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Zhenxian Liang, Fred Wang, Laura MarlinoOrganization: ORNLEmail: [email protected]: 865‐946‐1467
APEC’11, Special Session 2.1March 8, 2011
This presentation does not contain any proprietary or confidential information
Automotive Power Module Packaging: Issues and Technologies
2 Managed by UT-Battellefor the Department of Energy
ORNL Power Electronics Packaging Program
Power electronics module packaging is one enabling technology
for performance improvement and cost reduction
Power electronics System:
Constitution and cost breakdown
3 Managed by UT-Battellefor the Department of Energy
Semiconductors and Their Packaging
Automotive Power Module Qualification
Performance(Electrical, Thermal)
Density (per volume/weight)
Functions(Intelligence)
Cost($/kW)
Reliability(Thermo-mechanical)
3
4 Managed by UT-Battellefor the Department of Energy
Automotive Power Module Reliability Requirement
Alain Calmels www.imapsfrance.org/ABSTRACT/.../MICROSEMI_251109.pdf
Beckedahl P. etal, “A New Module Concept for Automotive Applications PCIM07
Thoben M. etal, “From vehicle Drive Cycle to reliability testing of Power Modules,” Power Electronics Europe, No.6, 2008, P.21
27,000 Power cycles @
ΔT=100°C, Tjmax
=150°C10,000 Thermal cycles @ ΔT=80°C
5 Managed by UT-Battellefor the Department of Energy
Automotive Power Module Cost Estimation
6 Managed by UT-Battellefor the Department of Energy
Power Semiconductor Cost Analysis
Cost= Die size (S) * $/unit area
Increase Semiconductor Wafer Size (from 6” to 8”);
Barrier: Mechanical Support of Thin Wafer (70um/kV)
From Si to SiC, GaN, etc.
Semiconductor: Major Cost of Power Module;
Counted by Die Area;
Dependent on Device Structure
7 Managed by UT-Battellefor the Department of Energy
Interaction of Power Module Parameters
S
)()(
)(
/
2,
,
cmPTT
TTP
HPS
inaj
spja
aj
spjaloss
fLoss
•−
•=
−
•=
=
θη
θη: , Power device loss coefficient
θja, sp Specific Thermal Resistance (C/(W/cm2))
(Tj -Ta ) Operation Temperature Difference
inLoss PP •= η
)( CP
PT
inja
jalossj
°••=
•=Δ
θη
θ
maxjj TT ≤
8 Managed by UT-Battellefor the Department of Energy
0 100 200 300 400 500 6000
50
100
150
200
250
300
Abs
(cur
rent
) (am
ps)
Time(s)
US06 Drive Cycle
Automotive Power Module: Comprehensive Design
Die area (S)
0 100 200 300 400 500 600 70060
80
100
120
140
160
180
Time(S)
Tem
pera
ture
(C)
Temperature Profile Under US06 Drive Cycle
Ta=65CTa=105Cdie area S(cm2)=0.75die area S(cm2)=0.75
0 100 200 300 400 500 600 7000
50
100
150
200
250
300
Time(S)
Pow
er L
oss
(W)
An Inverter Power Loss Profile Under US06 Drive Cycle
EnergyLoss (J)=22599(S=0.75)
0 5 10 15 20 25 30 35 40 45 50 55 60 65 700
5
10
15
20
25
30
35
40
45
50
55
60
65
70
Delta Tj(C)
Num
ber
An Inverter Delta Tj Profile Under US06 Drive Cycle
9 Managed by UT-Battellefor the Department of Energy
Packaging Paradigm Shift and Challenges
Power Semiconductors Blocks
Integrated Advanced Cooler
Integrated Advanced Cooler
Signal
Block
Power
BusHigh Temperature
RobustnessHigh TC/PC, Reliability
Cost Effective Manufacturability
Highly Efficient Cooling
HT Material IntegrityHigh-melting bonding (Ag, Au and alloys);
Inorganic encapsulate (glass);
Nano Electrical and Thermal materials
CTE MatchingCTE modified Materials (AlSiC, Cu-x, Al-x,
Si3N4),
Structure/buffer optimization
Structural OptimizationDouble sided Electrical Interconnection;
Integrated cooling (plus Microchannel, spray, jet, phase change, etc)
Processing AdvanceReflowing, Brazing /Sintering, Transient
liquid phase bonding, thermal press
bonding, deposition, Ceramic spray,
10 Managed by UT-Battellefor the Department of Energy
ORNL Advanced Power Module Packaging LabFacility Layout
Chemical Processing
Station
Reflow Ovens
Thermal Cycle
Chamber
Wire Bonder
Encapsulate Set
Micro-Probe Process
Inspection
Thermal Shock Oven
Sintering Oven
Paste Printer
Clean Assembly
Bench
11 Managed by UT-Battellefor the Department of Energy
Evaluation of Advanced Automotive Module Packaging Technologies
12 Managed by UT-Battellefor the Department of Energy
Microstructure and Mechanics Analysis of Packaging Constitution
Voids at Si/Ag interface
SKiM
Prius 2010
Solder PorosityTPM
13 Managed by UT-Battellefor the Department of Energy
Packaging Electrical Parasitic Parameters Extraction
0.80 mΩ18.3 nH12.9 nH
Positive
13 mΩ35.6 nH
Negative
Neutral
13 mΩ35.6 nH
0.87 mΩ
0.37 mΩ
0.37 mΩ
0.41 mΩ
0.41 mΩ10.6 nH 8.5 nH
10.6 nH 8.5 nH
0.80 mΩ18.3 nH12.9 nH0.87 mΩ
0.44 mΩ
11.3 nH14.4 nH
Positive
7 mΩ19.6 nH
Negative
Neutral
7 mΩ19.6 nH
0.33 mΩ
0.17 mΩ0.18 mΩ7.3 nH 6.5 nH
0.44 mΩ11.3 nH14.4 nH
0.33 mΩ
0.17 mΩ0.18 mΩ7.3 nH 6.5 nH
L=50.3nH R=2.35mΩ
L=39.5nH R=1.12mΩ
Prius 2010
Camry
14 Managed by UT-Battellefor the Department of Energy
Ther
mal
Res
istiv
ity o
f lay
er (K
cm2 /W
)
0.3
0
0.2
0.1
Layer
Thermal Grease
Cu Baseplate
Solder DBC Cu
DBC Cu
DBC Ceramic
Solder Si Die
CHIP
Base Substrate
Baseplate
Heat Sink
Thermal Resistance Simulation In Power Module
Thermal Grease
5 10 15 20 25 30 35 40 45 5010
15
20
25
30
35
40
45
50
55
60
65
Pressure (psi)
Add
ition
al T
hick
ness
(um
)
H=1094 Mpa, Ktim=1, σ2=1 um
H=745 Mpa, Ktim=2, σ2=5 um
H=745 Mpa, Ktim=2, σ2=6.9 um
15 Managed by UT-Battellefor the Department of Energy
Integrated Cooling Power Module
CopperCladding
Diode
IGBT
RibbonBonds
Coolant Channel
16 Managed by UT-Battellefor the Department of Energy
60% Thermal Performance Improvement
L=12.8nH R=0.22mΩ
Electrical Parasitic Parameters (20-30% of Prius)
O
P
N
Gu
Eu
GL
EL
ORNL Advanced Power Device Packaging Structure
An Integrated Phase Leg Packaging Design
17 Managed by UT-Battellefor the Department of Energy
High Temperature Limit of Si Switch
50 100 150 200 250 300 350101
102
103
104
105
106
Intrinsic Temperature(C)
BV
(V)
g p
NPTW=60umW=100um
ni
=nDSecondary
Breakdown (Dynamic Avalanche) Failure
CriterionTi
=240C for 600V PN Junction
High TemperaturePackaging
Target
Rated Maximum Junction
Temperature
Conventional Packaging
Temperature Limit
18 Managed by UT-Battellefor the Department of Energy
High Temperature Packaging: Material CTE Matching
200°C Reliable Operation Temperature
19 Managed by UT-Battellefor the Department of Energy
High Temperature Packaging: Structure Optimization
Puqi Ning, Ph. D dissertation, Virginia Tech, 2010
20 Managed by UT-Battellefor the Department of Energy
High Temperature Packaging: Die Attachment
Aluminum tab
Aluminum tab
Silversintered layer
Ni-Cubond coating
Agplating
25 µm
Semi-disk usedto promote
semi-articulatedaligned loading
Load trainpush rod
One tabis sheared
off ofthe other
Pd on AlAg on Cu
21 Managed by UT-Battellefor the Department of Energy
Si IGBT (1200V): High Temperature Operation
16.8mA 200 ˚C
fs
=10kHz
20 40 60 80 100 120 140 160 180 2000
20
40
60
80
100
120
140
Junction temperature
IGB
T Lo
ss
fs =15kHzfs =10kHzfs =5kHzRthja =0.73K/WRthja =0.86K/WRthja =1.04K/W
Coolant temperature: 105˚C
VCE
IC
RCE(on)
VT0
VGE
=15V
I-V Characterization Leakage Current at Block State
Power Loss vs Temperature Power Loss vs Thermal Management
22 Managed by UT-Battellefor the Department of Energy
High Power Density Integrated Traction Drive
ModularPole-Drive
Unit
IMMD
(a)105 ˚C water ethylene glycol (b) 90 ˚C transmission oil
23 Managed by UT-Battellefor the Department of Energy
Summary
Developing power electronics packaging is a vital effort to meet DOE VTP targets in products’performance improvement and cost reduction.
Advancing packaging technology with materials development, structure optimization and processing innovation.
Improving cost‐effectiveness, efficiency and reliability of power electronics modules by improved electrical performance, reliable high temperature operation, efficient thermal management, highly functional integration and power density.
24 Managed by UT-Battellefor the Department of Energy
Acknowledgement
Thanks And Questions?
The automotive power electronics packaging works have been primarily
supported by DoE
under Vehicle Technology Programs. The authors would
also like to thank their colleagues, Andrew A. Wereszczak, Randy Wiles, Puqi
Ning, Madhu
Chinthavali, all with ORNL for the contribution to this
presentation