Ajay P. Malshe, Ph.D. Mechanical Engineering University of Arkansas, Fayetteville, AR, U.S.A

Ajay P. Malshe, Tel (479) 575-6561 / E-mail <[email protected]>

Metrology and Metrology and Instrumentation Challenges Instrumentation Challenges for Nanomanufacturing and for Nanomanufacturing and Product Realization of Product Realization of Integrated SystemsIntegrated Systems

Ajay P. Malshe, Ph.D.Mechanical EngineeringUniversity of Arkansas, Fayetteville, AR, U.S.A.

ConvergenceConvergence of Scales-Signals-Domains for Integrated Systems… of Scales-Signals-Domains for Integrated Systems…


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Examples of integration of nano-micro-bio fornanomanufacturing of integrated systems, (a) nano mechanical machining system on chip

(status- fabrication complete and is being released);

(b) femto second, 380 fs, written periodic feature on diamond, smallest feature is about 50 nm;

(c) E. Coli Cellular actuation using 30 nm flagilar motors (see attached movie);

(d) 3D assembled cBN 0-2 um sized particles in TiN matrix (technology used to spin-off NanoMech);

(e) nanomechanical silicon beam for NEMS devices;

(f) nano mechanical patterning of GaAs surface for growing array of quantum structures 1.5μm scan of sample after a 5x5 grid of 25 (30 nm) 40μN indents spaced approximately 200nm apart.

(c)

(d)

15nm

(b)

(a)

50nm

(111)

(c)

cBN-TiN compositecoating

(d)

(e)

NanoMEEG

(f)

(d)

Nanotechnology for Mechanical Engineers Glimpses of Work in Malshe’s Materials and Manufacturing Research Group:


Nano-Manufacturing new products or adding value to current products to improve quality of life throughintegration of nano materials.

GRAND challenge: “Retaining functional signature of the NANO materials, devices, and components during nanomanufacturing and application.”


Typical needs of manufacturing:

Dimensional Repeatability

Functional Reproducibility

Behavioral Reliability Low cost Known standards Evolutionary

production Environmentally

benign


Example 1: Nano Machining (Time 90sec)


Example 2: Nano Machining Time (120sec)


Key challenges for metrology and instrumentation…Key challenges for metrology and instrumentation…

Nano materials- functional and dimensional classification

Tools and systems for reproducible nano manipulation* and post-synthesis processing (* self and/or intentional)- tolerance, materials and interfacial analysis

Integration and packaging- interconnects across the scale and functional boundaries

Addressing component reliability and system durability- known standards

Addressing “application specific” scientific and engineering designing-to-processing issues- proven design , modeling and scale up tools

Integrated CircuitsICs

Micro Electro Mechanical Systems (MEMS)

Quantum structure, Laser Dots

DNA Computing

Trend of Progress in the Field of Micro and Nano SystemsTrend of Progress in the Field of Micro and Nano Systems


ACKNOWLEDGEMENTS

DMII- National Science Foundation (NSF) EPSCoR- National Science Foundation (NSF)ECS- National Science Foundation (NSF) Air Force Office of Scientific Research (AFOSR) Students and post-doctoral fellows, and colleagues. Collaborators from SNL, LBNL, UNL and OSU, Valenite, Coherent and Texas A&M. Fayetteville and Springdale high schools.

Documents

Ajay P. Malshe, Ph.D. Mechanical Engineering University of Arkansas, Fayetteville, AR, U.S.A