AFM course & SMM · AFM course & SMM - Calibration - Applications (semicon, materials, bio) - Advanced solutions Ferry Kienberger Keysight Labs Austria [email protected]

AFM course & SMM

- Calibration- Applications (semicon, materials, bio)

- Advanced solutions

Ferry Kienberger

Keysight Labs Austria

[email protected]

SPM2.0, Montpellier,

Jan 20187500 SMM

Page

Overview- Keysight background in SPM2.0

- Goal of this course and summary

- AFM overview:- Basics- AFM high resolution topographical imaging- AFM single molecule force measurements- AFM demo on the 5500

- GHz modeling EMPro overview and demo

- GHz network test with VNA (Fieldfox demo and antenna)

- SMM:- Technology overview including calibration and dopant density- SMM demo on complex impedance and semicon dopant profiling

Linz JKU

LinzKeysight

Nano-AFM

microscopy

Electrical, bio-

and materials

science

RF/microwave

equipment

Cell phone,

WiFi, Radar,

defense

Modeling

software

EMPro, ADS

for semicon

devices

The past

RF engineersNano & materials

Theory & modeling

Current, the SMM

Nano-AFM

microscopy

Electrical, bio-

and materials

science

RF/microwave

equipment

Cell phone,

WiFi, Radar,

defense

Modeling

software

EMPro, ADS

for semicon

devices

Future: the SMM for new

science

Nano-AFM

microscopy

Electrical, bio-

and materials

science

RF/microwave

equipment

Cell phone,

WiFi, Radar,

defense

Modeling

software

EMPro, ADS

for semicon

devicesCondensed matter

physics (eg topological

Insulators): phycisists & materials science

Semicon materials

(eg spintronics):Semicon industry

Single ion-channel

@ GHz frequency:Bio-experts

MD/Atomistic/quantum

Mechanic modeling

(nano-sec vs GHz)3D inverse scattering

Imaging: mathematicians

Current, the SMM

Nano-AFM

microscopy

Electrical, bio-

and materials

science

RF/microwave

equipment

Cell phone,

WiFi, Radar,

defense

Modeling

software

EMPro, ADS

for semicon

devices

Eigler, IBM

On-wafer

Probing Free-Space

Propagation

RF instrumentation

5G

VNA

VNA

www.agilent.com/find/backtobasic

sPage 9

Grundlagen der vektoriellen

Netzwerkanalyse VNA

//upload.wikimedia.org/wikipedia/commons/6/67/Agilent_N5245A_PNA-X.jpg

learning@agilent

What Types of Devices are Tested?

Device type ActivePassive

Inte

gra

tio

nH

igh

Low

Antennas

Switches

Multiplexers

Mixers

Samplers

Multipliers

Diodes

Duplexers

Diplexers

Filters

Couplers

Bridges

Splitters, dividers

Combiners

Isolators

Circulators

Attenuators

Adapters

Opens, shorts, loads

Delay lines

Cables

Transmission lines

Waveguide

Resonators

Dielectrics

R, L, C's

RFICs

MMICs

T/R modules

Transceivers

Receivers

Tuners

Converters

VCAs

Amplifiers

VCOs

VTFs

Oscillators

Modulators

VCAtten’s

Transistors

VNA

Page

Handset antennas & compliance testing

e.g SAR (specific absorption rates)

High speed connectors

Aerospace and defense,

Radar applications

What EMPro

is typically

used for…

EMPro

Agilent EEsof

EMPro

Agilent EEsof

Antenna integration

3D EM modelingEMPro

Agilent EEsofRADAR and defense applications

3D EM modelingEMPro

University of LinzAltenbergerstr. 69, A-4040 Linz, Austria

1. Atomic force microscopy basics

Dr. Ferry Kienberger

Agilent LaboratoriesPage 16

Atomic Force Microscopy (AFM)




How does an AFM work?

In the dark you scan with your finger over the table

• high and round

• hard and soft

• sticky

• warm and cold

Brain convolutes the sensations into an image

Breakfast Table

AFM convolutes nanoscale objects on the surface into a3D topography map plus different material properties


Atomic Force Microscope (AFM)





AFM Imaging and Tips



Agilent AFM Product - Modularity

Large StageEnvironmental

ControlVideo Microscopy

Stand Alone

Inverted Light

Microscope


Agilent Laboratories

Guangzhou, June 17Page 26

11 µm scan

Approx. 2400X

90 x 90 µm scan

Cell imaging:

(top) Erythrocytes(red blood cells)

(bottom) mouse lung

Endothelial cells

Integration with optics Simply put the AFM on top of inverted light mic- Standard optics from top, fluorescence from bottom




Imaging in Liquid:Design Consideration of the AFM Scanner

• Top down scanning:

-> no electronics under the sample plate

• Pendulum design and separated piezo plates for unperturbed scanning in xyz, low mechanical noise, fast scanning

• Atomic and Molecular Resolution

• Open liquid cell / closed cell /flow-through cell




Scanner: Balanced Pendulum – Ultimate Resolution

Y scan

Laser tracking spot remain fixed relative to AFM cantilever

Balanced pendulum Scanner: scanning faster, more accurate control in XYZ, less noise

Traditional Tube ScannerSimple pendulum: scanning slower, less accurate during turn around, more noise



Contact Imaging Mode Dynamic Imaging Mode

Documents

AFM course & SMM · AFM course & SMM - Calibration - Applications (semicon, materials, bio) - Advanced solutions Ferry Kienberger Keysight Labs Austria [email protected]