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Fundamentals of Microelectronics Jintae Kim 1 Chapter 6: Physics of MOS Transistor □ MOSFET: Metal-Oxide-Semiconductor Field-Effect Transistor - A dominant type of transistor in modern integrated circuit (IC) for consumer products Ex) Memory (Flash, DRAM), CPU, Image Sensor, Wireless LAN transceiver, Bluetooth transceiver, etc are all designed using MOSFETs - We learned BJT first, but why is MOSFET so much more popular than BJT? 1) Technology Scaling: The size of transistor has been getting smaller and smaller by innovations in transistor technology over the last 40 years Called “Moore’s law” 10nm x 10nm Size of Transistor 2017 Year 1993 Transistor Size 600nm x 600nm ~3600x smaller 2) The cost of single MOSFET has been dropping continuously

Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

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Page 1: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

1

Chapter 6: Physics of MOS Transistor

□ MOSFET: Metal-Oxide-Semiconductor Field-Effect Transistor

- A dominant type of transistor in modern integrated circuit (IC) for consumer products Ex) Memory (Flash, DRAM), CPU, Image Sensor, Wireless LAN transceiver, Bluetooth transceiver, etc are all designed using MOSFETs - We learned BJT first, but why is MOSFET so much more popular than BJT?

• 1) Technology Scaling: The size of transistor has been getting smaller and smaller by innovations in transistor technology over the last 40 years Called “Moore’s law”

10nm x 10nm

Size of Transistor

2017Year 1993

Transistor Size 600nm x 600nm

~3600x smaller

2) The cost of single MOSFET has been dropping continuously

Page 2: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

2

3) Can be used for both analog and digital circuits can build an integrated system on a single silicon die

Digital

Analog

4mm

Example) 801.11 Wifi Chip Die Photograph

□ MOS Capacitor

- Review of Parallel Plate Capacitor: Q=CV, C = ϵ𝐴

𝑑

+V

+++

++

+ + ++

+

++

d

Area: A=WL

Page 3: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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- MOS capacitor

````

Metal or Conductor

Insulator

Semiconductor

(P-type for now)

1) What happens when V1 > 0?

- Top Plate:

- Bottom-Plate:

2) With V1 > 0 , what happens if we apply V2?

Page 4: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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□ MOSFET

i) MOSFET is a 3-terminal device

Gate: Oxide: Drain & Source:

ii) MOSFET is built on “silicon substrate”

iii) There are two types of MOSFETS: NMOS and PMOS

Page 5: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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□ Formation of Channel in MOSFET and Threshold Voltage

1) Scenario 1: When VGS = 0

2) Scenario 2: When VGS > 0 Holes near the oxide-substrate interface are repelled 3) Scenario 3: When VGS >> 0

Minority carrier is pulled toward the interface

D

G

p-substrate

n+ n+

S

Page 6: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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4) With VGS > VTH, let’s apply VDS > 0

- Let’s plot ID versus VDS

Observation: The MOSFET is similar to “voltage-controlled resistor”

- Let’s plot Id versus VGS

D

G

p-substrate

n+ n+

S

Page 7: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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□ Channel Pinchoff

D

G

p-substrate

n+ n+

S

x0 L

- Channel Potential V(x): potential along the channel from 0 to x V(0) = 0, V(L) = VDS

- Voltage difference between gate and channel at x = VGS – V(X)

- What happens if At x=0, VGS-V(0) > VTH Channel exists near the source AT x=L, VGS-V(L) <VTH Channel doesn’t exist near the drain Called “Channel Pinchoff”

- How does current flow when there is channel pinchoff?

D

G

p-substrate

n+ n+

S

- Electrons reaching at the end of the channel is pulled toward the drain by the electric field in the depletion region

Page 8: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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□ Derivation of MOSFET current 1) When there is no pinchoff

i) Gate capacitance per unit area: Cox

ii) Channel Charge per unit length: Qch(x) At x=0 At arbitrary x, iii) Drain Current : ID iv) Finding closed form of ID by using boundary condition

GS D

WL

Page 9: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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Note: This equation is valid only when Q(x)>0 for all x from 0 to L (No pinchoff)

At x=0: At x=L: - When is the ID at its maximum?

- Special Case when VDS << VGS-VTH

VDS

ID

VGS-VTH

Page 10: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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2) Drain current when there is channel pinchoff: “Square-Law”

Note: With pinchoff, Q(x) = WCOX[VGS-VTH-V(X)] is not valid where there is no channel Modified ID is found by performing the integration only for Q(x)>0

D

G

p-substrate

n+ n+

S

Page 11: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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- Combined Drain Current Model: Square-Law & Mode of Operation

BJT MOSFET

Main Mode (Voltage-Controlled

Current Source)

Condition

Current

Mid-Terminal

Integrated Circuit Design

VDS

ID

VGS-VTH

Page 12: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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□ MOSFET Nonideality: Channel-Length Modulation - Just like Early effect in BJT, people experimentally found out that ID actually

depends on VDS called “Channel Length Modulation”

D

G

p-substrate

n+ n+

S

DG

p-substrate

n+ n+

S

L1

L2

v) Drain Current with Channel Length Modulation

VDS

ID

Page 13: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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□ MOSFET Small-Signal Model

VGS-VTH

gm

W/L 2x, ID 2x

W/L 2x, ID 1x

W/L 1x, ID 2x

Page 14: Chapter 6: Physics of MOS Transistor - Konkukhome.konkuk.ac.kr/~jintkim/ckt1_17/data/lecturenote_chap6.pdf · Fundamentals of Microelectronics ... Can be used for both analog and

Fundamentals of Microelectronics Jintae Kim

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□ PMOS Transistor

NMOS PMOS

Gate

Source/Drain

Substrate (Body)

Channel Carrier

Channel Turn-On

Saturation condition

- CMOS Process

D

G

N-substrate

P+ P+

S

L1

D

G

N-Well

P+ P+

SD

G

p-substrate

n+ n+

S