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7/25/2019 Cfm Surface Lectures 2012 Notes 1-9 Final
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Surface Physics :
Structure and Composi t ion & How to study them !
Course structu re
Lecturing schedule
Comments :
PowerPoint: - hand-outs; research & past paper; problem workshop; lab tour
Texts: Woodruff & Delchar, Modern Techniques of Surface Science, CUP:
Zangwill, Surface Physics, CUP: McCash, Surface Chemistry, Oxford
Briggs & Seah Practical Surface Analysis ,Vols: 1 & 2 , Wiley
Prof Chris McCon vil le P431 c.f.mcconvil [email protected]
week Tues 10-11PS128
Wed 11-12B2.02
Thurs 9-10F1.11
Fri 12-1B2.02
8 CFM1 - CFM2 CFM3
9 CFM4 CFM5 - CFM6
10 CFM7 - CFM8 CFM9
1. Why surfaces are important & how can we study them?
2. Surface science techniques - phenomenology & determination
3. Surface crystallography & structural / chemical determination
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SURFACE PHYSICS
Why are surfaces interesting?
Fundamental:a surface is a special kind of defectthe mostextreme kind of defect - in a perfect 3-D periodic solid withdifferent geometrical (atomic) and electronic structure
Practical:
1. all gas-solid and liquid-solid interactions occur at thesurface. e.g. corrosion, adhesion, wear, heterogeneouscatalysis (surface reactions, chemistry), electronic junctions
2. the surface chemistry (compound formation) and electronic
structure of solid-solid interfaces can dominate the performanceof a reaction or the operation of an electronic device
3. surfaces and interfaces can also be modified by adsorption(segregation) from the bulk - e.g. grain boundary segregationand intergranular brittle fracture or by alloying at the surface
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grain boundary segregation and intergranular brittle fracture!!
a 2nd world war Liberty ship
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What is difficult about studying surfaces?
Experiment:
2. Surface Specificity
Need to detect these small amounts of material (very few atoms)in the presence of the under ly ing bulk sol id.
e.g. 1 mm thick sample has 5 x 106atomic layers
so 1% of a monolayer is 1 part in 5 x 108of the total no. of atoms
Need to use a very, very local clean environmentto ensure the surface stays clean
ULTRA-HIGH VACUUM (UHV)
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3. The need for ultra-high vacuum (UHV)consider the rate of arrival of molecules at a surface from the surrounding gas
kinetic theory of gases: rate of arrival of molecules ofno. density n /unit. vol., average velocity ca, is r = n ca
now c2rms= 3 kBT/m & ca= (8/3)1/2crms(kB- Boltzmanns constant, T - absolute temp., m - molecular mass)
and P = nkBT (cf P = RT/V) so r = P/(2kBTm)1/2
substitute kB
= 1.38 x 10-23J.K-1and m = 1.66 x 10-27M kg
gives r = 2.63x1024P/(MT)1/2molecules m-2
take M=28 (N2, CO), T = 300 K and convert P (in Pa) to p in mbar (1 mbar = 100 Pa)
so r = 2.87 x 1024p molecules m-2
1 ML1019molecules m-2so with unity sticking factor the monolayer time is= 3.48 x 10-6/p s or 3.48/p s
e.g. p = 1 mbar, = 3.5 sp = 3.5 x 10-6mbar, = 1 s
p = 3.5 x 10-10mbar, = 104s or 3 hrs
MORAL : need UHV for
realist ic experimental
t imescales on c lean and
created surfaces
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Diffusion
Pump
(low vapourpressure oil)
Turbo
Molecular
Pump
(high speed fan,oil free)
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What kind of surface?Simple- low Miller index single
crystal surfaces
e.g. face centred cubic (fcc)
General- especially vicinalsurfaces (low index + steps &kinks)
Can do the same for body-centredcubic (bcc), hexagonal close-packed (hcp), wurtzite (wz), and
zinc-blende (zb) structures
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wz
z
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Examples of high-index (stepped) surfaces
step atoms shaded for clarityfcc(410)
Terrace: (100)
Step
Primitive unit mesh
Centred-primitive unit mesh
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Surface structurewhy the interest?
Surface relaxation & atomic reconstructionatomic rearrangement for energy minimisation
Adsorptionwhere do adsorbed atoms and
molecules sit?active sites in heterogeneous catalysis
Adsorption bond lengths
implications for bonding and reactivity
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Surface structural phenomena - a brief overview
Clean sur face (e.g. metal): su rface relaxation
(i.e. the outermost layer spacing changes)
WHY?Electron charge depletion in surface layerdue to spill over into vacuum & smoothing -typically causes outer layer contract ion.
Damped oscillatory layer spacing changeswith depth due to propagation of chargefluctuations.
Sem iconduc tor sur face reconst ruct ionWHY? Covalently-bonded networks (e.g. Si, Ge, GaAs, InSb,.) -
surface leads to dangling bonds several surfacereconstructions possible to reduce no. of dangling bonds (onthe polar surfaces) and depending on surface composition.
Leads to depletion / accumulation of charge at the surface
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Surface Physics :
Structure and Composi t ion & How to study them !
Course structu re
Lecturing schedule
Comments :
PowerPoint: - hand-outs; research & past paper; problem workshop; lab tourTexts: Woodruff & Delchar, Modern Techniques of Surface Science, CUP:
Zangwill, Surface Physics, CUP: McCash, Surface Chemistry, Oxford
Briggs & Seah Practical Surface Analysis ,Vols: 1 & 2 , Wiley
Prof Chris McCon vil le P431 c.f.mcconvil [email protected]
week Tues 10-11PS128 Wed 11-12B2.02 Thurs 9-10F1.11 Fri 12-1B2.02
8 CFM1 - CFM2 CFM3
9 CFM4 CFM5 - CFM6
10 CFM7 - CFM8 CFM9
1. Why surfaces are important & how can we study them?
2. Surface science techniques - phenomenology & determination
3. Surface crystallography & structural / chemical determination
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Si(100)-(2x1)
Ideal termination has 2 dangling bonds persurface Si atom - surface atoms pair (formdimers) to reduce this to 1 dangling bond
per surface Si atomNB: dimers are asymmetric (buckled)
Si(111)-(7x7)
Ideal termination has 1 danglingbonds per surface Si atom -
reduced by:1. surface dimer formation -removes these dangling bonds
2. adatoms bond to groups of 3 Sisurface atoms (reduce 3 danglingbonds to 1
3. stacking fault appears in 1/2 ofsurface unit mesh
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Si(111)(7x7) surface Si(100)(2x1) surface
LEED
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Surface struc tural phenomena - a brief overview
Ionic solids (e.g. oxides or III-V semiconductors)
- instability of polar surfaces
WHY? dipole interaction energy becomes infinite soreconstruct to remove dipole interactions(e.g. nano-facets to non-polar orientation)
e.g. NiO(111) (100) nano-facet
MgO(111) - microfacets
ideal bulk-terminatedreconstructed
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Some other metal surface reconstructions
(111)nanofacets zig-zag rows
Examples of clean metal surfacemissing row and close packed
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Atom ic adsorp t ion on metals - usually highest-coordination site
The so-called clock reconstruction of a Ni(100) surface followingthe adsorption of atomic C or N ( but not O).
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Molecular adsorbates commonly form local directional bonds
Si(100)(2x1)-OH+H
H2O OHa+ Ha
Cu(110) + glycine
2NH2CH2COOH 2NH2CH2COOa+ H2
Need techniques that will allow thisdetailed information to be determined
(with sufficient accuracy!)
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Surface Structure & Surface Crystallography
NB: a surface is a 3-D ob ject but has only 2-D period ici ty
Terminology
substrate
Structure identicalto that of infinitebulk solid
selvedgeOutermost atomic
layers which differdue to presence oftermination of solid
adsorbate
Layer(s) of differentspecies from solid orgas phase or bulk
surface
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Surface Structure & Surface Crystallography
NB:a surface is a 3-D ob ject hence;
Surface = Adsorbate + Selvedge (+ Substrate)
- but has only 2-D period ici ty
and remember - ALL symmetry pro pert ies considered
apply to the 3D ob ject
Classi f icat ion o f stru ctures
Identify both t ranslat ionaland point symmetry operations
Devise a convenient notat ionrelating surfaceperiodicity (unknown) to substrate periodicity (known)
Classify structural types by relationship of surface andsubstrate periodicities
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Classify the 2-D periodic surface according to:(1) their periodicity; 2-D Bravais nets
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Stereograms of the ten two-dimensional point groups. On the left areshown the equivalent positions, on the right the symmetry operations. The
names follow the full and abbreviated 'International' notation.
Classify the 2-D periodic surface according to:(2) their point group symmetry; Ten 2-D point groups
Elements: 1,2,3,4,6 - fold rotation &mirror - al l operat ions act with in aplane parallel to the surface
Classify the 2-D periodic surface according to
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17- 2D Space GroupsClassify the 2-D periodic surface according to(3) their space group symmetry; 2D space groups
combine: Bravais nets &p.g. operations + glide
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alsoweclassify structures according to the relationshipbetween the surface and substrate periodicity
substrate primitive translation vectors (2-D) aand b
surface primitive translation vectors (2-D) aand b
hence can write a=G11a+ G12b and b = G21a+ G22b
where Gijare four coefficients which form a matrix G
so and
Note: thearea of substrate mesh is |ax b| so detG is the ratioof the areas of the surface and substrate primitive unit meshes
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Classification:- several possibilities
a) det.Gis integral and all matrix components are integral
the two meshes are simply related- mesh of surface+substrate is the
same as the mesh of the surface alone i.e. same translational symmetry
b) det.G is a rational fraction (or det.G is integral and some matrix
components are rational fractions)the two meshes are rationally related- structures are commensura te
e.g. in 1-D
so now the mesh of surface + substrate is a, b
e.g. in 1-D
det det
detG
P
QdetP and detQ have the
smallest integral values
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Classification:
c) det.G is irrational
incommensurate structure- implies surface atoms do not see the
corrugated potential of the substrate (may occur for adsorbed layerswith very strong adsorbate-adsorbate interactions)
Nomenclature
Most general: - use matr ixnotat ion- G
More convenient: - use Wood notation
e.g. adsorbate A on{hkl} surface of materialX
primitive translation vector lengths related by |a|=p|a| ,|b|=q|b |
surface mesh rotated by
structure is X{hkl}(pxq)R -A
NB:- cannot use Wood notation when the included angles ofthe surface and substrate mesh differ
e.g Ni{100}(2x2)-O andNi{111}(3x3)R30-O
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Dif f ract ion from surfaces how to make the signal
su rface speci f ic
Two contributing processes
inelastic scattering removes signal from any technique
which only detects electrons which have no tlost energysuch as elastic scattering (diffraction)!
1. inelastic electron scatter ing
Mechanisms
a. electron-hole pair excitations - low energy excitations -
dominant at low (
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Inelastic
scattering
mean-free-path
(Angstrom)
Electron energy above EF(eV)
Theoretical calculation of inelastic scattering in jellium with a charge
density appropriate for Al (devised by Quinn in 1962)
plasmone-h
plasmon scattering dominates for electron energies above about 30 eV
E i t l d t i ti f l t t f l t
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Experimental determination from electron spectroscopy of electron
attenuation lengths in many different materials (Seah & Dench, 1979)
Electron energy above EF(eV)
AttenuationLength(Angstroms)
d AB
e-
detect attenuationof electronsemitted from B as
function ofthickness ofoverlayer film of A
I I d 0exp( / )
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2.elast ic electron scatter ing
Part of the incident flux is elastically (back-)scattered out of the crystal by each atomic
layerso incident flux is attenuated as itpenetrates the solid due to elasticscattering as well as inelastic scattering
Elastic scattering can alsocontribute to attenuation lengthmeasurements by increasing theaverage escape distance
Quanti tat ive su rface stru ctu re determin at ion
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conservation of energy so
where is a reciprocal lattice vector
Quanti tat ive su rface stru ctu re determin at ion
(Electron) Diffraction at Surfaces & the Reciprocal Net
First, recall the situation in 3-D
periodic solids
conservation of reducedelectron wavevector (momentum)
k k
k k g' hkl
g a b chkl h k l * * *
a b c
*
2V
b c a
*
2V
c a b
*
2V
V a b c.
conservation of energy k k'2 2
In a 2-D periodic system
where is a reciprocal net vector
conservation of reducedelectron wavevector parallelto surface
k k g'/ / / / hk g a bhk h k * *
a
b n
*
2 A b n a
*
2 A A a b n.
k k'
2 2
k k k k ' '/ / / /2 2 2 2
perp perp
nis a unit surfacenormal
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Ewald Sphere Construc t iona convenient representation of these conservation equations
3-D case
1. Draw the vector kto the origin of thereciprocal lattice
2. Draw a sphere, radius |k| centred on the
start of the vector k3. Diffracted beams kcorrespond to thevectors from the centre of the sphere to theintersections of the sphere with reciprocallattice points
NB - the sphere ensures energy conservation, the reciprocal latticepoints ensure reduced momentum conservation
E ld S h C t t i
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Ewald Sphere Construc t iona convenient representation of these conservation equations
2-D case
1. Draw the vector kto the origin of thereciprocal net
2. Draw a sphere, radius |k| centred on the
start of the vector k3. Diffracted beams kcorrespond to thevectors from the centre of the sphere to theintersections of the sphere with reciprocal netrods drawn through reciprocal net points and
perpendicular to the surface
NB - the rods show that electron momentum transferperpendicular to the surface is a continuous variable - but theparallel component is discrete
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de Broglie and so
Low Energy Electron Dif f ract ion - LEED
typical energies 30-300 eV - WHY?
Wavelengthinteratomic distances
h
p
p
mE
2
2
h
mE2
with E in eV, in ngstroms, we have
e.g. if E=150.4 eV, = 1.0
Surface specificity- this energy range gives highest elasticand inelastic electron scattering cross-sections
1504.
E
Practical implementat ion : -
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Practical implementat ion : -
LEED optics
Field-free space Retarding-field region
Acceleration region - electronshit fluorescent screen
al l in ul tra-high
vacuum
~+5 keV
high-pass filter
NB:- only elastically scatteredelectrons are coherent and soform diffraction pattern
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LEED pattern is a projectionof the reciprocal net with a
magnification determined bythe electron energy (and thusEwald sphere radius)
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Low energy electron di f f ract ion (LEED)
Retardin g field analys er (RFA)
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Low energy electron di f f ract ion (LEED)
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Low energy electron di f f ract ion (LEED)
Cu(110)
Cu(100) Cu(111)
E0~ 60 eV forall 3 surfaces
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LEED pattern is simply aprojection of the reciprocalnet with a magnification
factor determined by theelectron energy (and thusEwald sphere radius)
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Clean GaAs(001)
Surfaces
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Real space Diffraction pattern (k-space)
square(1x1)
centredrectangle
(1x1)
squarec(2x2)
square(2x1)
from thediffractionpatterndetermine the
reciprocal netand henceinvert toobtain realsurface net.
NB:
Nomenclature fordiffracted beams- indexed relativeto substratereciprocal net
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Overlayer Structures
with LEED
(4x2)
c(4x2)
Two domains ofthe (4x2) rotated90o(a) and 45o
(b) relative to eachother
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Multiple domains can also have an effect when point group
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Multiple domains canalso have an effect when point groupsymmetry of the surface structureis lower than that of the substrate
both domains havesame diffracted beamlocations, but different(2-fold symmetric)
relative intensities.
Sum of two is 4-foldsymmetric
General con clusio n the effect of domains ensures that the point groupsymmetry of the surface diffraction pattern is always the same as that ofthe substrate.
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Reflect ion High Energy Electron Diffract ion (RHEED)
- High energy electrons (>15 keV) used with grazing incidence geometry (< 2o)
- Surface sensitivity due to low component of momentum normal to surface (few )
In LEED, low energy electrons used- provide large elastic scattering cross-section for back-scattered electrons- keep the penetration depth of the electrons short
In RHEED, another solution is used- provide large elastic scattering cross-section for forward-scattered electrons- keep penetration depth small by using grazing incidence
(LEEDs high energy cousin)
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Kinematic Basis o f RHEED
Conservation of energy (E = 2k2/2m):|ki| = |kf|
Conservation ofparallelmomentum (Laue condition):
k||= kf||ki||= G(h,k)
G(h,k)= ha1*+ ka2*is the 2D reciprocal lattice vector
symmetry of reciprocal 2D lattice and real space 2D lattice are the same
kf||ki||
ki kf
No translational symmetry in surface normal- surface is 2D periodic
- 5 Bravais lattices; (square, rectangular, centred rectangular, hexagonal, oblique)
2D unit mesh (cell) defined by lattice vectors a1and a2
2m
pmv
2
1E
mv
h
p
h
22
2mE
h
E150
convert to and E to eV
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Kinematic Basis o f RHEED
No translational symmetry in the surface normal (2D)- reciprocal lattice rods which are perpendicular to the surface
Ewald sphere is constant energy sphere of radius ki- diffraction occurs when sphere intersects a reciprocal lattice rod (at kf)
streaked RHEED patterns generally observed from flat surfaces
- due to thermal broadening of the lattice rods and surface imperfections
kf
ki
kf
kf
kf
kf
(00)
G (h,k)
Ewald sphere constructionfor 2D diffraction
|ki| = |kf| k||= kf||ki||= G(h,k)reciprocal lattice
rods
Ewald sphere
diffraction
pattern
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Theory s im i lar to LEED:-
bu t the incident wavevector IkIis now very large
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Surface Recons truc t ion
Semiconductor surfaces are characterised by dangling bonds (unsatisfied bonds) dueto lower coordination of surface atoms compared to bulk
Many semiconductor surfaces (polar surfaces) undergo a reconstruction to reducenumber of dangling bonds and minimise the surface energy
new larger 2D unit cell
Formation of surface dimers is common - change of periodicity:
e.g. GaAs(001)-(2x4)
GaAs
Other examples include:
Si(001) - (2x1) and Si(111) - (7x7)
GaAs(001) - c(4x4), c(8x2), (4x2), (2x3),
InSb(001) - c(4x4), (1x3), c(8x2), (1x1).
x2x1
Origin o f RHEED Patterns
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Origin o f RHEED Patterns
e.g. GaAs (001)
RHEED patterns along different azimuths
GaAs(001)-(2x4) Sur face Struc tu re
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GaAs(001) (2x4) Sur face Struc tu re
[110]
[110]
orderstreaks
orderstreaks 3rdlayer As
2ndlayer Ga
1stlayer As
4thlayer Ga
[110]
[110](2x4) unit cell
2x periodicity due to As dimer formation 4x periodicity due to existence of 2 dimers
and by 2 missing dimers reconstructed surface characterised by (2x4)
unit cell
streaked diffraction pattern
unit cell for
ideal terminated
surface
planview
sideview
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Clean GaAs(001)
Surfaces
R fl t i Hi h E El t Dif f t i (RHEED)
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Reflect ion High Energy Electron Diffract ion (RHEED)
High energy electrons (>15 keVup to 35 keV) used with grazing incidencegeometry
Ideal geometry for in-situ monitoring of growth Diffraction pattern obtained during growth provides information regarding
surface structure (2D unit cell) and surface quality during deposition
Intensity of diffraction features can be monitored and provide calibration ofgrowth ratesRHEED intensity oscillation technique
Ga As2/As4
electron gunRHEED pattern
GaAs
In-s i tu mon i tor ofMBE growth
Surface reconstruc t ions obs erved du r ing GaAs (001)
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Surface reconstruc t ions observed du r ing GaAs (001)grow th by m olecular beam epi taxy (MBE)
Growth diagram obtained in-situ byRHEED
Strong dependence on substratetemperature and incident flux ratio
(BEP = beam equivalent pressure)
14 different surface reconstructions - bothAs and Ga terminated
Most common growth surface is (2x4) Asterminated surface
~ 500-600 C and As/Ga flux ratios < 1:1
Classic Thin Film Grow th Modes
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Frank van der Merwe (FvdM) Volmer-Weber (VW)
2D layer-by-layer 3D is land g row th 2D3D growth
Stranski-Krastanov (SK)
Dg= gf+ gi- gs
gs,f = surface energies of substrate and epilayergi = interfacial energy
g
< 0; 2D grow thg
> 0; 3D growth
2D growth occurs when the atoms of the deposit material are more stronglyattracted to the substrate than to themselves
3D growth occurs when the deposit atoms are more strongly bound to eachother than to the substrate
2D-3D growth occurs in lattice mismatched heteroepitaxial systems: increasedstrain leads to an increase in gi as the film thickness is increased
e.g. Ge/Si (~ 4%), InAs/GaAs (~7%)
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Sem iconduc tor Quantum Dots (QDs) formed by
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Q (Q ) y
Sel f -Assembly
Deposition
Substrate
2D wetting layer
Self-assembled
3D islands
Formed during lattice mis-matched heteroepitaxial growth
Examples:
InAs / GaAs 7.2%Ge / Si 4.1%InAs / InP 4.0%InSb / GaAs 14.6%InSb / Si 20.2%
Stranski-Krastanov growth:strain plays an important role
Initial 2D layer formedso called wett ing layer
Coherent (dislocation free)3D islands occur at somecritical coverage crit
Growth mode transition easilymonitored in MBE using RHEED
Important factors; size, shape,density, composition (alloyingcan be important)
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Summary o f e lectron di f f ract ion techn iques:
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LEED Typically 30 -150 eV used to maximize the surface sensitivity.
Electrons elastically scattered-information on surface periodicity /reconstruction. Typically used to monitor static structures and determine the structure of
clean and adsorbate covered surfaces. Can be used in I-V (I-E) mode in conjunction with multiple scattering
calculations for a full structural analysis approach
Summary o f electron di f f ract ion techn iques:
RHEED Typically uses 15 keV electrons at very grazing incidence to maximize
the electron path length in the near surface. Used to monitor growing surfaces (geometry in separate azimuths)
Used for calibrating deposition rates (RHEED oscillations) Can detect 2D to 3D transitions in growth e.g. layer-by-layer to quantumdot growth
Can also be used in higher pressure environments (
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Su ace s uc u e de e a o us g
From diffraction patterncan determine the reciprocal net andhence invert to obtain the real surface net.
Try to extract any additional symmetry information from thediffraction pattern (point group, space group) - i f possib le!
Can (potentially) determine atomic positions within the unit net byanalysing the diffraction beam intensi t ies
In bulk structure determination by X-ray diffraction - measure intensitiesof many diffracted beamscan use Fourier transform of the intensitiesto get some directinformation on the structure
Surface structure determinat ion u sing LEED I-E
Dkperp is a continuous variable - measure intensity-energyspectra of diffracted beams, i.e. I-E plots
effect of com plex scatter ing factorsand mult ip le scatter ingprecludes use of Fourier transforms - use tr ial-and-errormethod
with multiple scattering simulations
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General c lassi f icat ion o f electron spectroscopy method s
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General classi f icat ion o f electron spectroscopy method s
B i l i t t i f th h t l t i f f t
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K L M
h
Basics: exp loi tat ion of the pho toelectr ic effect
What is the response of an atom to the loss of an electron?
1. Atom becomes a positive ion.2. Coulombic screening of the nuclear charge is reduced3. Energy levels adjust to new screening and chemical environment
KE = h- BE
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Avai lable pho ton energies for XPS
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XPS - hvalues used - 1487 eV (Al K) & 1254 eV (Mg K
)
Accessible corelevelsessentially for all elementsand (low) photoelectronkinetic energies
i.e. those whichcorrespond to shortattenuation lengths
Avai lable pho ton energies for XPS
valence levels
deep core levels
Photoionisation cros s-sect ions fo r XPS
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Essentially all elements
have one (or more) corelevels with similarly large
photoionisation cross-section (hence similarsensitivity).
XPS cross-sections:
photoionisation cross-sections athu=1500 eV (cf. Al K)
uppermostfactor of 10 incross-section
Photoionisation cross sect ionsfo r XPS
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What is the photoelectron binding energy measured in XPS?
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The simple view: KE = h- Eb Ebis the one-electron BE
Koopmans theorem but this is NEVER observed!
The apparent (photoelectron) binding energy is the difference betweenthe energy in the init ial state and the energy in the f inal state
initial state - neutral ground state atom + photon
final state - core-ionised atom + energetic (KE) electron
What is the time-scale of the emission process? - how doesthe core-ionised atom respond?
Free atom - adiabat ic appro ximation(fully relaxed)
KE = hu- Eb + Ea Ea= intra-atomic relaxation energy
This would be fine if photoemission was a slow processin reality it israpid so valid to use the Sudden approximation
i.e. Final state is one where electron is in an excited bound state of atom
or is ejected into the continuum of unbound states above Evacuum
What is the photoelectron binding energy measured in XPS?
F t di b t i i t i (f ll l d)
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Free atom - adiabat ic approxim ation(fully relaxed)
KE = hu- Eb + Ea
Ea= intra-atomic relaxation energyFree atom - sudd en approx imat ion
shake-up- other electrons in excited bound states
shake-off- other electrons in continuum (for atoms
= multiple ionisation)
Solid - adiabat ic approxim ation(fully relaxed)
KE = hu- Eb + Ea + Er
Er= inter-atomic relaxation energy
Solid - sudden approx imation
shake-upand shake-off- but metals have acontinuum of states above Ef- so even excitation
to states below vacuum level are shake-off-like
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Mg K=1253 eV XPS spectra show
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g
Zn-Cu-Co alloy
A l K
=1486 eV
Cu(100) sample
BOTH photoemiss ion &
Auger electron peaks
Enhances the spectralfinger-print of the atom(element) - several peakswith characteristic relativeintensities on staircase
background.Distinguish photoemissionand Auger peaks bychanging photon energy
KEphotoemission= h- EAKEAuger= EA- EBEC
Photoemissionintensity
inelastically-scatteredbackground
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Chemical state information in core level spectroscopy -especial ly XPS
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especial ly XPS
kinetic energy of thepeaks in the photoelectronenergy spectrum identifiesthe emitting atom
Recall - basis of XPS is that core level
binding energies are characteristic ofthe atomic sp eciesand so can beused for elementidentification/quantification
However this is not thewhole story ..
Chemical effects in XPS
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How can the photoelectron binding energy of an atomic core level be influencedby the surrounding atoms (chemical bonding = electronic structure)?
init ial s tate effect- change in one-electron binding energy Ebdue to change in valence electron environment
f inal s tate effect- change in inter-atomic relaxation energy Er
combined effect leads to an experimentally-observedchemical shift
NB: - the two con tr ibuto ry effects are NOT separable exper imental ly
Use the chemical shift as a spectral fingerprint of differentbonding environments
Auger Electron Spectroscopy (AES) is a dif ferent techn ique
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Use incident energetic electron sto produce core ionisation
allpeaks are due to Auger electron emissionNo equivalent of photoemission peak because in electronionisation incident electron does notgive up allits energy
Surface specif ic i tydue to inelastic & elastic scattering of outgoing
electrons - essentially same as XPSPract ical p roblem:use of incident electrons creates a largebackground of inelastically-scattered and secondary electrons - sosignal-to-background ratio is poor
Solut ion:use electronic differentiation of spectrum to suppressbackground and allow amplification
Consequence:peak in N(E)becomes double feature indN(E)/dE (or N(E))
E
typical Auger electron spectra of Si(001)
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incidentelectrons
3-10 keV
e-electron
energyanalyser
NB: unlike with photons, theelectron ionisation cross-section
peaks around Ep = 3 x B.E.
AES - an app l icat ion - character is ing layer-by layer grow th
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Ag
V
knees in the AES
amplitude vs. exposureshow monolayercompletions andprovide an absolutecoverage calibration
AES - an appl icat ion - ident i fy ing grain
b d t i i i t l f t
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boundary segregat ion in intergranular fracture
200 m
0.45 ML of P foundhad segregated tograin boundaries
Turbine rotor failure - Hinkley Point power station, UK.
Quant i ficat ion of sur face composi t ion
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XPS:-Measured intensity of emission depends on:
Surface composition (how much of an element) Photoionisation cross-section
Instrumental factors (analyser efficiency, sensitivity etc.)
Electron attenuation length
Depth distribution of elements
many of these factors can be accounted for by using standardreference spectra for relative peak intensities
AES:-Also need to think about: Auger branching ratio
Contribution to ionisation from backscattered electrons
depends of nature of substrate
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Wide Scan XPS of GaN AsXP
S of a d ilu te III-N-V alloy GaN0.104As0.896
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0 100 200 300 400 5000
500
1000
1500
2000
2500
3000
3500
Ga 3s
As 3p
Ga 3p
As 3s
Wide Scan XPS of GaN0.104
As0.896
Ga (LMM)
N 1sAs (LMM)
As 3d
Ga 3d
Intensit
y
(arb.units)
Binding Energy (eV)
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Analysis of carbon f ibre based po lymer com pos i te
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6CF3
(5CF2)2
3
CH2
O
4C=O
[1CH2
2C ]n
1CH3
h e-
Fluorinated Side Chain Polymer - Angle
Resolved C 1s.
49%
33%
3% 18%
y p y p
material by XPS
Woven carbonfiber composite
XPS analysis identified the functionalgroups present on composite surface.
Chemical nature of fiber-polymer interfacewill influence its properties.
Analysis of m ater ials for s olar energy col lect ion
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y gy
XPS Depth Prof i l ing- The amo rpho us-SiC/SnO2interface
Profile indicates a reduction of the SnO2at theinterface during deposition. Such a reductionwould effect the collectors efficiency.
Photo-voltaic Collector
Conductive Oxide- SnO2
p-type a-SiC
a-Si
Solar Energy
SnO2
Sn
Depth500 496 492 488 484 480
Bind ing Energy, eV
XPS analys is of p igm ent f rom Egypt ian Mummy
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150 145 140 135 130Binding Energy (eV)
PbO2
Pb3O4
500 400 300 200 100 0Binding Energy (eV)
O
Pb Pb
Pb
N
Ca
C
Na
Cl
XPS analysis showed
that the pigment usedon the mummywrapping was Pb3O4rather than Fe2O3
Egyptian Mummy
2nd Century AD(World Heritage MuseumUniversity of Illinois)
The impact o f XPS?
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Phys. Rev. 105, 1676, (1957)
Kai Siegbahn (1918 - 2007 )
1981 Nobel Prize in Physics
X-ray Photoelectron Spectroscopy (XPS),also known as Electron Spectroscopy for
Chemical Analysis (ESCA) is a widely usedtechnique to investigate the chemicalcomposition of surfaces.
p
for his contribution to the developmentof high-resolution electron spectroscopy "
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Instinct says beer. Reason says Carlsberg
Instinct says Surface Analysis. Reason says XPS
Electron s cat ter ing m ethods for su rface structure determ inat ion
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103
LEED - remote electron source - incidentplane waves - interference - diffraction.
NB - much of interference comes fromsubstrate layers
Alternative approach - use photoemission from a core level of a surface
(adsorbate) atom as the sourceof the electrons which interfere
Photoelectron Diffraction -detect photoelectrons
(Surface) Extended X-ray AbsorptionFine structure - SEXAFS - detect
photoabsorption
Sur face st ructure & composi t ion us ing s cattered ions
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Factors governing ion -surface interact ion
e.g. Energy, mass, charge exchange, etc. Surface structure & composi t ion
Low energy ion scattering (LEIS)
Coaxial impact collision ion scattering spectroscopy (CAICISS)
Sub-sur face structure & c omposi t ion
Medium energy ion scattering (MEIS)
Secondary ion mass spectrometry (SIMS)
Combinat ions of techniques
First UK MEIS data
Factors governing ion-sur face interact ion
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Energy: LEIS: 0.5 - 10 keV
MEIS: 50 - 400 keVRBS: >1 MeV
SIMS: 250 eV - 2 keV
Mass: Hydrogen (H+)
Helium (He+) or Neon (Ne+)
Alkali metals (e.g. Li+)
Oxygen (O+) and Caesium (Cs+)
Momentum transfer: (e.g. sputtering)
Charge transfer: (e.g. neutralisation)
Binary collision model in ionTwo body billiard ball collision:
Ion scat ter ing spectros cop y: basic pr incip les
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106
yscattering
Two-body billiard ball collision:
E
E AA1
0 2 1
2 21
1 2 21
1
( )[cos ( sin ) ]/
whereAis the ratio of themasses A = M2/M1
EE
AA
2
02
224
1
( )cos
Conversation of energy
E0= E1+ E2
E0= M1v02/2 etc.
Conservation of momentum
M1v0 = M1v1cos1+ M2v2cos2
M1v1sin1+ M2v2sin2
Why is the binary collision modeladequate (ignore solid)?
Duration of collision is short(cf. vibrational timescale)
Energy transfer large (cfbinding energy of the atomto the solid)
Low energy ion s catter ing (LEIS)
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1-10 keV He+, Ne+ or Li+
Fixed scattering angle(usually as small aspossible or 90)
Compositional informationfrom ion energy losses
Surface structure determinationvia shadowing & blocking cones
Low energy ion s catter ing (LEIS)
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1-10 keV He+, Ne+ or Li+
Fixed scattering angle(usually as small aspossible or 90)
Compositional informationfrom ion energy losses
Surface structure determinationvia shadowing & blocking cones
Low energy ion scattering spectroscopy - elementidentification through scattered ion energy spectra
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109
Typical 1 keV He+LEIS spectrum
scattering angle 90o so
Note: peaks get closer as M2
increases- mass resolution best for largescattering angles and smallAvalues
E
E
A
A1
0
1
1
(O atom)
1 keV He+ions
Surface specificity & shadow cones
NB: shadow cone widths are close tointer-atomic spacing at low energies
Focussing effect at edge of cones
Several different energ y regim es of ISS
in addition to LEIS - Low energy (~500-5000 eV, He+, Ne+..) also have
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110
MEIS - Medium energy
HEIS - High energy
50-400 keV, H+, He+...
1-2 MeV, H+, He+...
At these high energies:
shadow cones much narrower
ions penetrate below surface layerShadow cone width (as characterised here by 5oimpact parameter) decreases with :-
increasing energy
decreasing ion mass (nuclear charge)decreasing scatterer atom mass (nuclear charge)
MEIS & HEIS are notintr ins ically
su r face speci f ic
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Mult ip le scat ter ing in LEIS - a sou rce of struc tura l information
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112
scattering from atomic chain
treat as succession of binary collisions
At grazing incidence skimming
trajectories lead to minimum andmaximum possible scatteringangles which are related to theatom spacing in the plane of
incidence
pseudo-singlescattering
pseudo-doublescattering
BUTneutralisation maysuppress scattered ion signalfrom these trajectories
Inf lu ence of charge exchange on m ult ip le scatter ing in LEIS
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113
Augerneutralisation
resonantchargeexchange(ionisation &neutralisation)
mechanisms
especially He+scattering- the longer the trajectoryclose to the surface, themore neutralisation
trajectory-dependentneutralisation probability
suppresses multiplescattering signal
especially Li+scattering -achieve chargeequilibrium whenclose to thesurface
final chargestate determinedby outgoingtrajectory only(point of
equilibrium loss)
no suppressionof multiplescattering signal
Newtonian scattering of a classical particle?
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0 30 60 90 120
0 30 60 90 120
and at the atomic scale .
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i .e. Life gets s imp ler if the total
scattering ang le is 180!!
E1
E0
=(A 1)2
(A + 1)2
NB:- Remember A is the ratio of the masses of the scattered & target atoms
Shadow ing & Block ing
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Block ing co ne formationshown by ion trajectoriesstarting from a point source(in the third layer). Note theblocking cones are broader.
Shadow ing coneformation for calculatedion trajectories at grazingincidence (here shown at
cthe critical angle)
i.e. top layer specific!
CAICISS(Coaxial Impact Col l is ion Ion Scatter ing Spectro sco py )
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(Coaxial Impact Col l is ion Ion Scatter ing Spectro sco py )
Conceived b y M. Aono et al. RIKEN, Japan
Pulsed ion beam
Beam chopping
and steering
Ion beam
Source (Neilson)
He or Ne
Sample
angle (polar/azi) Time of flight
MCP detector
Time of flight
(a)
(c)
(b)
(d)
Pulsed ion beam
Beam chopping
and steering
Ion beam
Source (Neilson)
He or Ne
Sample
angle (polar/azi) Time of flight
MCP detector
Time of flight
(a)
(c)
(b)
(d)
Pulsed ion beam
Beam chopping
and steering
Ion beam
Source (Neilson)
He or Ne
Sample
angle (polar/azi) Time of flight
MCP detector
Time of flight
(a)
(c)
(b)
(d)
CAICISS @ Warw ick
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Interaction o f H w ith Si (111) - (
3 x
3) - Ag
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Series of time-of-flight CAICISS spectra each showing twopeaks (Ag and Si) for (a) exposure to H*at R.T. and
(b) following the H*desorption sequence
CA ICISS o f Si (111) - ( 3 x 3) - Ag atom ic hydro gen (H*)
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Separation of ions and neutralsusing a synchronised pulsedvoltage.
At 2 keV the probability of ionneutralisation for sub-surface
scattering events is ~100%
Crystalline Ag and an Ag atom of the(3 x 3) structure have the same
neutralisation efficiency for He+ions.
Hence the intensity ratio in the Ag(ion) peak is ~0.25 implying that theAg clusters are 4 atomic layers(~7) high.
Medium energy ion scatter ing (MEIS)
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Surface relaxation by shadowing andblock ing
MEIS/HEIS - much narrower shadow cones - must use
specific incidence directions for surface specificity
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124
sub-surfaceshadowing(surface-specificsignal) incrystallographic
(channelling)directions
2 MeV He+scattering fromW(100)
surface peak
incidencedirection
Subsurface scattering
elastic +inelastic
Channell ing in MEIS
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MEIS - more precise structural informationfrom double-alignment experiments
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126
Measure blocking
curves of
elasticallyscattering ion flux(surface peak) as
function ofoutgoing direction -bulkand surfaceblocking dips aredisplaced for arelaxed surface
101 keV H+
ions from Ni(110)
incident ionshadowing
scatteredionblock ing
Analys is of MEIS spectra
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MBE grown & ion implanted samples
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Anneal ing a s ingle Sb dlayer : moni tor ing di f fus ion
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Difference spectra indicate Sb in lattice
sites.
Lattice site occupation high (~75-80%) evenafter 450C anneal.
At 640C non-lattice site Sb appears alongwith surface segregated material, althoughsubstitutional Sb remains at the same depthwith no apparent broadening.
By 800C very little sub-surface Sbremains and only a peak at the surfacecan be seen.
MEIS from an A l-Pd-Mn quasi-cry stal
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LEED pattern at 75 eV showingthe 5-fold icosahedral symmetryof a Al70Pd21Mn9quasi-crystal.
Azimuthal Angle (deg)
Inten
sity
(counts)
4200
3800
3400
3000
0 60 120 180
MEIS data showing local structureincluding 5-fold symmetry at 72intervals
Absolute scattering yields in MEIS - provide quantitativeinformation on the number of displaced atoms induced byadsorption
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131
adsorption
e.g.Cu(111)+SCH3pseudo-(100) reconstruction - howmany reconstructed Cu
layers?
blocking
curves
theory:
2-layerreconstruction
1-layerreconstruction
clean surface
Daresbury MEIS Facil i ty
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Scattering
chamber
Preparation
chamber
Electrostatic
lensCollimator
500kV power supply Accelerator tube Ion sourceplatform
Dipole magnetExperimental station
Secondary Ion Mass Spectrom etry (SIMS)
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Near Sur face Processes in SIMS
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Several pro cesses :- removal of the matrix & impurity incorporation:- implantation of the incident ion beam:- charge exchange & neutralisation:- Altered layer forms prior to steady-state erosion
Also, ionisation is influenced by the electronic state of the surface, sosecondary ion yields can vary by 102 - 103for different elements.
As dopant profiles in semiconductors get shallower, the need for thinneraltered layers increases, hence the need for SIMS at ultra-low energies
(i.e. < 250 eV)
Summary - surface struc ture determ ination by ion scat ter ing
Key underlying physics is the use of the shadow cone
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135
LEIS- shadow cone is wide (atomic separation), low sub-
surface penetrationmultiple scattering useful for interatomic determination insurface plane - but these trajectories may have enhancedneutralisation probability (especially for He+)
MEIS/HEIS- narrow shadow cones, strong sub-surfacepenetration possible in non-shadowing incident directions
absolute scattering yields equate to number of illuminatedlayers - so can give structural information from sub-surfaceshadowing
use of ingoing shadowing and outgoing blocking(double alignment) enhances specificity of method
SIMSerodes the surface and analyses the emitted ions todetermine the composition
Scann ing probe m icros copy (SPM) techniques:
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Scann ing probe m icros copy (SPM) techniques:
Scanning tun nel l ing microsc opy (STM)
Metal surfaces & atomic manipulation
Semiconductor surfaces & epitaxial growth
Atom ic force microsco py (AFM)
Conducting & non-conducting surfaces
Biological surfaces
Other app l icat ion s
Scanning ... force, magnetic, capacitance, electrochemical ... microscopy
Scanning p robe micro scopy (SPM)
Scanning Probe Microscopy
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Scanning p robe micro scopy (SPM)
Covers a range of imaging from several 100 m to 100 pm
Surfaces can be resolved with atomic resolution (STM & AFM)
Resolves structural features, steps, defects, adsorbatesin vacuum,air or liquid
Imp act of SPM
SPM has become an essential tool in nanoscience and nanotechnology
Local experiments on single atoms or molecules can be performed
Force measurements of single chemical bonds, biological systems oroptical spectra of single molecules can be performed
Local probe can manipulate materials on the atomic and molecular
scale - build artificial structures on the atomic scale
Introduction
Scanning Tunneling Microscope (STM) was invented by Gerd Binnig and
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Scanning Tunneling Microscope (STM) was invented by Gerd Binnig andHeinrich Rohrer at IBM Zurich in 1981 (Nobel Prize in Physics in 1986).
Binnig also invented the Atomic Force Microscope (AFM) at Stanford University,with Quate and Gerber, in 1986.
All other applications and techniques flow from these two designconcepts.
Th STM i l t i th t h ( i l t )
The Scanning Tunneling Microscope (STM)
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The STM is an electron microscope that uses a sharp (single atom)tip to attain atomic resolution images of the surface electron density
since you cant actually see atoms.
The STM is an electron microscope that uses a sharp (single atom)
The Scanning Tunneling Microscope (STM)
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The STM is an electron microscope that uses a sharp (single atom)tip to attain atomic resolution images of the surface electron density
since you cant actually see atoms.
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Si(111)(7x7) su rface recon stru ct io nSince you are measuring the electronic states, images of the same surface can vary!
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Filled states image 49 atom unit cell model for (7x7)
Si(111)(7x7) su rface recon stru ct io nSince you are measuring the electronic states, images of the same surface can vary!
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Filled states image High resolution image
BUT why not see the atomic positions with STM?
Pr incip le of scanning tunnel ling m icroscop y (STM)
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144
Bring conducting (usually W) tip to
within atomic dimensions of surface.
Measure current tunnelling throughvacuum gap between tip and surface - thisdepends exponentia lly on separat ion
Scan tip parallel to surface - currentwill vary (exponentially) with separation- either map the currentas a functionof position or - more usually - map theheight variations applied to the tip to
maintain constant tunnelling current
Atomic-scale images of the (filled orunfilled) electronic states at thesurface
unfilled
states
filled states
tip
surface
E
Scanning Tunnel l ing Microscopy (STM)
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Requirements:
Conducting substrate (metal, oxideor semiconductor)
Operates in vacuum or air (orsolution)
Ultra-high vacuum allows atomic
resolution Provides real-spaceinformation
Need good vibrational isolation (!)
Practical:
Sharp metal tip (W or Pt/Ir) is brought close to conducting substrateMotion of tip is controlled by 3 piezoelectric drives (x,y,z)
Bias voltage is applied between the substrate and tip
Quantum tunneling occurs and current flows between the two
V
x
y
z
substrate
computer
tip
displayset tunnellingvoltage
tunnellingCurrentamplifier
w
Scanning Tunnel l ing Microscopy (STM)
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Requirements:
Conducting substrate (metal, oxideor semiconductor)
Operates in vacuum or air (orsolution)
Ultra-high vacuum allows atomic
resolution Provides real-spaceinformation
Need good vibrational isolation (!)
Practical:
Sharp metal tip (W or Pt/Ir) is brought close to conducting substrateMotion of tip is controlled by 3 piezoelectric drives (x,y,z)
Bias voltage is applied between the substrate and tip
Quantum tunneling occurs and current flows between the two
V
x
y
z
substrate
computer
tip
displayset tunnellingvoltage
tunnellingCurrentamplifier
w
Quantum mechanical tunneling
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W
Tunnelling current, I ~ exp (-2kw)
where k = (2m)1/2/h , = work function
change in barr ier width o f 1 leads to x10 chang e in tunn el ing cu rrent
STM: basic pr inc iples
Treat sample and tip as metalsSimple 1D potential model; barrier width = w
Electron in state yn with energyEn lying between EF-eV and EF
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p p ; Enlying between EF eV and EFhas a chance to tunnel into thetip. The contribution to the tunnelcurrent is proportional to;
wkeon '22|)(| y
Total current I is proportional to
the number of states within theenergy interval, eV;
f
eVfn
E
EE
wkeonI '22|)(|~ y
For small V the summation can be written in terms of the local density of statesat the Fermi level
E
EnEn zEz
y
2|)(|
1),(
Hence current is proportional to wfwk
f eEVeEV 025.1'2 ),0(~),0(
mk
2'
Sample
tip
Z=0 Z=w
w
EF- eV
EF
i .e. tunnel cu rrent is d etermin ed by the LDOS of the s ample at the Fermi energy
STM modes of Operat ion
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lateraldistance
currentsmall w, largecurrent
lateraldistance
z-piezovoltage
Constant current-tunneling current is keptconstant by changing theheight of the tip and the z-piezo voltage is plottedversus lateral position. Mostcommon method.
Constant height- tip isscanned in x,y plane andremains at constantheight in the z-direction.Variation in tunneling
current is measured.Good for very flatsurfaces.
Calibrat ion o f t ip shapecare needed!(a good moto whenever
interpret in g SPM images!)
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How does the image
formed relate to whatyou are actuallylooking at?
STM imaging d if ferent mater ials
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Metals- valence electrons generally highly delocalised - strong effect
due to smearing out (Smoluchowski smoothing) - STM images of cleanmetals show very weak corrugations (< 0.1 ) - mainly above atoms.
Usually requires low temperatures for high resolution.
Semiconductors- valence electrons more strongly localised and directionalbetween atoms (covalent bonds) - STM images of clean semiconductorsshow strong corrugations (up to 1 or more) - protrusions especially abovedangling bonds
Insulators- cannot image with STM
Compounds & adsorbate-covered sur faces- atoms of different elementsmay appear quite different due to electronic effects. Some atoms may even
image as dips, not protrusions
Look again @ STM from Si(111)-(7x7) surface
typical STM image
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152Si(111)(7x7) structure
STM is anelectronicprobe, so for
surface structural applications thereare key problems:
Do the protrusions correspond toatomic positions?
Do you see all atoms in the same
way? (chemical effects?)Are the relative heights and lateralpositions reliable (quantitative)?
NB: valence states at the surfaceof a covalently-bonded solid arelocalised, so STM shows largecorrugations
STM from elemental metal su rfaces
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153
Generally corrugations are veryweak but protrusions are abovesurface atoms - image appearanceessentially independent of biasvoltage - but best contrast at lowvoltage, very close tip-sample
separation
Strong bias voltage effects (and
hence misleading images) do occurin special cases - e.g. bcc (110) -see simulations on W(110)
STM from an adsorbate on a metal - C on Ni(100)
Isolated C
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154
Ni(100)(2x2)-C p4gclock reconstruction
low coverage
clock
atoms imagedas deep dips
STM from adsorbates on Pt(111) - sim ulations
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155P. Sautet, Surf. Sci. 374 (1997) 406
Added row structure formed by O reaction with Cu(110)
O atoms
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156
153 x 128 STM image
Cu(110)-(2x1)-O
outermost layer Cuatoms
lower layer(s) Cuatoms
Cu atoms are removedfrom the atomic steps to
h dd d
Added row structure formed by O reaction with Cu(110)
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157
153 x 128 STM image
Cu-O-Cu-O chains
are added to thesurface and movetogether
235 x 256 STM images -increasing O2exposure
create the added rows -so the steps recede as
the added rows grow
F. Besenb acher, Rep. Prog . Phys .
59 (1996) 1737
Clean metal su rfaces - Cu(111)
Low temperature STM (>10K)
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Low temperature STM (>10K)
Observe Friedel oscillations
Molecu lar im aging w ith STM
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Cyclopentene molecules on aAg(110) surface at 80K
Most famous STM imageSeptember 28th1989
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Xe atoms on a Ni(110) surface at 4K
Positioning Atoms with an STM
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D.M. Eigler & E.K. Schweizer, Nature 344, 534 (1990)
Fe atoms on the surface o f Cu (111) at 10K
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M.F. Crommie, C.P. Lutz, D.M. Eigler, Science 262(1993) 218
Molecu lar manipu lat ion
w ith STM
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P. Zeppenfeld, C. P. Lutz and D. M. Eigler, Ultramicroscopy 4244, 128 (1992)
In-si tu STM-MBE system
RHEED
STM
MBE
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Ga/In As2/As4
electron gun
pattern
GaAs
in-situ monitoring of growth by reflection highenergy electron diffraction (RHEED)
atomic scale snapshots of growth by scanningtunneling microscopy (STM)- 1 cm2substrates
- rapid quenching
MBE
Ga/In
- Ga, In, As, Sb, Si solid sources- N plasma source
- atomic H source
Quench grownsample in vacuum
As2/As4
GaAs (001)
STM imaging o f MBE grown GaAs(110) su rface
(110) surface is non-polar and there is no surface reconstruction
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0.2 nm
0.57 nm
0.4 nm
Top view
Side View
unit cell
Filled states STM image of GaAs(110)- lone pair on surface As atoms
200 nm x 200 nm
Example of vol tage dependent imaging
Non-polar GaAs(110) surface
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+1.9 V -1.9 Vsample bias
Plan view of surface
(1x1) unit cell
Atom select ive imaging:
Charge transfer from Ga to As atoms in surface Ga dangling bonds empty, As dangling bonds full
Unoccupied state density - Ga (empty states imaging)
Occupied state density - As (filled states imaging)
InSb(001)-c (4x4) surface
Same symmetry and periodicity as for
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y y yGaAs(001)c(4x4) surface
High resolution filled states image(bias = -2.5 V, tunnel current = 1 nA)
Improved image resolution relative to GaAs.InSb lat t ice constant > GaAs lat t ice cons tant
10
GaAs(001)c(4x4)
Sem iconductor Heteroepi taxy
Optoelectronic devices requirecombinations of different materialswith different band gaps
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7
low lattice mismatch (typically < 1%)
AlAs/GaAs, CdTe/InSb, InAs/GaSb
high lattice mismatch (typically > 3%)
Ge/Si, InAs/GaAs, InSb/GaAs
stra in
dis locat ions
growth mod e changes
% misfit between two different materials:
= (aeas)/asx 100
ae= lattice parameter of epilayer
as= lattice parameter of substrate
with different band gaps
Semiconductor heteroepitaxialgrowth allows band gap engineering
Relative lattice constants of differentmaterials play important role ingrowth behaviour and quality
STM evidence for 2D Layer-By-Layer growth mode
GaAs(111)A homoepitaxy - 2ML GaAs growth
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0 0.5 1 1.5 2 2.5
Surfacestep
density
Coverage (ML)
Oscillation in step density correlates withmeasured RHEED intensity oscillations
0.5 ML
0.25 ML
0.75 ML
1.0 ML
1.25 ML
1.5 ML
1.75 ML
2.0 ML 1000
Direct evidence for 2D island nucleation, coalescenceand completion of each layer
Surface step density measured from STM images
Effects of Lat t ice Mismatch on grow th mode
E.g.InAs growth on different low index GaAs substrates (= 0.0756)
(001) (110) (111)A
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7
(001) (110) (111)A
GaAs(001) - 2.5 ML InAs
Stranski-Krastanovgrowthstrain relief - 3D islands(Quantum dots)
GaAs(110) and (111)A - 5 ML InAs
Strain relief - dislocations
2D layer by layer growth
Plan view STM images
Stranski -Krastanov g row th & QD formation w ith STM
InAs growth on GaAs(001):- 7.2% lattice mismatch
( )
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(a) (b)
(c) (d)
(a) 1.4 ML: InAs 2D wetting layer
Different grey levels correspondto step edges (0.3nm) of 2Dwetting layer
(b) 1.7 ML: Initial stages of 3Disland formation. Coexistence of
small and large 3D islandsrandomly nucleated on surface
(c) 2.0 ML: Evolution of 3D islandsand rapid increase in numberdensity
(d) 2.7 ML: Coalescence of 3Dislands into larger 3D islands
Shape of quantum dots f rom high reso lu t ion STM imaging
InAs/GaAs(001)
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Atomic scale STM imaging reveals crystallographic facets and the shapes of the 3Dislands
Number of facets formed, e.g. {137}, {111}, {110} Shape and island aspect ratio depend on growth conditions
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Tip-Samp le Interact ions in AFM
Repulsive:
Several different forces contribute to cantilever deflection
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- short distances (few Angstroms)
-due to overlap of electron clouds associatedwith atoms in tip and sample
contact regime
Contact AFM mode
- tip makes soft physical contact with sample (forces ~ 10-8- 10-6N)- repulsive forces cause cantilever to bend to accommodate topographic changes
- stiff cantilevers allows nano-patterning via surface deformations
Attractive:
- long distances (10-100 Angstroms)- long range van der Waals interaction
non-contact regime
Non-contact AFM mode- cantilever vibrates near sample surface close to its resonant frequency- detect change in frequency or amplitude of tip oscillation- minimal contact and low forces (~10-12N) allows study of soft samples
Examples of AFM images from Sem iconduc tors
InAs/GaAsdensity & distributionof quantum dots grown by MBE
Si/Ge heterostructure (30% Ge)
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of quantum dots grown by MBE
0
10
20
30
40
10 20 30 40 50 60
Provides information on large area surface morphology on near atomic scale
UHV-AFM imageSi(111)(7x7) surface
(Scan size:13nm x 13nm, Cantilever: PiezoResistive type, Frequency shift:-33Hz)
CVD (550C)
Roughness (rms)4.200 nm
Cross-hatch pattern dueto misfit dislocations
MBE (550C)
Roughness (rms)15.856 nm
High reso lut ion bio log ical imaging with AFM
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"Nano-Alps" AFM image of a monolayer ofa bacterial surface-layer protein (Bacillus
sphaericus CCM2177).
The layer exhibits square lattice symmetrywith a lattice constant of 13.1nm. The 50nm image was obtained in contact mode
under water.
AFM reconstruction based on averaging over100 plaque particles each for the luminal and
cytoplasmic face of an asymmetric unitmembrane (AUM) of urine bladder epithelium.
The luminal side (left) of particles protrudes
about 6.5nm relative to the lipid bilayer and thecytoplasmic face (right) at only 0.5nm; hence thename ''asymmetric unit membrane.
Averages are based on contact mode AFMimaging in buffer solution. These particles form2-D crystalline plaques in situ. Centre-to-centre
distance is 16nm
Why, how, what surfaces? Surface sensitivity &ifi it
Course Summary: the topics
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177
specificity.
Surface structures - 2D symmetry & phenomenology Diffraction from surfaces, reciprocal net, electrondiffraction (LEED) and RHEED
Chemical structure of surface determination usingelectron and photoelectron spectroscopy - XPS & AES -including chemical state specificity used for structuraldetermination e.g. photoelectron diffraction
Ion scattering methods of surface structuredetermination (LEIS, MEIS, SIMS) Scanning probe microscopySTM and AFM
Richard Feynman - 1959
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