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Innovative Motion Control Solutions
SPS, Nov. 2013
November 2013
Agenda
10:00 – 10:05 Gathering & seminar introduction (Z'eev)10:05 – 10:30 450mm wafer handling (Z'eev)10:30 – 11:15 Look-ahead algorithm, G&M-codes,
Network cable failure detection & recovery (Shura)11:15 – 11:30 Break 11:30 – 12:15 Motion enhancements new features (Boaz)12:15 – 13:00 Motion enhancements new features-cont. (Maksim)
2
450mm Wafer Handlingand Inspection
3
4
State of the Art Motion Control Solutions 450mm (& 300mm) Wafer Inspection
> 450mm wafer inspection challenges and general motion system structure
> System/subsystem motion control requirements> ACS technologies and solutions to meet specific requirements> Complete solution summary
5
Agenda
Challenges in 450mm Wafer Production / Inspection
Extremetech.com
> Larger work envelope, higher speeds and larger masses> Equal or better level of precision and accuracy!
Wikipedia.com6
Motion System Structure
> High precision wafer positioning stage> Gantry (XX’Y) structures preferred over basic XY> Higher performance
› stand-still jitter and better constant velocity› High resolution laser based encoders or interferometers› May require multiple feedbacks with real-time feedback switching› Control algorithms become more complex (servo, homing, etc.)
> Inspection heads> Relatively small linear/rotary motors (brushless, brush, or stepper)> Digital and Analog I/O> Synchronization with motion (camera, laser, etc.)
> Auxiliary axes and I/Os> Transport/handling, alignment, optics focus> Safety interlocks, GP digital/analog I/O
> User interface & high level machine control typically resides on PC
7
> Large Gantry – 750 x 750 mm or more travel area> Typical Motion Performance Specs
> High speed >1 m/sec> High accuracy <50nm over 450mm> Fastest possible Move & Settle to ±1nm window> Smooth velocity
(±3nm following error @ 100mm/sec)
> Typical Stage Components> Air or precision mechanical bearing> Linear servomotors> High resolution optical and/or laser interferometer and
laser encoder
8
Wafer Stage Motion Control Requirements
> Dynamic Z auto-focus> Multiple low power motors and feedback types> Camera/Optic triggering based on XY or XYZ position> Focus accuracy of 100nm> Automatic, smooth switching to & from focus error sensor
and position encoder feedback> Mount driver and I/O on moving heads to simplify cabling
cables
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Inspection HeadsMotion Control Requirements
> Multiple motor and feedback types, wide range of power levels
> Wide range of I/O types, fast response time (=sub-millisecond)
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Auxiliary Axes & I/OMotion Control Requirements
> MC4Unt integrated multi-axis drive chassis> Includes
› Controller & EtherCAT master› Modular drives› Power supply
> Revolutionary NanoPWMTM drives offer performance better than linear drives
> MIMO gantry control> Advanced ServoBoostTM algorithm for optimal
performance and stability> Additional advanced features
› 2D/3D Error Mapping› Profile Shaping› Kinematics transformations
Wafer Stage SubsystemControl Solution
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> SPiiPlus EtherCAT Motion and Machine Controller> Up to 32 (64) synchronized axes & 1000’s I/Os> Multitasking with 64 threads / programs> Flexible programming
> Real time ACSPL+> IEC61131-3 PLC> Host libraries
> Other possible controllers> SPiiPlusSC PC based Soft Controller> SPiiPlusNTM standalone controller
MC4UNT Complete System Motion and Machine Controllers
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> Based on ACS’ proprietary PWMBoostTM technology developed over the last 5 years
> Replaces linear drives, providing:> Better performance> Sub-nano jitter> Smooth velocity (velocity
error<<1%)> Higher voltages and higher
currents
NanoPWMTM Drives Better than Linear Drives
1nm steps
±0.4nm jitter
13
NanoPWMTM Drives Better than Linear Drives
> A much smaller package> Improved reliability> Better price
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> ServoBoostTM is a proprietary real time servo algorithm that:> Identifies disturbances in real time> Analyzes disturbance root cause> Compensates for it and attenuates its impact> Predicts the disturbances anticipated and prevents their negative effects
> ServoBoostTM provides:> Improved machine performance: Faster settling, better stability, lower jitter,
smoother velocity> Excellent robustness
› Large changes in load › Varying system parameters
> Automatic compensation of disturbances, resonances, axes interaction, cogging and more
Wafer Stage Control TechnologyServoBoostTM
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> UDMLC – 2 , 4-axis compact EtherCAT drive module for small motors > Designed for remote mounting (100x75x48mm3)> 12 to 48Vdc, 1.25/2.5A, 2.5/5A, 5/10A per axis (dual
axis)> Brush, brushless, stepper, voice coil motors> Incremental and absolute digital encoders> Autofocus control algorithm> Multiple GP I/Os
> IOMNT> Compact (101x65x59mm3)> Up to 32/32 I/O per module> 24Vdc, 0.5A per output
Inspection Heads SubsystemControl Solution
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> Proprietary autofocus algorithm developed for wafer inspection> On the fly switching between multiple feedback sources> Maintain focus accuracy while moving (high bandwidth)
Inspection Head Control TechnologyAutofocus
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> UDMxx – Multi-axis EtherCAT drive modules for various motor sizes> Wide power ranges (100W to 3kW peak)> Brush, brushless, stepper, voice coil motors> Incremental, absolute digital, SinCos encoders> Multiple GP I/Os
> IOMNT (if additional I/O needed)> EtherCAT modules for interfacing to
standard drives > UDIxx - +/-10V commands, encoder inputs> PDMnt - Step/Dir stepper and servo drives
> 3rd Party EtherCAT drives and I/O
Auxiliary Subsystem Axes & I/O
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4 232/32
MC4U EC Master
with NanoPWM
DrivesUDMLC IOMNT IOMNTUDMXX
Wafer Stage Inspection Heads Auxiliary Axes & I/O
Additional optional drives
and I/O
32/323-8
A Complete Control Solutionfor Wafer Inspection
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> Highest Performance> Advanced algorithms ServoBoost, MIMO Gantry, Autofocus, feedbacks switching> NanoPWM drives to handle larger loads with higher dynamics needs
> Scalability & Flexibility> Standard Industrial EtherCAT Network> 64 axes & 1000’s of I/Os> Support of 3rd party devices
> Short time to market> One common platform for many machines and system configurations > Single development environment for entire system with full simulator
> Suitable for many other demanding applications> Electronic Mfg Pick/Place, Flat Panel Display Inspection, Wide Format Inkjet
Printing, SEM, CMM
20
Summary
Look-Ahead Algorithm
G&M-Codes Programming Support
Network Cable Failure Detection & Recovery
21
Look-ahead in SPiiPlusNTAgenda
> Market needs> Look-ahead advantages> SPiiPlusNT XSEG capabilities> Corner processing> Example> Further XSEG extensions
22
Look-ahead in SPiiPlusNT Market Needs
> Markets:> Cutting applications (especially laser cutting)> High-speed precise machining
> Applications that challenge to perform a process more efficiently and with better quality
> Technically, it means to pass trajectory with higher velocity and smaller tracking (position) error
23
Look-ahead Advantage
> Look-ahead is an ability of the motion controller to detect conditions that cause exceeding of the machine limits and correct the motion profile automatically and in advance
> Thus, with Look-ahead algorithm better performance and accuracy of the trajectory following is achieved
24
Look-ahead Algorithm in SPiiPlusNT
> Look-ahead algorithm in SPiiPlusNT is implemented as part of the new segmented motion - XSEG
> Main capabilities of XSEG:• Automatic detection of corners and segments, where
required velocity exceeds axis limits (maximal acceleration, jerk)
• Automatic velocity reduction at such segments• Building-up velocity profile using multi-segment look-ahead
algorithm• Segments adding “on-the-fly” (competitive advantage)• Velocity override (competitive advantage)• Outputs synchronization (competitive advantage)
25
Corner Processing
> The controller automatically detects the corner and can automatically calculate the corner velocity in order to pass it with no acceleration/jerk jumps
> As alternative option, the corner velocity can be set by the application
Path Corner
Corner angle Exact path option
Corner velocity Corner
Required velocity Velocity profile
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Corner ProcessingScope Graph
27
XSEG- Further Extensions
> Different geometry processing> Smooth path with permitted deviation/curvature> Smooth path with minimal velocity
> 3D segments
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RS274 Numerical Control Language (G-code)Agenda
> Market needs> Implementation> Execution> Integration with ACSPL+
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G-code Market Needs
> Market Needs:> G&M-codes language is the de-facto standard for CNC
machines> CAD/CAM systems produce G&M-codes programs for
many other markets, such as› cutting applications › different high-speed precise machining
30
G-code in SPiiPlusNT
> SPiiPlusNT implements many common G&M codes, specifically motion-related commands, tool and offset compensation commands, absolute/increment programming, digital outputs control, etc.
Main advantages:> Sophisticated look-ahead algorithm for segments
processing> Outputs synchronization with the motion> Integration of G-code program with ACSPL+> Ability to implement unknown G-codes by the user
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G-code Program Execution
> Editing, debugging and execution of G-code program is done the same way as ACSPL+ program
CAD/CAM SW
N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
G-code program as text file
SPiiPlusNT controllerSPiiPlusNT controller
N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
ACSPL+ bufferACSPL+ buffer
G-code program is downloaded to the controller either by SPiiPlus MMI or by the user program
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G-code with ACSPL+
> ACSPL+ commands and G-code commands can be mixed within the controller buffer
CAD/CAM SW
N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
G-code program as text file
SPiiPlusNT controllerSPiiPlusNT controller
N10 G0 X-90 Y-100N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90
N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
ACSPL+ bufferACSPL+ bufferG-code program is downloaded to the controller either by SPiiPlus MMI or by the user program
OUT0.0=1 ! ACSPL+ line
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Implementing G-code Commands by the User
> Unknown G-code commands support can be easily added by implementing G-code subroutine
CAD/CAM SW
N10 G0 X-90 Y-100N11 G54N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
G-code program as text file
SPiiPlusNT controllerSPiiPlusNT controller
N10 G0 X-90 Y-100
N15 G2 X-100 Y-90 I-90 J-90N20 G1 Y90N25 G2 X-90 Y100 I-90 J90N30 G1 X90N35 G2 X100 Y90 I90 J90N40 G1 Y-90N45 G2 X90 Y-100 I90 J-90N50 G1 X-90N60 G0 X0 Y0N100 M2
ACSPL+ bufferACSPL+ buffer
G-code program is downloaded to the controller either by SPiiPlus MMI or by the user program
N11 G54 G54:N10 G10 X10 Y20 Z30RET
D-bufferD-buffer
N11 G54
Unknown G-code command
implementation
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Network Cable FailureDetection & RecoveryAgenda
> Demonstration movie> Advantages> Prerequisites> Functionality
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Network Cable Failure Detection & Recovery - Demonstration
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Network Cable Failure Detection & Recovery - Advantages
> In case of cable or connector failure: > the machine can be immediately recovered without a need
to repair the broken part> the location of broken cable or connector is detected by the
controller that simplifies the machine repair
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Network Cable Failure Detection & Recovery - Prerequisites
> In order to support Enhanced Network Failure and Recovery, the machine setup should provide:> Additional (2nd) EtherCAT port in the EtherCAT Master
module> Additional cable that connect the 2nd EtherCAT port to the
network> Currently, only SPiiPlusSC with two EtherCAT ports can be
used as EtherCAT Master> In the future also SPiiPlusNTM and MC4U with 2nd EtherCAT
port will be available
38
Network Cable Failure Detection & Recovery - Functionality
> Detection of the location of the failure> The system reactivation in the simple and quick way, with no
need for the machine re-initialization> Ability to save the configuration after the failure, so at the
subsequent power-up, the system will be initialized correctly (even if the cable is still broken)
> Quick and simple way to reinitialize the network after the failure repair
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New Servo & Motion Features
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Agenda
> ServoBoostTM – for enhancement of servo performance> Cogging compensation – for smoother motion> Profile shaping – for reduction of vibrations > Smooth Feedback switching – for systems with multiple feedback
devices> Enhanced fast Sin-Cos – for high resolution Sin-Cos encoders, up to
6[MHz]
> MotionBoostTM – for faster motion> One parameter tuning – for simpler high performance servo tuning> BiQuad filters – for solving resonance issues> NanoPWMTM – for ultimate jitter performance
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ServoBoostTM
Better Servo Performance
> ServoBoostTM is a real time algorithm that:> Identifies disturbances in real time> Analyzes disturbance root cause> Compensates it and attenuates its impact
> ServoBoostTM provides:> Improved machine performance: Faster settling, better stability,
lower jitter, better constant velocity> Automatic adaptation to large changes in load and system
parameters> Automatic compensation of disturbances, resonances, axes
interaction, cogging and more> Applicable to all ACS high performance (HP) products
42
Adaptation to Load Changes
No loadTotal moving mass is increased x 3
• System performance may deteriorate or even become unstable due to significant load changes.
• With ServoBoostTM , the performance remains consistent and stable despite of load changes and disturbances.
Position error with PID control
Position error with ServoBoostTM
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Adaptation to Increasing Load by x3
> With standard PID algorithm> The system is still stable> The bandwidth is 3 times smaller
(20Hz instead of 60Hz)> Poor performance
> With ServoBoostTM
> maintains the 60Hz bandwidth > Same performance> It also compensates the resonance
created by the elevated center of gravity
Initial system
With extra loadStandard PID
With extra loadUsing ServoBoostTM
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Crossover Error Elimination-Several Axes, One Machine Frame
> Due to reaction forces of accelerating axes the frame vibrates and deteriorates overall performance. Appears in almost all multi axes machines.
> ServoBoostTM eliminates this interaction, enhancingplacement accuracy
Position Error 5[nm/div]
Without ServoBoostTM
With ServoBoostTM
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Automatic Cogging Compensation
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Cogging and Periodic Disturbances
> Brushless motors may suffer from periodic disturbances that result from imperfections in motor structure or electrical drive.
> These disturbances create speed fluctuations, vibrations, acoustic noise, and an excitation of lightly damped resonances.
> Cogging is an example of a periodic disturbance: non-uniform force that is caused by magnetic interactions between magnets and the rotor slots in the motor.
> Motors with low cogging are usually more expensive.
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Cogging and Periodic Disturbances
> Cogging Compensation algorithm compensates cogging automatically and provides an “electronic upgrade” to inexpensive motors.
> ServoBoostTM provides automatic compensation to cogging and other periodic disturbances.
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Profile Shaping
> If a first impulse starts a vibration, a second impulse can cancel it.
> Timing and magnitude of the second impulse must be accurate.
> Additional pulses may be added to improve robustness.> Several vibration modes can be treated.
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Profile Shaping
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Switching between Multiple Feedback Devices
> In systems with more than one feedback device, it’s possible that some of the feedbacks do not cover the entire travel range
> Maximal length of glass scales/ laser interferometer mirrors is limited and insufficient for some applications
> Encoders with multiple short glass scales can be less costly than one long scale encoder
> In moving magnet applications the encoder scale may be attached to the moving magnet, that moves through multiple encoder readheads
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Multiple Encoder Scales Switching
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Multiple Encoder Scales Switching
> Fast & Smooth switching
Switching
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Fast Sin-Cos Support
> Available for UDMNT, UDIHP> Soon available for MC4U
Old support New support
Sine periods/sec 2.5x106 6x106
Suitable for high resolution feedback With restrictions Yes
Suitable for PWM drives No Yes
> Improved support has been developed for high resolution Sin-Cos feedbacks
54
MotionBoostTM – Solution for Fast & Aggressive Motion
> MotionBoostTM technology implements an enhanced motion profile
> Designed to :> Improve settling time by reducing the residual vibrations> Lower peak current, acceleration and velocity values
> Mostly effective in short aggressive moves with aggressive servo
> Ideal for Pick and Place applications and wire bonders> Very short move durations are possible with SPiiPlusSC using
CTIME = 0.2[msec]
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MotionBoostTM Example10[mm] motion in 58[msec]
Regular PTP MotionBoostTM
Move and settle to 1[µm] 170[msec] 84[msec] ~50% improvementof move and settle
Position error with PTP
Position error with Motion Boost
5[µm] div
Zoom In
1[µm] div
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Simplified Tuning forHigh Performance
> One parameter tuning of position and velocity loops> The user:
› Specifies the desired bandwidth of the system> The tool:
› Identifies the characteristics of the system› Automatically calculates the servo parameters
57
Easy Interface & Reliable Result
Tuning example:
Resulted FRF
• Tuning is based on a single parameter: system bandwidth
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Inertia Mismatch
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Inertia Mismatch Compensation
> Stability issues may occur when a heavy load is connected to relatively low-inertia motor Inertia motor through a compliant transmission> At low frequencies the system behaves as a rigidly coupled
motor and load> At high frequencies the load is effectively decoupled from
the motor. The gain of the plant significantly increases and reflects the motor inertia only
60
High Order BiQuad Filters – for InertiaMismatch Compensation
> ACS offers fully adjustable high order BiQuads filters in the servo loops.
> Examples where BiQuads can be handy:> Inertia mismatch compensation> Frame vibration compensation> Attenuation of resonances
61
BiQuad Filters– Inertia MismatchCompensation
> Example: Cardiac CT scanner> Rotation motor connected by a belt to the load > Inertia mismatch of 10,000!
Rigidly coupled motor and load
Decoupling of load raises the plant gain
62
BiQuad Filters– Inertia MismatchCompensation
> Using a regular PID results in a very low bandwidth with poor stability margins.
Sub-Hertz Bandwidth
Poor Stability marginscauses high resonance
63
BiQuad Filters– Inertia MismatchCompensation
> A proper selection of Biquad filters results in a high bandwidth with significantly improved stability margins
~30Hz Bandwidth
Sufficient Stability margins
64
NanoPWM™ Drives
NanoPWMTM Drive Technology is a brand new state of the art proprietary PWM power stage implementation in select ACS drives, that provides:> As good or better performance than precision linear drives
> Sub-nano jitter> Smooth velocity (velocity error<<1%)
> Higher voltages and higher currents in a much smaller and cost effective package when compared with commercially available linear drives
> Improved reliability over linear drives
65
NanoPWM™ - Compact Solution
> Simpler to use:> Integrated into MC4U control module
for full hardware multi-axis systemssolution
> Single bus supply vs. bipolarsupplies in most linear drives
> Digitally adjustable advancedcurrent loop vs. primitivenon-adjustable analog loopsin most linear drives
66
NanoPWM™ Drives
> Ultimate solution for:> 450mm / 300mm wafer handling and inspection stages> FPD handling and inspection> Demanding applications that require high performance
> High power output & compact footprint> 100Vdc, up to 15A/30A (continuous / peak)
67
NanoPWM™ Technology
> Sub-nanometer position jitter performance> Nanometer stepping:
1nm steps
±0.4nm jitter
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Significantly Lower Standstill Jittercomparing to equivalent 3rd party linear drives
3rd party linear drive
NanoPWMTM drive
NanoPWMTM
(100V, 30Apeak)3rd party linear drive
(±50V, 30Apeak )
Stand still jitter[nm] p-p 1.32 3.56
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NanoPWMTM drive
Better Results at Low Speed comparing to off-the-shelf linear drives
(*) Results taken on an ironless linear stage with cross roller bearings
3rd party linear drive
NanoPWMTM 3rd party linear drive
Position Error[nm] p-p@ 1[mm/sec] 22.3 47.8
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NanoPWM™ is Superior to Any Other Equivalent PWM Drive in the Market
NanoPWMTM drive
Regular PWM drive
NanoPWMTM
100V, 30[A]Standard PWM
100V, 30[A]
Stand still jitter[nm] p-p 1.4 35
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NanoPWM™ the Best PWM Drive One Can Get!
NanoPWMTM 3rd party linear drive
Package size Small Big
Complexity Low High
Performance Very Good Good
Reliability Very Good Problematic
Price Lower High
72
Summary
> Algorithms for better system performance were discussed–ServoBoostTM, MotionBoostTM, Cogging compensation, profile shaping and BiQuad filters
> New developments were presented:> Enhanced support for fast Sin-Cos> Support for switching between multiple feedback devices> New tool for advanced and simpler tuning> NanoPWMTM drives – for ultimate jitter performance, better
than cumbersome linear drives
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THANK YOU