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Complete MOSFET fabrication process Wednesday, February 8, 2017 3:35 PM 20170208 Page 1

Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 1: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

Complete MOSFET fabrication processWednesday, February 8, 2017 3:35 PM

20170208 Page 1

Page 2: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

20170208 Page 2

Page 3: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 4: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 5: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 6: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 7: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 8: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 9: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 10: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 11: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 12: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 13: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 14: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 15: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 16: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 17: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 18: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 19: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 20: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 21: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 22: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 23: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 24: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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Page 25: Complete MOSFET fabrication processzyang/Teaching/20162017...The first mask is placed over the wafer and ultraviolet light is projected onto the mask. Areas of photoresist exposed

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