Applied Polymer Photonics:

Chemical and Biological Sensing

Applied Polymer Photonics:

Chemical and Biological Sensing

The University of Akron / U.S. Air Force Collaborative CenterPolymer Photonics Workshop

April 22, 2004

The University of Akron / U.S. Air Force Collaborative CenterPolymer Photonics Workshop

April 22, 2004

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Edward M. Zdankiewicz, P.E.EnviroChipx LLC

Edward M. Zdankiewicz, P.E.EnviroChipx LLC

Outline

• Markets

• Applications

• Materials and microstructures

• Chem / bio sensor examples

• What does the future hold?

• Question and answer

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FY 2004 Worldwide Microsystems Market

IT / Peripherals$13,400M11.5% CAGR

Environmental Monitoring$1,750M35.4% CAGR

Automotive$2,350M16.9% CAGR

Industrial / Automation$1,850M11.6% CAGR

Medical / Biochemical$7,400M32.5% CAGR

Telecommunications$3,650M128.1% CAGR

Total MST Market$30,400M21% CAGR

Sources: Roger Grace, Nexus, MST News.

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Microsystems for Chem / Bio Sensing

IT / Peripherals$13,400M11.5% CAGR

Environmental Monitoring$1,750M35.4% CAGR

Automotive$780M16.9% CAGR

Industrial / Automation$615M11.6% CAGR

Medical / Biochemical$7,400M32.5% CAGR

Telecommunications$3,650M128.1% CAGR

Total Chem / Bio MST Market$10,545M21% CAGR

Sources: Roger Grace, Nexus, MST News, EnviroChipx.

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Biomed / Biotech Opportunities for MEMS

Biotech applicationsBiomed applications• Air, water, soil quality• Agriculture • Anti-bioterrorism• Anti-microbial agent delivery• Bioremediation• Biosensors• Disease diagnostics• Environmental monitoring• Fertility therapy• Food and beverage safety• Genomics• Metabolomics• Proteomics• Toxic chemical detection• Transcriptomics• Veterinary medicine

• Anti-bioterrorism• Drug delivery• Drug development• Emergency medicine• Extended care / nursing homes• Fertility therapy• Genomics• Infection control• In-vitro medical diagnostics• In-vivo medical diagnostics• Metabolomics• Out patient / home health care• Proteomics• Surgical medicine• Toxic chemical detection• Transcriptomics

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Measuring the Chemistry of Life

• Human• Mammal• Reptile• Amphibian• Bird• Fish • Insect• Arachnid• Plant• Bacteria• Fungi• Virus

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Sources: Goodacre (2003), EnviroChipx.

Chem / bio sensors

• Air• Water• Food• Soil• Toxics

Biomedical

BiotechnicalEnvironmental

Typical Chem / Bio Analytes Measured• Hydrogen sulfide (H2S)• Human IgG• Iodide ion (I-)• Oxygen (O2)• p-nitrophenol phosphate• Penicillin• Potassium ion (K+)• Rabbit IgG• Ribonucleic acid (RNA)• Sulfur dioxide (SO2)• Testosterone• Thyroxine• Trinitrotoluene (TNT)• Urea• Water vapor

… and many more analytes arebeing added on a regular basis ...

• Adenosine triphosphate (ATP)• Ammonia (NH3)• Antigens (using matching antibody)• Bilirubin• Biotin• Bromide ion (Br-)• Carbon dioxide (CO2)• Carbon Monoxide (CO)• Chloride ion (Cl-)• Cortisol• Deoxyribonucleic acid (DNA)• Glucose• Hepatitis B• Hydrogen (H2)• Hydrogen ion (pH)• Hydrogen cyanide (HCN)

Sources: Eggins (1996), EnviroChipx.

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Polymers in MEMS: Where?

Source: Primedyne Systems.

Chip Level• passive (protective) layers• substrates• sensing elements• optics / waveguides• light pipes• transduction layers• micro-actuators• dielectrics• insulators• passive microstructures

Packaged Device Level• passive (protective) layers• optics / waveguides• gas / chemical filters• chip carriers / packaging• ventilated housings• moisture / dust filters

P.C. Board / Module Level• optics / waveguides• light pipes • P.C. board substrates• insulators• mounting pastes and adhesives• passive (protective) layers• EMF / RFI shielding• thermal management

Systems Level• optical windows• housings• enclosures• card files• EMI / RFI shielding• displays• mechanisms• macro-actuators• keypads

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Photonic Polymers in MEMS: Where?

Chip Level• passive (protective) layers• substrates• sensing elements• optics / waveguides• light pipes• transduction layers• micro-actuators• dielectrics• insulators• passive microstructures

Packaged Device Level• passive (protective) layers• optics / waveguides• gas / chemical filters• chip carriers / packaging• ventilated housings• moisture / dust filters

P.C. Board / Module Level• optics / waveguides• light pipes• P.C. board substrates• insulators• mounting pastes and adhesives• passive (protective) layers• EMF / RFI shielding• thermal management

Systems Level• optical windows• housings• enclosures• card files• EMI / RFI shielding• displays• mechanisms• macro-actuators• keypads

Source: Primedyne Systems.

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Photonic Polymers in Commercial Use

Sources: Eggins (1996), Krohn (1992), EnviroChipx.

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Optical structures • bandpass filters • couplers• diffraction gratings• lenses• mirrors• optical fibers• optical windows• planar waveguides• prisms

100 µm800 nm190 nm 2.5 µm400 nm 16 µm

Polymers (i.e., polyacrylamide, etc.)GlassFused silica

Materials• nylon• teflon• polyacrylamide• polyethersulfone• polyimide• polysulfone

Optical Microstructures Using Polymers

120 µm

Diffractiongrating

Diffraction lens array

Optically clearelastomer biochipsMicro lens

arrays

External cavitytunable lasersource

Sources: MEMS Optical, Fluidigm, Heptagon Oy (Finland) and New Focus.

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Polymers and MEMS Manufacturing

• Thin film deposition— spin-on— sol gel “drop and dispense”— vapor deposited— sputtered— molecular beam epitaxy

• Thick film deposition— stencil printed— screen printed— inkjet printed— micro-stamped

• Deposited sacrificial layer• Direct-write sacrificial layer• Multi-layer lamination• Thermal embossing• Roll-to-roll embossing• Micro injection moldingSources: Infineon, AFRL, I-Stat, MST News.

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Types of Optical Chem / Bio Sensors

• Intensity and phase angle based• Majority chem / bio sensors are intensity-modulated• Majority of applications are biochemical / biological

Intensity-modulated

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Intensity-modulated

Transmissive— absorption *— evanescent

— fluorescence

— refractive

— scattering

Transmissive— absorption *— evanescent

— fluorescence

— refractive

— scattering

Phase angle-modulatedPhase angle-modulated

* includes white and spectral

response (colorimetric) devices.

Reflective— absorption *— evanescent

— fluorescence

— refractive

— scattering

Reflective— absorption *— evanescent

— fluorescence

— refractive

— scattering

InterferometricInterferometric

Transmissive Sensors

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Simple transmissive

PHOTO-TRANSISTORS

LIGHT EMITTINGDIODE (LED)

SAMPLING CELL

SAMPLE GAS OUT

SAMPLE GAS IN

FILTERS

IR LIGHT

Non-dispersive absorption

Non-dispersive infrared (NDIR)

Scattering transmissive

20 x 20 x 60 mmoptical bench

Sources: Krohn (1992), Texas Instruments.

.

Reflective Sensors

Simple reflectiveReflected

laser beams

Microcantilevers coated with PSA antibodies

Mediated reflective Sized forcatheters

In-vivo blood gas sensorSources: C.C. Berkeley, Protein Data Bank, Krohn (1992), FISO.

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Refractive Sensors

Prism materials• Nylon • Teflon• Polyethersulfone• Polysulfone

Sources: GEMS Sensors.

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Combined Technology Sensors

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Sources: SpectRx, STEAG microParts (Germany)

• Early detection of newborn jaundice• Non-invasive … no blood sample• Analyses light reflected from infant’s

forehead

• Micro-spectrometer engine• Visible light bandwidth• Reflection / emission measurement• Absorption / transmission measurement

Optical grating

Interchangeable opticalsensing heads (polymer-based)

BiliChek™ handheld bilirubin analyzer

Injection moldedoptical bench

Solid statephotodetector

Evanescent Wave Sensors

• Cladding carries optical energy

• Modulated by sensitive layer on fiber core or cladding

• Surface plasmon resonance … sensitive layer is a metal or semiconductor

Evanescent region

Prism

Reflective evanescent

Evanescent region

Sensitive layer

Sensitive layer

Transmissive evanescentSources: Krohn (1992), Eggins (1996).

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Fluorescence Sensors

Lens • Fluorescence

• Chemiluminescence

• BioluminescenceFocusedUnfocused

Sources: Krohn (1992), Ocean Optics.

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Fluorescence - Based DNA DetectionTotal internal reflection fluorescence (TIRF)

Strong activityWeak activityEqual activityInactive

Sources: Agilent, Affymetrix,Caliper and Cepheid.

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Fluorescence - Based Protein Sensors

1 mm

Disposable microtiter plates

Integratedmicrofluidics

Micro-injectedmolded

96 micro-wells

Reagentreservoir

20 x 38 x 3 mm

Polymer lab-on-chip for clinical microbiology applications

Sources: Integrated Mechanization Solutions BV (Netherlands), Merlin Diagnostika (Germany), Scientific American .

Cell growth rates optically monitored using a STEAG microParts micro-spectrometer.

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Fluorescence + Fiberoptics + Microspheres

DNA encodedmicrospheres

50 - 100 µmbead diameters Micro-well

plate readers

Source: Illumina Inc.

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Futures: Is There a Moore’s Law for Gene Chips?

1 000

Increasingfeatures

vs.decreasingsensitivity?

•••

Singlemolecule

detection?

Sources: IEEE Spectrum (2001), Affymetrix, Agilent.

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Futures: Top Down MEMS

• Integrated optics and microfluidics

• On-chip sources and detectors

• High volume, low cost, disposables

• Less silicon … more polymers

• True 3-dimensional micro-optics

• Electro-optical polymers … fully digital

• Sub-micron patterned micro-optics

1 µm … note the scale!

PMMAmicro-coiledtubing

2 mm

Micro-textured lens

Nano diffraction grating 1µm

Sources: IEEE J. Sensors (2003), MRS Bulletin (2001).

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Futures: Bottoms Up Nanotechnology

• Nano-engineered sensing films— nano stamping

— nano dip pen

— molecular self-assembly

• Self-assembled optical paths (?)— planar waveguides

— optical fibers

• Self-assembled optics (?)— lenses

— diffraction gratings

— mirrors

— prisms

Planarwaveguide

Opticalfiber

Latexmicrosphere

30-nm wide PMMA gratingwith 200-nm spacing

30-nm wide PMMA gratingwith 200-nm spacing

Self - assembled sensing films

Sources: IEEE J. Sensors (2003), MRS Bulletin (2001). — couplers04.22.04 EZ - 25

Microsystems for Life ™

Contacts:

Ed ZdankiewiczCEO and CTO

EnviroChipx LLC

Tel: (216) 374 - 3377

Email: edzdankiewicz@att.net

Terry MartellCOO and CFO

EnviroChipx LLC

Tel: (330) 655 - 2238

Email: thmartell@alltel.net

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