C19 POD E · 2009. 10. 30. · C19 Bell Jar System 6 Leybold Vacuum Full Line Catalog 2005 High Vacuum Experimentation Systems Technical Data Lateral high vacuum connection flange

vacuum

UNIVEXHigh Vacuum Experimentation SystemsUNIVEX 300, UNIVEX 450UNIVEX 350, UNIVEX 450 BSpecial plants

C19

184.01.02Excerpt from theLeybold Vacuum Full Line Catalog 2005Product Section C19Edition May 2005

C19

Contents

GeneralGeneral . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.02

Applications and Accessories / Process Components . . . . . . . . . . . C19.03

ProductsBell Jar System

UNIVEX 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.04

UNIVEX 450 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.08

Door System

UNIVEX 350 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.12

AccessoriesStandard Accessories for UNIVEX 300, 350, 450 and 450 B . . . . . . .C19.16

Components

for Glow Discharge Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.18

for Thermal Evaporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.20

for Electron-Beam Evaporation . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.23

for High Rate Sputtering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.24

for Film Thickness Measurements . . . . . . . . . . . . . . . . . . . . . . . . .C19.25

MiscellaneousSpecial Units

UNIVEX 450 B (Chamber Systems) . . . . . . . . . . . . . . . . . . . . . . .C19.26

UNIVEX 450 for Daktyloscopy . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.27

UNIVEX 450 C, Test Systems with a Vacuum Chamber . . . . . . . .C19.28

Leybold Vacuum Full Line Catalog 20052

High Vacuum Experimentation Systems

GeneralThe UNIVEX multi-purpose experimentation systems were developed by Leybold for applications in research and development, as well as for settingup pilot production systems.

The range of applications for thesesystems covers primarily vacuumcoating as well as experiments invacuum process engineering.

The multi-purpose experimentationsystems from Leybold are based ona modern modular concept. The highvacuum pumps are installed horizon-tally at the level of the base plate orthe vacuum chamber.

Automatic Pressure

ControlVarious processes require a constantpressure in the UNIVEX vacuumchamber. For this purpose Leyboldoffers a wide range of differentpressure or flow control systems.

Special designs which aremanufactured according tocustomer’s specifications areavailable upon request.

Special Accessories for

UNIVEX 300, 350, 450

and 450 BBesides standard process components we can also supplyinstallations according to customersrequirements, for example for:

� Vacuum soldering experiments

� Metallurgical experiments

� Thermal conduction experiments

� Diffusion experiments

� Dactyloscopy

Leybold Vacuum Full Line Catalog 2005 C19

General High Vacuum Experimentation Systems

3

Application and Accessories

Passive components

Sensor technology

Opto-electronics

Tribology

Soldering

Dactyloscopy

Glove box applications

Special applications

Thermal conduction experiments

UNIVEX 3

00

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UNIVEX 4

50 B

Special

plants

Accessories / Process Components

Page

C19.06 + 10

C19.14 + 26

C19.03

C19.03

C19.02

C19.21

C19.25

C19.02

C19.18

C19.20

C19.23

C19.24

C19.24

UNIVEX 4

50

UNIVEX 3

50

Standard accessories

Base plate and bell jar

Vacuum chamber with door

Auxiliary operation

Substrate holder

Substrate heater

Gas admission

Process equipment

Shutters

Thin film measurement

Sources

Custom installations

Glow discharge cleaning

Thermal evaporation

Electron-beam evaporation

DC high rate sputtering

RF high rate sputtering

Applications Bell jar system Door system

Substrate HeaterFor the purpose of heating substrates, Leybold offers a variety ofheating facilities (radiation heaters, heaters with quartz lamps,for example). These systems may becombined with different temperaturecontrollers.

Special designs which are manufactured according to customer’s specifications are available upon request.

Cooling and

Heating SystemsSpecial experiments require that thetemperature of the samples be maintained constant within a widetemperature range for the setpoint.

For this Leybold delivers uponrequest cooling/ heating facilities withLN2 as the refrigerant and an electricheater, complete with temperaturecontroller.

Special designs which are manufactured according to customer’s specifications are alsoavailable upon request.

Substrate HoldersUpon request Leybold is able to sup-ply substrate holders according tocustomer’s specifications.

Substrate holders with planetary gearfor the UNIVEX 450 and UNIVEX 450 B are available upon request.

C19

Bell Jar System

UNIVEX 300

Table-Top System with

300 mm dia. Vacuum

Chamber

Advantages to the User� Modular system design

� Any kind of process componentmay be installed

� Process components may beretrofitted without problems

� Freely accessible vacuum chamber

� Freely accessible base plate

� Very simple to operate and use

� Pump system adapted to the individual process

Typical Applications� Vacuum coating in research and

development

� Special experiments

Basic Unit� The pump system and the

electrical supply system are housed in a 19" rack cabinet

� Moreover, the 19" cabinet providesspace (max. 6 height units) for avacuum gauge and a thicknessmeasuring instrument as well aspower supply units for the processcomponents

� The basic unit may be placed on abench top

Vacuum Chamber� The base plate is attached to the

lateral intake port of the basic unit

� Either a vacuum chamber made ofstainless steel or glass may beplaced on the base plate

Pump System� The standard pumping equipment

comprises a TRIVAC D 8 Btwo-stage rotary vane pump and aTURBOVAC 151 turbomolecularpump

� For processes which developincreased quantities of gas orwhich require low operating pressures, the TURBOVAC 361may be built-in

� For processes which involve pumping of aggressive media, abarrier gas version of the turbomolecular pump and a rotaryvane pump with a filling of specialoil may be supplied

� For especially sensitive processesalso a dry compressing vacuumpump like the EcoDry M may beused as the backing pump

Vacuum Measurement� Depending on the type of

application, a combination vacu-um gauge operating according tothe cold cathode or hot cathodeprinciple may be installed



UNIVEX 300, typical arrangement with stainless steel bell jar and process components


Bell Jar System High Vacuum Experimentation Systems

5

486 = 19"

UNIVEX 300LEYBOLD

1040

803 = 18 HE

928

61

Ø 300

398

462

620

566304

280

269

Dimensional drawing for the UNIVEX 300 with base plate and bell jar

Technical Data UNIVEX 300Standard Special

High vacuum pump

Pumping speed for N2 l x s-1

Backing pump / nominal pumping speed

Supply unit for high vacuum pump

Control

High vacuum connection flange DN

Electrical connection

Cooling water connection;

DN 10 hose bar

Cooling water consumption l x h-1

Weight kg

TURBOVAC 151 TURBOVAC 361

145 345

TRIVAC D 8 B / 9.7 m3 x h-1 TRIVAC D 8 B / 9.7 m3 x h-1

TURBOTRONIK NT 20 TURBOTRONIK NT 20

Power supply with main switch plug-in Power supply with main switch plug-in

100 ISO-F, lateral 100 ISO-F, lateral

230 V, 50 Hz, max. 16 A 1) 230 V, 50 Hz, max. 16 A 1)

4 to 7 4 to 7

50 50

130 130

Ordering Information UNIVEX 300Standard Special

Basic unit

1) Other voltages and frequencies upon request

Part No. 030 60 upon request

C19

Bell Jar System



Technical DataLateral high vacuum

connection flange DN

Dimensions (H x dia.) mm

Installation holes mm

Lateral connections DN

Weight kg

100 ISO-K

60 x 350

34.5 dia. (13 x)

2 x 10 KF, 1 x 40 KF

19

Ordering InformationBase plate, stainless steel

120

170Height = 14

230

30° 15°DN 40 KF

DN 10 KF

DN 10 KFDN 100 ISO-K

Dimensional drawing for the base plate on theUNIVEX 300

Special Accessories for UNIVEX 300

Stainless Steel Base Plate

Technical Data350 x 300

200

FPM

5.6

Ordering InformationBell jar, Pyrex glass Part No. 030 10 1)

350

341300

373

Dimensional drawing for the glass bell jar withimplosion protection

Pyrex Glass Bell Jar (Vacuum Chamber)

1) With punched steel cover for implosion protection


300

FPM

9.6

Ordering InformationBell jar, stainless steel Part No. 030 12 1)

321

380

190

Drawn offsetby 90°

160

10

Dimensional drawing for the stainless steel bell jar

Stainless Steel Bell Jar (Vacuum Chamber)

1) With DN 100 viewing window and 2 carrying handles; hole at the top (34.5 mm dia.)

Base Plate

Base Plate

Bel l Jar

Bel l Jar

Bel l Jar

Bel l Jar


Height, cylindrical section mm

Seal

Weight kg

Part No. 030 61



Seal

Weight kg



7

Notes

C19

Bell Jar System

UNIVEX 450

Cabinet Housed System

with 450 mm dia. Vacuum

Chamber




� Freely accessible vacuum chamber


� Very simple to operate and use



development

� Pre-production trials

� Dactyloscopy


Basic Unit� The pump system and the

electrical supply system are housed in the UNIVEX 450 cabinet

� Moreover, the 19" cabinet providesspace (max. 20 height units) for avacuum gauge and a thicknessmeasuring instrument as well aspower supply units for the processcomponents


lateral intake port of the basic unit

� A vacuum chamber made of stainless steel may be placed onthis base plate

� A water-cooled vacuum chambercan also be supplied

� The vacuum chamber is moved bythe hoist attached to the basic unit


comprises a TRIVAC D 40 B two-stage rotary vane pump and aTURBOVAC 1000 turbomolecularpump

� For processes which developincreased quantities of gas orwhich require low operating pressures, the UNIVEX 450 canalso be equipped with cryo pumps




application, a combination vacu-um gauge operating according tothe cold cathode or hot cathodeprinciple may be installed



UNIVEX 450, with turbomolecular pump system and various installations



9

1260

1606

60°

1835

2058

1040

500

404

486

454 870

1690

Dimensional drawing for the UNIVEX 450; with base plate, bell jar and hoist


High vacuum pump




Control

Built-in electropneumatic valves




DN 10 hose bar


Compressed air connection, DN 10 bar

Weight kg

TURBOVAC 1100 COOLVAC 1500 CL

1150 1500

TRIVAC D 40 B / 46 m3 x h-1 TRIVAC D 40 B / 46 m3 x h-1

TURBOTRONIK NT 20 Compressor unit

Power supply Power supply with automatic

pump system control

– Push gate valve DN 250 ISO-F,

2 angled valves DN 40 KF

250 ISO-F, lateral 250 ISO-F, lateral

400 V, 3-phase + N, 50 Hz, max. 32 A 1) 400 V, 3-phase + N, 50 Hz, max. 32 A 1)

4 to 7 4 to 7

100 140

– 6 to 10

225 350


Basic unit


Part No. 030 70 upon request

C19

Bell Jar System

Specific Accessories for UNIVEX 450



Technical DataLateral high vacuum

connection flange DN


Installation holes mm

Lateral connections DN

Weight kg

250 ISO-K

115 x 475

34.5 dia. (19 x)

2 x 16 KF, 2 x 40 KF

27

Ordering InformationBase plate, stainless steel Part No. 030 71

Höhe = 15

220

15°

DN 40 KF

DN 16 KF

DN 250 ISO-K

DN 16 KF

280340

20,5°20,5°

20°

Dimensional drawing for the base plate for UNIVEX 450

Stainless Steel Base Plate


400

FPM

23

Ordering InformationBell jar, stainless steel Part No. 030 16 1)

500

255

468265

10

Dimensional drawing for the stainless steel bell jarfor UNIVEX 450

Stainless Steel Bell Jar (Vacuum Chamber)

1) With DN 100 viewing window; hole at the top fitted with a blank flange. Upon request the stainless steel bell jar may be supplied with a coiled cooling or heating pipe

Base Plate

Bel l JarDimensions (H x dia.) mm


Seal

Weight kg

Height = 15

Base Plate

Bel l Jar



11

Notes

C19

Door System

UNIVEX 350

Door System with 350 mm

dia. Vacuum Chamber




� Vacuum chamber with a door


� Very simple to operate and use viaprogrammable control

� For installation into clean-roomwalls

� For RF sputtering



base frame

� The door is equipped with a viewing window

� Bottom plate and lid are providedwith installation holes

� Additional lateral flanges for installing process components

� A water-cooled vacuum chambercan also be supplied

� Evaporation protection plateswhich may be easily disassembledare available



UNIVEX 350

1472 = 33 HE

486

UNIVEX 350LEYBOLD

486 = 19"

380

894840

370

100

566 566

1132

1233

1652

1742

Dimensional drawing for the UNIVEX 350


development

� Pre-production trials


Basic Unit� The UNIVEX 350 consists of two

separable 19" rack mount cabinets

� The process chamber and thepump system are accommodatedin one cabinet

� The electric power supply with thepump system controller based ona PLC with display and operatingunit is accommodated in thesecond cabinet. This cabinet alsohouses the vacuum gauge as wellas the power supply units for theprocess components


Door System High Vacuum Experimentation Systems

13


High vacuum pump




Control

Built-in electro-pneumatic valves




DN 10 hose bar


Compressed air connection, DN 10 bar

Weight kg

TURBOVAC TW 701 COOLVAC 1500 CL

680 1500

TRIVAC D 16 B / 18.9 m3 x h-1 TRIVAC D 25 B / 29.5 m3 x h-1

OEM power supply 59 V DC Compressor unit

Power supply with programmable control Power supply with programmable control

1 x DN 16 KF 1 x gate valve DN 160 ISO-K,

2 x right-angle valve DN 25 KF, 1 x DN 16 KF

160 ISO-K 160 ISO-K

400 V, 3-phase + N, 50/60 Hz 1) 400 V, 3-phase + N, 50/60 Hz 1)

4 to 7 4 to 7

25 140

– 6 to 10

350 425


Basic unit


upon request upon request


comprises a TRIVAC D 16 B two-stage rotary vane pump and aTURBOVAC TW 701 turbomolecular pump

� For processes which developincreased quantities of gas orwhich require low operating pressures, the UNIVEX 350 canalso be equipped with aturbomolecular pump having a

higher pumping speed (TURBOVAC 1000, for example) orwith cryopumps




application, a combination vacuum gauge operating according to the cold cathode orhot cathode principle may beinstalled

C19

Door System



Technical Data Vacuum Chamberfor UNIVEX 350

Material

Dimensions

Inside width mm

Inside depth mm

Inside height mm

Connections

Front side

Bottom plate

Lid

Rear DN

Left side DN

Right side DN

Weight kg

Stainless steel

370

380

500

Door with window

15 installation holes, 34.5 mm dia.

7 installation holes, 34.5 mm dia.

160 ISO-K, 2 x 10 KF, 2 x 40 KF

160 ISO-K, further flanges optional

160 ISO-K, further flanges optional

55

Ordering Information Vacuum Chamberfor UNIVEX 350

Vacuum chamber Is included with the UNIVEX 350

484

440

500580

370

220 220

195

380

Dimensional drawing for the vacuum camber

The position, number and size of the flangesand the installation holes may be variedalmost freely according to requirements!

Vacuum Chamber


Door System High Vacuum Experimentation Systems

15

Notes

C19

Accessories



Technical DataMaterial

Gasket

Weight kg

Stainless steel

FPM

0.1

Ordering InformationBlank-off screw fitting Part No. 030 40

Blank-off screw fitting

Standard Accessories for UNIVEX 300, 350, 450 and 450 B

Blank-Off Screw FittingFor 34.5 mm dia. hole.

Technical DataTotal length mm

Shaft dia.; atmosphere/vacuum mm

Max. rotational speed rpm

Permissible torque Nm

Weight kg

400

8/10

150

2

2

Ordering InformationRotary feedthrough Part No. 030 63

Rotary feedthrough with attached drive motor andcontrol cable

Rotary FeedthroughWith mount for substrate holder; forall common bell jar sizes; suitable for34.5 mm dia. holes.

Blank-Off Screw Fitting

Blank-Off Screw Fitting

Rotary Feedthrough

Rotary Feedthrough


Accessories High Vacuum Experimentation Systems

17

Technical DataLenght m

Weight kg

3

0.2

Ordering InformationControl cable Part No. 030 56

Control Cable, 6-WayUsed to connect the motor to thepower supply, complete with plugs.

Technical DataCabinet

Output V DC

Connection V / Hz

Weight kg

1/2 19" rack module, 3 HU

24, load dependent control

via potentiometer

230, 50/60

3

Ordering InformationSupply unit Part No. 200 02 466

Supply Unit VS 024For driving the motor.

Technical DataDimensions mm

Speed rpm

Electrical power supply V DC

Weight kg

70 dia., 300 long

0 to 150, load dependent control

24

2

Ordering InformationMotor drive Part No. 030 64

Motor Drive for

Rotary FeedthroughWith connection flange and coupling;is electrically operated through theVS 024 supply unit.

Motor Drive

Motor Drive

Control Cable

Control Cable

Supply Unit

Supply Unit

C19

Accessories



Technical DataElectrode material

Insulation

Max. ratings V

mA

Sealing material of the high

voltage feedthrough

Length of the connection cable m

Weight kg

Aluminum

Ceramics

2000

65

FPM

2

1

Ordering InformationGlow discharge assembly

for UNIVEX 300 and 350

for UNIVEX 450 and 450 B

Part No. 030 34Part No. 030 35

Glow discharge assembly with high voltage feed-through and connection cable

Components for Glow Discharge Cleaning

Glow Discharge AssemblyWith glow discharge electrode, highvoltage feedthrough for 34.5 mm dia.hole and connection cable for fittingto the central rotary feedthrough.


Output V

mA

Timer h

Connection

Remote control

and locking input

19" rack module, 3 HU

2000, max.

65

continuously adjustable,

selectable +/– and 50 Hz AC

0 to 6 h max.

230 V, 50/60 Hz, 150 VA

included

Ordering InformationC 2000 high voltagepower supply unit Part No. 032 95

C 2000 high voltage power supply unit

C 2000 High Voltage

Power Supply UnitFor supplying the glow dischargeassembly; with selector switch, meterand timer.

Glow Discharge Assembly

High Voltage Power Supply Unit

Glow Discharge Assembly

High Voltage Power Supply Unit



19

Technical DataSwitching pressure mbar (Torr)

Return switching pressure mbar (Torr)

Switching inaccuracy mbar (Torr)

Max. permissible operating pressure (abs.)

mbar (Torr)

Storage temperature range °C

Nominal temperature range °C

Switching contact

Contact life

Switching capacity


Vacuum connection DN

Materials in contact with the medium

Protection class IP

Approx. 6 (4.5) below atmospheric pressure

3 (2.3) below atmospheric pressure

2 (1.5)

2000 (1500)

-25 to +85

0 to 85

Changeover contacts, gold-plated,

for prog. controls

> 105 switching cycles

100 mA / 24 V AC

30 mA / 24 V DC

6.3 mm flat plug

16 KF

stainless steel 1.4305, 1.4310,

stainless steel 1.4300 PTFE coated

44

Ordering InformationLow Pressure Safety Switch

PS 113 A, DN 16 KF;

complete with 3 m long cable Part No. 160 14

PS 113 A Safety Switch

PS 113 A Safety SwitchFor safety interlock arrangements inconnection with the UNIVEX systemcontroller, respectively optionallyconnected power supply equipment(for sputtering, electron beamevaporation or vacuum etching, forexample).

Technical Data

Gas admission rate qL mbar x l x s-1

Connection flange DN

5 x 10-6 to 1 x 103

16 KF

Ordering InformationVariable leak valve with isolation valve

(see also Product Section C14 “Vacuum Valves”)

Part No. 215 010

Variable Leak Valve with

Isolation Valve

Safety Switch

Variable Leak Valve

Safety Switch

Variable Leak Valve

C19

Accessories



Technical DataRating per conductor V

A

Seals

Water connection mm

Weight kg

max. 100

500

FPM

hose 4/6 dia.

2.5

Ordering InformationSingle thermal evaporator Part No. 030 20

Single thermal evaporator

Components for Thermal Evaporation

Single Thermal EvaporatorConsisting of two water-cooled highvoltage feedthroughs with terminalblocks for 34.5 mm dia. holes.


A

Seals

Water connection mm

Weight kg

max. 100

500

FPM

hose 4/6 dia.

3.9

Ordering InformationDual thermal evaporator Part No. 030 21

Dual thermal evaporator

Dual Thermal EvaporatorConsisting of three water-cooled highvoltage feedthroughs with terminalblocks for 34.5 mm dia. holes.

Technical DataLength m

Rating V

A

Cross section mm2

Weight kg

2

max. 100

500

120

3.5

Ordering InformationPower supply cables (set of 2)

1) Two sets of power supply cables are needed for the dual thermal evaporator

Part No. 030 53 1)

Power Supply CablesFor single and dual thermal evaporators, equipped with terminalsand clamping pieces.

Single Evaporator

Dual Evaporator

Power Supply Cable

Single Evaporator

Dual Evaporator

Power Supply Cable



21

Technical DataConnection for actuation

Dimensions of the shutter screen mm

Weight kg

24 V DC, 1 s pulse

50 x 50

0.2

Ordering InformationVapor source shutter Part No. 030 59

Vapor source shutter, attached to the rotary feedthrough

Solenoid Actuated Vapor

Source ShutterWith rotary magnet and shutter screen; for installation to the rotary feedthrough


A

Seal

Weight kg

max. 700

16

FPM

0.3

Ordering InformationMeasurement feedthrough Part No. 500 001 543

6-way measurement feedthrough

6-Way Measurement

FeedthroughsFor connection of the vapor sourceshutter; for 34.5 mm holes, plug-insoldered contact on the inside.

Technical DataLength m

Weight kg

3

0.2

Ordering Information6 way control cable Part No. 500 001 549

Control Cable, 6-WayFor connection between measurement feedthrough and powersupply unit for the vapor source shutter, complete with connectionplugs.

Vapor Source Shutter

Measurement Feedthrough

Control Cable

Vapor Source Shutter

Measurement Feedthrough

Control Cable

C19

Accessories




mm

Outputs

Inputs

Main power supply

Weigth kg

1/2 19" rack module, 3 HU,

400 deep

1 x evaporator output, 5 V, 400 A max.

can be rewired to 10 V, 200 A max.

1 x shutter output, 24 V DC, 1 s pulse

Remote control unit for controlling the

evaporation power (0 to 10 V)

Remote control for the shutter

230 V, 50/60 Hz, 10 A

15

Ordering InformationAS 053 power supply unit Part No. 200 23 209

AS 053 power supply unit

AS 053 Power Supply UnitFor supplying thermal evaporatorsand one solenoid-actuated sourceshutter.With LCD display for current readout; with membrane key pad.

Technical Data19" rack module, 3 HU

400 deep

2 x evaporator output, 5 V, 400 A max.

can be rewired to 10 V, 200 A max.

2 x shutter output, 24 V DC, 1 s pulse

Remote control unit for controlling the

evaporation power (0 to 10 V)

Remote control for the shutter

Switchover evaporator 1 / 2

230 V, 50/60 Hz, 10 A

30

Ordering InformationAS 053-2 power supply unit Part No. 200 02 461

AS 053-2 Power Supply

UnitFor supplying power to two thermalevaporators with vapor source shutters.With LCD display for current readout; with membrane key pad.

Power Supply Unit

Power Supply Unit

Power Supply Unit

Power Supply Unit

Cabinet

mm

Outputs

Inputs

Main power supply

Weigth kg



23

Various models of electron-beam evaporators and power supplies areavailable for installation in the UNIVEXsystems.

Electron-beam evaporatorThe selection of a suitable electron-beam evaporator dependsmostly on the space available, thedemanded evaporation rates as wellas the number and type materialswhich need to be evaporated.

Power suppliesThe selection of the power supplyunit for the individual electron-beamevaporator depends on the demanded maximum evaporationpower as well as the demanded properties for X/Y beam deflection.Models with output power ratingsranging from 3 kW to 10 kW are available.

As a rule, the maximum output powerof the power supply may not exceedthe maximum permissible power specified for the evaporator.

Further information upon request.

Safety regulationsWhen installing electron-beam evaporators in the UNIVEX 300 thestainless steel ball jar must be used.Moreover, a safety interlockingarrangments is required. For the UNIVEX 300 and 450 a separateinterlocking kit is available; in thecase of the UNIVEX 350 and 450 Bthis kit is already included.

As further safety means a water flowmonitor is required for each electron-beam evaporation unit so asto ensure intensive cooling of theelectron-beam evaporator.

This water flow monitor is includedwith each electron-beam evaporator.

Components for Electron-Beam Evaporation

Ordering InformationInterlocking kit for

UNIVEX 300

UNIVEX 450

UNIVEX 350

UNIVEX 450 B


IncludedIncluded

Interlocking Kit

C19

Accessories



DC SputteringVarious DC sputtering sources maybe built into the UNIVEX units. Theselection depends on the size of thesubstrate, the required target materialand the available installation space.DC sputtering sources from 50 mm to200 mm as well as corresponding DCsputtering power supply units from500 W to 3000 W are available. Thepower supply units may be built intothe basic units.

DC sputtering sources are suited forall UNIVEX systems.


RF SputteringVarious RF sputtering sources maybe built into the UNIVEX 350 andUNIVEX 450 B. The selectiondepends on the size of the substrate,the required target material and theavailable installation space. RFsputtering sources from 50 mm to200 mm as well as corresponding RFsputtering power supply units from150 W to 1000 W are available. Thepower supply units may be built intothe basic units.

RF sputtering sources are only suitedfor the UNIVEX 350 and UNIVEX 450 B.


Gas InletSputtering sources can only be operated with gas admission. Forthis, manually operated variable leakvalves up to automatically controlledmass flow controllers are available.


Components for High Rate Sputtering

Safety regulationsWhen installing electron beam evaporators in the UNIVEX 300 thestainless steel ball jar must be used.Moreover, a safety interlocking arrangement is required. For the UNIVEX 300 and 450 a separateinterlocking kit is available; in thecase of the UNIVEX 350 and 450 Bthis kit is already included.

As further safety means a water flowmonitor is required for each electron-beam evaporation unit so asto ensure intensive cooling of theelectron-beam evaporator.

Ordering InformationInterlocking kit for

UNIVEX 300

UNIVEX 450

UNIVEX 350

UNIVEX 450 B


IncludedIncluded

Interlocking Kit



25

Components for Film ThicknessMeasurements

Various thin film thickness measuringinstruments may be installed in theUNIVEX units.

The selection depends on thedemanded measurements tasks andthe required degree of automation.

We especially recommend the thinfilm thickness measuring instrumentswhich rely on quartz oscillatorsXTM/2 in the case of simple tasks,and the XTC/2 for complex controltasks.

Further thin film measuring instruments which may be used tocheck complex multilayer films areavailable.


C19

Special Units

UNIVEX 450 B (Chamber Systems)

Besides the standard UNIVEXsystems we are also prepared to deliver modified systems for specialapplications.

Besides the standard chambersystem UNIVEX 350 we can also supply UNIVEX systems with otherchamber sizes. These are then sodesigned that the chamber containing the processing components and the pump systemare mounted to a separate frame.The door flange of the chamber maythen easily be integrated in the wallof a clean room. The electric powersupply and the system controller areaccommodated in a separate 19"electrical cabinet. This will simplifyinstallation and subsequent operation.

All processing components commonly used in thin-film processing may be installed in thechamber.

The scope of the pump system usedwill in each case depend on therequirements of the desired processes to be run in the chamber.

Design of the entire system inaccordance with customer requirements will be undertakenupon request.



UNIVEX 450 B having a chamber diameter of 490 mm and with a 10-fold thermal evaporator

1415

173

1645

7801060

666

520

500672

Dimensional drawing for the UNIVEX 450 B

UNIVEX 450 B having a chamber diameter of 490 mm and with RF sputter sources and dry compres-sing vacuum pump system; with EcoDry L pump

UNIVEX 450 B having a chamber diameter of 490 mm and with electron-beam evaporator with heatable and coolable chamber walls; with COOLVAC 3010 cryopump

The position, number and size of the flangesand the installation holes may be variedalmost freely according to requirements!


Special Units High Vacuum Experimentation Systems

27

UNIVEX 450 for Dactyloscopy

Dactyloscopy is a term from the areaof criminal investigation meaning:“Identification of a person through hisfingerprints”. Depending on the material of the part which was touched, different methods are usedto render the fingerprints visible.

In the case of materials like plasticshopping bags, for example, foils,handlebars etc. evaporation methodshave been found to be most useful.

The method itself utilises the effectwell known from normal evaporationprocesses where the evaporatedmaterial will adhere better (andthicker) on the skin material (water,amino acids, fat and alike) depositedby the finger compared to the surrounding untouched material. Anoptimum contrast is attained by selecting a suitable evaporationmaterial, usually gold or zinc.

Benefits of this method:� No “smearing” of existing traces

compared to conventionalmethods

� Large surface areas (up to 80 x 40 cm max.) carrying fingerprintscan be checked completely in onepass

� The time needed for one pass isonly about 10 minutes (dependingon the material carrying the fingerprints)

� Good contrast also in the case ofmulticolour surfaces

� Fixation of the deposited materialwith the traces is easy – the resultsmay be well documented (can bephotographed)

� The carrier of the fingerprints isnot destroyed.

UNIVEX 450 for dactyloscopy

Cluster system with lock, transfer chamber and with the possibility of adding up to six processing chambers

C19

Special Units

UNIVEX 450 C



Test system with a 700 mm dia. chamber

For special applications we can alsosupply cluster systems based on theUNIVEX concept. These clusters areequipped according to customersrequirements and incorporate separate processing and load lockand transfer chambers.

Test Systems with a Vacuum Chamber

We can also supply vacuum chambers with custom pumpsystems for testing of various components.



29

Notes

vacuumLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-221 347-0Fax: +49-221 [email protected] w w w . l e y b o l d . c o m

P.R. China

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]

Leybold Vacuum (Tianjin)Equipment Manufacturing Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaPhone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beijing Branch:1-908, Beijing Landmark Towers8 North Dongsanhuan RoadChaoyang DistrictBeijing 100004, ChinaSales and Service:Phone: +86-10-6590-7607Fax: +86-10-6590-7622

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Shanghai Branch:Add: No. 33, 76 Futedong SanRd., Waigaoqiao FTZ , Shanghai 200131, ChinaSales and Service:Phone: +86-21-5064-4666Fax: [email protected]

Leybold Vacuum (Tianjin)Guangzhou Branch:Add: G/F,#301 Building, 110 Dongguangzhuang Rd.Tianhe District, Guangzhou 510610, ChinaSales:Phone: +86-20-8723-7873Phone: +86-20-8723-7597Fax: [email protected]

India

Leybold Vacuum India Pvt Ltd.A-215 Road No. 30MIDC Wagle Industrial EstateThane(W) - 400 604 MaharashtraIndiaSales and Service:Phone: +91-22-2581 2929Fax: +91-22-2581 [email protected]

Netherlands

Leybold Vacuum Nederland B.V.Computerweg 7NL-3542 DP UtrechtSales and Service: Phone: +31-346-58 39 99 Fax: +31-346-58 39 90 [email protected]@leybold.com

Spain

Leybold Vacuum España S.A.C/. Huelva, 7E-08940 Cornella de Llobregat (Barcelona)Sales: Phone: +34-93-666 46 16Fax: +34-93-666 43 [email protected] Service: Phone: +34-93-666 49 51Fax: +34-93-685 40 10

Sweden

Leybold Vacuum Scandinavia ABBox 9084SE-40092 GöteborgSales and Service: Phone: +46-31-68 84 70 Fax: +46-31-68 39 39 [email protected]/delivery address:Datavägen 57BSE-43632 Askim

Switzerland

Leybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales: Phone: +41-1-308 40 50 Fax: +41-1-302 43 73 [email protected]: Phone: +41-1-308 40 62 Fax: +41-1-308 40 60

USA

Leybold Vacuum USA Inc.5700 Mellon RoadExport, PA [email protected]: Eastern & Central time zonesPhone: +1-724-327-5700Fax: +1-724-733-1217Pacific, Mountain, Alaskan & Hawaiian time zonesPhone: +1-480-752-9191Fax: +1-480-752-9494Service: Phone: +1-724-327-5700Fax: +1-724-733-3799

Belgium

Leybold Vacuum Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales: Phone: +32-2-711 00 83 Fax: +32-2-720 83 38 [email protected]: Phone: +32-2-711 00 82 Fax: +32-2-720 83 38 [email protected]

France

Leybold Vacuum France S.A.7, Avenue du QuébecZ.A. de Courtaboeuf, B.P. 42F-91942 Courtaboeuf CedexSales and Service: Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 [email protected]

Leybold Vacuum France S.A.Valence Factory640, Rue A. Bergès - B.P. 107 F-26501 Bourg-lès-Valence CedexPhone: +33-4-75 82 33 00 Fax: +33-4-75 82 92 69 [email protected]

Great Britain

Leybold Vacuum UK Ltd.Waterside Way, Plough LaneGB-London SW17 0HBSales: Phone: +44-20-8971 7000 Fax: +44-20-8971 7001 [email protected]: Phone: +44-20-8971 7030 Fax: +44-20-8971 7003 [email protected]

Italy

Leybold Vacuum Italia S.p.A.8, Via Trasimeno I-20128 MilanoSales: Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 [email protected]:Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 [email protected]

Field Service BaseZ.I.Le CapanneI-05021 Acquasparta (TR)Phone: +39-0744-93 03 93Fax: +39-0744-94 42 [email protected]

Leybold Vacuum GmbHBonner Strasse 498 D-50968 ColognePhone: +49-221-347 1234 Fax: +49-221-347 1245 [email protected]

Leybold Vacuum GmbHSales Area North/EastBranch office BerlinBuschkrugallee 331. ObergeschossD-12359 BerlinPhone: +49-30-435 609 0 Fax: +49-30-435 609 10 [email protected]

Leybold Vacuum GmbHSales Area South/SouthwestBranch office MunicKarl-Hammerschmidt-Strasse 38D-85609 Aschheim/DornachPhone: +49-89-357 33 90 Fax: +49-89-357 33 933 [email protected]@leybold.com

Leybold Vacuum GmbHSales Area WestBranch office CologneEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1270 Fax: +49-221-347 1291 [email protected]

Leybold Vacuum GmbHService CenterEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1439 Fax: +49-221-347 1945 [email protected]

Leybold Vacuum GmbHMobile after sales serviceEmil-Hoffmann-Straße 43 D-50996 Cologne-SuerthPhone: +49-221-347 1765 Fax: +49-221-347 1944 [email protected]

Leybold Vacuum Dresden GmbHZur Wetterwarte 50, Haus 304D-01109 DresdenService: Phone: +49-351-88 55 00 Fax: +49-351-88 55 041 [email protected]

Japan

Leybold Vacuum Japan Co., Ltd.Head OfficeTobu A.K. Bldg. 4th Floor23-3, Shin-Yokohama 3-chomeKohoku-ku, Yokohama-shiKanagawa-ken 222-0033Sales:Phone: +81-45-4713330Fax: +81-45-4713323

Leybold Vacuum Japan Co., Ltd.Osaka Branch OfficeMURATA Bldg. 7F2-7-53, Nihi-MiyaharaYodogawa-ku Osaka-shi 532-0004Sales:Phone: +81-6-6393-5211Fax: +81-6-6393-5215

Leybold Vacuum Japan Co., Ltd.Tsukuba Technical S.C.Tsukuba Minami Daiichi Kogyo Danchi21, Kasumi-no-Sato, Ami-machi, Inashiki-gunIbaraki-ken, 300-0315Service:Phone: +81-298-89-2841Fax: +81-298-89-2838

Korea

Leybold Vacuum Korea Ltd.#761-4, Yulkeum-ri,SungHwan-eup, Cheonan-CityChoongchung-Namdo,330-807, KoreaSales:Phone: +82-41-580-4420Fax: +82-41-588-3737Service:Phone: +82-41-580-4415Fax: +82-41-588-3737

Singapore

Leybold Vacuum Singapore Pte Ltd.No.1, International Business Park,B1-20B, The SynergySingapore 609917Sales and Service:Phone: +65-66652910Fax: [email protected]

Taiwan

Leybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chung-Hsin Rd., Chu-TungHsin-Chu, Taiwan, R.O.C.Sales and Service:Phone: +886-3-5833988Fax: +886-3-5833999

Germany Europe Asia

America

HotlineSales: +49-221-347 1234Service: +49-221-347 [email protected]@leybold.com

LV_0

7326

_200

5

05

.05

Sales and Service Net Worldwide

Documents

C19 POD E · 2009. 10. 30. · C19 Bell Jar System 6 Leybold Vacuum Full Line Catalog 2005 High Vacuum Experimentation Systems Technical Data Lateral high vacuum connection flange