Accredited Body: DQS Inc., 1130 West Lake Cook Road, Suite 340, Buffalo Grove, IL 60089 USA 1 / 2

CERTIFICATE

This is to certify that

Entegris Inc.

7 Commerce Drive Danbury, CT 06810 United States of America with the organizational units/sites as listed in the annex

has implemented and maintains an Occupational Health and Safety Management System.

Scope: The occupational health and safety activities and supporting processes associated with the design, manufacture, sales and service of specialty materials and packaging delivery systems for high purity applications.

Through an audit, documented in a report, it was verified that the management system fulfills the requirements of the following standard:

BS OHSAS 18001 : 2007

Certificate registration no.

Date of original certification

Date of certification

Valid until

10000182 BSOH

2007-12-07

2018-05-07

2021-03-12

DQS Inc.

Brad McGuire Managing Director

Annex to certificate Registration No. 10000182 BSOH

Entegris Inc.

7 Commerce Drive Danbury, CT 06810 United States of America

This annex (edition: 2018-05-03) is only valid in connection with the above-mentioned certificate. 2 / 2

Location Scope

10000182 Entegris Inc. 7 Commerce Drive Danbury, CT 06810 United States of America

Research and Development of specialty gases and chemicals. Manufacture, logistics and supply of specialty gases and packaging for semiconductor applications.

10003430 Entegris Inc. 706 Houston Clinton Dr Burnet, TX 78611 United States of America

Manufacture, logistics and supply of specialty chemicals, packaging and delivery systems for semiconductor applications.

10008265 Entegris Inc. 10851 Louisiana Ave South Bloomington, MN 55438 United States of America

Develop, manufacture and supply of high-purity liquid packaging and dispense systems for semiconductor, display and life sciences applications.