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Analysis Report

AlTi=50/50at% target of Plansee & XMaM

Issued lab：The Chinese State Key Lab (SKL) of new Materials in

The University of Science and Technology in Beijing (USTB)

Reported by: Dr. Li Qun with Tel: +86-15321111536

Reported date: August 10th, 2017

Remark: The following analysis result is for reporting both the same and different

features of AlTi=50/50at% target made by Plansee & XMaM. The key quality

specification of density, micro grain structure and chemical composition for sputtering

target are included.

Sample A: Made by Plansee SE and provided by Hauzer Shanghai Ltd.

Sample B: Made by Xiamen Advanced & High-tech Materials Co., Ltd.

Density

Manufacturer Actual Density (g/cm3) Density by percent

Plansee 3.60 99.2%

XMaM 3.63 100%

Remark:

1) The theory density for AlTi=50/50at% target made by HIP is 3.63g/cm3.

2) Density by percent means (actual density/theory density) x 100%

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Micro grain structure

Plansee（×100） XMaM（×100）

Plansee（×200） XMaM（×200）

Plansee（×500） XMaM（×500）

The above micro structure pictures are observed by SEM(scanning electron

microscope) with back scattering mode. The bright parts means Titanium and The

dark parts means Aluminum.

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Chemical Composition in wt%

AlTi 50/50at% = AlTi 36/64wt%

Magr. Ti Al C N O S Fe Si

Plansee Balance 35.88 0.035 0.013 0.54 ＜0.005 0.036 ＜0.01

XMaM Balance 36.07 0.012 0.016 0.28 ＜0.002 0.054 0.016

The above analysis result means both Plansee and XMaM's chemical composition

are in the same level.

Conclusion:

Both Magrs. have the same quality level for AlTi=50/50at% target. However,

XMaM's target has smaller grain size, more uniform grain distribution and a little

higher density, which will contribute to get solid coating film and maybe longer

coating life.

The end.