Agilent 5530 Dynamic Calibrator Getting... · Chapter 1 Introducing the Agilent 5530 Introduction 1-2 Getting Started Guide 1 Introduction This chapter provides an overview of the

Agilent 5530 Dynamic Calibrator

Getting Started Guide

Getting Started Guide

Agilent 5530 Dynamic Calibrator

Agilent Technologies, Inc. 7.CD.L.03.11.97.R1.J.CW1FLSanta Clara Site5301 Stevens Creek BoulevardSanta Clara, California 95052-8059

©Copyright Agilent Technologies, Inc. 1992, 2000, 2001, 2008

All Rights Reserved. Reproduction, adaptation, or translations without prior written permission is prohibited, except as allowed under the copyright laws.

Printed: October 13, 2008

Printed in USA

Manual part number10747-90061

Certificationand Warranty

Certification

Agilent Technologies, Inc. certifies that this product met its published specification at the time of shipment from the factory. Agilent further certifies that its calibration measurements are traceable to national standards administered by the U. S. NIST, NRC Canada, Euromet members (NPL, PTB, BNM, etc.) or other recognized standards laboratories.

Warranty

Agilent warrants Agilent hardware, accessories and supplies against defects in materials and workmanship for a period specified by each product from date of shipment. If Agilent receives notice of such defects during the warranty period, Agilent will, at its option, either repair or replace products which prove to be defective. Replacement products may be either new or like-new.

Agilent warrants that Agilent software will not fail to execute its programming instructions, for the period specified above, due to defects in material and workmanship when properly installed and used.

If Agilent receives notice of such defects during the warranty period, Agilent will replace software media which does not execute its programming instructions due to such defects.

For detailed warranty information, see back matter.

Safety Considerations

General

This product and related documentation must be reviewed for familiarization with this safety markings and instructions before operation.

This product is a safety Class I instrument (provided with a protective earth terminal).

Before Applying Power

Verify that the product is set to match the available line voltage and the correct fuse is installed. Refer to instructions in Chapter 1 of the Manual.

Before Cleaning

Disconnect the product from operating power before cleaning.

Safety Earth Ground

An uninterruptible safety earth ground must be provided from the mains power source to the product input wiring terminals or supplied power cable.

Safety Considerations (contd)

Warning Symbols That May Be Used In This Book

Instruction manual symbol; the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual.

Indicates hazardous voltages.

Indicates earth (ground) terminal.

or

Indicates terminal is connected to chassis when such connection is not apparent.

Indicates Alternatingcurrent.

Indicates Direct current.


WARNINGBODILY INJURY OR DEATH MAY RESULT FROM FAILURE TO HEED A WARNING. DO NOT PROCEED BEYOND A WARNING UNTIL THE INDICATED CONDITIONS ARE FULLY UNDERSTOOD AND MET.

CAUTIONDamage to equipment, or incorrect measurement data, may result from failure to heed a caution. Do not proceed beyond a CAUTION until the indicated conditions are fully understood and met.

These CAUTION labels are required by the United States Center for Devices and Radiological Health. Failure to follow their instructions may result in personal injury.

This symbol indicates laser radiation

.

For additional safety and acoustic noise information, see back matter.

CONTINOUS WAVE 1mW 670nm

CLASS II LASER PRODUCT

LASER RADIATION-DO NOTSTARE INTO BEAM

CAUTION

ContentsContents
About This Guide
1 Introducing the Agilent 5530Introduction 1-2Overview of the Agilent 5530 1-3System Overview 1-4Overview of Laser Calibration 1-5Types of Measurements 1-7

2 Making Laser Measurements SafelyIntroduction 2-2Safety Labeling 2-2General Safety Precautions 2-3Using the Laser Head Safely 2-4Using Components Safely 2-4Protecting the Optics 2-5

3 Installing the Software and Connecting Components

Introduction 3-2Installing the Metrology Software 3-2

Computer Requirements 2Installing the software 4To start the Metrology Software (general) 5To exit the Metrology Software (general) 5

Connecting the Axis Module and Sensor Hub 3-6Communication LEDs 11

Getting Started Guide iii

Contents

Connecting the Sensors 3-11Connecting the Laser 3-14Agilent 10888A Remote Control Unit 3-16Agilent 10887-60202 A-quad-B Cable Assembly 3-17Connecting and Turning on Power 3-18

4 Using the Agilent 5530for the First Time

Introduction 4-2Task 1: Assembling and Connecting Components 4-3Task 2: Setting Up the Software 4-6Task 3: Aligning the Optics 4-10Task 4: Making the Measurements 4-13Task 5: Displaying and Saving Data 4-17

Displaying analysis data 17Saving data 19

Task 6: Exiting the Metrology Software 4-20

5 Setting Up the Software for a MeasurementIntroduction 5-2Terms to Know 5-4Conventions Used in the Software 5-6

Entering data 6Using buttons 7

Using Online Help 5-7Accessing the Software 5-8Selecting a Measurement Type 5-10Recalling Saved Setup Files and Data Files 5-12Saving Setup Data and Measurement Data Files 5-14Exiting the Metrology Software 5-16

iv Getting Started Guide

Contents

Setting Up the Laser Software for Your Measurement 5-17

Verifying the hardware setup 18Testing the remote control unit 19Setting up environmental compensation 19Defining laser parameters 20Resetting the laser position 22

Setting Up Your Measurement 5-22

6 Making the MeasurementIntroduction 6-2Mounting the Laser Head on the Tripod 6-2Collecting Measurement Data 6-7Recording Measurement Data 6-8Erasing Measurement Data 6-9

7 Analyzing, Transferring, and Printing Measurement Data

Introduction 7-2Displaying the Analyze Data Screen 7-3Changing the Data Display 7-4

Autoscaling 4Adding text to your graph 4Displaying and editing measurement data 5Printing the data analysis graph 7

Transferring Data to Another Program 7-8Setting Up the Data Analysis Graph 7-8

Selecting an industry standard 9Entering machine information 10Creating a compensation table 11

Getting Started Guide v

Contents

8 Ensuring Repeatability, Accuracy, and Resolution

Introduction 8-2Ensuring Accuracy 8-3

Compensating for environmental factors 4Correcting errors that affect linear measurements 4

Abbé error 5Deadpath error 6Cosine error 7

Correcting errors that affect angular measurements 9Correcting errors that affect straightness, squareness, and parallelism measurements 9

Ensuring the accuracy of straightness reflector mirrors 9Correcting for slope 10Compensating for environmental factors 11

Optimizing Repeatability From One Calibration to the Next 8-13Improving Resolution 8-14

9 Troubleshooting and MaintenanceIntroduction 9-2Troubleshooting the Agilent 5530 9-2Maintaining the Agilent 5530 9-4

Maintaining the optics 4Cleaning with pressurized air 4Cleaning with lens tissue and methanol or alcohol 4

Maintaining the air sensor 5Cleaning 5Checking accuracy quickly 5

vi Getting Started Guide

Contents

Maintaining material temperature sensor 6Cleaning 6Checking accuracy quickly 6

Returning sensors to Agilent for calibration 6Agilent Service Agreement 6

A GlossaryG-2

Index

Getting Started Guide vii

Contents

viii Getting Started Guide

About This GuideThe Agilent 5530 Dynamic Calibrator Getting Started Guide explains to first-time users how to set up and use the Agilent 5530 to perform a simple linear measurement (on your desk or bench instead of on a machine). It also provides an overview of the Agilent 10747F Metrology Software, guidelines for ensuring consistent accuracy, and troubleshooting and maintenance procedures.

For complete instructions on making actual machine measurements, see the Agilent 5530 Dynamic Calibrator Measurements Reference Guide. For screen-by-screen help when using the Agilent 10747F Metrology Software, use the online help feature.

This guide includes the following chapters:

Chapter 1 Introducing the Agilent 5530 —

Describes the system and discusses its capabilities and ease of use. It also provides an overview of laser calibration.

Chapter 2 Making Laser Measurements Safely —

Provides the information you need to use the system safely.

Chapter 3 Installing the Software and Connecting Components —

Explains how to set up and turn on the system.

Chapter 4 Using the Agilent 5530 for the First Time —

Provides step-by-step instructions for using the Agilent 5530 to make a simple linear measurement on your desk or bench. This tutorial is intended to help you understand how to use the system before you actually make a machine measurement.

Getting Started Guide ix

About This Guide

Chapter 5 Setting Up the Software for a Measurement —

Explains how to access and use the metrology software. It also explains how to set up the software for a measurement.

Chapter 6 Making the Measurement —

Explains how to use the metrology software to make a measurement and collect data.

Chapter 7 Analyzing, Transferring, and Printing Measurement Data —

Explains how to use data you collected during the measurement.

Chapter 8 Ensuring Repeatability, Accuracy, and Resolution —

Explains how you can ensure your measurements are as consistently accurate as possible.

Chapter 9 Troubleshooting and Maintenance —

Provides instructions for user-level troubleshooting and routine maintenance, such as cleaning the optics.

Glossary — Defines terms used in this guide.

Index

x Getting Started Guide

1

Introducing the Agilent 5530

Chapter 1 Introducing the Agilent 5530

Introduction

1

IntroductionThis chapter provides an overview of the Agilent 5530 Dynamic Calibrator and briefly describes the types of measurements you can make with it. Figure 1-1 shows the various components used in a typical system configuration.

Figure 1-1. Agilent 5530 set up for a typical linear measurement

1 Agilent 5519A/B Laser Head

2 Agilent 10766A Linear Interferometer with an Agilent 10767A Linear Retroreflector attached

3 Height adjuster

4 Personal Computer (PC)

5 Agilent 10888A Remote Control Unit (optional)

6 Agilent E1738A Air Sensor (optional)

7 Agilent 10767A Linear Retroreflector

8 Agilent E1737A Material Temperature Sensor (optional)

9 Agilent 10753B Tripod

8

12

5

9

6

8

3

7

4

3

1-2 Getting Started Guide


Overview of the Agilent 5530

1

Overview of the Agilent 5530

The Agilent 5530 Dynamic Calibrator is a laser system used to ensure the accuracy of a machine’s motion and positioning. Controlled through your PC (with the Microsoft® Windows operating system installed), the system is able to collect and analyze measurement data for a number of measurements. The Agilent 10747F Metrology Software was designed specifically for machine calibration so you do not need prior PC experience — and complete online help is provided.

After you have made a machine measurement using the Agilent 5530, the system generates plots and reports, including environmental and machine data. You can save the data in a format compatible with popular electronic spreadsheets (such as Microsoft® Excel) for custom data analysis. You can also store and recall measurement setups and default settings so you do not need to reenter them for each measurement.

The Agilent 5530 allows you to select resolution and error limits and choose the number of standard deviations shown on plots. It also offers higher resolution, including an internal resolution extension feature and optional high-resolution optics. In addition, the CNC error compensation table can be automatically calculated and printed.

The Agilent 5530 enables you to calibrate your tools to the following industrial standards:

• NMTBA without offset

• NMTBA

• ANSI B5.54/B5.57

• VDI 3441/2617

• GB 10931-89

• GB/T 17421.2-2000

• BSI 3800

• JIS 6330

• ISO 230-2 1997

• ISO 230-2 1988

Getting Started Guide 1-3


System Overview

1

System Overview

The Agilent 5530 Dynamic Calibrator System typically includes the following components:

• measurement optics such as reflector, retroreflector, turning mirror, and interferometer

• Agilent 5519A/B Laser Head

• Agilent 10753B Tripod

• Agilent E1735A USB Axis Module

• Agilent E1736A USB Sensor Hub (optional, as required)

• Agilent E1738A Air Sensor(s) and Agilent E1737A Material Temperature Sensor(s), (optional, as required)

• Agilent 10888A Remote Control Unit

• Agilent 10747F Metrology Software

The USB sensor hub provides the interface between the air and material temperature sensors and your PC. The sensors provide digital signals that the software uses to calculate compensation factors. These factors adjust for changes in the system’s operating environment. Typical sensors used with this hub are an Agilent E1738A Air Sensor and one to three Agilent E1737A Material Temperature Sensors. Other sensor combinations are possible — contact your Agilent representative if you require more information.

The USB axis module contains the laser measurement electronics and interface for both the optional remote control unit and the A-quad-B encoder input.

The Agilent 10747F Metrology Software enables you to perform PC-based laser calibrations.



Overview of Laser Calibration

1


The accuracy and precision of a multi-axis machine is determined primarily by the machine’s geometry. To fully analyze the machine’s positioning accuracy, you need to measure the following geometric characteristics (each of which contributes to positioning accuracy and precision at any point within a machine’s work zone):

• the six degrees of freedom for each measurement axis

• squareness between measurement axes

• parallelism between measurement axes

The six degrees of freedom can be grouped as follows (see Figure 1-2):

• angular displacement about the axis measured

– pitch

– yaw

– roll

• translational (perpendicular) displacement about the axis measured

– straightness in the horizontal plane

– straightness in the vertical plane

• linear displacement

Squareness and parallelism of travel between two or more axes characterize how the axes are positioned relative to each other. Both measurements are accomplished by performing two straightness measurements, one of which is made through a 90 degree reference (the optical square).

The Agilent 5530 uses a laser to provide the data you need to accurately analyze the machine’s geometry. Laser measurement systems provide high accuracy over long distances—up to 80 meters (260 feet) with long range optics — by analyzing the light from a low powered helium-neon laser. Since the wavelength of this light is precisely known, laser




1

measurement systems provide higher accuracy than other types of calibration systems. The Agilent 5530 offers even more reliability because it uses Agilent’s two-frequency laser technique, which virtually eliminates problems resulting from changes in beam intensity.

Figure 1-2. Six degrees of freedom

1 Pitch

2 Yaw

3 Roll

4 Horizontal straightness

5 Vertical straightness

6 Linear displacement

1 2 3 4 5 6



Types of Measurements

1


The Agilent 5530 dynamic calibrator performs the following types of measurements:

• Linear measurements made in a straight line along a single axis. They indicate whether your machine is accurately measuring distances where the laser beam is located.

• Angular measurements of changes in squareness between axes (pitch and yaw).

• Straightness measurements of perpendicular displacement at the work point relative to a reference straight line to determine how straight the machine will cut a part.

• Squareness measurements consists of two perpendicular straightness measurements.

• Parallelism measurements consist of two straightness measurements. There are two types of parallelism measurements: linear (or coplanar) and rotational. Linear parallelism measurements are made along two axes that are parallel to each other. Rotational parallelism measurements are made on a machine spindle or fourth (rotary) axis on a milling machine.

• Timing, Flatness, Way Straightness, and Diagonal measurements. See the Agilent 5530 Dynamic Calibrator Measurements Reference Guide for a description of these measurements.

In addition to the above measurements, optional fixturing is available to measure the angular displacement of a rotating device.




1


2

Making Laser Measurements Safely

Chapter 2 Making Laser Measurements Safely

Introduction

2

Introduction

This chapter provides safety guidelines you must follow to help ensure your protection and the protection of the equipment. Familiarize yourself with all these guidelines before setting up or using the Agilent 5530.

Safety Labeling

The following symbols appear on the Agilent 5530:

When you see this symbol, refer to the instruction manual for help.

This symbol indicates hazardous voltages. Use caution.

This symbol indicates a ground terminal.

!



General Safety Precautions

TabTitle

2

General Safety Precautions

Before turning on the power to any component of the Agilent 5530 system, make sure it is plugged into a protective grounded socket.

Tampering with a protective (grounding) conductor or disconnecting the protective earth terminal causes a potential shock hazard. Grounding one conductor of a two-conductor outlet is not sufficient protection.

If you think the electrical protection is impaired, make sure the component is not used until a qualified service technician has checked and, if necessary, repaired it.

If an autotransformer is used for voltage reduction, make sure the common terminal is connected to the earth terminal of the power source.

Use only fuses with the correct rating and specified type. Do not use a repaired fuse or a short-circuited fuse holder. This could cause a shock or fire hazard.

WARNING This word identifies information that if ignored could result in personal injury. Do not proceed past a WARNING sign until the indicated conditions are fully understood and met.

These caution labels are required by the United States Center for Devices and Radiological Health. Failure to follow their instruction may result in personal injury.

CAUTION:LASER LIGHT DO NOT STARE INTO BEAM

MAXIMUM OUTPUT: 1 mwPULSE SPEC: continuous waveLASER MEDIUM: helium neon

CLASS II LASER PRODUCT



Using the Laser Head Safely

2

Using the Laser Head SafelyThe laser source used by the Agilent 5519A/B Laser Head is a Class II, low power (less than 1 mW) helium-neon laser. It will not cut metal or even burn paper. Therefore, special safety equipment, such as tinted glasses or shielding, is not necessary. To avoid possible injury from prolonged exposure, you should not stare directly at the laser light beam or the beam reflected from a polished surface. (It is safe to look at the dots of light reflected on an unpolished surface.)

The Agilent 5519A/B Laser Head complies with U.S. National Center for Devices and Radiological Health regulations 21 CFR 1040.10 and 1040.11. These regulations may also apply to any end product into which the Agilent 5519A/B is designed. Care must be taken to ensure that the end product complies with all applicable national and local laser safety regulations.

Using Components SafelyWhen using any Agilent 5530 calibrator system’s electronic component (including the laser head, air and temperature sensors, and remote control unit), observe the following guidelines:

• Before connecting a component, make sure the component and cable are in good condition.

• If a sensor cable is cut, the cable must be replaced before use.

• Be sure the cables do not present a hazard to people working in the area. Also, place all cables so they will not be damaged by equipment or people.

• Hold a cable by its connector (the plug, not the cord) when connecting or disconnecting it.

• Never force a connector into a port. If they do not join easily, they do not match. Make sure the connector and port match and that the connector is properly aligned.

• After inserting a connector into a port, do not twist or turn it.



Protecting the Optics

TabTitle

2

• Do not open the casings on the sensors.


Although the Agilent 5530 calibration system’s optics are rugged, there is a possibility they can be damaged by the following conditions:

• hard impact or excessive force—either from dropping or machine movement

• excessive vibration

• excessive heat or cold

• excessive humidity

• splashed or spilled chemicals or solvents

• scratching of the glass surfaces

When using the calibrator system’s optics, follow these guidelines:

• Avoid touching the exposed glass surfaces of the optics. Fingerprints, scratches, and dirt reduce the beam intensity. This does not affect the accuracy or system specifications, but it does make alignment more difficult.

• Heating and cooling of the optics affect the accuracy of your measurements. To minimize this problem, follow these guidelines:

– Keep the optics away from sources of heat or cold, such as air vents and heat ducts.

– Avoid changing the ambient temperature before making a measurement. If the temperature does change, allow 5 to 10 minutes for the optic temperatures to stabilize.

– Avoid unnecessary handling of the optics.

• Cleaning the optics should be avoided unless the signal intensity is noticeably reduced. See Chapter 9, “Troubleshooting and Maintenance,” for cleaning instructions.




2


3

Installing the Software and Connecting Components

Chapter 3 Installing the Software and Connecting Components

Introduction

3

Introduction

This chapter first explains how to install the metrology software. It then explains how to connect the following components to your personal computer (PC): the laser head, air and material temperature sensors, and optional remote control unit and A-quad-B input. Finally, it explains how to connect and turn on power.

Installing the Metrology Software

This section explains how to install the Agilent 10747F Metrology Software on your PC.

Computer RequirementsThe Metrology software is compatible with any computer running the Windows® operating system version XP or Windows Vista (32-bit), with at least two USB 2.0 ports and a CD drive.

NOTE If your computer is equipped with only one USB port, you will need to add a powered USB 2.0 hub.

If your PC is running Windows Vista, only the 32-bit version of Vista is compatible with the Metrology software. The Metrology software will not work on PCs running 64-bit Vista. To determine what version of Vista you are running, do the following:

In Windows, select Control Panel � Welcome Center � View computer details � Show more details, then note the System Type (see Figure 3-1).




3
Figure 3-1. Vista Operating System Type
If your PC is running Windows Vista (32-bit), you must install and enable winhelp32.exe, as follows:

You must be logged on to your PC as an administrator.

Navigate to the Microsoft download center by connecting to the Microsoft web site at www.microsoft.com and clicking on the appropriate link(s).

Choose the link for the recommended downloads for Vista, and then use the search feature on the Vista site to find winhelp32.exe. Click on the appropriate link.

Allow Microsoft to validate your Vista software, then follow the instructions to install the help feature.




3

Installing the software

To install the metrology software, follow these steps:

1 If you haven’t already done so, turn on your PC.

2 Insert the Agilent 10747F Metrology Software CD, which came with the product, into the PC’s CD-ROM drive.

3 If the install program does not start automatically, use Explorer to display the contents of the CD, and double-click on the file “setup.exe”.

4 A small screen first appears to allow you to select the language for your installation.

Figure 3-2. Language Selection screen

Follow the instructions of the installation program to install the Metrology software.

After the installation program is complete, the Laser Metrology group is displayed in the Programs pop-up menu as shown in Figure 3-3.

NOTE Leave the Metrology software installation CD in your computer for now. You will access the CD shortly to install the drivers for system components.




3

Figure 3-3. Sample Windows screen showing the Metrology icon

To start the Metrology Software (general)

The general procedure for starting the Metrology Software is:

1. Click Start on the task bar of the Start menu window (see Figure 3-3)2. Select Programs on the pop-up menu, see Figure 3-3)3. Select the Laser Metrology group.4. Select Laser Metrology (see Figure 3-3), then select the 5530 icon.

To exit the Metrology Software (general)

To exit the software, follow these steps:

1 Return to the Main Menu, then select Quit.

A window is displayed asking if you are sure you want to quit.

2 Select Yes to quit. Select No or press Enter to return to the Metrology Main Menu.

NOTE Clicking on the “X” button that appears in the upper right corner of the Metrology screens will not exit the Metrology software.



Connecting the Axis Module and Sensor Hub

3


After installing the software, connect the E1735A USB Axis Module and E1736A USB Sensor Hub to the USB ports on your PC. The steps for connecting either the Axis Hub or the Sensor Module to the PC are identical.

1. Connect the USB cable to the Axis Module (see Figure 3-4).

Figure 3-4. The Axis Module or Sensor Hub USB connector

2. Connect the USB cable to the Sensor Hub. The Sensor Hub connection port is identical to the one on the Axis Module (see Figure 3-4 above).

1 Agilent E1735A USB Axis Module orAgilent E1736A USB Sensor Hub

2 USB connection port

3 COM ready LED

4 High Speed ready LED

5 Module ready LED

6 Read / Write LED 2

1CO

M H.S.

RDY R/W

Agilent Technologies

3456




3

3. Next connect the USB cable from the Axis Module to a USB port on your PC, or a powered USB 2.0 port connected to your PC.

4. A screen will appear on your PC that states “Welcome to the Found New Hardware Wizard”. Answer the question “Can Windows connect to Windows Update to search for software?” by selecting the radio button “No, not this time” (see Figure 3-5).

Figure 3-5. Installing the driver for the USB Axis Module - screen 1

5. Click on Next




3

6. On the new screen that appears, answer the question “What do you want the wizard to do?” by selecting the radio button “Install from a list or specific location (Advanced)” (see Figure 3-6).


7. Click on Next




3

8. On the new screen that appears, select the radio button “Search for the best driver in these locations.” Below this selection, check the box for “Search removable media (floppy, CD-ROM...)” — see Figure 3-7.


9. Click on Next




3

10. The new screen that appears should indicate that the driver for the Axis Module has been found and installed on your PC (see Figure 3-8). Click on Finish to close the wizard.

11. Next connect the USB cable from the Sensor Hub to a USB port on your PC, or a powered USB 2.0 port connected to your PC.

12. The Found New Hardware Wizard screen will again appear on your PC (see Figure 3-5). Repeat steps #4 through #7 to install the driver for the Sensor Module.




Connecting the Sensors

3

Communication LEDs

The LEDs on the E1735A Axis Module and the E1736A Sensor Hub (see Figure 3-4) indicate the following conditions:


This section explains how to connect the air and material temperature sensors to your PC through ports on the USB Sensor Hub.

Before connecting a sensor, perform the following inspection:

• Examine the component’s cable for kinks, cuts, or breaks.

• Check for metal chips embedded in the cable.

• Check the connectors for loose or damaged pins.

• Look for evidence of oil or coolant on the cable or in the connectors.

If any of these conditions exist, clean or replace the cable as needed.

NOTE Be aware that the sensors contain magnets to enable them to be easily attached to steel surfaces.

The E1738A Air Sensor must be connected to port #4 of the Sensor Hub; any additional air sensors, if used, may be connected to any other open port on the hub. Any E1737A Material Sensor(s) should be connected to the Hub starting with port #1. Otherwise the procedure for connecting all of the sensors to hub are identical.

LED indicator On Off

COM device driver is working driver not installed

H.S. USB 2.0 connection USB 1.1 connection or lower

RDY power on power off

R/ W reading or writing idle




3

The connectors at either end of a sensor cable are identical. To connect the sensor cables to the sensors, line up the red mark on the cable connector with the red mark on the sensor connector (on the bottom side of the sensor) and insert the cable connector. It will lock in place.

CAUTION Do do not twist or turn the connector while inserting it. This may damage the pins inside of the connector.

The cable connector includes a spring-loaded locking mechanism to hold the cable securely to the sensor. To disconnect the cable, release the lock by sliding back the knurled sleeve on the connector. The cable connector should disconnect easily from the sensor.

Figure 3-9. Connecting a Sensor

NOTE The Metrology software identifies a sensor by the number of the port on the Sensor Hub to which it is connected. It is good practice to record the number of the port used by a particular sensor.

1 E1738A Air Sensor(bottom)

2 Sensor connector alignment mark

3 Sensor cable alignment mark

4 Sensor cable

5 Magnet

52

3

4

1




3

Figure 3-10. The Sensor Hub sensor ports

To connect a sensor cable to the hub, line up the red mark on the cable connector with the small circle above the connector port on the Sensor Hub (see Figure 3-10).

CAUTION Do do not twist or turn the connector while inserting it. This may damage the pins inside of the connector.

The cable connector includes a spring-loaded locking mechanism to hold the cable securely to the Sensor Hub. To disconnect the cable, release the lock by sliding back the knurled sleeve on the connector. The cable connector should disconnect easily from the Sensor Hub.

1 - 4 Sensor connection ports

5 Agilent E1736A USB Sensor Hub

6 Cable connector alignment mark (x4)

5


E1736AUSB Sensor Hub

1234

Sensor#4 Sensor#3 Sensor#2 Sensor#1

6



Connecting the Laser

3


This section explains how to connect the laser head to the system. The Agilent 10882A,B,C cable connects the laser head to the USB Axis Module. The connectors on both ends of the cable are the same.

NOTE Do not set up the laser on the tripod at this time. The procedure for mounting the laser on the tripod will be given in Chapter 6.

1 To plug the connector into the laser head port on the USB axis module, orient the red dot on the connector to the key on the port labeled “Laser Head” (see Figure 3-11).

2 Insert the connector into the port. When the connector is properly aligned, it will slide into the port and lock.

Figure 3-11. Connecting the Laser to the Axis Module

1 Agilent E1736A USB Axis Hub

2 Laser Head Port

3 Red dot for cable connector alignment

4 Agilent 10882A,B,C cable

1


E1735AUSB Axis Module

2

3

A quad BInput Remote LaserHead

4




3

Follow the same procedure to plug the connector on the other end of the cable into the rear of the laser head (see Figure 3-12). Align the red dot on the cable connector with the small dot above the laser head connector.

Figure 3-12. Laser head power connector and power switch

If you are not using the optional remote control unit, and if you do not wish to connect an encoder to the 5530 Dynamic Calibrator, then you are ready to power up the system. Proceed to the section “Connecting and Turning on Power” on page 3-18.

To use the USB axis module's A-quad-B encoder input, connect it to the A-quad-B encoder output of the machine being calibrated, using an Agilent 10887-60202 A-quad-B cable assembly. Some preparation of the cable may be necessary. Refer to additional information in “Agilent 10887-60202 A-quad-B Cable Assembly” on page 3-17.

1 Power connector

2 Power switch

3 Port for Agilent 10882A cable that connects the laser head to the PC

3 2

1

AC LI

NE :

Fuse

:

100-

240V

AC 5

0/60

/400

Hz

1.5A

25

0V

65VA

MAX

LASER HEAD

Laser OnReady

Laser radiation Do not stare into beam.

Maximum Output: 1 mw

Laser Medium: Helium NeonPulse Spec: Continuous Wave Class II

Laser Product

Complies with 21CFR 1040.10 & 1040.11

PAR PERSONNEL QUALIFIE POUR USAGE EN LABORATOIRE QUALIFED PERSONAL FOR LABORATORY USE BY

5519A

Agilent

0

l

USE O

NLY

WITH

250V

FUSE

S



Agilent 10888A Remote Control Unit

3

Agilent 10888A Remote Control Unit

The optional Agilent 10888A Remote Control Unit includes a non-removable 15-meter (49-foot) cable that plugs into the Agilent E1735A USB Axis Module.

To connect the cable, line up the red mark on the cable connector with the small circle above the port labelled “Remote” on the Axis Module. When the connector is properly aligned, it will slide into the port and lock.

Figure 3-13. Connecting the Remote Control Unit to the Axis Module

1 Agilent E1735AAxis Module

2 Module connector alignment mark

3 Cable connector alignment mark

4 Axis Module connector

5 Cable connector

1


E1735AUSB Axis Module

4

5

A quad BInput Remote LaserHead

2

3



Agilent 10887-60202 A-quad-B Cable Assembly

3

Agilent 10887-60202 A-quad-B Cable Assembly

This 3-meter (10-foot) cable connects your machine’s A-quad-B encoder output to the Agilent E1735A USB axis module’s A-quad-B input port.

The cable is supplied with a mating connector for the Agilent E1735A module on one end. The other end is unterminated, allowing you to make the connections you need for use with your machine’s encoder. The cable’s signal-versus-pin connections are listed in the table below.

Connector Front (mating side) Connector Rear View (wire side)

Pin Number Wire Color Signal Name

1 Drains GND

2 White A

3 Black ~A

4 Wht/Grn/Gry +5V Return

5 Wht/Gry +5V

6 Blue B

7 Tan ~B

8 Wht/Brn ~External Sample

Shell Outer braid Outer shell

8

7

1

2

6

5

4

3

1

2

3

4

8 7

6

5



Connecting and Turning on Power

3

Connecting and Turning on Power

To connect power and turn on the system, see Figure 3-12 and follow these steps:

1 Connect the laser head power cord to the three-prong outlet on the rear panel of the laser head (see Figure 3-12).

2 Plug the other end of the power cord into an outlet supplying correct current.

Manual selection of power source voltage is not required. The laser head's internal power supply automatically adjusts to operate from any power source whose voltage and frequency range combination are listed next to the laser head's rear-panel line power module.

3 Press the Power switch on the laser head to the “I” position.

This turns on the laser head.

4 Connect the PC power cord and turn on the PC.

The PC runs through its normal startup routine.

You are now ready to check the installation. Go to Chapter 4 for instructions to familiarize yourself with the system before you set it up on a machine to make an actual calibration.


4

Using the Agilent 5530for the First Time

Chapter 4 Using the Agilent 5530 for the First Time

Introduction

4

Introduction

This chapter steps you through a simplified linear measurement you can perform on a table or desktop. This tutorial will allow you to get comfortable with the Agilent 5530 before you set it up on a machine to make an actual calibration. For this tutorial, you need a straightedge and the measurement template provided on page 4-21, in addition to the Agilent 5530 components. Figure 4-1 shows the components set up for the tutorial.

Figure 4-1. Components set up for the tutorial

1 Personal computer with metrology hardware and software installed

2 Straightedge

3 Retroreflector assembly

4 Interferometer assembly

5 Tutorial measurement template

6 Laser head

1 2

3

4

56



Task 1: Assembling and Connecting Components

4


To set up the hardware for this tutorial, follow these steps:

1 Print the measurement template provided on page 4-21.

NOTE Be sure that you do not change the size of the drawing when you print it. The page size is 8.5” x 11 inches.

2 Place the copy of the measurement template on your work surface. Then place the straightedge on top of it along the line indicated.

3 Place the laser head on the measurement template so that its two front feet are on the circles on the template.

Make sure the straightedge extends at least 225 mm (9 inches) in front of the laser head.

4 Connect and turn on the system by following instructions in Chapter 3, “Installing the Software and Connecting Components.”

NOTE You will not be using the sensors for this tutorial.

5 Assemble the linear interferometer as shown in Figure 4-2.

The arrows on the interferometer point to the locations of the reference and measurement mirrors.




4

Figure 4-2. Assembling the interferometer

6 Place the interferometer assembly about 1 cm (1/2 inch) away from the straightedge approximately 5 cm (2 inches) from the front of the laser head as shown in Figure 4-1.

Note the direction of the arrows on the interferometer label. These arrows indicate the direction of the laser beam as it exits the interferometer. Make sure one arrow points to the retroreflector.

7 Assemble the retroreflector as shown in Figure 4-3.

8 Place the retroreflector against the straightedge as shown in Figure 4-1.

1 Linear retroreflector

2 Height adjuster and post

3 Base

4 Linear interferometer

1

4

10785A

HE

IGHTADJUSTER

A

3

2

10766A LINEAR INTERFEROMETER

10767ALIN

EAR RETROREFLECTOR

1A




4

Place the retroreflector as close as possible to the interferometer assembly without allowing the two to touch.

9 Mark the positions of the interferometer assembly and retroreflector on the template with a pencil or piece of tape.

You will later move the optics and will have to return them to the position you marked.

You are now ready to set up the metrology software.

Figure 4-3. Assembling the retroreflector

1 Linear retroreflector

2 Post and height adjuster

3 Base

10785A

HE

IGHTADJUSTER

A

1

3

2



Task 2: Setting Up the Software

4


NOTE The following instructions assume that you have the Agilent 10747F Metrology Software installed on your computer and you know how to use Microsoft Windows. For complete instructions on setting up the Agilent 10747F Metrology Software and general software information, see Chapter 5.

For most of your measurements, you follow a basic path through the software:

• setting up the laser and hardware

• setting up the measurements

• collecting data

• analyzing the data you collected

To help you navigate through the measurements, the button for the next screen in the basic path is colored green. (This is not necessarily the same as the default selection, which is highlighted with a black border.)

1 In Windows, click the Start button, then select Programs.

2 Select Laser Metrology as shown in Figure 4-4.




4

Figure 4-4. Sample Windows screen showing the metrology menu

3 Open the metrology software by selecting Agilent 5530 Dynamic Calibrator as shown in Figure 4-4.

The Metrology Main Menu is displayed (Figure 4-5).




4

Figure 4-5. Metrology Main Menu

4 Select the Linear button.

To select a button if you have a mouse, place the cursor on the button and press the mouse button once (click). (If your mouse has more than one button, press the left one.) If you do not want to use a mouse, do one of the following:

• Press the Tab key until the button is highlighted, and press Enter.

• Press the Alt key simultaneously with the letter that is underlined on the button.

The Set Up Laser: LINEAR screen is displayed (Figure 4-6). Use this screen to help set up the laser and optics in preparation for the measurement.




4

Figure 4-6. Set Up Laser: LINEAR screen

5 If the Position Units field (to the right of the Measurement Axis diagram) is not set to mm, follow these steps:

a. Select Change Parameters.

b. Select mm in the Position Units box.

c. Select OK.

You are now ready to align the optics to each other and to the laser beam path.



Task 3: Aligning the Optics

4


In this procedure, you make sure that the optics are aligned with the laser beam path and with each other. Follow these steps:

1 Set the turret ring on the laser head to OTHER (Figure 4-7).

Figure 4-7. Front of the laser head

2 Rotate the laser head’s target into position over the lower port by turning the lower aperture control.

3 Pass your finger between the interferometer assembly and retroreflector.

One of the alignment dots on the laser head should flicker. This is the retroreflector return beam. The other is the interferometer assembly return beam.

NOTE You may need to adjust the height of the interferometer and or the reflector to see both return beams on the target in the lower port on the laser head.

1 Turret ring set to “Other”

2 Upper aperture control

3 Upper port

4 Lower port

5 Lower aperture control

STRAIGHT

AVOID EXPOSURELASER RADIATION IS

EMITTED FROM THIS APERTURE

LASER ON SIGNAL

OTHER

4

5

3

2

1

Agilent




4

4 Adjust the interferometer assembly’s position so that its return beam is centered on the laser head’s target in the lower port.

5 Adjust the retroreflector’s position so that its return beam is centered on the laser head’s target.

You should now see just one dot on the laser head’s target. If not, remove the interferometer assembly and adjust the retroreflector to the laser beam. Then, replace the interferometer assembly and adjust its position to the laser beam.

6 Rotate the large aperture into position over the laser head’s upper port.

7 Open the laser head’s lower port.

If the Strength field on the Set Up Laser: LINEAR screen does not display at least 60 percent, follow these steps:

a. Remove the interferometer assembly. Using only the retroreflector, the beam strength should be near 100 percent. If the beam strength is not 100 percent:

Verify the laser head turret is in the "Other" position — see Figure 4-7.

Check the retroreflector lens for oily films, fingerprints, or physical damage.

If necessary, clean the optics using the instructions in Chapter 9, “Troubleshooting and Maintenance.”

If beam strength still is not 100 percent, realign the retroreflector.

b. Check the interferometer assembly lenses for oily films, fingerprints, or physical damage. If necessary, clean the optics using the instructions in Chapter 9, “Troubleshooting and Maintenance.”

Realign the optics by repeating steps 1 through 5.

8 Move the retroreflector approximately 25 mm (1 inch) away from the interferometer assembly.




4

If the beam strength falls to 60 percent or below, realign the optics by repeating steps 1 through 5.Move the retroreflector to the end of the straightedge (at least 75 mm; 3 inches) and check the beam strength again.

Realign the optics if necessary.

9 Move the retroreflector back to the starting (zero) point and check the beam strength again.

If strength is less than 60 percent, repeat steps 1 through 9.

10 Secure the straightedge to the work surface with tape.

11 On the Set Up Laser: LINEAR screen, select Reset Position.

This resets the laser and establishes the current positions of the optics as the zero point for the measurement.

You are now ready to make your measurements.



Task 4: Making the Measurements

4

Task 4: Making the MeasurementsIn this section you will make three measurements. Follow these steps:

1 On the Set Up Laser: LINEAR screen, select Set Up Meas.

The Set Up Measurement: LINEAR screen is displayed (Figure 4-8). This screen is used to define the parameters that are related to the actual measurement.

Note the value in the Target Window field near the top center of the display. This is how close to each position you must move the reflector during the measurement.

Figure 4-8. Set Up Measurement: LINEAR screen




4

2 In the Travel Mode box, select Unidirectional.

3 In the Start Position field, type 0, which stands for 0 mm; this is the position you will move the retroreflector to first. To enter information in a field, first select the field, then type the information.

(If entering a new value produces an error message about inconsistent targets, it means that other values in the list must also be changed. You can select Recalc. Parameter to determine values that are consistent with the one you entered.)

4 In the End Position field, type 75.

The value 75 mm is the position you will move the retroreflector to last.

5 In the No. of Points per direction field, type 4.

The value 4 represents the number of measurements you will make, beginning with the start position (0).

You do not need to fill in the interval; the software calculates the interval from the start and end position and number of points.

6 In the No. of Cycles field, type 1.

The value 1 is the number of times you will make the three measurements.

7 Select Collect Data.

The Collect Data: LINEAR screen is displayed (Figure 4-9). This screen is used to record measurements and access other functions, such as analyzing data.




4

Figure 4-9. Collect Data: LINEAR screen

8 On the screen, select Record.

9 Move the retroreflector 25 mm (1 inch) away from the interferometer assembly.

10 On the screen, select Record.

The Laser Position field displays the measurement position, which is the current location of the optics. In an actual measurement, this would be the distance the machine moved from the zero point.

The Target field displays the distance that the retroreflector was supposed to move. The system calculates this position from the numbers you entered earlier in the Start Position, End Position, and No. of Points per direction fields on the Set Up Measurement: LINEAR screen.




4

NOTE If the Laser Position is not within the Target Window of the Target: millimeters position, then the red "Outside Target Window" label is displayed and the record function disabled.

The graph in the middle of this screen displays the measurements as they are collected. The position and error values are shown in the table in the lower-left corner of the screen.

11 Select Record.

12 Move the retroreflector another 25 mm (1 inch) away from the interferometer assembly.

13 Select Record.

14 Move the retroreflector another 25 mm (1 inch) away from the interferometer assembly.

15 Select Record.

After you have made the specified number of measurements or clicked the Analyze Data button, the Analyze Data screen is displayed (Figure 4-10). Your measurement is now complete and you are ready to display and save the data.



Task 5: Displaying and Saving Data

4

Figure 4-10. Analyze Data: LINEAR screen


There are a number of ways you can use the data you collected during your measurement. In this tutorial, you will display your data on the screen and save it to a file using the Analyze Data screen (Figure 4-10).

Displaying analysis data

The system allows you to create a graphic and statistical display of the measurement data.




4

The system also allows you to display the following information for each measurement point:

• the actual measurement recorded

• the target position

• the amount of error in the measurement

To display this information, select Show Data on the Analyze Data: LINEAR screen.

The Show Data Set: LINEAR screen is displayed (Figure 4-11).

Figure 4-11. Show Data Set: LINEAR screen




4

Saving data

To save your measurement data, follow these steps:

1 Select Main Menu.

The Metrology Main Menu is displayed.

2 Select Save Data.

The Save Data screen is displayed (Figure 4-12).

Figure 4-12. Save Data screen

3 If necessary, select the drive on which you want to save the data.

The default is displayed at the top of the Disk Drives box. To change the default, follow these steps:



Task 6: Exiting the Metrology Software

4

a. Select the down arrow on the right side of the Disk Drives box.

b. Select a disk drive.

4 If necessary, in the Directories box, select the directory in which you want to save the data.

The default is shown in the Current Path field below the Disk Drives box. You must choose one of the directories shown (you cannot create a new directory on this screen).

5 Type a name for the data file (up to eight characters) in the File Name field below the files box.

6 Select OK.

The system saves the file and returns you to the Metrology Main Menu.

Task 6: Exiting the Metrology Software

To exit the software, follow these steps:

1 Return to the Main Menu, then select Quit.



NOTE The “X” button that appears in the upper right corner of the Metrology GUI screens is inoperable. Clicking on this “X” button on most of the Metrology screens will not exit the Metrology software

Now that you have completed this tutorial, you are ready to learn more about the software. See Chapter 5.


Measurement Template

1 Laser feet positions 2 @ Straightedge position

2

1

1


5

Setting Up the Software for a Measurement

Chapter 5 Setting Up the Software for a Measurement

Introduction

5

Introduction

The laser is controlled and the measurements you make are recorded and analyzed by the Agilent 10747F Metrology Software installed on your personal computer (PC). The software performs three major functions:

• setting up the software for the laser head, optics, and measurement type

• making the measurement and collecting data

• analyzing and outputting the results of the measurements, including transferring the data to a spreadsheet

This chapter covers the first function; chapters 6 and 7 cover the second and third. Figure 5-1 provides an overview of the metrology software screens.

The specific instructions required to use the software to make a measurement are presented in the Agilent 5530 Dynamic Calibrator Measurements Reference Guide.



Introduction

5

Figure 5-1. Metrology software screen flow diagram

Save Data

OK

Main Menu

SaveData

RecallData

PreviousScreen

Set Up Laser

Set UpMeas.

Other Measurements

Square Parallel Diagonal Time-Base

LIN ANG STR

Recall Data

SetupOnly

Setup & Data

Quit

No

Other

Laser Diagram

Yes Exit ProgramQuit

OK

Set Up Plotter

OK

Save Data

OK

Environ. LaserDiagram

Set Up Measurement

CollectData

Collect Data

AnalyzeData

Show Data

Comp.Table

Analyze Data

SaveData

ShowData

Next Axis

Machine Info

Set Up Graph

Plot

Linear Compensation Table

Set UpGraph

MachineInfo

OK

OK

Save Data

Print

OK PrintTo File

OKPrint

Print

Are You Sure?

Environ. Comp.

OK



Terms to Know

5

Terms to Know

Before using the metrology software, you should be familiar with the following terms and concepts:

• arrow cursor—The mouse cursor is an arrow when the software is idle and the cursor is not on a field that requires a keyboard or remote control entry.

• button—Clicking a button causes an immediate action.

• check box—Check boxes enable you to turn measurement characteristics on and off. To switch one of these boxes on or off, click the mouse anywhere on the characteristic’s name or in the circle to the left of the characteristic.

• click—Press the mouse button and release it to select an item on the screen. If your mouse has more than one button, use the left one. Unless otherwise stated, clicking has the same effect as moving the cursor to a button and pressing Enter.

• default—The software may supply information in a field or highlight a button based on a previous selection or the standard information flow. This information is called the default.

• dimmed fields—If a field is dimmed or grayed it cannot be selected.

• double click—Press and release the mouse button twice in rapid succession. Double clicking a button or icon opens another screen or window. Double clicking in a field highlights the entire field, allowing you to replace its contents with what you type from the keyboard.

• fields—A field is a box where you type information on the screen. Sometimes the field contains default information.

To enter information into a field, follow these steps:

1. Select the field.

2. Type the new information. The new information is inserted before the cursor. Highlighted text is replaced by the new text.



Terms to Know

5

• hourglass cursor—The mouse cursor looks like an hourglass when the software is busy processing a command. The cursor changes back to one of the other icons when processing is completed. Mouse clicks are ignored until processing is completed.

• beam cursor—The mouse cursor looks like an I-beam when the software is idle and the cursor is on a field that requires a keyboard entry.

• menu bar—Some screens include a menu that is displayed across the top of the screen. Clicking a menu item opens a pull-down menu of subtopics.

To select an item from a pull-down menu, click the item. Or, simultaneously press the Alt key and the underlined letter in the menu option.

• option box—An option box lists your choices for a field. Only one choice can be selected in an option box.

To select an option, click the mouse anywhere on the option’s name or in the circle to the left of the option.

Options define system parameters. Generally, no direct action occurs when you select an option. However, changing an option may cause other system parameters to change. For example, switching from inches to millimeters on the Set Up Measurement screen causes many other setup parameters to automatically change conversion factors.

• prompt—You type commands for the PC at the prompt. The prompt can be customized for each PC, but the basic form is a letter indicating which drive you are using followed by a colon and an angle bracket (for example, c:>). The prompt also indicates where your cursor is on the PC screen.

• select—You select an icon or menu item using one of the following methods:

– clicking on it with the mouse

– pressing the Alt key and the underlined letter simultaneously on your keyboard

– tabbing to the field and pressing the Enter key



Conventions Used in the Software

5

NOTE Since individual PCs vary slightly, you may need to adjust the software instructions for your PC. For example, the Enter key is labeled Return on some keyboards.

Conventions Used in the Software

The Agilent 10747F Metrology Software has been designed for easy data entry and use. This section outlines some of the conventions you will follow when using the software.

Entering data

When entering data, tab to move to the next field. Tabbing or double clicking on a field puts you in replace mode: the information in that field is highlighted indicating that it will be replaced by what you enter from the keyboard.

If you use the arrow keys to move to the next field or click once in the field, you are in insert mode and the information you type will be added to the existing information.

You can only work with one screen at a time. However, you can move to the PC Windows operating system without exiting the metrology software. To do this, follow these steps:

CAUTION Do not exit the main or Start menu window during data collection; it can interfere with making your measurements.

1 Reduce the current metrology screen by selecting the minimize “−” button in the upper right corner.

This reduces the current screen to an icon on the task bar (located at the bottom of the Start menu window). The Start menu window is now displayed on your computer screen.



Using Online Help

5

2 After you have finished working in the Start menu window, click on the minimized metrology screen, which is located in the task bar at the bottom of the screen.

The metrology screen that you were working on is maximized and displayed on your computer screen.

Using buttons

Each screen has its own set of buttons that perform functions or take you to another part of the metrology software. The following buttons are common to the screens or windows.

• i (Info)—Select this button for online help for an entire screen.

• Main Menu—Select this button to move directly to the Metrology Main Menu.

• OK—Select this button to accept changes and close a window.

• Previous—Select this button to display the screen that logically precedes this screen.

You will notice that one button on the screen has a black frame around the text; this is the default value. You can select this button in the normal way or by pressing Enter.

Using Online Help

This guide does not provide instructions for completing each field on each screen since this information is provided by the online help.

To access the online help for a field, follow these steps:

1 Select the field you want help with using either of the following methods:

• Tab to the field but do not press Enter.

• Use the mouse to move the cursor to the field, then press and hold the left mouse button. Next, “drag” the mouse cursor off of the field and release the button.



Accessing the Software

5

2 Press F1.

The help text for that field is displayed in a new window.

3 Close the help window by pressing the Alt key and the F4 key simultaneously or by using the mouse to “click” Exit on the File menu.

To access online help for an entire screen or for a procedure, select the information (i) button.


The metrology software runs under the Windows operating system. To use the metrology software, you should be able to do the following in Windows:

• select an item from a pull-down menu or file list

• use a mouse to select or click a button (icon)

• open an application icon

If you do not know how to do these tasks, refer to the documentation provided with your Windows software.

To display the Metrology Main Menu, follow these steps:

1 Press the Start button, located at the bottom left of the task bar in the Start menu window as shown in Figure 5-2.

2 Select Programs, then select Laser Metrology from the pop-up menu.

The laser metrology group pop-up menu is displayed (Figure 5-2).




5

Figure 5-2. Sample Windows screen showing the metrology icon

3 Open the metrology software by selecting Agilent 5530 Dynamic Calibrator.

The Metrology Main Menu is displayed (Figure 5-3).



Selecting a Measurement Type

5

Figure 5-3. Metrology Main Menu


The Metrology Main Menu, shown in Figure 5-3, is your gateway to the Agilent 10747F Metrology Software. You start with this screen to perform the following functions:

• select your measurement type

• recall saved measurement or setup data

• save measurement and setup data

• exit the metrology software




5

1 To make a linear, angular, or straightness measurement, select the button for that measurement.

The Set Up Laser screen for that measurement type is displayed.

2 Select the Other Meas button to display a menu of additional measurement types as shown in Figure 5-4.

Figure 5-4. Other Measurements Menu



Recalling Saved Setup Files and Data Files

5


You can easily recall a file containing measurement setup data and data saved from a previous measurement. The setup data is saved in the same file as the measurement data but can be recalled without recalling the measurement data. When you recall a file you are, in effect, recreating the measurement setup. You can even return to a point in the measurement process where you left off. See “Saving Setup Data and Measurement Data Files” in this chapter for instructions on saving files.

To recall a file, follow these steps:

CAUTION Recalling a file erases all unsaved data. You may want to save the data you’ve been working with before recalling another file.

1 On the Metrology Main Menu, select Recall Data.

The Recall Data screen is displayed (Figure 5-5).




5

Figure 5-5. Recall Data screen

2 If necessary, select the disk drive where the file is stored.

Click the arrow, or press the Alt key and the down arrow key simultaneously, to display available disk drives. Then select the name of the drive you want.

3 Select the directory where the file is stored.

A list of files is displayed. The three-character file extension indicates the type of measurement—for example, type “lin” for linear.



Saving Setup Data and Measurement Data Files

5

4 Select the file name on the list.

5 Select one of the following buttons:

• Setup and Data (Alt s)—recalls both the measurement setup data and the measurement data file. The last screen displayed before the data was saved is displayed again.

Double clicking the file name on the file list is the same as selecting the name (step 4) and then selecting this button.

• Setup Only (Alt o)—Only the setup data from the file is recalled. The measurement data is erased and the Set Up Laser screen is displayed.

NOTE To return to the Metrology Main Menu without recalling a file, click Previous. The setup is not changed and your unsaved measurement data is not erased.


You can save measurement data at any time during your measurement using the following steps. The setup data is saved automatically when you save measurement data.

The Save Data button is on both the Metrology Main Menu and the Analyze Data screen.

To save data, follow these steps:

1 Go to the Metrology Main Menu or the Analyze Data screen.

2 Select Save Data.

The Save Data screen is displayed (Figure 5-6).




5

Figure 5-6. Save Data screen

3 If necessary, select the disk drive where you want to store the file.

Click the arrow, or press the Alt key and the down arrow key simultaneously, to display available disk drives. Then select the name of the one you want.

4 Select the directory where the file is stored.

5 To replace an existing file with the new file, select a file name from the list. To create a new file, type a new file name in the File Name box.

To select a name from the list that is displayed, click on the file name or highlight the file name and press Enter. A window pops up asking you to verify that you want to replace an existing file.



Exiting the Metrology Software

5

If you are entering a new file name, use a three-character file extension to indicate the type of measurement. For example, use one of the following:

• “lin” for linear• “tim” for timing

• “ang” for angular• “flt” for flatness

• “par” for parallelism• “sqr” for squareness

• “str” for straightness• “way” for way straightness

• or use “txt” to save as a plain text file

The file extension defaults to the type of measurement selected on the Metrology Main Menu at the beginning of the measurement.

NOTE To return to the previous screen without saving the file, select Previous.

6 Select OK to save the file.

The file is saved and you return to the Metrology Main Menu.

7 Click Previous to return to the screen you were using before moving to the Metrology Main Menu or Analyze Data screen.

Exiting the Metrology Software

You exit (or quit) the metrology software from the Metrology Main Menu screen. Follow these steps:

1 Return to the Metrology Main Menu.

2 If necessary, save your data.

See “Saving Setup Data and Measurement Data Files” for instructions on saving data.



Setting Up the Laser Software for Your Measurement

5

3 Select Quit.




When you select a measurement type on the Metrology Main Menu or Other Measurements menu, the Set Up Laser screen is displayed. This screen helps you set up the laser, optics, and machine tool encoder in preparation for a measurement. You use it to perform the following functions:

• verify that the hardware is connected and working and that the optics are aligned

• test the remote control

• set up environmental compensation

• define laser parameters

• reset the laser position

The Set Up Laser screen is customized for each measurement type. Figure 5-7 shows the version of this screen for linear measurements.

If you haven’t already done so, connect and turn on all components and mount the optics for your measurement. This screen then helps you align the optics by showing the strength of the laser return beam.

To set up environmental compensation, select Environmental. The Set Up Environmental Compensation screen is displayed (Figure 5-8). See “Setting up environmental compensation” in this chapter for information on this screen.




5

Figure 5-7. Set Up Laser: LINEAR screen

Verifying the hardware setup

The Set Up Laser screen automatically verifies the following:

• The laser head is connected and is ready to make a measurement.

• The return beam has sufficient strength to make the measurement.

• The Agilent E1735A USB Axis Module and Agilent E1736A USB Sensor Hub are installed and working.

If any of these verifications fail, an error message replaces the numeric display at the top of the screen.




5

Testing the remote control unit

On the remote control unit, press the Record button.

If the remote control unit is working, the Test Record Button field on the Set Up Laser screen flashes when the Record button is pressed on the unit.

Call your service representative for additional help.

Setting up environmental compensationTo display the Set Up Environmental Compensation screen (Figure 5-8), select Environmental on the Set Up Laser screen.

This screen performs the following functions:

• If you are using sensors and automatic compensation, this screen displays the environmental readings that affect measurements, the wavelength of light compensation factor, and material temperature compensation.

• If you are using manual compensation, you can enter the values for environmental compensation on this screen.

Select OK to return to the Set Up Laser screen.




5

Figure 5-8. Set Up Environmental Compensation screen

Defining laser parameters

Selecting the Change Parameters button on the Set Up Laser screen (Figure 5-7) displays a screen (Figure 5-9) with option boxes where you can redefine the following parameters:

• Position Units and Error Units—determine the measurement units.

• Laser Direction Sense—determines which direction of travel will increase the measurement number.

• Encoder Type and Resolution—determines if the machine tool’s encoder pulses are used as the reference to the machine tool’s position. If the encoder pulses are used, this parameter determines the measurement unit the encoder uses.

• Numeric Display—determines what is shown on the large numeric display (for example, the laser’s current position).




5

• Averaging —these buttons select the period over which data for each measurement point is averaged. Averaging results in a smoother, more stable numeric display (with a longer period yielding a more stable display). Choose a period that is shorter than the machine dwell time at each point. Choices are: 0 sec (turns averaging off), .1 sec (default), 1 sec, or 10 sec.

• Preset —this value determines the offset from zero when the laser position is reset. This is different from deadpath; compensation works both on the preset distance and the measured distance.

Refer to the online help for more information on these parameters and their values.

Figure 5-9. Set Up Laser screen with Change Parameters window open



Setting Up Your Measurement

5

Resetting the laser position

There are three situations in which you need to reset the laser position:

• You have aligned the optics and completed the laser setup and are ready to begin the measurement.

• The laser beam was blocked or it lost its lock, and you corrected the problem.

• The Encoder is changed from Not Used to A-quad-B or Up/Down.

To reset the laser position, select Reset Position on the Set Up Laser screen.

You are now ready to use the Set Up Measurement screen.


After completing your laser software setup, select Set Up Meas on the Set Up Laser screen to display the Set Up Measurement screen as shown Figure 5-10.




5

Figure 5-10. Set Up Measurement screen

This screen defines software and measurement characteristics, including the following:

• Travel Mode—determines whether measurements will be taken in one direction only (Unidirectional), both forward and reverse (Bidirectional), or backward and forward for one point at a time (Pilgrim).

• Trigger—determines if the remote control, machine tool encoder, or an automatic trigger will signal the software to record a measurement. See the Agilent 5530 Dynamic Calibrator Measurements Reference Guide for information on selecting a triggering mode. The Record Button (manual) trigger is used unless Auto or Encoder is chosen.

• Automation—determines if the data will be saved or plotted after each run and whether the next run will start automatically.




5

• Set Up Targets—defines the target list. To display and edit the target list (Figure 5-11), press Show Targets.

Figure 5-11. Set Up Measurement screen with Set Up Targets window open

You are now ready to begin making the measurement. See Chapter 6.


6

Making the Measurement

Chapter 6 Making the Measurement

Introduction

6

Introduction

This chapter first explains how to mount the laser head on the tripod. Once you have set up the Agilent 5530’s hardware and the measurement portions of the software, you are ready to collect measurement data.

Mounting the Laser Head on the Tripod

To mount the laser head on the tripod, see Figure 6-1 and follow these steps:

1 Remove the tripod and mounting plate from the transit case.

2 Spread the tripod legs fully and extend each leg to the approximate height you require.

3 Place the mounting plate on the tripod.

The base of the mounting plate fits into over the top of the tripod. Align the mounting plate as shown in Figure 6-1.

4 Hand tighten the mounting plate screw that secures the mounting plate to the tripod.

Hint

To make it easier to align the laser head to the machine, place the tripod with one leg in line with the path of the laser beam.




6

Figure 6-1. Laser head, mounting plate, and tripod

1 Laser head

2 Handle

3 Elevation adjustment nut

4 Azimuth adjustment knob

5 Slide adjustment knob

6 Mounting plate retention screw

7 Tripod

8 Knob to lock height adjustment in place

9 Leg locks

10 Knob to stiffen leg support

11 Height adjustment knob

12 Knob to lock the rotation of the mounting plate

13 Mounting plate

2

1

13

12

3

4

5

6

7

8

9

9

10

11




6

5 If the legs are not fully extended or if the tripod is on a rough or uneven floor, use the bubble level on the mounting plate to ensure that the mounting plate is level.

If the mounting plate is not level, follow these steps:

a. Make sure all the legs are fully spread.

b. Make sure the tripod’s feet are flat on the floor.

c. Adjust leg lengths.

NOTE The laser beam may be aligned to the machine you are calibrating without being level to gravity.

6 Place the laser head on the mounting plate.

To place the laser head, stand at the rear of the tripod and mounting plate, see Figure 6-2 and follow these steps:

a. Place the laser head’s front feet in the pedestals at the ends of the flexure at the front of the mounting plate.

b. Place the laser head’s rear foot in the groove on the azimuth adjustment screw.

Turning the azimuth adjustment knob rotates the laser head in the horizontal plane. The related movement of the laser head's front feet is enabled by the flexure that attaches their supporting pedestals to the main part of the mounting plate.

7 Secure the laser head to the mounting plate.

The laser head’s front feet are secured via captive screws in the mounting plate’s pedestals; its rear foot is secured via a clamp. To secure the laser head to the mounting plate, see Figure 6-3 and follow these steps:

a. Using the knurled knobs at the bottom of the pedestals, screw the captive screws into the laser head's front feet and tighten them until the feet are securely clamped to the pedestals.

b. Hook the lower edge of the rear-foot clamp in the groove on the underside of the mounting plate.

c. Slip the hooked portion of the clamp around the adjustment screw on the laser head’s rear foot and above the locking nut.




6

Figure 6-2. Laser head mounting plate assembly

1 Pedestals for laser head's front feet

2 Flexure

3 Bubble level

4 Groove for laser head’s rear foot

5 Azimuth adjustment screw

6 Azimuth adjustment knob

7 Slide adjustment for translating the laser head

8 Slide adjustment knob

9 Groove for lower edge of the mounting clamp

10 Knob to lock the rotation of the mounting plate

11 Mounting plate base

12 Retaining screw

******************

* View of the top side of the mounting plate assembly

** View of the underside of the mounting plate assembly

1

1

7

8

6

2

10

11

6

9

6

7

12

8

6

5

3

4

*

**




6

Figure 6-3. Securing the laser head to the mounting plate

d. Raise the elevation screw locknut to hold the clamp in place.

With the laser head secured to the mounting plate, ensure that:

• the rear foot screw moves easily and the laser head responds to its adjustment

• the tripod is level and stable

You can now use the handle on the laser head to carry the laser head and tripod as a unit.

1 Knurled knob for pedestal captive screw

2 Elevation adjustment screw

3 Elevation screw locknut

4 Clamp for rear foot

1

2

3

4



Collecting Measurement Data

6

Collecting Measurement Data

Once you have set up the Agilent 5530’s hardware and the measurement portions of the software, you are ready to collect measurement data.

On the Set Up Measurement screen, select Collect Data.The Collect Data screen is displayed (Figure 6-4).

The Collect Data screen displays the results of your measurement in three ways:

• numeric displays

• Position/Error list box

• graph of data as it is recorded

Figure 6-4. Collect Data screen



Recording Measurement Data

6

The numeric displays are defined by the options selected in Upper Num. Display and Lower Num. Display. The top display indicates the actual laser position or actual error. The lower display indicates the target or encoder position.

You can also enter error and target values from the keyboard. This is useful for testing, for entering data from another source, or for completing a data set when the laser is unavailable.

The information from the numeric displays is presented in a table in the Position/Error list box in the lower-left corner of the screen. You cannot edit the values in the list box, but you can remove points by selecting Erase Data. See “Erasing Measurement Data” in this chapter for more information.

A status message is displayed beneath the list box indicating the travel mode and run status; for example, “Bidir.: Run 3 of 10” (run 3 out of a total of 10 runs in bidirectional mode).

Recording Measurement Data

The procedure for recording measurement data is determined by the trigger mode you selected on the Set Up Measurement screen.

If you selected Record Button, either press the record button on the remote control unit or select Record on this screen.

After you have completed all runs, your measurement is complete. You are now ready to analyze the data you have collected. See Chapter 7 for instructions on displaying, printing, transferring, and saving data.



Erasing Measurement Data

6


If, during your measurement, you record data you do not want or if you need to collect additional data, the metrology software enables you to erase one or more data points. Follow these steps:

1 On the Collect Data screen, select Erase Data.

The Erase Data window is displayed (Figure 6-5).

Figure 6-5. Collect Data screen with Erase Data window open




6

2 Select one of the following options:

• Erase last data point—erases the most recent measurement recorded and recalls the previous target value so you can retake the measurement.

• Erase last data run—erases the current partial data run (or the last run if there is no data in the current run) and sets up data collection at the beginning of the run.

• Erase to beginning—erases all data for the current axis and sets up data collection at the beginning of the first run for that axis.

3 Select Erase.

If you do not want to erase any data, select Don’t Erase.


7

Analyzing, Transferring, and Printing Measurement Data

Chapter 7 Analyzing, Transferring, and Printing Measurement Data

Introduction

7

Introduction

The Agilent 10747F Metrology Software enables you to take the raw measurement data you collected and analyze the following machine characteristics:

• accuracy

• repeatability

• mean backlash

• slope

This chapter describes how to use the system to make these analyses. It also explains how to:

• alter the way the data is displayed on the screen

• transfer the data to a spreadsheet program

• print the data and the analysis

See Chapter 5, “Setting Up the Software for a Measurement,” for information on saving the data.

NOTE This guide does not provide instructions for completing each field on each screen since this information is provided by the online help.



Displaying the Analyze Data Screen

7

Displaying the Analyze Data Screen

To begin data analysis, select Analyze Data on the Collect Data screen. The Analyze Data screen is displayed (Figure 7-1).

Figure 7-1. Analyze Data: LINEAR screen

The Analyze Data screen presents graphical data and numerical analysis of the data set. Use the Set Up Graph screen (by selecting the Set Up Graph button) to specify:

• what numerical analysis is to be performed on the data

• what analysis is to be plotted on the graph shown on the Analyze Data screen

On the Analyze Data graph, the horizontal axis represents machine position; the vertical axis represents measured error.



Changing the Data Display

7

To move the comment box, in which the results of the numerical analysis are displayed, to another part of the Analyze Data screen, follow these steps:

1 Place the mouse cursor on the edge of the box.

2 Press and hold the mouse button and drag the box where you want it displayed.

This box will also be displayed in this location the next time the screen is displayed.

To save your measurement data, select Save Data. This button displays the Save Data screen. See Chapter 5, “Setting Up the Software for a Measurement,” for instructions on saving data. After the data is saved, you return to the Analyze Data screen.


Autoscaling

To alter the display to show only the portion of the graph that contains data, select Autoscale Vertical. The display remains the same size and the axes are scaled to display only the measurement data.

Adding text to your graph

To add text to your graph, follow these steps:

1 On the Analyze Data screen, select Add Text.

The mouse cursor changes to cross hairs.

2 Create a box.

For most kinds of measurements, including Linear as shown in Figure 7-1, only one text box can be added to the Analyze Data screen. For Timebase Linear measurements, two text boxes can be added, one for each of the two graphs.




7

To create a text box, follow these steps:

a. Place the mouse cursor where you want one corner of the box to be located.

b. Press and hold the mouse button. Then drag the cursor along a diagonal line to draw a box.

c. Release the mouse button.

The box you created automatically aligns itself to the grid of the Analyze Data screen.

This box will be displayed in this location the next time the screen is displayed.

NOTE Be sure your text boxes do not overlap, or some of your text will be hidden.

3 Type your text.

The text scrolls to fit the shape of the box. If the text overflows the box it will scroll out of sight.

4 To move or resize the box, click Add Text again, which causes the box to disappear. Then click-and-drag again, which causes the box to reappear at the new location and size, still containing the entered text.

Displaying and editing measurement data

To display the measurement data in a table, select Show Data from the Analyze Data screen. The Show Data Set screen is displayed (Figure 7-2).

You can edit the data in the following ways:

• sort by run number or position number (by selecting a button)

• change the sign of the position or error values (by checking boxes)

• exclude certain runs (refer to “Erasing Measurement Data” on page 6-9)

• change individual measurement values (see below)




7

NOTE Changing a measurement value on this screen also changes the value on the Analyze Data screen when the file is saved.

To change an individual measurement value, follow these steps:

1 In the table on the Show Data Set screen, highlight the value you want to change.

2 Type the new value in the Change Error box.

3 Press Enter on the keyboard or select another measurement value from the list.

Figure 7-2. Show Data Set: LINEAR screen

For linear measurements, you can create a compensation table. See “Creating a compensation table” in this chapter for instructions.




7

Printing the data analysis graph

To print the graph and numerical analysis after you have customized your data display, on the Analyze Data screen select Plot, then click Plot again in the pop-up Plot Type menu. Alternatively, click the Plot ISO 230-2 button to print the graph in that format. If the required number of data runs have not been taken, a warning message will be displayed.

In either case a standard Windows Print screen is displayed (Figure 7-3). See your Windows documentation for instructions on using this screen.

Figure 7-3. Analyze Data: LINEAR screen with Print window open



Transferring Data to Another Program

7

Transferring Data to Another Program

To transfer your measurement data to a spreadsheet or other PC program, follow these steps:

1 On the Analyze Data screen, select Show Data.

The Show Data Set screen is displayed (Figure 7-2).

2 Select Run # or Pos # under Sort By.

This determines if the data will be sorted by run number or by position number.

3 Select Print to File.

The Print Data to File screen is displayed.

4 Type a file name in the File name box or use the suggested default.

Use the browser to specify the desired drive and folder, then click OK.The data is saved as an ASCII file with tab separated values, and can now be used as input to a spreadsheet program or other application software.

After the data is saved, you will automatically return to the Show Data Set screen.

Setting Up the Data Analysis Graph

To display the Set Up Graph screen, select Set Up Graph on the Analyze Data screen. The Set Up Graph screen (Figure 7-4) determines (1) the numerical analysis that is performed on the measurement data and (2) how the graph shown on the Analyze Data screen is displayed.




7

Figure 7-4. Set Up Graph: LINEAR screen

Selecting an industry standard The industry standard you select on the Set Up Graph screen determines the settings for numerical and graphical analyses. If you alter any of the settings dictated by the industry standard selected, when you select OK and return to the Analyze Data screen the comment box will show the standard, followed by “(modified),” along with the results of the numerical analysis.

The numerical analysis figures present a single calculated value for all data points in the measurement. The graphical analysis enables you to view the data as an array of individual values so you can analyze trends within the data.




7

You also use the Set Up Graph screen to indicate additional information to be printed on your printed copy of the graph. This information includes the following:

• legend

• machine information (See “Entering machine information” for more information.)

• environmental data

• numerical analysis

Entering machine information

To display the Machine Information screen (Figure 7-5) select Machine Info on the Set Up Laser or Set Up Graph screen. This screen records information about the machine you are calibrating. This information is stored with the data files for the machine and can be printed on the plots from the Analyze Data screen.




7

Figure 7-5. Machine Information screen

Creating a compensation table

To create a compensation table to correct the machine tool for linear positioning errors, select Comp Table from the Show Data Set screen. The Linear Compensation Table screen is displayed (Figure 7-6).

Compensation is based on the data as it appears in the Show Data Set screen. The Linear Compensation Table screen presents compensation values in the user’s machine units and can interpolate where target positions do not match the machine’s compensatable positions. Compensation can be based on the mean values for forward and reverse travel separately or on the combined mean.




7

Figure 7-6. Linear Compensation Table screen


8

Ensuring Repeatability, Accuracy, and Resolution

Chapter 8 Ensuring Repeatability, Accuracy, and Resolution

Introduction

8

Introduction

This chapter discusses the importance of repeatability, accuracy, and resolution. These terms are not interchangeable but are sometimes confused. Therefore, you should understand their meanings. To help visualize these terms, think of a sharpshooter firing at a target (Figure 8-1).

Figure 8-1. Example of repeatability, accuracy, and resolution

Repeatability is the range among a group of measurements at a target position. In the sharpshooter example, the compactness of the shot pattern is a measure of repeatability (for that person, using that weapon, in that environment, at that time).

1 Repeatability

2 Accuracy

3 Resolution

3

2

1



Ensuring Accuracy

8

You can think of repeatability in a similar way when making measurements with the laser. Operator skill, machine stability, machine geometry, and the environment all affect repeatability.

Accuracy is how closely the measurements agree to a given standard for the measurement. (By comparison, repeatability is how closely the measurements agree to each other.) In the sharpshooter example, the closeness of the shots to the bull’s-eye is a measure of accuracy. It is possible for the shots to be close together (repeatable), but far from the bull’s-eye.

Machine tool accuracy is more complex than positioning accuracy at one target. In linear positioning, accuracy is the difference between the average position of a group of measurements and the location of the target position for those measurements. Accurate parts are exactly like the drawing for those parts; repeatable parts are exactly like each other. A batch of parts, all rejected for the same flaw, are repeatable but not accurate.

Resolution is the smallest increment of scale. In the sharpshooter example, resolution is the distance between rings in the target.

In laser measurement, resolution is the smallest unit of measurement you can make with confidence.

For discussion purposes, accuracy is presented first in this chapter, followed by repeatability, and resolution.

Ensuring Accuracy

The accuracy and precision of a measurement are influenced by many factors. Philosophies of how to quantify overall positioning accuracy vary as shown by the multitude of standards. The Agilent 10747F Metrology Software enables you to quantify overall accuracy to any current standard or to the needs defined by your situation. (The results are often very different.)



Ensuring Accuracy

8

One of the most important steps you can take to improve the accuracy of your measurements is to follow the calibration schedules for your laser measurement system’s components.

The rest of this section describes common problems that affect accuracy and offers suggestions for minimizing the impact of these problems.

Compensating for environmental factors

Environmental conditions in your work area affect the accuracy of your laser measurements. These conditions include air temperature, air pressure, relative humidity, and material temperatures. To compensate for these error producing conditions, you can use remote air sensors (such as the Agilent E1738A) and remote material temperature sensors (such as the Agilent E1737A). Or, if you are receiving environmental data from another source, you can enter compensation parameters through the Set Up Environmental Compensation screen.

The metrology software uses this data to calculate a total compensation factor. The system references measurement readings to standard conditions: temperature of 20 °C (68 °F), air pressure of 760 mm (29.9 inches) Hg, and relative humidity of 50 percent. It multiplies this compensation factor by the wavelength count to correct for differences between the actual wavelength of light (WOL) in air and the standard WOL in a vacuum.

Correcting errors that affect linear measurementsLinear measurements are affected not only by environmental conditions, but also by the following physical setup errors:

• Abbé error

• deadpath error

• cosine error



Ensuring Accuracy

8

Abbé error

The perpendicular distance between the displacement measurement axis of a machine (the machine’s scales) and the measurement line where displacement in that coordinate is being measured is called the Abbé offset. Abbé error is the measurement error resulting from angular motion of a moveable component and the Abbé offset between the scales measuring the motion of that component and the measurement line. See Figure 8-2 for an illustration of Abbé error.

Understanding Abbé error is valuable in predicting a machine’s largest errors and, to a large degree, the limit of how accurately a machine can do its work.

The Abbé error increases in proportion to the size of the angular offset and the distance of the linear offset. To minimize this error, you should make your measurement as close as possible to what you are measuring. For example, if you want to determine the accuracy of a machine’s lead screw or scale, make your measurement as close as possible to the screw or scale. If, on the other hand, you want to measure how accurately the machine positions its cutting tool, make your measurement along the tool’s path. This compensates for geometric inaccuracies of the measurement system including those due to Abbé error.

A micrometer is not subject to Abbé error, since the measurement axis and its scale are the same.

Locate your calibration axis in the most critical positioning area of the machine’s working area. Once compensated, the machine will position most accurately along the calibration axes. The worst accuracy will be at the greatest offset from the calibration axes.



Ensuring Accuracy

8

Figure 8-2. Example of Abbé error

To calculate the amount of measurement error resulting from Abbé offset, use the following formula:

Offset distance × tan (offset angle)

For an angle of 20 degrees or less, you can approximate the Abbé error using the following formula:

Deadpath error

Deadpath is the part of the measurement path that the retroreflector never moves through. In other words, it is the distance between the interferometer and the retroreflector when they are closest together (see Figure 8-3).

* Measurement axis at lead screw

** Measurement axis at probe or tool path

1 Measurement axis

2 Work piece

3 Abbé offset

4 Error in measurement

5 Measured distance

6 Actual distance

7 Probe or tool path

θ Angle of offset

2

6

5

1,7

2 31

6

5

7

0 0

***

44

Offset dis cetan5

6–× 10arc sec----------------------

⎝ ⎠⎜ ⎟⎛ ⎞

angle in arc ondssec( )××



Ensuring Accuracy

8

To minimize this error, during setup you should place the optics as close as possible without allowing them to touch. Measure the remaining distance and enter and record this distance on the Set Up Laser screen so the system can compensate for WOL changes over this distance.

Figure 8-3. Example of deadpath error

Cosine error

Cosine error results when the laser beam path and the desired measurement axis are not parallel (Figure 8-4). When the laser path is not properly aligned with the machine travel, the laser beam travels at an angle to the actual machine travel.

As a result, the recorded measurement is shorter than the actual distance the machine traveled. The error increases as the angle or distance grows.

1 Laser head


3 Deadpath distance for first interferometer position

4 Deadpath distance for second interferometer position

5 Linear retroreflector at the zero point

6 Linear retroreflector at measurement point x

7 Measurement length

8 Zero point of measurement

9 Interferometer assembly placed to minimize the deadpath error

1 2 3 4 5 6

789



Ensuring Accuracy

8

Figure 8-4. Example of cosine error

To minimize cosine error, follow these guidelines:

• Take time to carefully check your optic alignment to ensure the laser beam is traveling parallel to the machine travel.

• Watch for irregularities in your linear measurements. If the amount of error is steadily increasing, you may have significant cosine error.

• Allow the temperature of the optics to stabilize before making the measurement (approximately 5 to 10 minutes).

1 Laser head


3 Retroreflector at the first measurement position

4 Displacement along the axis of measurement

5 Retroreflector at the second measurement position

6 Axis of motion

7 Axis of measurement

8 Actual displacement

0

1 2 3 4 5 6

8

7



Ensuring Accuracy

8

Correcting errors that affect angular measurements

The accuracy of your angular measurement can be reduced by even a slight change in the distance between the retroreflectors. This distance changes if the temperature of the angular reflector’s housing changes during the measurement. To minimize this error, follow these guidelines:

• Avoid excessive handling of the angular reflector.

• Avoid moving the angular reflector over heated or cooled surfaces.

• Avoid having heated or cooled air moving past the angular reflector.

Correcting errors that affect straightness, squareness, and parallelism measurements

The accuracy of your straightness measurement can be reduced by the following factors:

• the accuracy of the straightness reflector mirrors

• misalignment (slope) between the machine travel and the laser measurement axis

• environmental factors

Ensuring the accuracy of straightness reflector mirrors

The accuracy of the straightness measurement depends on the two plane mirrors in the straightness reflector having the same flatness. If one mirror is convex or concave, the system will misinterpret this as an out-of-straightness condition.

To minimize the effect of the mirrors along the horizontal axis, follow these steps:

1 Rotate the straightness reflector 180 degrees and make a second set of measurements.

2 Average the data collected for each point.

See the Agilent 5530 Dynamic Calibrator Measurements Reference Guide for more information.



Ensuring Accuracy

8

Correcting for slope

The misalignment (slope) between the machine travel and the laser measurement axis for a straightness measure is different from the cosine error that you get in linear measurements. Misalignment causes a slope to be measured because the reflector is not directing its reference bisector along a path parallel to the machine travel axis (Figure 8–5).

You can have the Agilent 10747F software automatically adjust for the effects of slope on your measurement.

Figure 8-5. Example of slope in a straightness measurement

To have the software adjust for slope, follow these steps:

1 Go to the Set Up Graph screen.

2 If necessary, turn on the slope correction feature by selecting it.

3 Select the slope correction method supported by your industrial standard.

1 Interferometer

2 Reference bisector

3 Machine travel

4 True out-of-straightness distance

5 Straightness reflector

6 Data path

4

5

4321

6



Ensuring Accuracy

8

For squareness and parallelism measurements, the slope is removed from the first axis. This same amount of slope is removed from the second axis. Any remaining slope on the second axis is the out-of-squareness or out-of-parallelism measurement for the combination of the two axes.

Compensating for environmental factors

Straightness measurements are sensitive to environmental effects. The most common sources of errors caused by the environment are:

• thermal expansion of the machine or part

• machine vibration

• air turbulence

To minimize the effect of thermal expansion, follow these guidelines:

• Allow the machine and optic temperatures to stabilize before making your measurement.

• Try to minimize the total time of your measurement. If your work area is not temperature controlled, parts of the machine may expand or contract at different rates throughout the day.

Excessive vibration and air turbulence can be identified by the following signs:

• random drifting of the measurement results when the optics are at rest

• drift increasing as the distance between optics increases

If drifting of the measurement stops when the machine is turned off, vibration is the likely cause. To minimize the effect of machine vibration, follow these guidelines:

• Make sure the straightness reflector, base, and height adjuster are securely fastened.

• Keep the length of the spindle and post(s) to a minimum.

• Reduce feed rates.



Ensuring Accuracy

8

• Place pads under the reflector’s base as a last resort in high-vibration, low-accuracy measurements.

You can also help factor out the vibrational effects by averaging successive runs or averages.

Air turbulence is caused by temperature differences in the air. To minimize the effect of air turbulence, follow these steps:

1. Remove sources of temperature fluctuations, such as open doors, motors, lamps, exhaust fans.

2. Stir the air along the measurement path with a large fan to stabilize the temperature.



Optimizing Repeatability From One Calibration to the Next

8

Optimizing Repeatability From One Calibration to the Next

Repeatability is a measure of consistency from one calibration to the next (see Figure 8-1). The metrology software helps you make consistent measurements by enabling you to recall saved setup files and open online setup diagrams. Make your measurements carefully and follow these guidelines:

• Set up the measurement the same way each time.

• Keep your deadpath consistent. Use the same distance between optics each time.

• Place the sensors in the same place each time.

• Standardize the machine environment; for example:

– Match the conditions surrounding the measurement as closely as possible from one calibration to the next.

– Be sure the machine’s foundation is rigid and will not move with the machine’s motion.

– Keep the temperature around the machine as stable as possible. Remember, unless your work area is temperature-controlled, the temperature may change as you travel up from the machine’s base as well as along the machine’s length.

– Use the same optics and environmental sensors from one calibration to the next.

• Attach the measurement and reference retroreflectors to the interferometer. Then, watch the measurement display for any fluctuations indicating noise from the electronics.

Noise from the electronics is rarely a problem and you normally will not see any fluctuations.



Improving Resolution

8

Lost motion, or backlash, is one source of non-repeatability; therefore, you should pay special attention to this. The lost motion can be seen in the difference between your forward and reverse means on the Analyze Data screen. However, certain geometric problems with your machine can give the appearance of lost motion. Chapter 9, “Troubleshooting and Maintenance,” lists some causes of excessive lost motion.

Improving Resolution

The resolution of your system depends on the optics you are using and the size of your sample.

To get the best resolution from your optics, follow these guidelines:

• Be sure to use the optics most appropriate for your measurements.

• Examine the optics to be sure they are clean and in good condition.

• If your measurement requires extra-high resolution, you may need to use the following optics used with the Agilent 10724A Plane Mirror Reflector:

– Agilent 10706A,B Plane Mirror optics

– Agilent 10716A High Resolution Plane Mirror optic

The metrology software provides extended resolution by averaging samples of over 100 points to provide an additional digit of measurement resolution. You can choose this option on the Set Up Measurement screen.


9

Troubleshooting and Maintenance

Chapter 9 Troubleshooting and Maintenance

Introduction

9

Introduction

.This chapter provides instructions for resolving problems you may encounter when using the Agilent 5530. This chapter also provides general maintenance instructions for the hardware and optics.

The metrology software provides online error messages to assist you with software problems. See your Windows documentation for Windows problems. See your PC user documentation for PC-related problems.

Troubleshooting the Agilent 5530

Table 9-1 lists problems you might encounter while using the Agilent 5530 and provides solutions.

Table 9-1. Problems and Solutions

Problem Solution

Lost motion or backlash. Check the physical condition of the machine tool. This problem could be caused by the following:

lack of lubrication; the gib is too tight; the thrust bearing or ball screw is bad; unbalanced tuning of the servo control card.

Measurement results drift when the optics are at rest.

Make sure the optics and fixtures are tight, minimize vibration, and reduce the feed rate.

Also, make sure the temperature of the optics is stable.

Environmental data fluctuates during the measurement.

Check the measurement path for sources of heat or for air ducts.

If you do not find temperature fluctuations, check the accuracy of your sensors using the maintenance instructions.



Troubleshooting the Agilent 5530

9

No sensor readings. Make sure sensors are properly connected and Automatic Compensation is selected on the Set Up Environmental Compensation screen.

Record button does not work. If using the remote control unit, make sure the cable is connected properly.

Loss of beam strength before end of travel path.

Check the alignment of the optics and laser head.

Clean the optics if necessary. See “Maintaining the optics” in this chapter for instructions.

Table 9-1. Problems and Solutions (Continued)

Problem Solution



Maintaining the Agilent 5530

9


This section provides maintenance instructions for the optics and optional sensors.

Maintaining the optics

Although you should clean the optics periodically, frequent cleaning may actually damage the lenses. Therefore, minimize cleanings by preventing the optics from getting dirty. When you must clean optics, observe the following guidelines:

Cleaning with pressurized air

Use low-pressure air to remove dust particles from the lenses. Typically, this will clean the lenses adequately.

CAUTION Do not use pressurized air to clean lenses that are recessed into an optic, such as the lenses on an Agilent 10736A Interferometer.

Cleaning with lens tissue and methanol or alcohol

If pressurized air does not clean the lens adequately, you may need to use lens tissue and methanol or alcohol.

1 Fold the lens tissue into an approximately 25 mm (1 inch) square.

2 Wet the tissue with methanol (do not saturate) and gently wipe across the optical surfaces. Use plenty of tissue. Apply only enough pressure to remove the contaminant.

CAUTION To avoid damaging the lens, (1) always apply liquid to the tissue, not to the lens; (2) never use a dry tissue to clean the lens; (3) do not reuse the tissue.

If you are cleaning external optical surfaces that are hard to reach, use a cotton-tipped swab.




9

If you use alcohol with lens tissue, avoid alcohol contamination by observing these precautions:

• Use only unopened containers of alcohol. Alcohol absorbs water when exposed to air, resulting in water spots when the alcohol evaporates.

• Transfer the alcohol to a squeeze bottle that can be capped and made airtight.

• Never transfer alcohol back into the original container.

Maintaining the air sensor

By keeping the air sensor in good working condition, you can help ensure measurement accuracy and speed.

Cleaning

Clean the sensor casing and cable using a cleaning solution, such as Simple Green, applied to a soft cloth or paper wipe. Be careful not to spray cleaner into the sensor case openings. Do not open the casing to clean inside.

Checking accuracy quickly

Check the air sensor’s temperature reading by placing the sensor next to an Agilent E1737A material temperature sensor. The material temperature sensor must be facing up. After stabilization (allow 5 to 10 minutes), the two readings should be within 0.5 °C (0.9 °F).

Check the air sensor’s pressure reading against a calibrated barometer placed in the same location. The two readings should be within 1.5 mm (0.06 inch) Hg (200 Pa).

If the E1738A Air Sensor’s accuracy is outside these guidelines, return the sensor to Agilent for calibration.

See “Returning sensors to Agilent for calibration” later in this chapter for a list of authorized calibration facilities.




9

Maintaining material temperature sensor

It is important that you clean and calibrate the material temperature sensors regularly.

Cleaning

Clean the sensor casing and cable using a cleaning solution, such as Simple Green, applied to a soft cloth or paper wipe. Do not open the casing to clean inside.

Checking accuracy quickly

To check the accuracy of the material temperature sensors quickly, you will need three or more material temperature sensors. Place the sensors next to each other on the machine or other work surface. If one sensor’s reading is different from the others by more than 0.5 °C (0.9 °F), you can assume that the sensor is inaccurate.

If the E1737A Air Sensor’s accuracy is outside these guidelines, return the sensor to Agilent for calibration.

Returning sensors to Agilent for calibration

A sensor’s accuracy is based on a 1-year calibration cycle. Every 12 months, you should return the air and material temperature sensors to Agilent for calibration.

See the Service and Support page (at the back of this guide) for a list of Agilent Service Centers, which you can contact to arrange for calibrating air and material temperature sensors. These centers also provide basic support for laser products.

Agilent Service Agreement

An Agilent Service Agreement is available that includes routine cleaning, maintenance, and calibration. See your Agilent representative for more information.

Do not try to service the sensor; return defective sensors to Agilent for service or replacement.


Glossary

Glossary G

loss

ary

Abbé error—The measurement error resulting from angular motion of a moveable component and the Abbé offset between the scales measuring the motion of that component and the measurement line.

Abbé offset—The perpendicular distance between the displacement measurement axis of a machine (the machine’s scales) and the measurement line where displacement in that coordinate is being measured accuracy—How closely a measurement agrees to a known standard or true value. See the industrial standard you are using for a precise definition of accuracy.

ambient—Surrounding on all sides. For example, ambient temperature refers to the temperature of the machine’s environment.

AMT—Association of Manufacturing Technology.

ANSI—American National Standards Institute.

arcsec, arcseconds—1/3,600 of one degree of arc, equivalent to approximately 4.85 micro units per unit.

ASME—American Society of Mechanical Engineers.

azimuth—1) The lateral deviation of the laser beam from the machine travel path. 2) The horizontal angular distance from a fixed reference direction (laser beam travel) to a position, object, or object referent.

BSI—British Standards Institute.

CMM—Coordinate Measurement Machine.

coefficient of thermal expansion (CE)—The amount by which a material expands or contracts due to a change in temperature. Usually expressed in parts per million (ppm) per degree of temperature change (either Celsius or Fahrenheit).

G-2 Getting Started Guide

Glossary G

lossary

cosine error—An error resulting from misalignment of the scale (the laser beam) to the mechanical axis of motion. This error is called cosine error because its magnitude is proportional to the cosine of the angle of misalignment.

cube corner—See retroreflector.

degrees of freedom—Possible types of motion along a machine’s travel path. Generally there are six degrees of freedom: roll, pitch, yaw, linear displacement, horizontal straightness, and vertical straightness (see Figure G-1).

ESD—Electrostatic discharge. ESD is a static electrical charge that builds up and discharges when objects (such as the optic casings or the PC boards) touch. ESD can ruin static-sensitive electronic components such as PC boards.

far end of travel—The point in a measurement setup when the measurement optics are at their farthest distance apart.

interferometer—An optic that separates a beam of light into two or more paths and subsequently recombines the beams after they traverse different optical paths.

ISO—International Organization for Standardization.

JIS—Japanese Institute for Standards.

laser head—The laser source with its housing and focusing and polarization components.

laser interferometry—A technique for measuring distance using the wavelength of laser light by observing and counting optical interference patterns. Can also refer to devices using interferometric techniques to measure surface flatness.

loss of lock—The condition when the receiver in the laser head loses its firm hold on the return laser beam.

MTC—Material temperature compensation.

Getting Started Guide G-3

Glossary G

loss

ary

microinch—One millionth of an inch.

micrometer—One millionth of a meter (39.37 microinches).

micron—See micrometer.

near end of travel—The point in a measurement setup when the measurement optics are closest to each other.

NMTBA—National Machine Tool Builders Association. Now known as the Association of Manufacturing Technology (AMT).

parts per million (ppm)—A means of standardizing an error by comparing your error against one million of those error units. (It is usually a high-resolution percentage.)

pitch—The angular motion (of a carriage or slide designed for linear motion) that is perpendicular to the desired linear motion and perpendicular to the yaw of the carriage.

ppm—Parts per million.

referent—The point or object that is used as a reference. (For example, the position of the interferometer.)

repeatability—The range among a group of measurements at a target position.

resolution—The smallest increment of a scale.

retroreflector—A mirror assembly that reflects the light beam parallel to the incoming beam. Also known as a cube corner.

roll—The rotational movement about a lengthwise horizontal axis (see Figure G–1).

rotation (of the laser head)—Tilting the laser head to direct the laser beam as required for your measurement.


Glossary G

lossary

time constant—A measure of the time required for a physical system to move from one equilibrium state to another. In each time constant, the system moves about 63 percent (1 - 1/e) of the remaining distance between its present state and the new equilibrium state. After five time constants, the system is essentially at the new equilibrium state.

translation (of the laser head)—Linear movement of the laser head without changing its angle (tilt) to direct the laser beam as required for your measurement.

wavelength-of-light (WOL) compensation—Correction for the small changes in the wavelength of light due to changes in the refractive index of air.

WOL—Wavelength of light.

yaw—Rotation about a vertical axis (see Figure G-1).

VDI—Verein Deutscher Ingenieure, a German engineering standard.

Figure G-1. Six degrees of freedom

1 Pitch

2 Yaw

3 Roll

4 Horizontal straightness

5 Vertical straightness

6 Linear displacement

1 2 3 4 5 6

Getting Started Guide G-5

Glossary G

loss

ary


Index
AAbbé error, 8-5accessing the software, 5-8accuracy
checking air sensor, 9-5checking material temperature

sensor, 9-6ensuring, 8-3of the straightness reflector

mirrors, 8-9adding text to your graph, 7-4Agilent 10747A Metrology Software.

See metrology software, 1-4Agilent 10886A PC Compensation

Board. See PC compensation board, 1-4

Agilent 10887P Programmable PC Calibrator Board. See PC calibrator board, 1-4

Agilent 5529A/55292Aoverview, 1-4

Agilent 5529A/55292A systemillustrated, 1-2, 1-4overview, 1-3types of measurements, 1-7

Agilent 5529A/55292A system, typical components list, 1-4

Agilent Service Centers, 9-6air sensor

checking accuracy, 9-5cleaning, 9-5

aligning the optics, tutorial, 4-10analysis data

displaying, 4-17Analyze Data

Linear screen, illustrated, 4-17Analyze Data screen, illustrated, 7-3Analyze Data: Linear screen,

illustrated, 4-17

assembling optics, tutorial, 4-3assembling the interferometer,

illustrated, 4-4assembling the retroreflector,

illustrated, 4-5autoscaling, 7-4

Bbuttons, using, 5-7

Ccable assembly

Agilent 10887-60202, A-Quad-B, 3-17

calibrating the laser, overview, 1-5changing the data display, 7-4cleaning

air sensor, 9-5material temperature sensor

material temperature sensorcleaning, 9-6

cleaning the optics, 9-4Collect Data: Linear screen, 4-15compensating for environmental

factors, 8-4components list, 1-4components, inspection, 3-11connecting a component to a PC port,

illustrated, 3-14, 3-16connecting components, 3-11, 3-14conventions used in the software, 5-6correcting errors

affecting linear measurements, 8-4affecting straightness, squareness,

and parallelism, 8-9correcting for slope, 8-10correction errors

affecting angular measurements, 8-9cosine error, 8-7

Getting Started Guide Index-1

Index

Ddata

erasing, 6-9recording, 6-8saving, 4-19

data displaychanging, 7-4

data transfer to another program, 7-8Deadpath error, 8-6defining laser parameters, 5-20degrees of freedom, illustrated, 1-6displaying analysis data, 4-17displaying and saving data,

tutorial, 4-17displaying data, 4-17displaying the Analyze Data

screen, 7-3

Eensuring accuracy, 8-3entering data, 5-6entering machine information, 7-10environmental factors,

compensating, 8-4Erase Data window, illustrated, 6-9erasing data, 6-9erasing measurement data, 6-9error

Abbé, 8-5cosine, 8-7deadpath, 8-6

errorsaffecting straightness, squareness,

and parallelism, 8-9errors, physical setup, 8-4exiting software, 5-16exiting the software, 4-20extended resolution, 8-14

Ffont of the laser head, illustrated, 4-10front of the laser head, illustrated, 4-10

Gglossary, G-2Graph screen, illustrated, 7-9graph, data analysis

printing, 7-7

Hhelp, online, 5-7

Iillustrated, 6-7improving resolution, 8-14industrial standards, 1-3industry standard

selecting, 7-9inspecting components, 3-11installing

software, 3-4

Llaser head

and tripod, illustrated, 6-3front, illustrated, 4-10mounting, 6-2mounting plate, illustrated, 6-3power connector, 3-15power switch, 3-15

Laser head mounting plate assembly, illustrated, 6-5

laser head power connected, illustrated, 3-14

laser parametersdefining, 5-20

Linear Compensation Table screen, illustrated, 7-12

MMachine Info screen, illustrated, 7-11machine information

entering, 7-10maintaining

air sensor, 9-5material temperature sensors, 9-6

maintenance instructions, 9-4

Index-2 Getting Started Guide

Index

making the measurement, 6-1making the measurements,

tutorial, 4-13material temperature sensor

checking accuracy, 9-6measurement data

displaying, 7-5editing, 7-5erasing, 6-9recording, 6-8saving, 5-14

Measurement Template, 4-2, 4-21measurement types, 1-7metrology icon, 4-7, 5-9Metrology icon, illustrated, 3-5Metrology Main Menu, illustrated, 4-7,

5-10metrology software

accessing, 5-8setting up, 4-6

metrology software in Windows 95, 3-4metrology software, installation, 3-4mounting plate, illustrated, 6-3mounting the laser head, 6-3mounting the laser head on the

tripod, 6-2mounting the tripod, 6-3

Oonline help, using, 5-7optics

aligning, tutorial, 4-10cleaning, 9-4protecting, 2-5

optimizing repeatability, 8-13Other Measurements menu,

illustrated, 5-11overview

system, 1-4overview of system, 1-4

Pparameters

defining, 5-20

PC calibrator boardoverview, 1-4

PC compensation boardoverview, 1-4

physical setup errors, 8-4power and turn on the system, 3-18power connector

laser head, 3-15Print window, illustrated, 7-7printing the data analysis graph, 7-7protecting optics, 2-5

RRecall Data screen, illustrated, 5-13recalling files, 5-12recording measurement data, 6-8remote control unit

Agilent 10888AAgilent 10888A Remote Control

Unit, 3-16removing the interferometer

assembly, 4-11repeatability, optimizing, 8-13resetting the laser position, 5-22resolution, extended, 8-14resolution, improving, 8-14returning sensors, 9-6

Ssafety

components use, 2-4general precautions, 2-3laser head, 2-3optics, 2-5protecting optics, 2-5symbols, 2-2

safety labeling, 2-2Save Data screen, illustrated, 4-19,

5-15saving

setup data and measurement data, 5-14

saving data, 4-17, 4-19saving measurement data, 5-14


Index

screens illustratedSave Data screen, 4-19Set Up Measurement screen, 5-24

screens, illustratedAnalyze Data screen, 7-3Analyze Data: Linear screen, 4-17Collect Data screen

Collect Data screen, 6-7Collect Data: Linear screen, 4-15Erase Data window, 6-9Graph screen, 7-9Linear Compensation Table

screen, 7-12Machine Info screen, 7-11Metrology Main Menu, 5-10Other Measurements menu, 5-11Print window, 7-7Recall Data screen, 5-13Save Data screen, 5-15Set Up Environmental

Compensation screen, 5-20Set Up Laser screen, 5-21Set Up Laser: Linear screen, 5-18Set Up Linear screen, 4-9Set Up Measurement screen, 5-23Set Up Measurement: Linear

screen, 4-13Show Data screen, 7-6Show Data: Linear screen, 4-18

securing the laser head, illustrated, 6-6selecting industry standard, 7-9service centers, 9-6Set Up Environmental Compensation

screen, illustrated, 5-20Set Up Laser screen, illustrated, 5-21Set Up Laser: Linear screen,

illustrated, 5-18Set Up Linear screen, illustrated, 4-9Set Up Measurement screen,

illustrated, 5-23, 5-24Set Up Measurement: Linear

screen, 4-13setting up

environmental compensation, 5-19for tutorial, illustrated, 4-2the data analysis graph, 7-8the laser software, 5-17

setting up the software, 4-6Show Data screen, illustrated, 7-6Show Data: Linear screen,

illustrated, 4-18six degrees of freedom, illustrated, 1-6slope, correcting, 8-10software

accessing, 5-8software set up, 4-6software, 10747A

accessing, 5-8conventions used in, 5-6exiting, 5-16screen flow diagram, 5-3setting up for measurement, 5-17

software, installation, 3-4standards, 1-3symbols, safety, 2-2system overview, 1-4

Ttemperature compensation (MTC), 5-19terminology, 5-4terms and concepts, 5-4terms to know, 5-4terms, definition, G-2transferring data to another

program, 7-8tripod, illustrated, 6-3troubleshooting, 9-4turn on the system, 3-18tutorial

aligning the optics, 4-10displaying analysis data, 4-17exiting the software, 4-20making the measurements, 4-13saving data, 4-19set up, illustrated, 4-2setting up software, 4-6


Index

Uusing buttons, 5-7using online help, 5-7

Vverifying the hardware setup, 5-18

Wwavelength of light (WOL), 5-19Windows screen, 5-9Windows screen, illustrated, 4-7


Index


Printed in U.S.AData subject to changeRev 10/13/08

Contacting Agilent Technologies:For more information about Agilent test and measurement products, applications, and services, visit our web site atwww.parts.agilent.com.

Agilent’s Test Measurement Fax Service for United States and Canada:Technical information for test and measurement products and services is available 24 hours a day, 7 days a week, by calling1-800-829-4444.

Technical Support:If you need technical assistance with an Agilent test and measurement product or application, you can find a list of local service representatives on the web site listed above. If you do not have access to the Internet, one of the following centers can direct you to your nearest representative:

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Tel: 877-894-4414Fax: (905) 206-4700

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Tel: +31 20 547 2000Fax: +31 20 547 7799

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DECLARATION OF CONFORMITY According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014

Manufacturer’s Name: Agilent Technologies, Incorporated Manufacturer’s Address: Supplier’s Address:

5301 Stevens Creek Boulevard Santa Clara, CA 95051 USA

Declares under sole responsibility that the product as originally delivered Product Name: 5530 Dynamic Calibrator Model Number: E1735A USB Axis Module, E1736A USB Sensor Hub,

E1737A Material Sensor, E1738A Air/Temp/Hum/Pres Sensor

Product Options: This declaration covers all options of the above products Complies with the essential requirements of the following applicable European Directives, and carries the CE marking accordingly:

• The Low Voltage Directive (2006/95/EC) • The EMC Directive 89/336/EEC, amended by 93/68/EEC

Conforms to the following product standards: EMC Standard Limit IEC 61326-1:2002/EN 61326:1997+A1:1998+A2:2001+A3:2003

CISPR 11:1990 / EN 55011:1990 Group 1 Class A IEC 61000-4-2: 1995+A1: 1998 / EN 61000-4-2:1995 4 kV CD, 8kV AD IEC 61000-4-3: 1995 / EN 61000-4-3: 1996 3 V/m, 80-1000MHz IEC 61000-4-4: 1995 / EN 61000-4-4: 1995 0.5 kV signal lines, 1 kV power lines IEC 61000-4-5: 1995 / EN 61000-4-5: 1995 0.5 kV line-line, 1kV line-ground IEC 61000-4-6: 1996 / EN 61000-4-6: 1996 3 V, 0.15-80 MHz 1 cycle, 100% IEC 61000-4-11: 1994 / EN 61000-4-11: 1994 Dips: 30% 10ms; 60% 100ms Interrupt: > 95%@5000ms Canada: ICES-001: 2004 Australia/New Zealand: AS/NZS CISPR 11: 2004 This product was tested in a typical configuration with Agilent Technologies test systems

Safety IEC 61010-1:2001 / EN 61010-1:2001 Canada: CSA C22.2 No. 61010-1-04

Supplementary Information: This DoC applies to above-listed products placed on the EU market after:

25 August 2008

Randall White

Date Randall White

Product Regulations Manager

For further information, please contact your local Agilent Technologies sales office, agent or distributor, or Agilent Technologies Deutschland GmbH, Herrenberger Straße 130, D 71034 Böblingen, Germany.

In accordance with ISO/IEC Guide 22 and EN 45014

Agilent Technologies, Inc.

Santa Clara Division

5301 Stevens Creek BoulevardSanta Clara, California 95052-8059U. S. A.

Laser Dynamic Calibrator, 5529V/A

10886A Compensation Board, 10887B CalibratorBoard, 10751A/B/C/D Air Sensor,10757A/B/C/D/E/F

Material Sensor

This declaration covers all options of the product.

The product described above is in conformity with:

:

The requirements of the European Council Directive 89/336/EEC and carries the CE-marking accordingly.EMC Standards as required under the Australian Radiocommunications Act. (Supplier Code N279)

CISPR 22: 1993 / EN 55022:1994 / AS/NZS 2064.1/2 - Class AIEC 801-2:1991 / EN 50082-1:1992 - 4 kV CD, 8 kV ADIEC 801-3:1984 / EN 50082-1:1992 - 3 V/mIEC 801-4:1988 / EN 50082-1:1992 - 0.5 kV Signal Lines, 1 kV Power Lines

The requirements of the European Council Directive 73/23/EECIEC 1010-1:1990+A2 / EN 61010-1:1993

Date: December 12, 1995 _

Bruce Euler, Quality Engineering Manager

Contact your local Agilent Technologies Sales and Service Office in Americas; in Asia Pacific or in Europe: Hewlett-PackardGmbH Department ZQ/Standards Europe Herrenberger Straße 130, D-7030 Böblingen (FAX: +49-7031-143143)

WARNING: This is a Class A product. In a domestic environment this product may cause radio interference,in which case, the user may be required to take adequate measures.

Continued from front matter. . .

7.NC.NL.A.03.11.97.R1.J.CW4B

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For any assistance, contact your nearest Agilent Sales and Service Office.


WARNINGINSTRUCTIONS FOR ADJUSTMENTS WHILE COVERS ARE REMOVED AND FOR SERVICING ARE FOR USE BY SERVICE-TRAINED PERSONNEL ONLY. TO AVOID DANGEROUS ELECTRIC SHOCK, DO NOT PERFORM SUCH ADJUSTMENTS OR SERVICING UNLESS QUALIFIED TO DO SO.

Acoustic Noise Emissions

LpA<47 dB at operator position, at normal operation, tested per EN 27779. All data are the results from type test.

Geräuschemission

LpA<47 dB am Arbeits platz, normaler Betrieb, geprüft nach EN 27779. Die Angagen beruhen auf Ergebnissen von Typenprüfungen.

*10747-90061*Manual Part Number 10747-90061 Printed in U.S.A, OCTOBER 13, 2008

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