESH
relevanz
Assessment of the
environmental relevance Measures
Assessment of the Environmental Relevance:
A B
B/C C
The high environmental impact of the plant or activity or its group requires measures for reducing its impact
The acceptable environmental impact does not need immediate action, measures for reducing its impact have already been taken or comply with state-of-the-art technology
There is no immediate need for action - Measures have already been taken (continuous improvement programs, dynamic process)
Due to measures taken, no action is required or the environmental impact cannot be influenced
Goals
6 Overview of the Environmental Programs and Environmental Goals 2006-2010
The environmental protection, occupational safety and health program at the
Villach site is founded on the environmental protection, occupational safety and
health goals of Infineon Technologies AG. On the basis of the respective input
and output analyses and the site aspects evaluated as being significant, the
package of goals and measures is reviewed, adjusted and established once a
year. In the process, the measures, schedules and parties responsible for the
respective projects are fixed.
In the Environmental Statements over the last years, Infineon Technologies
Austria AG has focused conceptually on disclosing major strategic projects in the
field of waste water, exhaust air and recycling. Consideration is given to the state
of the art in new equipment for innovations, increases in capacity and replacement
investments. Extracts of environmentally relevant project activities which have
contributed significantly to improving the environmental performance of the site,
or will do so, are set out below.
50 51
52 53
6.1 IMPLEMENTED MEASURES 2006 – 2009
IMPRES Program 2006/2007 - Implemented Measures
Area Goal Measure Result2007
Waste water New waste water treatment plant Company test phase of indirect discharge up to 06/2007,go-aheadfordirectdischarge07/2007 ¸
Exhaust air Capacity expansion and technical optimization
Fur therexpansionandoptimizationoftheplants for purif ying exhaust air containing solvents
¸Waste Waste management concept Establishment of a comprehensive waste
management concept with material f low analysis ¸Health Healthy and capable staf f
Continuation of the “Healthy and Active” project with a focus on exercise, stress and conf lict management
¸
Noise Noise protection, legal compliance Implementation of the EU Directive on noise and vibration ¸
Production New working processes and company facilities
Safety and environmental evaluation and safeguarding of process innovations and of the planned expansion of facilities
¸Safety at the workplace Explosion protection, legal compliance
Further-reaching,in-housedetailedanalysisand optimization of the explosion zone safety concept(VEXAT)
¸Implementation of measuring instrument optimization in the area of quality assuranceforsF6 reduction
sF6-f reemeasurementinspecialreliabilitytests ¸
safeguardingproductionramp-up Installationoffur therPFCexhaustairpurif ication plants (6 plants) ¸
Environmental protection analysis
Expansion of the company environmental protection laboratory
Evaluation and introduction of new equipment and processes in the area of analytical standard processes and methods
¸Reduction of energy consumption and NOx
Replacement of an old boiler by a new“state-of-the-ar t” boiler ¸
Optimization study for reduction of the primary energy consumption
Feasibilitystudylookingintonewheatingconcepts for site expansion Building 06 ¸
Hazardous materials
Reduction of transports of hazardous materials
By supply of TMAH (developer) in concentratedform(on-sitedilution) ¸
Kyoto
Energy
52 53Measures
Area Goal Measure Result2008
Waste Increased waste recycling for the purposes of recycling management
Conceptualstudyonin-housematerialflowanalysis-forextendedreutilizationandrecyclingprojects
¸Spent solvents
Increased recycling of spent solvents with the main focus on cyclopentanone
Recycling of more than 200 t cyclopentanone and NMP (205 t have been achieved) ¸
Health Healthy and capable staff
Continuation of the “Healthy and Active” project with the main focus on stress management. Start of new projects with the main focus on skin protection for staff and company health promotion for 50+ staff
¸
Safety at the workplace
Extended maternity protection evaluation in cleanrooms
Assessment of individual workstations acc. to maternity protection aspects ¸
Environmental analysis
Furtherextensionoftheenvironmentalprotection laboratory
Further-reachingevaluationofmethodswithrespect to various parameters of waste water constituents (GC/MS, ICP/MS for organic materials and metals)
¸
Alternative heating concept Building 06Optimization of the total energy consumption through use of the primary energy carrier geothermal energy (approx. 650 MWh)
¸
Optimization study Energy consumption in production and peripheral installations ¸
Hazardous materials
Reduction of transports of hazardous materials
set-upofaTEOscentralsupplyandexpansionofthe air fractionation plant for liquid gases ¸
Increase in environmental and energy awareness
Foldercampaignwiththemainfocusonenvironment and energy ¸
Information to staff /publicImage film containing visualized key messages on environmental protection, safety and health activities
¸
IMPRES Program 2007/08 - Implemented Measures
Internal /External communication
IMPRES Program 2006/2007 - Implemented Measures
¢Project could not be implemented as planned for cost-relatedreasons.Areplacementprojectwaslaunched in the 2009/10 f iscal year. ¸ Project has been successfully implemented
Energy
IMPRES Program 2008/2009 - Implemented Measures
Area Goal Measure Result2009
Waste Basic assessment of waste f lows from production and peripheral installations
Market study on utilization of spent acids and various other waste f lows ¸
Health Healthy and capable staf f
Continuation of the “Healthy and Active” project with a focus on stress management. Star t of new projects focused on “Healthy back” and “mediation”
¸Workplace safety / Production
Innovation-newcompanyfacilitiesand work processes
Safety and environmental evaluation of the Can Pak production line ¸
Optimization of energy consumption in production areas
Optimization of cleanroom air purif ication (1MW/year) ¸switch-of fofventilationinstallationsattheweekend and overnight in of f ice buildings ¸Optimization of illumination levels ¸Optimization of refrigerating machines and heat pumps by installing electric expansion valves (1MW/year)
¢
E-MobilityInnovation projects on the integration of electric vehicles into an overall mobility and energy provision concept
Promoting electric vehicles (e.g. as company or commuter vehicles), including creating a suitable infrastructure for electric mobility and raising awareness
¸
Expansionofthecompany’son-siteinstallation -100%in-houseproductionofnitrogen ¸ConceptualstudyfordilutingMF320directlyon site ¸
Raising environmental and energy awareness
“Innovation Day” with a focus on new technolo-gies and energy ef f iciency in Inf ineon products and developments, at least 2 events in the current f iscal year
¸
Information to staf f and public
Communicating Inf ineon Austria’s focal aras of innovation, internally and externally, as part of the“InnovationDays”:energy-ef f icientsemiconductor solutions, in particular in the following future markets: ßsolar systems ßLED lighting ßE-Mobilitywithelectricand ßhybrid vehicles
¸
Energy
Optimization of energy consumption in peripheral areas
Reduction of transport of hazardous materials
Hazardous materials
Internal /External communication
54 55
¢Project could not be implemented as planned for cost-relatedreasons.Areplacementprojectwaslaunched in the 2009/10 f iscal year. ¸ Project has been successfully implemented
Program
IMPRES Program 2008/2009 - Implemented Measures
54 55
6.2 PLANNED MEASURES 2009/2010
Area Goal Measure Status Date
Waste / waste water Treatment/use of waste water Furtheroptimizationstudyonthetreatment/useof
waste water from the ECP area n 10/2010
Exhaust air Replacement of two outmoded exhaust air purificationplantsbystate-of-the-artplants
Replacement of old exhaust air purification plants gas tower Hall 15 and special gas chambers Hall 16 ¸ 02/2010
Health Healthy and capable staff
Continuation of company health promotion with an integrated approach, carrying out activities as needed and in coordination with internal guidelines, focusing on: health care, exercise, nutrition and mental health (stress management, mediation)
n 10/2010
Workplace safety / Production
Provisionofextendedsafety-relatedinformation at the workplace
Conceptual revision of standard operating procedures and workplace regulations n 10/2010
Optimization of energy consumption in production, peripheral and office areas (“ Energy Efficiency Management”)
Conduct of a comprehensive concept study on energy efficiency for energy management optimization. (Implementation projects resulting from feasibility studies)
n 10/2010
Optimization of power consumption ofsub-equipment
studyonsynchronizationofsub-equipment(e.g. vacuum pumps) with the operating hours of production equipment
n 10/2010
Optimization of lightingEvaluationandroll-outoflEDtechnology(pilot project) for selective test areas in production and periphery
n 10/2010
Reduction of power consumption for generating compressed air
Deploymentofoptimizedprocesscontrolforenergy-optimized control of the individual air compressors n 10/2010
Green IT studyonenergy-optimizedserverandserverroomcooling n 10/2010
Recycling / reuse of exhaust gases containing hydrogen
Study on conversion to electricity/reprocessing of thehydrogenused;processingforrecyclingtotheprocess
n 10/2010
Hazardous materials
Reduction of transport of hazardous materials
Technical implementation of the conceptual study fordilutingMF320directlyonsite n 10/2010
Raising environmental and energy awareness
Action program in the company suggestion scheme with a focus on saving energy
“Innovation Days” with a focus on new technologies inInfineonproducts,developmentsandprocesses;setting them into relation with energy efficiency, three events planned in current fiscal year
n 10/2010
Information to staff and publicCooperationwithexternalpartners(FederationofAustrianIndustry,printandTVmedia);variouspublications on the subject of energy efficiency
n 10/2010
Provision of measuring equipment for electromagnetic fields Purchase of a qualified measuring instrument ¸ 01/2010
Use of environmentally friendly heat pumps with increased energy efficiency
Replacementofheatpumpno.1bystate-of-the-artsystem with optimized energy recovery rate (COP = 5.16), and operation of the system with environmen-tally friendly refrigerant (R 134a), reprocessing of the R22 still present from heat pump No. 1
¸ 02/2010
E-MobilityInnovation projects on the integration of electric vehicles into an overall mobility and energy provision concept
Technology projects with leading automotive and power supply companies to increase the energy efficiencyinE-Mobility,includingtestchipforraising efficiencyinlithium-ionbatteriesbyintelligentbattery management and balancing system and start ofdevelopmentofahighlyefficientAC/DCon-boardbattery charger
n 10/2010
n Not yet implemented n Partially implemented ¸ Project successfully implemented
IMPRES Program 2009/10 - Goals for 2010
Energy
Internal /External Communication
Environmental technology
Program
bilduntertitel 8pt, line space 11pt, letter 0 pt
-
6.3 SPECIAL ENVIRONMENTAL ACHIEVEMENTS
In the area of special environmental achievements, the Villach site – as demonstrated below for the
lastthreeyears-hasdisplayedhighinnovativenessandaforward-lookingapproach.
A few important examples are listed below:
Area Projects
New water treatment plantThe new water treatment plant was completed and went into operation,
andthego-aheadfordirectdischargewasgiveninfiscalyear2006/07
Exhaust air treatmentInfiscalyear2006/07,thein-housepurificationplantforexhaustair
containing solvents was extended by a concentrator in Hall 16 for
further purification of dilute exhaust streams
Reduction in greenhouse gases
In the last three years, we again succeeded in substantially
maintaining the previous year’s good emission level in the area of
testing facilities and wafer production. The emission targets attained
resulted in the ESG Award 2007 within the Group
WasteIn fiscal years 2006/7 and 2007/08, comprehensive market and market
and recycling studies (as part of a waste benchmark and master
thesis, among others) were drawn up
Recycling
Theinternalrecyclingquotaofsolvents(redistillationofDMFand
PGMEA) was again approx. 42% in the last fiscal year. In fiscal year
2007/08 a new recycling scheme was evaluated and implemented
successfully for the solvent fractions cyclopentanone and NMP.
As part of this project, for fiscal year 2008/09 almost 55% of these
chemicalsrequiredin-housewererecoveredbyexternalredistillation
measures for the purposes of recycling management
Environmental analysisExpansionofthein-houseenvironmentalprotectionlaboratoryinthe
last3fiscalyearsforintegralandhigh-resolutionmeasurement
techniques in the field of environmental analysis
Renewable energy carriers
In the 2008/09 fiscal year, the use of heat exchangers and heat pumps
tested and proven over many years again allowed us to achieve
approx. 20% savings in the amount of energy required relative to the
total amount used
56 57
Begriffserklärung
Changes
7.1BEGRIFFsERKläRUnGAbwasseremissionsverordnung
ist der systematische und dokumentierte Verif izierungsprozess im Unternehmen, mit dem Daten und Vorgänge ermittelt und bewertet werden
neueProduktionsliniezurFertigungvonWafern
AbkürzungfürChemisch-MechanischesPolieren
CO2,chemischeFormelfürKohlenstoffdioxid;dadieTreibhausgaseunterschiedlicheKlimawirksamkeithaben,brauchtmaneinegemeinsameEinheit,umsievergleichenzukönnen;dieseEinheitheißtCO2-äquivalentundberechnetsichausderMenge
der Emissionen eines bestimmten Gases multipliziert mit dessen Klimawirksamkeit
organisches Lösungsmittel
Gleichstromwandlung
AbkürzungfürdaslösungsmittelDimethylformamid
AbkürzungfürEcoManagementandAuditscheme(engl.);EG-Öko-Audit-system
BegrifffürInnovationsprojektbeiInfineonzurUnterstützungvonenergieeff izientenElektro-undhybridfahrzeugen
umdieUnternehmenbeimAuf-undAusbauvonbetrieblichenUmweltmanagementsystemenzuunterstützen,hatdieInternationalstandardizationOrganisation(IsO)dieweltweitgültigeEnIsO14001entwickelt
AbkürzungfürEnvironmentandsafety(engl.);UmweltschutzundArbeitssicherheit
ArtderFertigung,beideraufdenWafernChipsgefertigtwerden
GefahrstoffesindstoffeundzubereitungenmiteinerodermehrerenderfolgendenGefährlichkeitsmerkmale:explosions-gefährlich,brandfördernd,hoch-oderleichtentzündlich,entzündlich,giftig,sehrgiftig,gesundheitsschädlich,ätzend,reizend,
sensibilisierend, krebserzeugend, fortpflanzungsgefährdend, erbgutverändernd, oder auf sonstige Weise chronisch schädigend, Krankheitserregerübertragend,umweltgefährlich
symbolfürGigajoule
Gaschromatographie / Massenspektroskopie, analytisches Verfahren im Bereich organischer Verbindungen
einkristallinerWerkstoff,derbeiErwärmungeinemitderTemperaturanwachsendeelektrischeleitfähigkeitzeigt;halbleitersindz.B.siliziumoderGermanium;derBegriffwirdauchfürICsausdiesemWerkstoffverwendet
engl. Integrated Circuit, integrierter Schaltkreis
InductivelyCoupeledPlasma/Massenspektroskopie,analytischesVerfahrenfüreinennachweisvonMetallen
Infineon Integrated Management Program for Environment, Safety and Health
Zusatzprotokoll der Vereinten Nationen mit dem Ziel des Klimaschutzes
symbolfürliter
Sicherstellung der Rechtssicherheit
allegutachterlichzertif iziertenEinheiten/standorteeinesUnternehmenssindaufeinemzertif ikataufgeführt
Produktionschemikalie
AbkürzungfürManufacturedlayer(engl.);produktspezif ischeAnzahlvonlithographieebenen
AbkürzungfürMegawattstunde
Abkürzungfürdaslösungsmitteln-MethylPyrolidon
Nkm3:Abkürzungfürnormkubikkilometer
symbolfürnanometer
(Occupational Health and Safety Assessment Series) ist ein internationaler Standard zur Bewertung und Zertif izierung eines Arbeitsschutzmanagementsystem
AEV
Audit
Can Pak
CMP
CO2 -Äquivalent
Cyclopentanon
DC/DC
DMF EMAS
E-Mobil i t y
EN ISO 14001
ES
Front-End
Gefahrstof f
GJ
GC/MS
Halble i ter
IC
ICP/MS
IMPRES
Kyoto Protokol l
l
Legal Compl iance
Matr ix-Zer t i f ikat
MF 320
ML
MWh
NMP
Nkm3
nm
OHSAS 18001
7 Anhang
-
Area Projects
New water treatment plantThe new water treatment plant was completed and went into operation,
andthego-aheadfordirectdischargewasgiveninfiscalyear2006/07
Exhaust air treatmentInfiscalyear2006/07,thein-housepurificationplantforexhaustair
containing solvents was extended by a concentrator in Hall 16 for
further purification of dilute exhaust streams
Reduction in greenhouse gases
In the last three years, we again succeeded in substantially
maintaining the previous year’s good emission level in the area of
testing facilities and wafer production. The emission targets attained
resulted in the ESG Award 2007 within the Group
WasteIn fiscal years 2006/7 and 2007/08, comprehensive market and market
and recycling studies (as part of a waste benchmark and master
thesis, among others) were drawn up
Recycling
Theinternalrecyclingquotaofsolvents(redistillationofDMFand
PGMEA) was again approx. 42% in the last fiscal year. In fiscal year
2007/08 a new recycling scheme was evaluated and implemented
successfully for the solvent fractions cyclopentanone and NMP.
As part of this project, for fiscal year 2008/09 almost 55% of these
chemicalsrequiredin-housewererecoveredbyexternalredistillation
measures for the purposes of recycling management
Environmental analysisExpansionofthein-houseenvironmentalprotectionlaboratoryinthe
last3fiscalyearsforintegralandhigh-resolutionmeasurement
techniques in the field of environmental analysis
Renewable energy carriers
In the 2008/09 fiscal year, the use of heat exchangers and heat pumps
tested and proven over many years again allowed us to achieve
approx. 20% savings in the amount of energy required relative to the
total amount used
6.4 IMPORTANT CHANGES SINCE THE LAST ENVIRONMENTAL STATEMENT
Looking back over the last three fiscal years, the following changes have been implemented at the
Villach site:
Fiscal year Changes
2006/07
The start of operation of the new water treatment plant, equipped
withretentionbasinandstate-of-the-artonlineanalysis,andthe
expansionofthein-house,state-of-the-artenvironmentalprotection
laboratorymarkthesuccessfulcompletionofmajormulti-year
environmental protection projects at the Villach site.
2007/08
As part of the continued expansion of the site by Building 06, an
energy concept was prepared and successfully put into practice.
This new office and development complex was presented during a
ceremony,followedbya“FamilyDay”,inwhichthecurrentstateof
environmental technology at the site was presented not only to staff
but also to interested members of the public.
2008/09
Infineon Technologies Austria AG won the Innovation and Research
Award 2009 of Carinthia for outstanding expertise in thin wafer
technology, which makes a significant contribution to the energy
efficiency of end devices.
Launch and implementation of a comprehensive “Energy Efficiency
Project” for the areas of administration, infrastructure and production
under the conceptual leadership of a Strategic Energy Manager.
The project will continue in the 2009/10 fiscal year with a focus on
innovation.
56 57
7.1GlOssARY
7 Annex
58 59
AEV
Af f i l iated companies
Audit
AUVA
CanPAK
Cleanroom
CMP
CO2 -equivalent
Cyclopentanone
DC/DC
DMF
EMAS
E-Mobil i t y
EN ISO 14001
Environment (based on EN ISO 14001)
Environmental aspec t s
Environmental impac t
Environmental management system
(based on EN ISO 14001)
Environmental Statement
ESH
Front end
Ful ly deionized water
GJ
GC/MS
Green IT
Hazardous mater ial
Abwasseremissionsverordnung(AustrianWaste-WaterEmissionOrdinance)
entities with more than 50 percent of their proprietary shares belonging to the company are called aff iliated companies
is the systematic and documented verif ication process in the company by means of which data and processes are determined and assessed
AustriansocialInsuranceforOccupationalRisks(AllgemeineUnfall-versicherungsanstalt)
new production line for wafer manufacture
used for the manufacture and inspection of micromechanical and electronic components and systems posing special require-ments as regards, for example, freedom from particles
abbreviation for Chemical Mechanical Polishing
CO2,chemicalformulaforcarbondioxide;asthegreenhousegaseshavedifferenteffectsontheclimate,acommonunitofmeasurementisneededsothattheycanbecomparedwithoneanother;thisunitiscalledCO2 equivalent and is calculated from the volume of the emissions of a certain gas multiplied by its impact factor
organic solvent
DC conversion
abbreviation for the solvent dimethyl formamide
abbreviation for Eco Management and Audit Scheme
termforinnovationprojectatInfineontosupportenergy-eff icientelectricandhybridvehicles
the International Standardization Organization (ISO) developed the globally applicable standard EN ISO 140001 in order to support companies in developing and expanding company environmental management systems
comprisesthesurroundinginwhichthecompany,orpartsofit,is/areactive;thisincludesair,water,landandothernaturalresources, people and nature, as well as their interrelation
describe the portion of activities, products or services etc. of the company or its constituent parts or its sites which interact or can interact with the environment
each positive or negative change to the environment which is completely or partially the result of the activities, products, services etc. of the company or its constituent parts or its sites
environmentalmanagementispartoftheorganization’smanagementsystem;theenvironmentalmanagementsystemincludesthe organizational structure, planning activities, practices, processes and resources required for developing, implementing, achieving, assessing and maintaining the environmental policy
with this document, the company sites which are validated according to the ordinance (EC) No. 761/2001, regularly report their activities,individualenvironmentaltargets,environmentally-focusedachievements,environmentalimpactsetc.tothewiderpublic
abbreviation for Environment, Safety and Health
type of production where chips are made on the wafers
ultrapure water
symbol for gigajoule
gas chromatography / mass spectroscopy, analytical technique in the field of organic compounds
optimized air conditioning for servers
substances and preparations with one or more of the following dangerous properties: explosive, oxidizing, highly or readily f lammable, toxic, highly toxic, detrimental to health, caustic, irritating, sensitizing, carcinogenic, toxic for reproduction, muta-genic, chronically damaging in some other way, pathogenic, or harmful to the environment
Glossary
Glossary58 59
l
ICP/MS
IMPRES
IMPRES-related objec t ive
IMPRES pol icy
IMPRES program
IT
Kyoto Protcol
Legal Compl iance
Mat r ix cer t i f icate
MF 320
ML
MWh
NMP
Nkm3
nm
OHSAS 18001
PFC
PGMEA
RPT
Semiconduc tor
Slur r ies
State of the ar t
t
TEOS
Wafer
Y IP
symbol for liter
Inductively Coupled Plasma/ Mass Spectroscopy, analytical technique for determining metal
Infineon Integrated Management Program for Environment, Safety and Health
Overall objective harmonized with the IMPRES policy, which the organization sets itself in the IMPRES manual
The organization’s collective aims and direction relating to its performance, as formulated at managerial level
isadescriptionoftheEsh-relatedindividualgoalsoftheorganization’ssites
Information Technology comprises all the methods, concepts and techniques for processing, storing, transmitting and providing access to information and data
protocoltotheUnitednationsFrameworkConventiononClimateChange
assurance that legal responsibilities are met
all units/sites of an organization certif ied by an expert are specif ied on a certif icate
production chemical
abbreviationforManufacturedlayer;product-specif icnumberoflithographylayers
abbreviationformegawatt-hour
abbreviationforthesolventn-methyl-2-pyrrolidone
abbreviation for standard cubic kilometer
symbol for nanometer
(Occupational Safety and Health Assessment Series) is an international standard for the assessment and certif ication of a respective management system
abbreviation for perfluorinated compounds
abbreviation for the solvent propylene glycol monomethyl ether acetate
reliability product testing of automotive chips
a crystalline material displaying increasing electrical conductivity as temperature rises, examples of semiconductors are siliconorgermanium;thetermisalsoappliedtoICsmadeofthismaterial
are suspensions of solids, in some cases with chemical additives, which are used in the CMP process
is the level of development of advanced processes, installations or operating methods which makes a measure seem fit for protectinghealth,safeguardingemployeesandlimitingenvironmentaldamage.Comparable,tried-and-testedprocesses,
installations or operating methods should be used for determining the state of the art
symbol for a metric tonne
tetraethylorthosilicate(organicsiliconcompoundforaphysico-chemicaldepositionofsiliconlayers)
Diskofsemiconductormaterial(silicon)withadiameterofupto300millimeters;intheproductionofICsitiscutfrommonocrystalline silicon and serves as a substrate for integrated circuits
Companysuggestionscheme“Yourideapays”
7.2 VALIDATION
60 61
Begriffserklärung
Environmental Statement60 61
COnTACTPERsOnFOREnVIROnMEnTAlPROTECTIOn&InDUsTRIAlsAFETY
hEADOFPUBlICRElATIOns
GEnERAlInFORMATIOn:
7.4 CONTACT PERSONS
Dr. Adolf Biedermann
Senior Staff Engineer Environmental Protection & Safety
Tel:+43(0)51777-2656
www.infineon.com/austria
Dr. Ingrid Lawicka
Senior Manager Public Affairs & Communication
Tel:+43(0)51777-2004
7.3DATEFORnEXTEnVIROnMEnTAlsTATEMEnT
The next Environmental Statement is an “Updated Environmental Statement” which will be
presentedinFebruary2011.
Thenext“ConsolidatedEnvironmentalstatement”willbepresentedinFebruary2013.
In the intervening years “Updated Environmental Statements” will be published.
The following contact persons are available for further information on the subjects of
environmental protection, occupational safety and health protection:
InFInEOnTEChnOlOGIEsAUsTRIAAG Other sites in Austria:
Graz siteBabenbergerstraße108020 GrazTel.:+43(0)51777-0Fax:+43(0)51777-900
Vienna siteLinke Wienzeile 4/1/3 1060 ViennaTel.:+43(0)51777-0Fax:+43(0)51777-11500
DICE GmbH & Co. KGFreistädterstraße4004040 LinzTel.:+43(0)51777-15100Fax:+43(0)51777-15999
Infineon Technologies IT Services GmbHLakeside B059020 KlagenfurtTel.:+43(0)51777-0Fax:+43(0)51777-4666
Villach sitesiemensstraße29500 VillachTel.:+43(0)51777-0Fax:+43(0)51777-3501E-mail:info-austria@inf ineon.com
[ www.inf ineon.com/austria ]
InFInEOnTEChnOlOGIEsAUsTRIAAG,Mai 2010, issued by Infineon Technologies Austria AG
inco-operationwithInfineionTechnologiesAG,CorporateEnvironmentalAffairs&Operationssupport