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11 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Daniele Cocco
Sincrotrone Trieste ScpA, S.S. 14 Km 163.5 in Area Science Park, 34012 Trieste,ITALY
X-ray Optics
Joint US-CERN-Joint US-CERN-Japan-RussiaJapan-RussiaSchool on ParticleSchool on ParticleAcceleratorsAccelerators
22 D. Cocco X-Ray optics, Erice, 6-15 April 2011
These regions are very interesting because are characterized by the presence
of the absorption edges of most low and intermediate Z elements !photons with these energies are a very sensitive tool for elemental andchemical identificationBut… these regions are difficult to access.
4-30eV300-40nm
30-250eV40-5nm
250eV - several keV
few keV - 50-100 keV
Energy regionsEnergy regions
33 D. Cocco X-Ray optics, Erice, 6-15 April 2011
!="µl/4# µl=linear absorption coefficient
refractive index µ=1$%$i!
% (unit decrement) related to the speed in the medium
! related to the absorption
%=(e2"2/2#mc2)|N+&HNH["/"H]2ln["H2/"2-1] |
N=electron density (1023-1024 el./cm3)"H=adsorption edge’s wavelength
" far from "H' %=Ne2"2/2#mc2
Refraction IndexRefraction Index
44 D. Cocco X-Ray optics, Erice, 6-15 April 2011
i
(
n>1
i
n<1
(
Snell’s law: n1cos(=n2cosi
Snell LawSnell Law
55 D. Cocco X-Ray optics, Erice, 6-15 April 2011
i
!
n>1
i
n<1
!S
n>1
I
n<1
S
I
Fermat’s principle
42
2
22
10102
!!!"=
mc
Ne
#
$%
!
1
f= n "1( )
1
R1
+1
R2
#
$ %
&
' ( ) 1"* "1( ) +
2
R< 0
!
" #10$4
HXR % f #1m if R #1mm
Snell LawSnell Law
66 D. Cocco X-Ray optics, Erice, 6-15 April 2011
n<1
S
I
X-ray LensesX-ray Lenses
77 D. Cocco X-Ray optics, Erice, 6-15 April 2011
i
!
n>1
i
n<1
!
Snell’s law: cos(=cosi/n
(=0 n=cosic
ic critical angle: total external reflection
sinic="(e2N/#mc2)1/2
"c(min)=3.333.10-13 N-1/2 sinic
Material Density
(g/cm3)
N
(electron/cm3)
!min
nm
Pentadecane (oil) 0.77 7x1022
64.1sini
Glass 2.6 78x1022
37.9sini
Aluminum oxide 3.9 115x1022
31.2sini
Gold 19.3 466x1022
15.4sini
i=5o: "minglass=3.3nm=375 eV"mingold=1.34nm=923eV
shorter wavelength needs smaller angles of incidence
Materials with higher density (i.e. higher atomic weight)
have higher reflectivity
Snell law - Total external reflectionSnell law - Total external reflection
88 D. Cocco X-Ray optics, Erice, 6-15 April 2011
1.0
0.8
0.6
0.4
0.2
0.0
refle
ctivity
2000150010005000
Photon energy (eV)
1o
2o
3o
5o
10o
20o
Gold
Grazing incidence mirror reflectivityGrazing incidence mirror reflectivity
)
99 D. Cocco X-Ray optics, Erice, 6-15 April 2011
)
Hard X-ray reflectivityHard X-ray reflectivity
1010 D. Cocco X-Ray optics, Erice, 6-15 April 2011
1.0
0.8
0.6
0.4
0.2
0.0
refle
ctivity
2000150010005000
Photon energy (eV)
Fused Silica
1.0
0.8
0.6
0.4
0.2
0.0
refle
ctivity
2000150010005000
Photon energy (eV)
C
1.0
0.8
0.6
0.4
0.2
0.0
refle
ctivity
2000150010005000
Photon energy (eV)
Ni
1.0
0.8
0.6
0.4
0.2
0.0
refle
ctivity
2000150010005000
Photon energy (eV)
SiC
1.0
0.8
0.6
0.4
0.2
0.0
refle
ctivity
2000150010005000
Photon energy (eV)
Al
1.0
0.8
0.6
0.4
0.2
0.0
refle
ctivity
2000150010005000
Photon energy (eV)
Au
"=2o
Other coatingsOther coatings
)
1111 D. Cocco X-Ray optics, Erice, 6-15 April 2011
*2*r'
+s'=2 r'*)
Tangential focusing
Image
Object
r
r’ "
Effect of Defects (slope errors)Effect of Defects (slope errors)
1212 D. Cocco X-Ray optics, Erice, 6-15 April 2011
-10
-5
0
5
10
ve
rtic
al p
ositio
n (µ
m)
-10 -5 0 5 10
horizontal position (µm)
s' = ,(Ms)2 + (2 r'*)2s' = ,(Ms)2 + (2 r'*)2
*2*r'
+s'=2 r'*)
Tangential focusing
Image
Object
r
r’ "
Image (spot) enlargementImage (spot) enlargement
1313 D. Cocco X-Ray optics, Erice, 6-15 April 2011
+s'=2 r'*
*2*r'
50
40
30
20
10
0S
lope e
rror
contr
ibution F
WH
M (µ
m)
1086420
Slope error [rms] (µrad)
Distance mirror-image = 1m
50
40
30
20
10
0
Slo
pe e
rror
contr
ibution F
WH
M (µ
m)
1086420
Distance mirror-image (m)
Slope error = 2.5 µrad
)
Image (spot) enlargementImage (spot) enlargement
1414 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Typical manufacturer capabilities (SESO, ZEISS, Winlight, Jobin Yvon)
- 2 µrad> 500 mmAspherical
- 1-2 µradUp to 500 mmAspherical
- 1-2 µrad> 500 mmToroidal
- 1 µradUp to 500 mmToroidal
1 µrad> 500 mmSpherical/flat
< 0.5 µradUp to 500 mmSpherical/flat
rms errorsLengthShape 10
8
6
4
2
0S
lope e
rror
contr
ibution F
WH
M (µ
m)
2.01.51.00.50.0
Slope error [rms] (µrad)
Distance mirror-image = 1m
Image (spot) enlargementImage (spot) enlargement
r’=1m
+s'=1 µm
+s'=4 µm
+s'=10 µm
1515 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Typical manufacturer capabilities (SESO, ZEISS, Winlight, Jobin Yvon)
-10x10-6
-5
0
5
10
resid
ual heig
ht (m
m)
100806040200
mirror position (mm)
Mirror profile precisionMirror profile precision
1616 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Term F20 of the optical path function
(1/r+1/r’)cos"/2=1/R spherical mirror
Tangential focusing
Image
Object
r
r’ "
Object
Sagital focusing
Image
Term F02 of the optical path function
(1/r+1/r’)/(2cos")=1/R cylindrical/toroidal mirror
)
*t 2*t
r'
*s
image
+s't=2 r'*t
+s's=2 r' cos" *s
"cos"
Mirror surface
sin"
Tangential and Tangential and Sagital Sagital focusing geometriesfocusing geometries
1717 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Spherical mirror suffer of spherical aberration
Solution: work in 1:1 configuration
source-image
AberrationsAberrations
Deviations from perfect imaging are called aberrations
1818 D. Cocco X-Ray optics, Erice, 6-15 April 2011
The bicycle tyre toroid is generated by rotating a circle of radius . in an arc of
radius R. In general, two non-coincident focii are produced: one in themeridional plane and one in the sagittal plane
Tangential focus:
Sagittal focus:
Stigmatic image:
J.B. West and H.A. Padmore, Optical Engineering, 1987
Torodial Torodial mirrormirror
!
1
r+1
" r
#
$ %
&
' ( cos)
2=1
R
!
1
r+1
" r
#
$ %
&
' (
1
2cos)=1
*
1919 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Tangential focus: Sagittal focus:
Stigmatic image:
Toroidal Toroidal mirror focal propertiesmirror focal properties
!
1
r+1
" r
#
$ %
&
' ( cos)
2=1
R
!
1
r+1
" r
#
$ %
&
' (
1
2cos)=1
*
2020 D. Cocco X-Ray optics, Erice, 6-15 April 2011
For .=R ! spherical mirrorA stigmatic image can only be obtained at normal incidence.For a vertical deflecting spherical mirror at grazing incidence the horizontalsagittal focus is always further away from the mirror than the vertical tangentialfocus. The mirror only weakly focusses in the sagittal direction.
A
x
y
z
O
T
S
M N
L
K
TK
TL
SN
SM
Toroidal Toroidal mirror focal propertiesmirror focal properties
2121 D. Cocco X-Ray optics, Erice, 6-15 April 2011
A
y
z
O
T
S
M N
L
K
TK
TL
Toroidal Toroidal mirror Tangential and mirror Tangential and Sagital Sagital focusfocus
2222 D. Cocco X-Ray optics, Erice, 6-15 April 2011
source image
source 80 µm vertical; r=4000 mm r´=400 mm (10:1) )=88o
Beam divergence 100X100 µrad
Spherical
No slope errors
Elliptical
No slope errors
Sagittal cylinder
No slope errors
Other focusingOther focusing geometriesgeometries
2323 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Spherical
1µrad slope errors
Elliptical
5µrad slope errors
Sagittal cylinder
5µrad slope errors
Beam divergence 100X100 µrad
Spherical
No slope errors
Elliptical
No slope errors
Sagittal cylinder
No slope errors
Beam divergence 500X500 µrad
Spherical mirrors are good for small demagnification and/or small divergenceElliptical mirrors are better for very large demagnifications and larger divergence but..
the slope errors have to be smallToroidal / parabolic mirrors are perfect if the induced aberration are acceptable
In search of the perfect focusing geometryIn search of the perfect focusing geometry
2424 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Rays traveling parallel to the symmetry axis OX are all focused to a point A.Conversely, the parabola collimates rays emanating from the focus A.
Line equation:
Paraboloid equation:
where:
Position of the pole P:
Paraboloid equation:
J.B. West and H.A. Padmore, Optical Engineering, 1987
ParaboloidsParaboloids
2525 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Slope errors = every deviation from the ideal surface with period larger then ~ 1,2 mm
Roughness = every deviation from the ideal surface with period smaller then ~ 0.5-1 mm
Typical definition is µrad or arcsec rms.
Alternative definition is "/10 or "/20 and so on… P-V or rms
used for normal incidence mirror or “poorer” quality mirrors
Typical definition is Årms.
Alternative definition is surface quality 20-10 or 10-5 (scratch-dig)
used for normal incidence mirror or “poorer” quality mirrors
A dig is nearly equal in terms of its length and width. A scratch could be much longer then width
20-10 means 20/1000 of mm max scratch width 10/100 mm max dig dimension
Other mirror defect - RoughnessOther mirror defect - Roughness
2626 D. Cocco X-Ray optics, Erice, 6-15 April 2011
2sin4
0
!"
#$%
&'
= (
)*+
eII
RoughnessRoughness
!
" =1
ns x( ) # s x( )[ ]
x= 0
n
$2
2727 D. Cocco X-Ray optics, Erice, 6-15 April 2011
RoughnessRoughness
2828 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Roughness (SF>1mm-1)
Slope errors
(SF<0.5-0.2 mm-1)
Power spectral densityPower spectral density
2929 D. Cocco X-Ray optics, Erice, 6-15 April 2011
RoughnessRoughness
3030 D. Cocco X-Ray optics, Erice, 6-15 April 2011
0.01
0.1
1
10
Inte
nsi
ty r
educt
ion (
%)
2000180016001400120010008006004002000
Photon energy (eV)
3 Å rms
10 Å rms
3 standard 1 best
Spherical/Flat
5 standard 3 best
(1-2 if very lucky)
Roughness (Å)
Toroidal/asphericalShape
2sin4
0
!"
#$%
&'
= (
)*+
eII
Flux reductionFlux reduction
3131 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Synchrotron Radiation BeamlinesSynchrotron Radiation Beamlines
Side view
Top view
Pin
hol
e
Pre
focu
sing
Ent
ranc
e sl
it
Mon
ochr
omat
or
Exi
t sl
it
Def
lect
ion
mir
ror
Ver
tica
l fo
cusi
ng
Hor
izon
tal
focu
sing
VF
M
HF
M
Prefocusing section: Adapt the source to the monochromator requirements
Adsorb the unwanted power radiation
Monochromator:Select the proper photon energy
Refocusing section: Adapt the spot shape at the necessity of the experiment
3232 D. Cocco X-Ray optics, Erice, 6-15 April 2011D. Cocco - ASEAN Training Course on the Use of Synchrotron Radiation 23 April – 4 May 2007 NSRC
Side view
Top view
Pin
hol
e
Pre
focu
sing
Ent
ranc
e sl
it
Mon
ochr
omat
or
Exi
t sl
it
Def
lect
ion
mir
ror
Ver
tica
l fo
cusi
ng
Hor
izon
tal
focu
sing
VF
M
HF
M
There are several reasons to choose a mirrorsubstrate, one is the power arriving on it
Synchrotron Radiation BeamlinesSynchrotron Radiation Beamlines
3333 D. Cocco X-Ray optics, Erice, 6-15 April 2011
e-
h/
Vertical
Horizontal
SR sourcesSR sources
3434 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Vertical
Horizontal
400W ! 1µm,; 10 to 100 time larger than wished
Thermal deformationsThermal deformations
3535 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Density Young’s modulus Thermal
expansion
Thermal
conductivity
Figure of
meritgm/cc GPa (!) ppm/
oC (k) W/m/
oC k/!
Fused silica 2.19 73 0.50 1.4 2.8
Zerodur 2.53 92 0.05 1.60 32
Silicon 2.33 131 2.60 156 60
SiC CVD 3.21 461 2.40 198 82
Aluminum 2.70 68 22.5 167 7.42
Copper 8.94 117 16.5 391 23.7
Glidcop 8.84 130 16.6 365 22
Molybdenum 10.22 324.8 4.80 142 29.6
Properties of typical mirrorProperties of typical mirror materialsmaterials
Bulk material
Reflecting coating
3636 D. Cocco X-Ray optics, Erice, 6-15 April 2011
600 mm
110 mm
SiliconSilicon bulk mirrorsbulk mirrors
3737 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Direct side coolingDirect side cooling
3838 D. Cocco X-Ray optics, Erice, 6-15 April 2011
70
60
50
40
30
20
10
0m
irro
r d
efo
rma
tio
n (
nm
)
300 250 200 150 100 50 0
mirror position (mm)
Object
Sagital focusing
Image
*s
image
+s's=2 r' cos" *s
1st mirror sagittally oriented
Direct side coolingDirect side cooling
3939 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Internally cooled mirrorsInternally cooled mirrors
5 standard 2-3best
Roughness (Å)
Metallic
3 standard 1 best
Spherical/Flat
Roughness (Å)
Glass/Silicon
Shape
0.01
0.1
1
10
Inte
nsi
ty r
educt
ion (
%)
2000180016001400120010008006004002000
Photon energy (eV)
3 Å rms
10 Å rms
4040 D. Cocco X-Ray optics, Erice, 6-15 April 2011D. Cocco - ASEAN Training Course on the Use of Synchrotron Radiation 23 April – 4 May 2007 NSRC
3GeV Synchrotron source3GeV Synchrotron source
6.6 cm period undulator K6.6 cm period undulator Kmaxmax=5.7=5.7
BL6.1BL6.1
1.51.5o o grazing incidencegrazing incidence
++T=7.7T=7.7o o
1.51.5o o grazing incidencegrazing incidence
++h=17h=17µµmm slope 26 slope 26 µµradrad
glidcop
Internally cooled mirrors (Glidcop)Internally cooled mirrors (Glidcop)
4141 D. Cocco X-Ray optics, Erice, 6-15 April 2011D. Cocco - ASEAN Training Course on the Use of Synchrotron Radiation 23 April – 4 May 2007 NSRC
INVAR®INVAR®
Carpenter Technology Inc.Carpenter Technology Inc.
Alloy 36 iron-nickel(36%) alloy with carbon (0.02%),Alloy 36 iron-nickel(36%) alloy with carbon (0.02%),
manganese (0.35%), Silicon (0.2%)manganese (0.35%), Silicon (0.2%)
Supernvar: iron-nickel(32%) alloy with carbonSupernvar: iron-nickel(32%) alloy with carbon
(0.02%), manganese (0.40%), Silicon (0.25%), Cobalt(0.02%), manganese (0.40%), Silicon (0.25%), Cobalt
(5.5%)(5.5%)
Invar & Invar & SuperInvarSuperInvar
4242 D. Cocco X-Ray optics, Erice, 6-15 April 2011D. Cocco - ASEAN Training Course on the Use of Synchrotron Radiation 23 April – 4 May 2007 NSRC
++h=6h=6µµmm ++T=130T=130o o
SuperInvarSuperInvar
4343 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Contamination process:
Hydrocarbons adsorbed by the surface
Cracking induced by the incoming radiation
Formation of graphitic carbon layer (mixed C coumpond)
Effect of the contamination:
Strong adsorption at the carbon edge (0270 eV)
Reduction of reflectivity due to enanchment of the surface roughness
general deterioration of the surface
Carbon ContaminationCarbon Contamination
4444 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Effect of the contamination:
Strong adsorption at the carbon edge (0270 eV)
Reduction of reflectivity due to enanchment of the surface roughness
general deterioration of the surface
250 eV 260 eV 270 eV 280 eV 290 eV 300 eV 310 eV
Carbon ContaminationCarbon Contamination
4545 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Contamination process:
Hydrocarbons adsorbed by the surface
Cracking induced by the incoming radiation
Formation of graphitic carbon layer (mixed C coumpond)
Effect of the contamination:
Strong adsorption at the carbon edge (0270 eV)
Reduction of reflectivity due to enanchment of the surface roughness
general deterioration of the surface
+ 300-500 V (DC)
I 100 mA-1A
P 0.5-1 mbar O2
Mirr
or su
rface
UV lamp discharge
Carbon Contamination and CleaningCarbon Contamination and Cleaning
4646 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Effect of the contamination:
Strong adsorption at the O/Cr edge
Reduction of reflectivity due to enanchment of the surface roughness
general deterioration of the surface
40x10-3
30
20
10
Inte
nsity (
a.u
.)
550540530520510
Photon Energy (eV)
536.2 eV
542.8 eV
CO contamination
0.4
0.3
0.2
0.1
Inte
nsity (
a.u
.)
600580560540520500
Photon Energy (eV)
571 eV
578 eV
Cr contamination
Other ContaminationOther Contamination
4747 D. Cocco X-Ray optics, Erice, 6-15 April 2011
SoftX-ray
I.R. U.V.VisibleMicrowave
HardX-ray
limit ~ 1-2 keV ( 1 nm)
SoftX-ray
I.R. U.V.VisibleMicrowave
HardX-ray
Zero order
External Orders (-)
Internal Orders (+)
d
!1
d
d sin(1) d sin(!
)
( ) ( )( )!"# sinsin $= dn
SoftX-ray
I.R. U.V.VisibleMicrowave
HardX-ray
Dispersive elementsDispersive elements
4848 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Laminar profile
whBlaze profile
)(
Blaze gratings: higher efficiency
Laminar gratings: Higher spectral purity
Higher resolution Blaze conditionBlaze condition
Blaze angle=(Blaze angle=(1+!1+!)/2)/2
( ) ( )( )!"# sinsin $= dnn#1#
2 #2
Zero order
External Orders (-)
Internal Orders (+)
d
!1
GratingGrating’’s profiless profiles
4949 D. Cocco X-Ray optics, Erice, 6-15 April 2011
50
40
30
20
10
Gra
tin
g e
ffic
ien
cy (
%)
800600400200
Photon energy (eV)
Laminar grating Blaze grating
10
8
6
4
2
0
Re
lative
eff
icie
ncy (
1st
ord
/2nd
ord
)
800600400200
Photon energy (eV)
Laminar grating
Blaze grating
( ) ( )( )!"# sinsin $= dn
Laminar profile
whBlaze profile
)(
GratingGrating’’s efficiencys efficiency
5050 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Laminar profile
wh
5
4
3
2
1
0
Eff
icie
ncy (
%)
2015105
groove height (nm)
W=60% gd=2400 l/mm 200 eV
800 eV
10
8
6
4
2
0
Eff
icie
ncy (
%)
87654321
blaze angle (!) (deg)
"=90ogd=2400 l/mm
200 eV 800 eV
Blaze profile
)(
GratingGrating’’s efficiencys efficiency
5151 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Mechanical ruling blaze profile ! smaller blaze angles; higer efficiency
Holographically recording laminar and blaze profile (large blaze angle)
! higher groove density; lower spacing disomogeneity
Diamond tool
Gold (Cr) layer
Si substrate
GratingGrating’’s productions production
5252 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Exposure
Development
Ion etching
Photoresist
removal
Coating
+ ++
++
+
++
+
++
++
++ +
+ ++
+
++ +
+
+
+
+
++
+
++
+ ++
+
+
++
HolographicHolographic Recorded GratingsRecorded Gratings
5353 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Light rays choose their paths to minimize the optical length
!B
A
dlrn )(r
where is the index ofrefraction of the medium and dl isthe line segment along the path
)(rnr
A
B
!!! ==
B
A
B
A
B
A
dtcdlv
cdlrn )(
r
Fermat’s principle is also known as the principle of least time:
A
B
FermatFermat’’s principles principle
5454 D. Cocco X-Ray optics, Erice, 6-15 April 2011
where " is the wavelength of the diffracted light, k is the order ofdiffraction (±1,±2,...), N=1/d is the groove density
For a classical grating with rectilinear grooves parallel to z with constant
spacing d, the optical path length is:
ykNPBAPF !++=z
A
OB
P
x
y
1 !
r
r’
za
zb
d
d sin(1) d sin(!
)
Optical pathOptical path
5555 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Let us consider some number of light rays starting from A and impingingon the grating at different points P. Fermat’s principle states that if thepoint A is to be imaged at the point B, then all the optical path lengthsfrom A via the grating surface to B will be the same.
B is the point of a perfect focusif:
for any pair of (y,z )
0 0 =!
!=
!
!
z
F
y
F
z
A
O BP
x
y
1 !
r
r’
Optical Path -Optical Path - Focal conditionFocal condition
5656 D. Cocco X-Ray optics, Erice, 6-15 April 2011
can be used to decide on therequired characteristics of thediffraction grating, in particularthe shape of the surface, thegrooves density, the object andimage distances.
) 0 0 y,zpair of (for any z
F
y
F=
!
!=
!
!ykNPBAPF !++= +
Equations:
z
A
O BP
x
y
1 !
r
r’
OpticalOptical Path - Focal conditionPath - Focal condition
5757 D. Cocco X-Ray optics, Erice, 6-15 April 2011
In general, and are functions of y and z and can not be made zero forany y,z
! when the point P wanders over the grating surface, diffracted rays fall onslightly different points on the focal plane and an aberrated image is formed
y
F
!
!
z
F
!
!
Goal: produce simpleexpressions for theintersection points inthe image planeproduced by the raysdiffracted fromdifferent points on thegrating surface
z
A
OB0
P
x
y
B
1
r
ro’
!0
za
zb0
Aberrated Aberrated imageimage
5858 D. Cocco X-Ray optics, Erice, 6-15 April 2011
z
A
O BP
x
y
1 !
r
r’
The grating surface may in general be described by a series expansion:
a00= a10= a01= 0 because of the choiceof origin j = even if the xy plane is a symmetryplane
Giving suitable values to the coefficients aij’s we obtain the expressions forthe various geometrical surfaces.
ji
i j
ijzyax !!
"
=
"
=
=0 0
Grating surfaceGrating surface
5959 D. Cocco X-Ray optics, Erice, 6-15 April 2011
0 ;0 ;8
1
;8
1 ;
4
1 ;
2
1 ;
2
1
3012304
3402222002
===
====
aaa
Ra
Ra
Raa
!
!!Toroid
Sphere, cylinder and plane are special cases of toroid:R=. ! sphere
R= 2 ! cylinder
R=.= 2 ! plane
Paraboloid
!
!!!
!!!
!
!!
!
33
2
043
2
40
230212
3
2
222002
cos64
sin ;
64
cossin5
8
cos sin ;
8
tan
; cos32
sin3 ;
4
cos ;
cos4
1
fa
fa
fa
fa
fa
fa
fa
==
"="=
===
Typical surfacesTypical surfaces
6060 D. Cocco X-Ray optics, Erice, 6-15 April 2011
1
2
2
2
2
33
2
22
22
2
2
22
33
2
40
22
230
22
212
22
2
33
2
042002
11
2
cos1cos
2
3
cos16
sin
;1sin5cos sin5
cos64
; sin8
sin ;sin
cos8
tan
;1sin
cos64
;4
cos ;
cos4
1
!
"#
$%&
'(
+=
"#
$%&
'))*
+,,-
.!!=
"#
$%&
'+!=
!=!=
"#
$%&
'+===
rrfwhere
a
b
fa
aabf
ba
ef
aef
a
abf
ba
fa
fa
//
/
/
///
/
//
//
/
/
/
/
/
Ellipsoid
Typical surfacesTypical surfaces
6161 D. Cocco X-Ray optics, Erice, 6-15 April 2011
( ) ( ) ( )222
zzyyxxAP aaa !+!+!=
( ) ( ) ( )222
zzyyxxPB bbb !+!+!=
!!
""
sin cos
sin cos
ryrx
ryrx
bb
aa
#=#=
==
z
A(xa,ya,za)
O B(xb,yb,zb)P (x,y,z)
x
y
1 !
r
r’
1 < 0; ! > 0
ykNPBAPF !++=
...2
1
4
1
2
1
8
1
4
1
8
1
2
1
2
1
2
1
2
1
211
2
202
2
102111
040
4
220
22
400
4
120
2
300
3
020
2
200
2
011100000
+++++
++++
+++++=
zFyFyyFyzF
FzFzyFyFyz
FyFzFyzFyFFji
ijk
ijk zyFF !=
Optical Path FunctionOptical Path Function
6262 D. Cocco X-Ray optics, Erice, 6-15 April 2011
z)(y, ofpair any for 0 0 =!
!=
!
!
z
F
y
F
) 000(ijk allfor 0 !=ijkF
Each term in the series (except F000 and F100)represents a particular type of aberration
ji
ijk zyF
Perfect focal conditionPerfect focal condition
6363 D. Cocco X-Ray optics, Erice, 6-15 April 2011
!!
! cos2cos
),( 20
2
ar
rT "=where and !! cos21
),( 02ar
rS "=
andand analogous expressions for ),( !rT " ),( !rS "
( )
( )
( )
( )!"!!
""
!"!!
""
!"
!"!"
!"#
coscos2 sin),(
sin),(
coscos2 sin),(
sin),(
coscos211
coscos2coscos
)sin(sin
12120
30300
02020
20
22
200
100
+$%&
'()
*+
++%&
'()
*=
+$%&
'()
*+
++%&
'()
*=
+$+
+=
+$,,-
.//0
1
++=
+$=
ar
rS
r
rSF
ar
rT
r
rTF
arr
F
arr
F
NkF
rrF !+=000
for r,r’ >> za,zbz
A
O BP
x
y
1 !
r
r’
AberrationsAberrations TermsTerms
6464 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Most important imaging errors:
F200 defocusF020 astigmatismF300 primary coma (aperture defect)F120 astigmatic comaF400 F220 F040 spherical aberration
There is an ambiguity in the naming of the aberrations in the grazing incidence case!
!"# Nk=+0
sinsin0100
=F grating equation
Aberrations TermsAberrations Terms
6565 D. Cocco X-Ray optics, Erice, 6-15 April 2011
0020
=F sagittal focusing ( ) 0coscos211
02=+!
"+ #$arr
Example: toroidal mirror
Substituting in
and imposing 1 = -! = )
2
1 ;
2
12002
Raa ==
!0;
200=F 0
020=F
Rrrt
1
2
cos
'
11=!!
"
#$$%
&+
'
!"
1
cos2
1
'
11=##
$
%&&'
(+
srr
( ) 0coscos2coscos
020
0
0
22
=+!""#
$%%&
'
(+ )*
)*a
rr0
200=F tangential focusing
The tangential focal distance r’0 is obtained by setting:
The sagittal focal distance r’0 is obtained by setting:
Focal conditionsFocal conditions
6666 D. Cocco X-Ray optics, Erice, 6-15 April 2011
)sin(sin0100 !"# $+$= DnF grating equation
!!"
#$$%
&'+'=
RrRrF
(()) cos
'
coscoscos22
200tangential focus
!!"
#
$$%
&
'(()
*++,
-.
'+(
()
*++,
-.=
rRrrRrF
///000 sincoscossincoscos22
300 primary coma
1 !r r`
Optical path function
Spherical GratingsSpherical Gratings
6767 D. Cocco X-Ray optics, Erice, 6-15 April 2011
!!"
#$$%
&'+'=
RrRrF
(()) cos
'
coscoscos22
200tangential focus
!!"
#
$$%
&
'(()
*++,
-.
'+(
()
*++,
-.=
rRrrRrF
///000 sincoscossincoscos22
300 primary coma
0300F
200F ==
Rowland Circle Source
Gra
ting Rgrating=2Rrowland circle
!
" r = Rcos#
!
r = Rcos"
Spherical GratingsSpherical Gratings
6868 D. Cocco X-Ray optics, Erice, 6-15 April 2011
!!"
#$$%
&'+'=
RrRrF
(()) cos
'
coscoscos22
200)sin(sin0100 !"# $+$= DnF
1 !r r`
Mantain fixed source and image in position and direction
R=30 m; gd=150 l/mm; r=4m; r’=1.5m
Variable Included Angle SphericalVariable Included Angle Spherical Grating MonochromatorGrating Monochromator
6969 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Plane mirror
Spherical/plane grating
Entrance slit/source
Exit slit/image
!!"
#$$%
&'+'=
RrRrF
(()) cos
'
coscoscos22
200)sin(sin0100 !"# $+$= DnF
"mirror=($+%)/2
Variable Included Angle Spherical Grating MonochromatorVariable Included Angle Spherical Grating Monochromator
7070 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Plane mirror
Spherical/plane grating
Entrance slit/source
Exit slit/image
h mirror axis ~ h/2 grating center
Variable Included Angle Spherical Grating MonochromatorVariable Included Angle Spherical Grating Monochromator
7171 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Plane mirror
Spherical/plane grating
Entrance slit/source
Exit slit/image
Variable Included Angle Spherical Grating MonochromatorVariable Included Angle Spherical Grating Monochromator
7272 D. Cocco X-Ray optics, Erice, 6-15 April 2011
200 400 600 800 1000 1200 1400 160000
5
10
15
20
25
30
35
40
Eff
icie
ncy
(%)
Efficiency CurvesEfficiency Curves
7373 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Source
Grating
40
20
0
-20
CC
D v
ert
ica
l p
ositio
n (µ
m)
-1.0 -0.5 0.0 0.5 1.0
Photon Energy (eV)
1.0
0.8
0.6
0.4
0.2
0.0In
tensi
ty (
a.u
.)
45.00245.00145.00044.99944.998
Photon Energy (eV)
FWHM = 1.6 meV
Plane mirror
Spherical grating
Entrance slit
Exit slit
Exit slit
10 µm
Resolving PowerResolving Power
7474 D. Cocco X-Ray optics, Erice, 6-15 April 2011
( )Nkr
sentrance
!"
cos#=$ entrance slit contribution
( )rNk
sexit
!
"!=#
$%
cosexit slit contribution
( ) ( )!"# sinsinNk $=
( )r
s
Nk=!="
#
$%&
'
(
()
)
)
* cos
( )r
s
Nk !
!="=##
$
%&&'
(
)
)*
*
*
+ cos
Resolving power = "/+" = E/+E
45/0.0016 0 28000
1.0
0.8
0.6
0.4
0.2
0.0In
tensi
ty (
a.u
.)
45.00245.00145.00044.99944.998
Photon Energy (eV)
FWHM = 1.6 meV
Plane mirror
Spherical grating
Entrance slit
Exit slit
smaller are s and s´,smaller will be the bandpass
Resolving PowerResolving Power
7575 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Typical Spherical grating monochromator resolving power
( )!"
"
"
cos#$
$=
%=
% s
rNk
E
E
Resolving PowerResolving Power
7676 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Typical Spherical grating monochromator resolving power +50-250 V
I(nA) Gas inlet
Photon in
4
3
2
1
Int
en
sit
y (
ar
b.
un
its
)
402.0401.5401.0400.5
Photon Energy [eV]
Gaussian Width
FWHM: 34 ± 3 meV
Experimental Data
Fitted Data
N2 1sE/+E > 11000
Resolving Power measurementResolving Power measurement
7777 D. Cocco X-Ray optics, Erice, 6-15 April 2011
$
%
Real Source
r
Virtual Source r’
fCrr 2=!
!
"
cos
cos=fC
!!"
#$$%
&'+'=
RrRrF
(()) cos
'
coscoscos22
200
0cos
'
coscoscos22
200=!!
"
#$$%
&
'(+
'(=
))**
rrF 0
'
coscos22
=+rr
!"
!
"2
2
cos
cos' rr #=
Plane GratingPlane Grating
7878 D. Cocco X-Ray optics, Erice, 6-15 April 2011
ellipsoidal
mirror
exit
slit
source
plane
grating
$%
Fixed virtual
source
Entrance
slit25.2=fC
r
r!
r!=2.252 r
SuperESCA at Elettra, r~4500 mm, r!~22800 mm
SX 700SX 700
7979 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Source
M1, Sagittal cylindrical collimator16m from source
Grazing incidence angle 1°
M3, Sagittal toroidal focusing mirror20m from the source
Grazing incidence angle 1°M2, Plane mirror
Plane gratings18m from source
Pin hole22m from source
0cos
'
coscoscos22
200=!!
"
#$$%
&
'(+
'(=
))**
rrF !="=+
!'0
'
coscos22
r
r
#$
One can select to work in:High resolution mode (accept to loose some flux)High efficiency mode (accept a reduction of resolution)High order suppression mode (with a typical appreciable reduction of flux)
Collimated light SX 700Collimated light SX 700
8080 D. Cocco X-Ray optics, Erice, 6-15 April 2011
Source
M1, Sagittal cylindrical collimator16m from source
Grazing incidence angle 1°
M3, Sagittal toroidal focusing mirror20m from the source
Grazing incidence angle 1°M2, Plane mirror
Plane gratings18m from source
Pin hole22m from source
!="=+!
'0'
coscos22
r
r
#$
fCrr 2=!
In principle one can work with any Cf value, higher or lower than 1 but…
This mirror do not produce a perfectly collimated light (NEVER)
! divergence changes with Cf
This mirror is no more able to focus the radiation
Problem amplified for Cf value lower than 1
CollimatedCollimated Light SX 700 Light SX 700
8181 D. Cocco X-Ray optics, Erice, 6-15 April 2011
!!!!++++= 3x3D2x2Dx1D0DD(x)
!
F200
= 12"n#D
1+ cos2$
r" cos$
R+
cos2%& r " cos%
R
'
(
) )
*
+
, ,
'
(
) ) )
*
+
, , ,
!
F300
="13
n#D2
+12
cos2$r
" cos$R
%
&
' '
(
)
* *
sin$r
+cos2+, r " cos+
R
%
&
' '
(
)
* *
sin+, r
-
.
/ / /
0
1
2 2 2
Groove density D varies along the grating surface:
x
!
F200
= 1
2"n#D
1+ cos2$
r+
cos2%& r
'
(
) )
*
+
, ,
'
(
) ) )
*
+
, , ,
A plane grating can focus!
Dn!"# $= sinsin
)sin(sin100 !"# $+$= DnF D> ; %<
D< ; %>
%
VariableVariable groove groove desnity desnity gratingsgratings