Upload
others
View
12
Download
0
Embed Size (px)
Citation preview
The Lumina Instruments AT1 introduces an innovative technology in laser scanning • Enables full surface scan and imaging of sub-nanometer
film coatings and defects • Scans and displays a 50-mm x 50-mm sample in 30
seconds • Capable on transparent, silicon, compound
semiconductor or metal substrates • Accommodates non-circular and fragile substrates • Able to separate top/bottom features on transparent
substrates • Up to 300x300 mm scan area • Can scribe location of defects for further analysis
© Copyright 2019 Lumina Instruments, All rights reserved
AT1 Thin Film Defect Optical Scanner
The AT1 has 4 detection channels for imaging of sub-nm transparent stains, particles, and crystal defects.
The polarization image generated by the AT1 is shown in the images below. Local film thickness variations as small as a few Angstroms are easily captured by the system.
4” x 8” Glass Display Full view of ITO on Glass Thin Film (~ 15 Angstrom) defects
25mm
25mm
Polarization Slope
Reflectivity Dark Field
4 Detection channels: • Polarization
(film, scratches) • Slope
(height, depth) • Reflectivity
(particles on rough surface)
• Dark Field (particles, scratches)
San Jose CA 95110 Tel +1.408.320.2938 [email protected]
www.lumina-inst.com
System Information
© Copyright 2019 Lumina Instruments, All rights reserved
Stress Points within Glass Substrate
TOOL SPECIFICATIONS Scan time 50mm x 50mm in 30 seconds Scan area 300x300 mm Scribe Diamond scribe - adjustable Sensitivity Film Defects <50 Angstroms Operating Temp 18 – 30o C Voltage 120 / 230 VAC Current 6 A / 4 A Weight 450 lbs / 205 kg
79”
Bumps on Sapphire
Scribed mark – water stain
Lumina scribe mark
Ridge on Sapphire
Glass crystal defect: Microscope vs Lumina Microscope Lumina AT1 image
Stain on Glass: dark on top, bright at the bottom