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V i s i o n a r y S e n s o r T e c h n o l o g y
CDG025DH i g h P r e c i s i o n V a c u u m G a u g e
F o c u s e d o n i n d u s t r i a l i z e d a p p l i c a t i o n s
CDG025D Vacuum Gauge
The INFICON CDG025D Capacitance Diaphragm Gauge line is designed for stable long time performance in harsh manu-facturing environments. The corrosion resistant ultra-pure ceramic sensor provides superior span stability over many years paired with state of the art zero stability. This bonded ceramic structure provides an unprecedented temperature stability over millions of pressure cycles, including atmospheric bursts. Advanced electronics offer the user a wide choice of suitable filters yielding solutions for all applications. A unique sensor shield (patents granted) protects the gauge from undesired process byproducts. For advanced processes, a total Alumina coating immunizes the product against chemical attack.
Typical applications• Load Lock • PVD, CVD, Etch• Puller, ovens • Oxidation• Industrial • Sterilization• Analytical • Quality control, reference vacuum
CDG025D Vacuum Gauge
The INFICON CDG025D Capacitance Diaphragm Gauge line is designed for stable long time performance in harsh manu-facturing environments. The corrosion resistant ultra-pure ceramic sensor provides superior span stability over many years paired with state of the art zero stability. This bonded ceramic structure provides an unprecedented temperature stability over millions of pressure cycles, including atmospheric bursts. Advanced electronics offer the user a wide choice of suitable filters yielding solutions for all applications. A unique sensor shield (patents granted) protects the gauge from undesired process byproducts. For advanced processes, a total Alumina coating immunizes the product against chemical attack.
Typical applications• Load Lock • PVD, CVD, Etch• Puller, ovens • Oxidation• Industrial • Sterilization• Analytical • Quality control, reference vacuum
Level 3 Protective coating Corrosion protection
Level 1 Baffle Stops coating, particles
Level 2 Shield Protects diaphragm
Gauge protection for increased lifetime
X3 version
all gauges
Digital signal processing
dynamic
slow
fast
+
Digital filtersSetable output P
U
Uout = a • p + b (a = slope / b = off-set)
gainstandard
offset
time(years)
10
Longtime full scale stability
measured at PTB
F.S
. sta
bilit
y
Measuring points of one gauge
Ceramic sensortechnology offers superior long-term stability.
Fully ceramic sensor
Bonded ceramic structure combined with digital signal processing provides superior measurement performance.
Indi
cate
d pr
essu
re(m
bar)
True pressure
CDG sensor technologyOther typical sensor technologies
(mbar)
Gas type independence
interface i/o
• Classic analog signal 0 … 10V• Wide range power supply• Zero adjust, push button • 2 individual setpoints• Status LED
CDG working principle
p
p
p
p
Δd
ΔCΔC
Direct pressure measurement by diaphragm
Δd ~ p
Capacitance readout
1ΔC
~ p
Electrode Diaphragmp = pressure
Time (min)
Sig
nal
ΔT heat ΔT heat
One material architectureassures excellent temperature stability of zero and span.
Superb compensation of ambient temperature change Standard sensor INFICON ceramic sensor
Temperature °C
typical performance
m V
Temperature coefficient
0 50
Span stabilityAny mounting orientation
CDG025D temperature CompensateD aDVantaGes at a GLanCe
• UnprecedentedFullScalestability• Environmentalindependence• Adaptablesensorintegration
Measurement ranges
0.1
1
10
100
1000
Full Scale (Torr)
0.00001 0.0001 0.001 0.01 0.1 1 10 100 1000 Pressure (Torr)
0.2% Accuracy
Temperature coefficient
In-situ architectureassures an excellent temperature stability of zero and span.
50
25
5
°C
Temperature coefficient/accuracy
inficon.com [email protected] Due to our continuing program of product improvements, specifications are subject to change without notice.
tibc20e1 ©2012 INFICON
ExcEllEnt custoMEr support is a coMMitMEnt
INFICON provides a global network of sales and service centers. These centers are staffed with local service and application experts who can assist you in choosing the best solution for your individual product application and provide fast support if service is needed.
Asia and Pacifica
CHINAINFICON Ltd.BeijingPhone: +86.10.6590.0164E-mail: [email protected]
INDIAINFICON PVT. Ltd.PunePhone: +91. 20. 4120. 4854E-mail: [email protected]
JAPANINFICON Co. Ltd.Yokohama-shi, Kanagawa-ken Phone: +81.45.471.3328E-mail: [email protected]
KOREAINFICON Ltd.Kyunggi-doPhone: +82.31.783.2942E-mail: [email protected]
SINGAPORE and AUSTRALIAINFICON PTE Ltd.SingaporePhone: +65.6631.0300E-mail: [email protected]
TAIWANINFICON Co. Ltd.Chupei CityPhone: +886.3.552.5828E-mail: [email protected]
Americas
INFICON Inc.East Syracuse, NYPhone: +1.315.434.1100E-mail: [email protected]
Europe, Middle East and Africa
INFICON GmbHColognePhone: +49.221.567.881.00E-mail: [email protected]
