Magic Crystal Technology Company

Calibration Specimens & Measuring Standards Product Catalogue:calibration specimens for SEM, FIB, EDS / WDS and

optical microscopes

Magic Crystal Technology Co.

2013-7-1

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目錄

1. SEM Calibration Specimens .................................................................................................................................. 3

1.1 Scanning Electron Microscopy Calibration .................................................................................................... 3

1.2 Back Scattered and Secondary Electron Test Specimens ............................................................................... 7

1.3 Mounts and Adapters for SEM Calibration .................................................................................................... 8

2. FIB and Ion Beam Sputter Standards .................................................................................................................... 9

3. Light Microscope Calibration .............................................................................................................................. 10

3.1 Micro-Ruler MR-1, Traceable ....................................................................................................................... 10

3.2 Linear Glass Scales ....................................................................................................................................... 11

3.3 England Finder - S7 Slide .............................................................................................................................. 13

If you need more information, please feel free to contact us! Our company boasts products of reliable

quality and superior performance as well as a capability to entertain various individual requirements. We

warmly welcome your patronage and will serve our clients both at home and abroad with products of

superior quality and excellent service geared to the trend of further development as always.

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1. SEM Calibration Specimens

1.1 Scanning Electron Microscopy Calibration

PELCO® XCS EDS Calibration Standards

The PELCO® XCS EDS calibration standards are practical, high quality and compact EDS calibration

standards using a standard type 12.7mm (1/2") pin stub as retainer. The small size of the pin stub

allows for using the PELCO® XCS calibration standard alongside specimens on readily available multi

pin stub holders. This enables quick in-situ calibration and regular performance tests of the EDS

system, Back Scattered Electron Detector and light element detection performance of the EDS

detector. The pure elements and compounds are mounted in the 12.7mm (1/2") stubs using a highly

conductive silver epoxy. All PELCO® XCS calibration standards are carbon coated for improved

conductivity. The PELCO® XCS EDS calibration standards are available in 7 fixed configurations:

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PELCO® XCS-5 is intended for EDS calibration and contains ANSI 316 stainless steel, SiO2, Mn, B, C

and a 200µm Cu aperture grid in a 12.7mm aluminum pin stub.

PELCO® XCS-6 is intended for EDS calibration and contains ANSI 316 stainless steel, SiO2, Mn, B, C

and a 200µm Cu mesh grid in a 12.7mm aluminum pin stub.

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PELCO® XCS-7 is intended for BSD response curve calibration for GSR and contains, Ge, Nb, Au, C,

Si and a 200µm Cu aperture grid in a 12.7mm aluminum pin stub.

PELCO® XCS-22 is intended for BSD response curve calibration for GSR and contains, Ge, Rh, Au, C,

Si, Co and a 200µm Cu aperture grid in a 12.7mm aluminum stub. Compatible with Oxford

Instruments EDS Systems.

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PELCO® XCS-8 is intended for EDS calibration and contains ANSI 316 stainless steel, SiO2, Mn, BN,

C and a 200µm Cu aperture in a 12.7mm aluminum pin stub.

PELCO® XCS-10 is intended for BSD response curve calibration and contains C, Si, Ti, Co, Ge, Nb,

Sn, Ho, Ir, Bi and a 200µm Cu aperture in a 12.7mm aluminum pin stub.

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PELCO® XCS-12 is intended for checking light element analysis performance and contains CaB6,

SiC, CrN, Fe2O3, CaF2 and a 200µm Cu aperture in a 12.7mm aluminum pin stub.

Each PELCO® XCS EDS X-ray calibration standard comes with a certificate issued by the

manufacturer stating the purity and origin of the elements, compounds or alloys. The ANSI 316

stainless steel is NBS SRM 1155 (standard reference material) which is traceable to NIST. The other

elements, compounds or alloys are not NIST traceable.

Prod # Description

659-5 PELCO® XCS-5 EDS Calibration Standard with SS316, SiO2, Mn, B, C and

200µm aperture ,

659-6 PELCO® XCS-6 EDS Calibration Standard with SS316, SiO2, Mn, B, C and Cu

grid ,

659-7 PELCO® XCS-7 BSD Response Calibration Standard with Ge, Nb, Au, C, Si and

200µm aperture

659-22 PELCO® XCS-22 BSD Response Calibration Standard with Ge, Rh, Au, C, Si,

Cu and 200µm aperture. Compatible with Oxford Instruments EDS Systems.

659-8 PELCO® XCS-8 EDS Calibration Standard with SS316, SiO2, Mn, BN, C and

200µm aperture

659-10 PELCO® XCS-10 BSD Response Calibration with C, Si, Ti, Co, Ge, Nb, Sn, Ho,

Ir, Bi and 200µm aperture

659-12 PELCO® XCS-12 EDS Performance Standard with CaB6, SiC, CrN, Fe2O3,

CaF2 and 200µm aperture

1.2 Back Scattered and Secondary Electron Test Specimens

BSE Atomic Reference Specimen

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When equipped with a back-scattered electron detector, an electron microscope has the capability to

produce images in which the contrast is controlled by differences in atomic number across the

specimen.

Three reference specimens are now available that are suitable for testing the atomic number contrast

performance. Each of the reference specimens consists of two high purity elements that have an

atomic number difference of 1. They are in the form of a wire of the low Z element embedded in a

matrix of the high Z element.

The specimens are available as a single mount either 3mm or 5mm diameter or can be incorporated

into a block of standards.

Prod # Description

652 BSE Atomic Reference, Nickel (Z-28) - Copper (Z-29)

653 BSE Atomic Reference, Palladium (Z-46) - Silver (Z-47)

654 BSE Atomic Reference, Platinum (Z-78) - Gold (Z-79)

1.3 Mounts and Adapters for SEM Calibration

SEM Specimen mounts selection for Calibration Listed below are the available SEM specimen mounts for SEM test specimens and calibration

standards. We have mounts available for most SEMs on the market which are listed in the table

as A-R. If a SEM specimen selection is available with a test specimen or calibration standard

(designed by the letter A-R after the product number), you can select the mount from the table

below. The test specimen of calibration standard is mounted on the selected SEM specimen

mounts with conductive cement.

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2. FIB and Ion Beam Sputter Standards

Ion Sputter Standards manufactured to the highest precision for calibrating the sputtering rate of

sputter ion guns. Thin films of Silicon Dioxide (SiO2), Silicon Nitride (Si3N4), Tantalum Pentoxide

(Ta2O5) and Nickel/Chromium (NiCr-3) are available, to calibrate the sputtering rate for different

materials.

Silicon Dioxide (SiO2)

Silicon wafers with thin films of silicon dioxide are available in thicknesses of 23, 50, 97 and 102.9nm.

The oxide films are grown with a wet oxygen process, which insures a higher degree of uniformity

than available using other processes. The wafers are 4" in diameter.

Prod # Description

612-11 Silicon Dioxide Ion Sputter Calibration Standard, SiO2 (23 ± 0.23 nm) on 4" Si wafer

612-12 Silicon Dioxide Ion Sputter Calibration Standard, SiO2 (50 ± 2.5 nm) on 4" Si wafer

612-13 Silicon Dioxide Ion Sputter Calibration Standard, SiO2 (97 ± 3.8 nm) on 4" Si wafer

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612-14 Silicon Dioxide Ion Sputter Calibration Standard, SiO2 (102.9 ± 2.5 nm) on 4" Si wafer

Silicon Nitride (Si3N4)

100nm Silicon Nitride (CVD) films deposited on a ~1 x 3cm piece of silicon wafer.

Prod # Description

612-20 Silicon Nitride Ion Sputter Calibration Standard, Si3N4 on 1x3cm Si

Tantalum Pentoxide (Ta2O5)

Films of tantalum pentoxide (~100nm) are anodically grown on 0.5mm thick tantalum foil. The

standards are ~37x37mm. The thickness accuracy is ~5%.

Prod # Description

612-30 Tantalum Pentoxide Ion Sputter Calibration Standard, Ta2O5 (~100nm) on 37x37mm Ta foil

Nickel / Chromium

Consisting of 12 alternating layers: 6 layers of Cr (~53nm) and 6 layers of Ni (~64nm) for a total

thickness of ~700nm with a maximum variation across the 75mm production wafer of ±2%.

Standard is on a 1x3cm section of a polished silicon wafer. The mass density of Cr and Ni was

measured using electron beam excitation and measuring characteristic X-ray intensities.

Prod # Description

612-40 Nickel / Chromium Ion Sputter Calibration Standard, Ni / Cr (12 layers) on 1x3cm Si

3. Light Microscope Calibration

3.1 Micro-Ruler MR-1, Traceable

The Micro-Ruler MR-1 is manufactured with anti-reflective chromium (30nm Cr2O3 over 70nm Cr)

on soda-lime glass using highly accurate semiconductor manufacturing equipment. The overall scale

extends over 150mm with 0.01mm increments with all labeling in mm. The ruler is designed to be

viewed from either side as the markings are both right reading and mirror images.

The overall size is 25mm x 180mm x 3mm thick, the linear expansion coefficient is 9 x 10-6ppm/°C.

Over its full 150mm length, the ruler will predictably change dimensions by 1.35µm/°C. The circles

(diameter) and square boxes (side length) are 0.02, 0.05, 0.10, 0.50, 1.00, 2.00 and 5.00 mm. They

are ideal to measure magnification simultaneously in X and Y directions or to determine image

distortions such as skew, pincushion, barreling or other non-linearities.

The measurement uncertainty (accuracy) is ± 0.5µm over 0-10mm and ± 2.5µm over the entire

150mm length as measured by the National Physical Laboratory (NPL) in the UK. NPL is the NIST

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counterpart in the UK. The Geller MicroAnalytical Laboratory certification is made under ISO-17025

accreditation. The MR-1 is offered as a certified reference material (a traceable standard),

recertification is recommended in 5 year intervals. See ordering information below for recertification

service. Measurements should only by made by using pitch measurements, this is the distance

between repeating parallel lines using either center-to-center or side-to-side spacing.

Prod # Description

6085 Micro-ruler MR-1, NPL traceable

6085-70 Recertification and Clean, MR-1

3.2 Linear Glass Scales

For measurements and calibration of microscope stages and instruments:

#2280-35 50mm Micrometer Scale

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#2280-36 150mm Micrometer Scale

with storage box

#2280-36 magnified section of scale

0.1mm, 0.5mm, 1mm and 0.5cm

each cm is marked with a numeral

Hard wearing scales with vacuum deposited chrome on substantial glass substrates. Parallax free

readings. Available in 50 and 150mm length. The 50mm scale is on a glass plate of 75x75x3mm and

is supplied in a plastic box with a size of 165x165x25mm. Divisions are 0.1mm. The 150mm scales

are available with either 0.1mm or 1mm divisions and have a glass substrate size of 180x30x6mm

and are supplied in a wooden box with a size of 250x100x40mm. A UKAS certificate is optionally

available for these glass scale at the time of purchase. Recertification or certification after purchase

is not available.

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Prod # Description

2280-35 50mm Micrometer Scale, 0.1mm divisions

2280-36 150mm Micrometer Scale, 0.1mm divisions

2280-37 150mm Micrometer Scale, 1mm divisions

2280-66 UKAS Certificate for Linear Glass Scales, Traceable to UKAS Standard

3.3 England Finder - S7 Slide

Locator and Calibration Slide

Progressively enlarged view of slide surface

X (A through Z, excluding I) Y (1 through 75), note K34 to right.

The England Finder is a glass slide marked over the top surface in a way that a referenced position

can be directly read relative to the locating edges.

All England Finders produced by Graticules for over 40 years are identical. The purpose of the finder

is to give the microscopist an easy method of recording the position of a particular field of interest,

so that the same position can be re-located at a later date, or by another person in another

laboratory, or when using any other England Finder on any other microscope.

The location of the arrows is identical for all England Finder slides. Mark a label on the left hand side

of the specimen slide, indicating the orientation to be repeated. By replacing the specimen slide with

the England Finder, taking care not to disturb the position, the feature of interest can be noted. The

feature can also be re-located at another place or time by reversing the procedure. Over 1,800

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positions on a 76 x 26mm slide can be accurately located. Slide thickness is 1.35mm ±0.05mm.

Nominal line width is 0.025mm.

Prod # Description

2280-50 England Finder S7 Slide

We will supply more if you need further information. Thanks! Our company boasts products of reliable

quality and superior performance as well as a capability to entertain various individual requirements. We

warmly welcome your patronage and will serve our clients both at home and abroad with products of

superior quality and excellent service geared to the trend of further development as always.