Application of hydrogen bubbles in silikon for Smart – Cut process

Karolina Milenko

Faculty of Physics Warsaw University of Technology

Supervisors: V.F.Reutow A.S.Sohatsky

Flerov Laboratory of Nuclear Reactions

Making silicon blisters and flakes

Si

600 oC Si

Si

400 oC

300 oC

Ions H+

Blisters

Flakes

Blisters

Flakes

Wafer A

1. H+ implantation

Smart- Cut

Wafer A

Wafer B

Wafer B

Wafer A

Wafer B

2. Cleaning + Bonding

3. Heat Treatment

4. Polishing

Swelling Si

Si

Ions H+

600 oC Si

Swelling Si

Swelling Si

Swelling Si

hd

d~2

hx ~

dhx

2