-
7/22/2019 Application Note Mw31 65nm
1/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 1/ [email protected] 03/08/06
!
!"#$%$&
!" ""
! # ! '$( & $) $
* +, - $
!"!)&...%
$ %!% & %' ! ( !
%! ) $ ! ' !
! ! ! * % % ! +, ! &)
1. Recent trends in CMOS technology
-* ' ! '' ' %! %!! ! !
./ %0* ! * ! ! %% '! ! %%' '
11 ( ) $ ( %' & ' &
! ! ' !!) $!& ' ! '' 2
%!! ! 3 444* 11 *
%% & % ! 13) ! % 5+ !'
!! & !) $ ! & !! % ! 1336)
- % 444 133 133 133 1336 1334 13
' !
3 63 3 1 6 1
7! !! (1
(1
(1
(8
!9 ,
!9 ,
!9 ,
7! ! 3 +3 +3 +3
,!:1 3 153 53 433 33 133 533
% .1/ 5) 1)5 ) 3) 3) 3) 3)3
/ " ) $ &$ 0 $ 1
$ %! ! ! ! ! * ! ! -) ) $
! !! ! & %* 0 .(1/ ! ! & !
! !) $ ! ! ' ! 2 ! !! !
&! !) 43 * ! 0 ! !& ' ! !* ;'! )1
2) $ ! 0* ! ! ;
%) 9'* ! 0 ! ! !2! ) $
! ! 0% & !' & !2! ! %' %!
! & !%%! +, ! ! !* (
+! ! !)
-
7/22/2019 Application Note Mw31 65nm
2/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 2/ [email protected] 03/08/06
-- 1 1 1 1
!
!
!
Technology (log scale)
Year
1!2!
! -!
3!
4!
1!
1!
!
!
!
)(
$
5$ $)
)(
$) 00$
11!
" ) $)( $
! !% !* ! ! !%%0! & ! ! 3)6* !
!! ! & ! 1) ! " ! ! !
! ! % 1 43 )
$ ! !2 ! & ! ! !* '+!
! ') $ % ! '!
! ' ! -) 1) ! & ! ! ! !%%! ! !
!* ! !% % !) $ % %!2 ! !* !
! & &' ' ! .! %!2 1334/)
-- 1 1 1 1
Production
Year
!
2!
!
-!
3!
!
1!
4!
1" )( !0 ( $ ( 0$ &! 627
-
7/22/2019 Application Note Mw31 65nm
3/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 3/ [email protected] 03/08/06
$ ! 43+ % ! % & 7! ! %!% 133
-
7/22/2019 Application Note Mw31 65nm
4/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 4/ [email protected] 03/08/06
9 .0 3/
!
.0 /
I
.0 3)/
-!
.J3H/
!
.3H/
I
.+3H/
9+
'
'
82
%
&
%
7 %
17 %
! !!
High speedvariant
GeneralPurpose variant
Low leakagevariant
*
3! &
! )
" $ $) $ & $) 3! $)(
$ ! ! 0 ! '!! ! !2! .& ) /) $ '!!
! !2! ! ! ! %&* ! ! !2
!%%! ! & '* & % %! !")
$ %!! '! ! 3)A )1A* % '!!)
* 0 A ! )3A )KI * % !
% & ! %& '!! !'!!& + )
Gate dielectric
2 '! 0 ! 0 .(1/
!& !! ! !%!& !2!) 8 !!
%' .9+E,F/ ! %! (1* & ( ' ! &!%!) 0 .(08/ ! & %% ! !
'
%! (1 ! !! !+0+ ' . 5/)
% (0:8 !* 0 %' ! & !>)
-
7/22/2019 Application Note Mw31 65nm
5/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 5/ [email protected] 03/08/06
1!
8(
$
15$
9
1!
8(
$
9(5$
9
+ 0$: ;
-
7/22/2019 Application Note Mw31 65nm
6/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 6/ [email protected] 03/08/06
-
7/22/2019 Application Note Mw31 65nm
7/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 7/ [email protected] 03/08/06
*= $
>$$ $
!$$ (
) $)
$ :;
! &&$
)
! &&$
)
+ ,
*=
-
7/22/2019 Application Note Mw31 65nm
8/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 8/ [email protected] 03/08/06
!9@2 !
+ , A@B! +&&@ !
C & $)
!9!! $
:/;
-
7/22/2019 Application Note Mw31 65nm
9/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 9/ [email protected] 03/08/06
DE E/@ E@ E
&&@
E$@ E
:; DE )$$ & , *= :A@ B! +&&@ !;
&&@
E$@1 E
:/; DE )$$ & )) 0 *= :A@ B! +&&@ !;
-" DE )$$ : ; & $) + , ))0 *=
$ !&!2 ! +% ( ' !2!
:L .I !2!/ 33 :L .9 %/* ! :A ' ! N !0 !
% AM 3 A .-) 4/) 8 ! '! A !
!2! ( ! % ()
-
7/22/2019 Application Note Mw31 65nm
10/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 10/ [email protected] 03/08/06
P-channel MOS device characteristics
$ ( ' ! 53 L:L +!2! ( !
% 633 L:L +% () $ '! . $!& 5/ ! %!! * !
! !%%! +%* ! G + !
+% ! ! % . ) ! ! +
'!!/) $ !2! !2!& * ! :L +!2!
( ! ! 33 :L +% ') $ + %( ' '! !
7 !! ! %' ! &! !0 !%!& ! 3)6
:L .-) 3/)
% +&
'( )
+&
* +
! 63 63 ' 3
$ A! .A/ 3) A 3)1 A
.:/ 3)5 :L 3)6 :L
.:/ :L 33 :L
/ 4" 0*= 0!$ &$ /( $) 3 ! >*= $)( 0 *
*= $
>$$ $
!$$ (
) $)
$ :;
! &&$
)
! &&$
)
+ ,
0*=
-
7/22/2019 Application Note Mw31 65nm
11/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 11/ [email protected] 03/08/06
Metal Layers
%! .) /* !'!!& ! ! ! !$
!$2) $ ! !$ ! ! !* !' '* !$2
! 3L !&' !) ! ! ! !& !
! !&!* ' .!$/ %% ' .!$2/)
8 !
+
" * $) $) 0$$ & ( 2 & !$.$
* % ! ! !& ! ! ! !) $
! ! & %!) ! 0!%* ! !! ! +
!$:!$2 ! & !$2* & ! 2 %%
%!) !* ! ! %0 !2 ! %% !2 O%0
!O ! %!* * ) $ % !%%!)
? ! ! ! ! % !$* ! !$ !$1) ! 2
& %0 !2 !)
J J
!6:! ! ! !6 ! A!6
1" $ $$ ! /$ !$ (
-
7/22/2019 Application Note Mw31 65nm
12/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 12/ [email protected] 03/08/06
" $ !09 $$ $
!
%:!))!
!
%:!))!
!
J:!))!
!
!1))!
4" #9!0 & ( $ $) !09 $$ !! &! *
:>$$*?;
-
7/22/2019 Application Note Mw31 65nm
13/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 13/ [email protected] 03/08/06
! ! & ! 0 . ! ! %' ,
!& 1/ ! ! ! ) + ! (
5) * ! !$))!$4 !' ! ! !!)
* " ) $ %! 5
) I! !$! !$3! ! !* ! !$! !$2! ! 2
! !* ' %%)
Ring Inverter Simulation
$ ! ! ' ! %% ! !!) @ &'
! % ! ! % ;)
" )!$ ! ($ & $) $ & !$ :E*?;
$ ! ! & ! ! ! ! ' '!
) $ +! !' % % 3)* 3)1L !
) %% '! .A/ ! & .A A 3)L* )1A
3)1L* ! )3 A /* ! ; %' !)
-
7/22/2019 Application Note Mw31 65nm
14/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 14/ [email protected] 03/08/06
++ & $
3) L A 3)679"
3) L 1A 6) 79"
)3A 3 79"
3" =$ &F( !0!$ $) $) $)( :*?;
K ! ! ) ;!
,-.' % ( 3)+L * ,-.'
.3)L /* ! '! ,-.'
( + ) @ !* &' ! A !
! ! ! ;)
High Speed vs. Low leakage
I ! ! !& * ' ! & %! & !
88 ! !& !& ! .'!&),/) $ ! !!
6* ! ! ! %!) @ !!" %! %
! !2! )
-
7/22/2019 Application Note Mw31 65nm
15/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 15/ [email protected] 03/08/06
" ) )!$ ! ($ & $) $ $ !0 $)
0&! )) 0 , ! :E#/*?;
%
.3)1 !0/
9 !&
-! !.16 79"/
2" !$ & $) $ )) 0 ! ) $ &F( &$ /$
$) $/( $ )) :#/*?;
-
7/22/2019 Application Note Mw31 65nm
16/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 16/ [email protected] 03/08/06
$ % ! ! ! ' % & ! &
2 ! &0* ! & E %F .-) 4/) $ !! %! &
% ! !" !& ) % * 2 ! .16 79"/ &
! % .3)1 / * ! ! ! !& . ! 33 /* !
! '! ! ' 6) 8 2 O!
O %! ! !)
! %% % ! E !2!F ! -) 4* !
% !!) ! E %F* !2! ! ! .
79" 13* ! !%%0! ! 53 H % /* 53 H (8* !
! ! !& . /) !* !2! ( '
& ! ! ' ' %&) 9 % ( &
% !)
./ & 2
% &0
.1/ (% ! P
!2! Q
-" >) $) *= 0$ $ , !
-
7/22/2019 Application Note Mw31 65nm
17/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 17/ [email protected] 03/08/06
%!2
.3)6/
A !&
. /
!
.79"/
1" !$ & $) $ , ! ) $ &F(
/$ $) $/( $ ( :#/*?;
% * + '( )
!0 3)1 3)6 I!2! R33 S
(! ; 16 79" 79"
/ " >!0$ 0&! & $) $ :#/*?;
Conclusion
$ !%%! ! ! ( ! !* &! ! !'!!& !
!!) % % ! & !* ! !!
(8 ! ; ! ! ! &* +! &!2+
% ! + % '!!) 8+! ! +! ( ' !!
!' & %* ! ! ! %!!' ! ' ! '!
) -!* % %! !' & %! !2!* %!
% ! !2! )
- 2 5 ! 1 * %%!! ! !
% 133)
-
7/22/2019 Application Note Mw31 65nm
18/18
MICROWIND APPLICATION NOTE 65 nm technology
Page 18/ [email protected] 03/08/06
References
