Atomic force microscopy

3. - 1. ...............................................................................................................3-3

1.1. , ..........................3-3 1.2. ..........................................................................3-3

1.2.1. ...............................................................................................3-4 1.2.2. ...................................................................................................3-5 1.2.3. ............................3-6 1.2.4. ..................................................................................3-6

1.3. ..................................................................................................................3-7 1.4. ...................................................................3-8 1.5. ...........................3-10

1.5.1. ..................................................................................3-11 1.5.2. ..................3-14

1.5.2.1. ........................... 3-14 1.5.2.2. ................................................................ 3-16 1.5.2.3. ................................................................. 3-19

1.5.3. .............................................................................................3-21 1.5.4. .....................................................................................................3-22 1.5.5. ...........................................................................3-27 1.5.6. ..........................................................................................3-28 1.5.7. .................................................................................3-28

1.6. ...............................3-29 1.6.1. ..................................................................................3-30 1.6.2. ..................3-32

1.6.2.1. ........................... 3-32 1.6.2.2. ................................................................ 3-34 1.6.2.3. ................................................................. 3-37

1.6.3. .....................................................................................................3-39 1.6.4. ...........................................................................3-42 1.6.5. ..........................................................................................3-43 1.6.6. .................................................................................3-44

2. - .......................................................3-45 2.1. ......................................................................................................3-45

2.1.1. .........................................................................................3-45 2.1.2. ..................................................................................................3-46 2.1.3. DFL.............................................................3-46 2.1.4. ..............................................................................................3-48 2.1.5. ........3-51 2.1.6. .....................................................................3-52 2.1.7. ..............................................................................................................3-56 2.1.8. ................................................................................3-60 2.1.9. ................................................................................................3-61

2.2. - ....................................................................................3-62 2.2.1. ...........................................................................3-62 2.2.2. .........................................................................................3-63 2.2.3. ..............................................................................................................3-63

2.3. ..................................................................................................3-64 2.3.1. ...........................................................................3-64 2.3.2. .........................................................................................3-65 2.3.3. .............................................................................................3-66 2.3.4. ..............................................................................................................3-67

2.4. ........................................................................3-68 2.4.1. ...........................................................................3-68 2.4.2. .........................................................................................3-68 2.4.3. .............................................................................................3-69 2.4.4. ..............................................................................................................3-70 2.4.5. .............................................................................3-71

2.5. ........................................................................................................3-71

3-1

3-2

2.5.1. ...........................................................................3-71 2.5.2. .........................................................................................3-72 2.5.3. .............................................................................................3-72 2.5.4. ..............................................................................................................3-74 2.5.5. ............................................................................3-75

2.6. ...............................................................................3-76 2.6.1. ...........................................................................3-76 2.6.2. .........................................................................................3-76 2.6.3. .............................................................................................3-77 2.6.4. ..............................................................................................................3-78

2.7. ................................................................................3-78 2.7.1. ...........................................................................3-78 2.7.2. .........................................................................................3-81 2.7.3. .............................................................................................3-81 2.7.4. ..............................................................................................................3-83

3. - ...........................................3-85 3.1. ........................................................................................................3-85

3.1.1. .........................................................................................3-85 3.1.2. ..................................................................................................3-86 3.1.3. ..........................................................3-86 3.1.4. Mag.............................................................3-90 3.1.5. ..............................................................................................3-91 3.1.6. ........3-94 3.1.7. .....................................................................3-96 3.1.8. ............................................................................................................3-100 3.1.9. ..............................................................................3-104 3.1.10. .............................................................................................3-104

3.2. ....................................................................3-105 3.2.1. .........................................................................3-105 3.2.2. .......................................................................................3-105 3.2.3. ...........................................................................................3-106 3.2.4. ............................................................................................................3-107

3.3. ..................................................................................................3-108 3.3.1. .........................................................................3-108 3.3.2. .......................................................................................3-108 3.3.3. ...........................................................................................3-109 3.3.4. ............................................................................................................3-111 3.3.5. ..........................................................................3-111

4. .............................................................................................................3-112 4.1. .................................................................................................................................3-112 4.2. (DFL(HEIGHT))............................................................................3-112

4.2.1. ...................................................................................................3-112 4.2.2. ........................................................................3-113 4.2.3. .............................................................................3-113 4.2.4. ...................................................................................3-116 4.2.5. ......................................................................................................3-118 4.2.6. ..........................................................................3-119 4.2.7. .........................................................................................3-122

4.3. (IPR-LOW(BIAS VOLTAGE))..........................................................3-123 4.3.1. ......................................................................3-124 4.3.2. ..........................................................................3-126

4.4. (MAG(HEIGHT))..................................................................3-127 4.4.1. ......................................................................3-127 4.4.2. ..........................................................................3-128 4.4.3. ...................................................3-130

4.5. (PHASE(HEIGHT)).........................................................................3-131 4.5.1. ......................................................................3-131 4.5.2. ...........................................................3-133

3. -

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3-9

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3-10

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3-12

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3-14

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3-15

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3-16

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3-17

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3-18

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3-20

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3-24

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3-25

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3-26

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3-27

1.5.6. 1. (. 1-52) ,

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3-28

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1.6.

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(. 1.6.2 . 3-32). 3. (. 1.6.3 . 3-39). 4. (. 1.6.4 . 3-42). 5. (. 1.6.5 . 3-43). 6. (. 1.6.6 . 3-44).

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3-29

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3-30

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4. (. 1-57, . 1-58). .

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5. (. 1-59), . 1-58.

3-31

. 1-60

6. . (. 1-60).

1.6.2.

1.6.2.1.

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. 1-61 1, 2 ;

3, 4 . 1-62

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3-32

3. -

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. 1-63 . 1-64

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3-33

. 1-66

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1.6.2.2. 1. , .

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3-34

3. -

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3-35

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3-36

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1.6.2.3. , ,

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3-37

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3. . , 1 2, - , (Laser). Laser 2050 .

4. 3, 4 ( ), .

3-38

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3-39

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(. 1-79), .

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3-42

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3-44

3. -

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2.1.1. , : ; ; ,

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1. (. 2.1.2 . 3-46). 2. DFL (. 2.1.3 . 3-46). 3. (. 2.1.4 . 3-48). 4.

(. 2.1.5 . 3-51). 5. (. 2.1.6 . 3-52). 6. (. 2.1.7 . 3-56).

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3-45

2.1.2. , Contact

(. 2-1) .

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Contact , .

2.1.3. DFL DFL,

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DFL 4 (. 2-2) , .

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3-46

3. -

DFL 1. Aiming (

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2. , 4 ( , . . 2-2) DFL 0 0.1 (. . 2-4).

3-47

2.1.4. : 1. Approach (

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2. Auto SetPoint, (. 2-6).

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3. .

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Set Point, DFL (.. Set Point=DFL+2);

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3-48

3. -

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Z- , DFL Set Point, ;

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DFL(t) ; Approach Done. (. 2 . 2-8).

3-49

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Laser , .

Set Point Set Point: Auto SetPoint

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Set Point :

Set Point DFL . Set Point DFL, , . , Set Point DFL ;

Set Point DFL, , , ;

3-50

3. -

Set Point DFL, , ;

Set Point DFL Laser.

2.1.5.

( FB Gain), . ( ), . DFL (. 2-9).

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0.50.7 , . FB Gain.

3-51

:

1. FB Gain , (. 2-10).

. 2-10. FB Gain

2. FB Gain, DFL .

3. FB Gain, . DFL (. . 2-9).

4. FB Gain, 0.50.7 FB Gain, DFL.

2.1.6. Scan ( )

(. 2-11).

. 2-11.

Scan (. 2-12).

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1D- , . 2D- .

3-52

3. -

Mode ( )

Contact Topography (Constant Force) (. 2-13). .

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:

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3-53

:

1. , 2D- (. 2-14).

. 2-14. 2D- 1 ;

2 ,

2.

(. 1 . 2-14).

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3. . , . , (. 2 . 2-14) . . (. . 2-7).

3-54

3. -

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X Y (Point Number), ( Scan Size) (Step Size) (. 2-15).

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3-55

. 2-16

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3-56

3. -

Run:

2D- , , (. 2-18), ;

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1D- (. 2-19);

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3-57

(. . 2-18, . 2-19) ,

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3-58

3. -

. 2-23. Height

Subtract . .

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, Frequency (. 2-24), Set Point (. 2-25), FB Gain (. 2-25). .

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3-59

. Pause , Restart.

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: 1. File Save. 2. ,

( C:\Program Files\NT-MDT\Nova).

3. *.mdt.

. NoNameXX.mdt, XX Nova.

3-60

3. -

2.1.9. : 1. ( ). 2. , :

a. Approach ( ) (. 2-26).

. 2-26. Approach

b. Moving Backward (. 2-27) Approach. C 23 .

. 2-27

c. , Backward (. 2-28).

. 2-28

3-61

2.2. - 2.2.1.

- , . - , , , , - , , (, ), .

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. 2-29 . 2-30

. . LF, . .

, , (. 2-30). . , .

, , . , .

3-62

3. -

2.2.2. - ,

2.1 . 3-45.

1. (. 2.1.2 . 3-46). 2. DFL (. 2.1.3 . 3-46). 3. (. 2.1.4 . 3-48). 4.

(. 2.1.5 . 3-51). 5. (. 2.1.6 . 3-52). :

Lateral Force.

6. (. 2.1.7 . 3-56).

( ) , . 2.1.6 . 3-52 Contact Topography (Constant Force) Lateral Force. Scan Mode Lateral Force (. 2-31). , , .

. 2-31.

2.2.3. Run,

Scan:

2D- : ( Height), ( LF) (. 2-32);

3-63

. 2-32.

1D-

(. 2-33).

. 2-33. LF

2.3. 2.3.1.

. ( ). .

, , . , . .

(. . 2-34) ( DFL ), , , DFL .

3-64

3. -

. 2-34

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2.3.2. , ,

.

1. (. 2.1.2 . 3-46). 2. DFL (. 2.1.3 . 3-46). 3. (. 2.1.4 . 3-48).

3-65

4. (. 2.1.5 . 3-51).

5. (. 2.1.6 . 3-52). 6. (. 2.1.7 . 3-56).

, .

2.3.3. 1. Scan ( )

(. 2-35).

. 2-35.

2. Contact Constant Height Mode Scan (. 2-36).

. 2-36.

. FB Gain ( ) . . DFL.

3-66

3. -

2.3.4. Run,

Scan:

2D- , , (. 2-37);

. 2-37.

1D-

(. 2-38).

. 2-38. DFL

3-67

2.4. 2.4.1.

, , , , .. , . , . , - .

, , - -, p-n , .

2.4.2. ,

2.1 . 3-45. ,

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AU006.

.

1. (. 2.1.2 . 3-46). 2. DFL (. 2.1.3 . 3-46). 3. (. 2.1.4 . 3-48). 4.

(. 2.1.5 . 3-51). 5. (. 2.1.6 . 3-52). 6. (. 2.1.7 . 3-56).

, .

3-68

3. -

2.4.3. 1. Scan ( )

(. 2-39).

. 2-39.

2. Spreading Resistance Mode Scan (. 2-40).

. 2-40.

. .

3. ( ). 4. Ipr low . 5. Bias Voltage,

(. 2-41) .

. 2-41. Bias Voltage

6. , Bias Voltage , Ipr low 110 A.

3-69

2.4.4. Run,

Scan:

2D- : ( Height), ( Ipr low);

. 2-42.

. Ipr low .

1D- (. 2-43).

. 2-43. Ipr low

3-70

3. -

2.4.5. , : Set Point ( );

( Bias Voltage) (. . 2-41). ;

( ).

! .

2.5. 2.5.1.

. Z- , . . , . , (. 2-44).

. 2-44

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3-71

2.5.2. ,

2.1 . 3-45. , ,

.

1. (. 2.1.2 . 3-46). 2. DFL (. 2.1.3 . 3-46). 3. (. 2.1.4 . 3-48). 4.

(. 2.1.5 . 3-51). 5. (. 2.1.6 . 3-52). 6. (. 2.1.7 . 3-56). ,

, .

2.5.3. 1. Scan ( )

(. 2-45).

. 2-45.

2. Force Modulation Mode Scan (. 2-46).

. 2-46.

. Z- , (, ), .

3-72

3. -

: 1. Resonance (

) (. 2-48).

. 2-47.

2. Auto peak find (. 2-48).

. 2-48. Resonance

3. (From, To) 525 . 4. , Run

( ). ( Mag) (. 2-49).

. 2-49

3-73

5. Frequency (. 2-50), .

. 2-50

6. , 25 . ( Amplitude) (. . 2-48), ( Gain) ( Preamplifier) (. . 2-48).

2.5.4. Run,

Scan:

2D- : ( Height), - ( Mag) (. 2-51);

3-74

3. -

. 2-51.

. Mag .

1D- (. 2-52).

. 2-52. Mag

2.5.5. , : Set Point ( ); , ; ( Amplitude) (. . 2-48),

( Gain) ( Preamplifier) (. . 2-48);

( ).

3-75

2.6. 2.6.1.

. (Set Point), , , ( DFL). DFL , ( ).

DFL (, ) . . , , ( DFL) .

, ( ) , . , . - . .

2.6.2. ,

2.1 , . 3-45. ,

, .

1. (. 2.1.2 . 3-46). 2. DFL (. 2.1.3 . 3-46). 3. (. 2.1.4 . 3-48). 4.

(. 2.1.5 . 3-51). 5. (. 2.1.6 . 3-52). 6. (. 2.1.7 . 3-56).

3-76

3. -

, .

2.6.3. ,

DFL, : 1. Scan Settings (. 2-53),

Scan.

. 2-53.

2. DFL.

3. OK, .

3-77

2.6.4. Run,

Scan:

2D- : ( Height), ( DFL) (. 2-54);

. 2-54.

1D- (. 2-55).

. 2-55. DFL

2.7. 2.7.1.

. - .

3-78

3. -

. , . .

, . , .

. 2-56 , , . , - , .

. 2-56

. , , .

, . , . . , , .

3-79

, , , (. 2-57). .

. 2-57

. , , .

( ), , , , . . , , , , , .. . .

. .

3-80

3. -

2.7.2.

(. 3, . ). .

, , .

AU007. .

1. (. 2.1.2 . 3-46). 2. DFL (. 2.1.3 . 3-46). 3. (. 2.1.4 . 3-48). 4.

(. 2.1.5 . 3-51). 5. (. 2.1.6 . 3-52). 6. (. 2.1.7 . 3-56).

, .

2.7.3. 1. Scan ( )

(. 2-58).

. 2-58.

2. Piezoresponse Force Microscopy Mode Scan (. 2-59).

3-81

. 2-59.

. Gain Preamplifier, DFL (. 2-60).

. 2-60 : Height Mag (. 2-61); Phase (. 2-61).

. 2-61.

3-82

3. -

2.7.4. Run,

Scan:

2D- : ( Height), ( Mag), ( Phase) (. 2-62).

. 2-62.

1D- (. 2-63).

. 2-63. Mag

. , , ( DFL). ( LF), DFL LF (. 2-64).

. 2-64

3-83

2D- , (. 2-65).

. 2-65.

3-84

3. -

3. -

, .

3.1. 3.1.1.

. , AU020 AU030. .

,

: ; ; ,

; ; ; 0.51 .

: 1. (. 3.1.2 . 3-86). 2. (. 3.1.3 . 3-86). 3. Mag (. 3.1.4 . 3-90). 4. (. 3.1.5 . 3-91). 5.

(. 3.1.6 . 3-94). 6. (. 3.1.7 . 3-96). 7. (. 3.1.8 . 3-100).

3-85

.

3.1.2. ,

SemiContact (. 3-1) .

. 3-1.

SemiContact , .

3.1.3.

: 1. Resonance (

) (. 3-2).

. 3-2.

2. Auto peak find (. 3-3).

. 3-3. Resonance

3. , ( From, To), 90 500 .

4. , Run.

3-86

3. -

:

( Mag); ; ,

;

Mag (. 3-4).

. 3-4

5. , . ( ) , . 3-4, , . ( 3.1.4 Mag . 3-90).

, ,

.

,

, , . , , . 3-5 . 3-9.

3-87

, , , ( ), ( Gain , Amp Gain ), .

I. , 3540 .

, 3540 (. 3-5), :

. 3-5

1. Gain, (. 3-6).

. 3-6

2. Mag 2025 , Gain . Mag (. 3-7).

3-88

3. -

. 3-7

3. Mag 2025 , Run.

4. , ( 3.1.4 . 3-90), 1-3 .

(. 3-8) ( Preamplifier : 1 10).

. 3-8

II. ,

3540 . ,

3540 (. 3-9), :

. 3-9

3-89

1. Amplitude, (. 3-10).

. 3-10

2. Amplitude . 3.

, Run. 4. ,

( 3.1.4 Mag . 3-90), 1-3 .

3.1.4. Mag Mag

2025 . Mag

. : 1.

Amplitude, (. 3-11) ( 01 ).

. 3-11

2. Mag 2025 , Amplitude . Mag (. 3-12).

. 3-12

3-90

3. -

3. ( : 0.1, 1, 10) (. 3-13).

. 3-13

. Mag ,

( Gain) ( Preamplifier).

Mag ( Amplitude), .

, Mag , .

3.1.5. 1. Approach (

) (. 3-14).

. 3-14.

2. SetPoint, (. 3-15).

. 3-15. Approach

3. , .

3-91

: , Z-

, , (. 3-16). ;

. 3-16.

Set Point, Mag (.. Set Point=Mag/2);

, .

Mag , .

1030 , , (. 3-17):

3-92

3. -

. 3-17.

1 ; 2

Mag Set Point, Z- , Mag Set Point, ;

(. 1 . 3-17);

; Mag Set Point

Mag(t), ; Approach Done. (. 2 . 3-17).

3-93

. , , , . , ( Z-) . . , . , Mag .

Set Point Set Point: Auto SetPoint (

); Set Point ,

(. 3-18).

. 3-18

Set Point Mag (.. SetPoint=Mag/2).

. Set Point Mag.

3.1.6.

( FB Gain), . ( ), . Mag (. 3-19).

3-94

3. -

. 3-19.

0.50.7 , . FB Gain.

:

1. FB Gain , (. 3-20).

. 3-20. FB Gain

2. FB Gain, Mag .

3. FB Gain, . Mag (. . 3-19).

4. FB Gain, 0.50.7 FB Gain, Mag.

. FB Gain 0.3, .

3-95

FB Gain 0.3 , :

1. ( ). 2. Mag 2050 %,

( Gain) ( Preamplifier).

3. ( Amplitude) Mag 2025.

. , Mag 20.

4. ( ). 5. ,

( 3.1.7 . 3-96), 14.

3.1.7. Scan ( )

(. 3-21).

. 3-21.

Scan (. 3-22).

. 3-22. Scan

1D- , . 2D- .

Mode ( )

Semicontact Topography (. 3-23). .

3-96

3. -

. 3-23.

:

, , Z-, ;

, , , , , 0.51 . , , Set Point, FB Gain. .

, : 1. ,

2D- (. 3-24).

. 3-24. 2D- 1 ;

2 ,

3-97

2. (. 1 . 3-24).

. Scan Size.

3. . , . , (. 2 . 3-24) . . (. . 3-16).

, ,

X Y (Point Number), ( Scan Size) (Step Size) (. 3-25).

. 3-25

Point Number, Scan Size, Step Size :

Point Number: Scan Size ; Step Size . Scan Size: Step Size ; Point Number . Step Size: Scan Size ; Point Number .

3-98

3. -

, , . , , .

( Frequency) 0.52 (. . 3-25).

,

Sensor Height. :

1. Scan Setings (. 2-16), Scan.

. 3-26

2. , , SensorHeight.

3. OK, .

3-99

3.1.8.

( TGQ-1, 3 ).

,

, , , .

Run, Scan (. 3-27).

. 3-27

Run:

2D- , , (. 3-28);

. 3-28.

1D- (. 3-29);

3-100

3. -

. 3-29. Height

Scan ,

: Pause, Restart, Stop (. 3-30).

. 3-30

- ,

Stop .

(. . 3-28, . 3-29) ,

. ,

Subtract. None (. 3-30). Plane (. 3-31),

, , , . 3-28, , . 3-32.

. 3-31

3-101

. 3-32.

, 1D- . . 3-29, , . 3-33.

. 3-33. Height

Subtract . .

. , Subtract, .

3-102

3. -

, Frequency (. 3-34), Set Point (. 3-35), FB Gain (. 3-35). .

. 3-34

. 3-35

Pause.

, . . , , : Frequency, Set Point FB Gain.

Restart .

, , .

, , .

, , .

, .

. , Set Point , .

3-103

3.1.9.

: 1. File Save. 2. ,

( C:\Program Files\NT-MDT\Nova).

3. *.mdt.

. NoNameXX.mdt, XX Nova.

3.1.10. : 1. ( ). 2. , :

1) Approach ( ) (. 3-36).

. 3-36.

2) Moving Backward (. 3-37) Approach. C 23 .

. 3-37

3) , Fast Backward (. 3-38).

. 3-38

3-104

3. -

3.2. 3.2.1.

. (Set Point), , , ( Mag). Mag , ( ).

Mag (, ) . . , , ( Mag), .

, , , ( ) , . . . .

3.2.2. ,

3.1 . 3-85. ,

, .

. AU020 AU030. .

3-105

1. (. 3.1.2 . 3-86). 2. (. 3.1.3 . 3-86). 3. Mag (. 3.1.4 . 3-90). 4. (. 3.1.5 . 3-91). 5.

(. 3.1.6 . 3-94). 6. (. 3.1.7 . 3-96). 7. (. 3.1.8 . 3-100).

, , .

3.2.3. ,

Mag , :

1. Scan Setting (. 3-39) Settings Scan.

. 3-39.

3-106

3. -

2. Mag.

3. OK, .

3.2.4. Run,

Scan:

2D- : ( Height), ( Mag) (. 3-40);

. 3-40. ( TGQ-1)

1D- (. 3-41).

. 3-41. Mag

3-107

3.3. 3.3.1.

, , , , . , . , (. 3-42).

. 3-42

.

, . , , , ,

3.3.2. , ,

.

. , AU020 AU030. .

3-108

3. -

1. (. 3.1.2 . 3-86). 2. (. 3.1.3 . 3-86). 3. Mag (. 3.1.4 . 3-90). 4. (. 3.1.5 . 3-91). 5.

(. 3.1.6 . 3-94). 6. (. 3.1.7 . 3-96). 7. (. 3.1.8 . 3-100). ,

, .

3.3.3. Mode ( )

Phase Contrast (. 3-43). .

. 3-43.

:

1. ( ).

2. Phase (. 3-44).

. 3-44

3-109

Phase 0 180 , 0 360 .

3. Resonance , Phase (. 3-45) ( ), (. 3-46). , 0 180 . .

. 3-45

. 3-46

3-110

3. -

3.3.4. Run,

Scan:

2D- : ( Height), ( Phase) (. 3-47).

. 3-47.

1D- (. 3-48)

. 3-48. Phase

3.3.5. , : Set Point ( ); ( Phase); ( FB Gain); ( ).

3-111

4.

4.1.

.

.

. DFL(Height). , , , .

4.2. (DFL(Height))

z- , .. DFL(Height).

, z- ( Height) DFL. DFL(Height) , , , .

. , .

4.2.1. ,

(. , 3, 2, . ).

: 1. (. 4.2.2 . 3-113); 2. , ..

(. 4.2.3 . 3-113); 3. (. 4.2.4 . 3-116); 4. (. 4.2.5 . 3-118); 5. (. 4.2.6 . 3-119); 6. (. 4.2.7 . 3-122).

3-112

3. -

. 4.2.2.

Curves ( ) (. 4-1).

. 4-1. Curves

4.2.3.

1. a (. . 4-2). Height.

. 4-2

. : Height ,

Z; SetPoint ,

, ;

BiasVoltage , , , .

2. f1(a) , . DFL (. 4-3).

. 4-3

3-113

. a, , f1(a).

3. Land, Lift (. 4-4).

. 4-4

. Land ( ) ,

, . Lift , , ..

.

Land = 0.

. Height (. 4-5): 1) 1 Height , Lift, 2) 2 - , Land 3) 3 - , Lift; 4) 4 - Height .

. 4-5

3-114

3. -

1. ( Point in curve) ( Curve Time). Point in curve 1000. Curve Time 15 .

. 4-6

2. , ( f1(a) safety limits).

. , DFL(Height) , , ( Level) , 5-10 , Set Point. , , , , 3-5 Set Point.

,

Height. , . Z- (. 4-7).

. 4-7. Z-

, , , .. Curve Time.

3-115

4.2.4.

. Select Frame (. 4-8) . 2D- .

. 4-8

: ; , ; .

.

.

: 1. XY Point Set Point (. 4-9).

. 4-9

2. , .

3. Curves.

3-116

3. -

,

, . 1. XY Point Set Line (. 4-10).

. 4-10

2. 2D- , (. 4-11). ; .

. 4-11

3. , , Positions.

. 1. XY Point Set Grid (. 4-12).

. 4-12

.

3-117

2. , (. 4-13). .

. 4-13

3. Positions (. 4-12) X Y.

4.2.5.

. , ,

, . ,

.

3-118

3. -

4.2.6.

(. 4-14). DFL(Heigth) .

, , (. 4-15). . 25 .

. 4-14. DFL(Heigth)

. 4-15. ,

. 4-14 , ( ) ( ).

. , Height, () ().

. .

. DFL(Heigth) . 4-16.

3-119

. 4-16.

. , (. 4-17).

. 4-17.

Data, (. , 2).

- , .

3-120

3. -

: 1. Data. 2. (.1 . 4-18).

. 4-18. Data 1 ; 2 ;

3 ; 4

3. 2, 3, .

4. , , 4, ( ) .

3-121

4.2.7.

. . z- DFL , DFL , , , (. 4-19).

. 4-19

,

Z. : F = k Height (1) k (. ).

Height.

(Pair Markers) , . 4-20.

. 4-20

3-122

3. -

DX DY Height DFL. Height = 25 .

0.03 /. , :

F = 0.03 /25 0.8 (2)

, ( ) .

, , Set Point = 2 . Height, . 4-21. Set Point; DFL .

. 4-21

Set Point = 2 :

F = 0.03 /81 2.4 . (3)

4.3. (Ipr-low(Bias Voltage)) ,

( Ipr-low) ( Bias Voltage). , .

, (. , 3, 2, . ). . BV .

3-123

4.3.1. ,

4.2 (DFL(Height)) . 3-112. . , .

1. , Contact (. 4-22).

. 4-22

2. - . : a Scan (

). b Mode Spreading Resistance (. 4-23).

. 4-23

-

(. 4-24):

)

)

. 4-24 ) ; )

3-124

3. -

1. ( ).

2. Bais Voltage; f1(a) Ipr-low (. 4-25).

. 4-25

3. ( From, To).

4. (. 4-26). Curve Time 1 .

. 4-26

4. ( , , ) (. 4-27).

. 4-27

5. . 6. .

3-125

4.3.2.

(. 4-28). Ipr-low(Bias Voltage) . , , .

. 4-28

, ( ) ( ).

. .

. , (. 4-29).

. 4-29.

Data, (. , 2).

3-126

3. -

4.4. (Mag(Height))

z- , .. Mag(Height). Mag , . Height

, z- . ,

, .

, (. , 3, 2, . ).

4.4.1. ,

4.2 (DFL(Height)) . 3-112. . , .

: 1. ,

SemiContact (. 4-30).

. 4-30

2. ( ).

3. Height; f1(a) Mag (. 4-31).

. 4-31

4. ( Land, Lift). .

3-127

5. (. 4-32).

. 4-32

. Mag ( Land), . Mag 10 % Mag ( Level 0.5 2 ). Height , .

6. ( , , ) (. 4-33).

. 4-33

7. . 8. .

4.4.2. (. 4-34).

Mag(Heigth) . , , .

3-128

3. -

. 4-34

, ( ), ( ).

. , Height, () ().

. .

. , (. 4-35).

. 4-35.

Data, (. , 2).

3-129

4.4.3. Mag(Heigth)

.

. , , z- . , z- ( Height):

= Height (1)

, . , , . Height, Mag ( Set Point) , .

, Mag Height:

Height = K Mag (2) .

Mag Height. (Pair Markers) (. 4-36). DX DY Height Mag.

. 4-36

3-130

3. -

, (2) , , Mag, :

K = Height / Mag = DX / DY= 31.7 / 4 = 7.93 [/] (3)

: = KMag (4) , Set Point = 8 ,

64 .

. , Gain, Lock-In - ( Scheme ). , K . Lock-In , . , , .

4.5. (Phase(Height))

z- , .. Phase(Height).

, , , , .

, (. , 3, 2, . ). 4.5.1.

, 4.2 (. 3-112). . , .

: 1. ,

SemiContact (. 4-37).

. 4-37

3-131

2. ( ).

3. Height; f1(a) Phase (. 4-38).

. 4-38

4. ( Land Lift). .

. ( Land) Height 10-20 % Mag (. 4-39). Mag(Height) (. . 4.4 (Mag(Height)) . 3-127). Height ~ -50 .

Mag

~ 10-20%

. 4-39

5. (. 4-40).

. 4-40

3-132

3. -

6. ( , , ) (. 4-33).

. 4-41

7. . 8. .

4.5.2. (. 4-42).

Phase(Height) . , , .

. 4-42

, ( ) ( ).

. , Height, () ().

. .

3-133

Phase(Height) , , . , . 4-42 . .

. 4-43 . . , , .. , ( Amplitude).

. 4-43

. , (. 4-44).

. 4-44.

Data, (. , 2).

3-134

3. - 1. 1.1. , 1.2. 1.2.1. 1.2.2. 1.2.3. 1.2.4.

1.3. 1.4. 1.5. 1.5.1. 1.5.2. 1.5.2.1. 1.5.2.2. 1.5.2.3.

1.5.3. 1.5.4. 1.5.5. 1.5.6. 1.5.7.

1.6. 1.6.1. 1.6.2. 1.6.2.1. 1.6.2.2. 1.6.2.3.

1.6.3. 1.6.4. 1.6.5. 1.6.6.

2. - 2.1. 2.1.1. 2.1.2. 2.1.3. DFL2.1.4. 2.1.5. 2.1.6. 2.1.7. 2.1.8. 2.1.9.

2.2. - 2.2.1. 2.2.2. 2.2.3.

2.3. 2.3.1. 2.3.2. 2.3.3. 2.3.4.

2.4. 2.4.1. 2.4.2. 2.4.3. 2.4.4. 2.4.5.

2.5. 2.5.1. 2.5.2. 2.5.3. 2.5.4. 2.5.5.

2.6. 2.6.1. 2.6.2. 2.6.3. 2.6.4.

2.7. 2.7.1. 2.7.2. 2.7.3. 2.7.4.

3. - 3.1. 3.1.1. 3.1.2. 3.1.3. 3.1.4. Mag3.1.5. 3.1.6. 3.1.7. 3.1.8. 3.1.9. 3.1.10.

3.2. 3.2.1. 3.2.2. 3.2.3. 3.2.4.

3.3. 3.3.1. 3.3.2. 3.3.3. 3.3.4. 3.3.5.

4. 4.1. 4.2. (DFL(Height))4.2.1. 4.2.2. 4.2.3. 4.2.4. 4.2.5. 4.2.6. 4.2.7.

4.3. (Iprlow(BiasVoltage))4.3.1. 4.3.2.

4.4. (Mag(Height))4.4.1. 4.4.2. 4.4.3.

4.5. (Phase(Height))4.5.1. 4.5.2.

Documents

Atomic force microscopy