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SUPERIOR TECHNOLOGY FOR SINTERING, SOLDERING, DIFFUSION AND CVD 0 ©2018 BSET EQ. www.bsetplasmas.com ATV Technologie GmbH

ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

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Page 1: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

SUPERIOR TECHNOLOGYFOR SINTERING, SOLDERING, DIFFUSION AND CVD

0©2018 BSET EQ. www.bsetplasmas.com

ATV Technologie GmbH

Page 2: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

BSET EQ History • Founded in 1996 • HQ in Antioch, CA• East Coast Office, Philadelphia, PA• Engineering• R&D • Process Development • Manufacturing• In-House Machine Shop• Customer tailored solutions ©2018 BSET EQ. www.bsetplasmas.com 1

Page 3: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

ATV History • Founded in 1972

• HQ in Vaterstetten (near Munich)

• Engineering department

• R&D department

• Process department

• SW department

• In-House flexible production (In Cleanroom)

• Customer tailored solutions

©2018 BSET EQ. www.bsetplasmas.com 2

Page 4: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

©2018 BSET EQ. www.bsetplasmas.com 3

Product Portfolio

SRO series IR Vacuum reflow Rack and Table top systems

i-Line Automated Vacuum Reflow System for Mass Production

SRO-706 MEMSlid sealing/getter activation system

PHP-603 LTCCSintering Press

PEO seriesFast ramping multipurpose quartz tube furnaces

Page 5: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

©2018 BSET EQ. www.bsetplasmas.com 4

IR LPCVD/ALD/RTASystems SRO-TCB Thermal

Compression Reflow System

RV series Diamond Scribers

Page 6: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

SRO-7XX Series

©2018 BSET EQ. www.bsetplasmas.com 5

SRO-700 Tabletop Reflow System

SRO-714/716 Stand Alone

Reflow System

Page 7: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

SRO-700 Tabletop

• Basic entry level Table Top System • Based on original SRO-704 chamber • R&D Applications • Pilot Line Applications (Low Volume) • Reflow Soldering • RTA • Brazing • Cold Wall Chamber Technology • IR Heating • HCOOH atmosphere feature included in

standard system configuration

©2018 BSET EQ. www.bsetplasmas.com 6

SRO-700

Page 8: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

SRO-700 Features

• Flux, Flux-Less and Solder Paste • HCOOH Standard • Direct IR Heating • Multiple Monitoring TCs • Process Temp. 450°C up to700°C • Ramp-up Rate 3.5K/sec. • Ramp-down Rate 2K/sec. • 100 Step Recipe Program

©2018 BSET EQ. www.bsetplasmas.com 7

Page 9: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

SRO-700 Series Options

• Spring Pin Array (Mounted into the Chamber Lid)

• Customer tailored Substrate Fixture

• Graphite Heater Plate

• Spring Clamps on Hot Plate

• Lid Lock

• Diaphragm/Scroll Pump, or Turbo Pump

• Closed Loop Water Chiller/Heater

©2018 BSET EQ. www.bsetplasmas.com 8

Page 10: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

SRO-714/716 Series

• R&D Applications

• Pilot Line Production

• Reflow Soldering

• RTA

• Brazing

• Cold Wall Chamber Technology

• IR Heating

• Vacuum (Optional)

• High Vacuum (Optional)

• HCOOH (Optional)

©2018 BSET EQ. www.bsetplasmas.com 9

Page 11: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

SRO-714/716 Series Features

• Flux, Flux-Less and Solder Paste • HCOOH Enriched Atmosphere • Direct IR Heating • Multiple TC Monitoring • Process Temp. Up to 450°C • Ramp-up Rate 3.5K/sec. • Automatic Lid• Ramp-down Rate 2K/sec. • 100 Step Recipe Program

©2018 BSET EQ. www.bsetplasmas.com 10

Page 12: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

SRO-714/716 Series Technical Data

• Footprint 38”L x 28”W x 53”H • Heated Area:

• SRO-714 - 9” x 8.5”• SRO-716 - 12” x 12”

• Heating Zones: • SRO-714 - 2• SRO-716 - 3

• Heating Method: • SRO-714 - 8 Lamp Array• SRO-716 - 12 Lamp Array

©2018 BSET EQ. www.bsetplasmas.com 11

Page 13: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

SRO-714/716 Series Options • Spring Pin Array (Mounted into the Chamber Lid) • Customer tailored Substrate Fixture • Lift Pins • Spring Clamps on Hot Plate • Formic Acid enriched Atmosphere • Flux management • Diaphragm/Scroll/Turbo Pump < 5x10-6mbar • H2O/ O2 Analyzing • H2 and N2H2 Safety Features • Gas Plasma Atmosphere • RGA/Mass Spectrometer • Closed Loop Water Chiller/Heater • Top Heater• Glove Box integration

©2018 BSET EQ. www.bsetplasmas.com 12

Up to 300 mm Single wafer processing:Up to 50 K/secondWith flux management: photo shows easily exchangeable flux hood in chamber lid which is part of flux management system

Page 14: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

Options overview

Options: SRO-700 SRO-714 SRO-716Formic Acid HCOOH Yes Yes YesVacuum Yes Yes YesCustom Tooling Yes Yes YesOverpressure No Yes YesFlux Management No No YesTop Heater No Yes YesHydrogen Operation (up to 100%) No Yes YesHigh Temperature (up to 700°C) Yes Yes YesHigh Temperature (up to 750°C) No Yes YesSwap Plates No Yes YesIn-Line Operation No Yes YesNo Wafer/Plate Movement during Cooling No Yes Yes

©2018 BSET EQ. www.bsetplasmas.com 13

Page 15: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

Specification Overview

Specification SRO-700 SRO-714 SRO-716

Max. Temperature 700°C 750°C 750°C

Heated Area 9" x 8.5" 9" x 8.5" 12" x 12"

Wafer Size 200 mm 200 mm 300 mm

Uniformity (85% of heated area, edge exclusion 15mm) <2-3% <1% <1%

He Leak Rate < 5x10-8mbar x l/sec < 5x10-9mbar x l/sec < 5x10-9mbar x l/sec

Max. Vacuum < 5.0 x10-5mbar x l/sec < 5,0 x10-6mbar x l/sec < 5,0 x10-6mbar x l/sec

Chamber Height 100 mm 40 - 100 mm 40 - 100 mm

Chamber Locking Manual Automatic Locking Automatic Loading

Lid Opening/Closing Manual Automatic Automatic

Flow Control Manual Flow Meter MFC MFC

Control T/C T/C in Hot Plate Touch T/C Touch T/C

Chamber Cooling Vertical Gas Flow Horizontal Gas Flow Horizontal Gas Flow

©2018 BSET EQ. www.bsetplasmas.com 14

Page 16: ATV Technologie GmbH SUPERIOR TECHNOLOGY FOR … · Overpressure No Yes Yes Flux Management No No Yes Top Heater No Yes Yes Hydrogen Operation (up to 100%) No Yes Yes High Temperature

Sample Applications

• IGBT • Power Semiconductors • Sensors • MEMS Devices • DIE Attach• High Power LED • Hybrid Assemblies • Flip Chip • Package Sealing • MMIC‘s • CPV Laser Bars

©2018 BSET EQ. www.bsetplasmas.com 15


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