Cleanroom safety in McGill Nanotool fab

John LiFeb-2013

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ContentsPurposecleanroom safety rules

New rules implementedEmergency proceduresSummary

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PurposeReinforce the general safety policies

Keys safety practices in the cleanroom

New safety practices implementation

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Cleanroom safety: where to startReview the Safety and Behavior videoReview the Microfab's Policies Review the chemical list

http://mnm.physics.mcgill.ca/content/list-chemicals-available-cleanroom (with MSDS)

Review the wet benches process http://mnm.physics.mcgill.ca/content/wet-benches

Review online safety training from McGill EHS unit http://cool.mcgill.ca/COOLLectureListing.aspx?Semester=TRAINING&Course=EHS

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Cleanroom safety: The consequence not following rules

Dangerous for yourself and other users if not follow the rule properly (HF burned examples)

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Cleanroom safety: Do’s/Don’tsAlways use bottle rinser to rinse/dry emptied bottle

(acid/solvent) before put in pass-through and markedAlways use the dedicated green glove to transfer

new acid bottle to acid benchAlways label your chemical in beaker (acid/solvent

bench) all the timesNever touch acid bench N2 gun with cleanroom

glovesNever leave glassware in dump rinser after doneNever leave outside of green marker area with PPE

on (except for getting chemical from cabinet or pass-through)

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Cleanroom safety: Do’s and Don'ts at Acid bench (I)

Do’s Don’ts

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Cleanroom safety: Do’s and Don'ts at Acid bench (II)

Do’s Don’ts

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Cleanroom safety:Transfer samples at wetbench

Prepare your solution with PPE onWearing Apron and cleanroom gloves(Not green

gloves), and with your own tweezers, to transfer your samples on clean/dry wipes

Put back on all PPE, using tweezers at wetbench to put samples in your beaker

Once Etching done, rinse, dry your samples and clean/dry the bench surface as well. And put the your samples on dry/clean wipe

Remove green gloves, and face shield (if you prefer), using your own tweezers to put the samples in your petri dish

Cleanroom safety: Pictorial steps of transferring samples at wetbench

Prepared Acid solution with PPE on

Remove green gloves, transfer your sample With your own tweezers to clean/dry wipe

Once finished your work, Put back PPE toRinse/dry your samples and clean bench

Then remove green gloves, with cleanroom gloves transfer your samples from wipes to petri dish with your own tweezers 10

Before Etch

After Etch

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Cleanroom safety: Cleanup

A clean wetbench is a safe wetbench

Wet Bench checklist:1. Return all chemicals to their proper

storage area 2. Dispose of any used chemicals 3. Rinse out all containers you have used

(graduated cylinders, beaker, etc.) and remove them from sink after rinse

4. Clean and dry the wetbench surfaces

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Cleanroom safety: Transfer chemical bottles from pass-through to wetbench

• Use the dedicated green gloves (which clamped by pass-through• Do NOT use cleanroom gloves

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Cleanroom safety: green gloves in the proper position and orderGloves for Metal bench Gloves for Acid bench

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Cleanroom safety: cleanupGloves for Site Coater Gloves for Laurell

coater

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Cleanroom safety: Chemical disposal

Solvent and resist (To solvent waste container)

Acid and Base (TMAH) (cool down and dump in drain)

Metal etchant (dedicated waste containers)Empty bottles of Acids and Solvents (rinse,

mark and put in pass-through)

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Emergency Procedures: Evacuation (I)

Should any of the following situations occurs:

• Ventilation system failure (ie., fresh air/exhaust systems/cleanroom power failure)

• Large chemical spill• Fire alarm sounded• or should any other imminently dangerous

situation present itself

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Emergency Procedures: Evacuation (II)

Must take the following actions IMMEDIATELY:

• WARN anyone within their immediate area of the danger.

• TURN OFF any equipments being used via the safest manner if possible.

• EXIT the fab in a calm, orderly manner via:

• INFORM Fab Personnel OR call McGill Security by dialing 3000

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Emergency ProceduresAccidental contact with a chemical

Remove contaminated clothing and flush with cold water for at lease 15 minutes.

The extent of any injury, even if no injury seems apparent, MUST be evaluated by a medical doctor immediately

In case of HF, gently massage calcium gluconate ointment into skin. This material in the NanoLab First Aid Kit

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Emergency Procedures: Fire safety

When you hear a fire alarm you must immediately exit the Clean Room through the closest emergency exit doors (No need to remove clean room bunny suits).

Trigger an alarm if it is possible when a fire occurs in cleanroom

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Report to staff immediately whenThere is abnormal smell or odour There is strange noise/sound There is gas/water leak Or any other abnormal situations

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Summary

Clean fab is a safe fabAll users in the microfab are expected to take

steps to ensure that health and safety of other lab members will not be endangered.

Every users are requested to correct other users dangerous behaviours in cleanroom

It is YOUR fab and YOUR safety matters