Acronym Glossary

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Silvaco Guide to Abbreviations, Acronyms, and Symbols

I N T R O D U C T I O N This glossary was compiled as a guide to the many abbreviations, acronyms, and symbols encountered at Silvaco. It is not a dictionary; a definition is provided only if it is necessary to understand the context of an abbreviation or symbol.

Please send any omissions, corrections, and suggestions to [email protected].

L E G E N D

Black Text Expansion of abbreviation (initials in bold) Burgundy Text Chemical elements and compounds Green Text Units of measurement Indigo Text Expanded definition [bracketed text] Supplemental elements for clarity and context (Parenthetical Text)

Alternate or “aka” words that share definition with the preceding word, e.g. Aluminum (Aluminium)

Parenthetical Numerals

Identifies individual definitions of multiple entries comprised of identical lettering

© 2003 Silvaco International. Reproduction and/or distribution of this document is prohibited without written permission from or by prior legal aggrement with Silvaco. All other trademarks and copyrights are the property of their respective owners.


A A ampere (amp): the SI standard unit of electric current, and one of the

seven SI base units of measurement. Equal to a force of 2 × 10-7 newtons per meter of length between two straight parallel conductors, of infinite length and negligible circular cross-section, placed 1 meter apart in vacuum space.

Å Angstrom: unit of microscopic length, gradually becoming obsolete in favor of SI-compliant nanometer (nm). 1 Å = 0.1 nm.

AA Atomic Absorption AAS Atomic Absorption Spectroscopy AC Alternating Current. ACK Acknowledge: logic signal ACIA Asynchronous Communication Interface Adapter ACL Advanced CMOS Logic A/D Analog to Digital ADC Analog to Digital Converter AES Auger Electron Spectroscopy AF Audio Frequency AFC Automatic Frequency Control AFM Atomic Force Microscopy AGC Automatic Gain Control AHF Anhydrous Hydrofluoric Acid Al Aluminum (Aluminium) Al2O3 Aluminum Oxide (Alumina) AlCl3 Aluminum Chloride AII-BVI, II-VI Semiconductors synthesized from elements of the 2nd and 6th groups of

periodic table (CdSe, CdTe, CdHgTe, ZnS) AIII-BV, III-V Semiconductors synthesized from elements of the 3rd and 5th groups of

periodic table (GaAs, GaP, GaN, GaAlAs).

AlGaAs Aluminum gallium arsenide ALC Automatic Level Control ALE Atomic Layer Epitaxy ALU Arithmetic Logic Unit ALCVD Atomic Layer Chemical Vapor Deposition ALD Atomic Layer Deposition AMHS Automated Material Handling System AMLCD Active Matrix Liquid Crystal Display A/N Alphanumeric ANSI American National Standards Institute APCVD Atomic Layer Chemical Vapor Deposition API Application Programming Interface

APM A solution of ammonia hydroxide, hydrogen peroxide, and water that is mixed at 0.25:1:5.

AQL Acceptable Quality Level


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Ar Argon

ARC Antireflective Coating. ARS Angle-Resolved Scattering As Arsenic AS Advanced Schottky, a form of transistor. As2O3 arsenic trioxide AsH3 Arsine

a-Si Amorphous Silicon (Amorphous Si) ASIC Application-Specific Integrated Circuit ASK Amplitude-Shift Keying ASO Automatic Shut-Off ASP DAC Asia South Pacific Design Automation Conference ATE Automated Test Equipment ATPG Automatic Test Pattern Generation


B B Boron B2H6 Diborane BARC Bottom Antireflective Coating BARITT Barrier Injection Transit-Time [Diode] BBUL [packaging] Bumpless Build-Up Layer BCC Body-Centered Cubic Cell BCCD Buried Channel Charge-Coupled Device BCD Binary Coded Decimal BCl3 Boron Trichloride BCTM BiPolar Circuits and Technology Meeting BEOL Back End Of Line [process] BEV Billion Electron Volts BF3 Boron Trifluoride BGA Ball Grid Array BHF Buffered Hydrofluoric Acid BHT Brinell Hardness Test BIM Binary Intensity Mask BiCMOS Bipolar Complementary Metal Oxide Semiconductor BiFET Bipolar Field-Effect Transistor BIST Built-In Self Test BITS Burn-In Test Socket BJT Bipolar Junction Transistor BNC Baby N-Connector BNDC Bulk Negative Differential Conductivity BOX Buried Oxides [In Silicon-on-Insulator substrates] bp Boiling Point BPI Bits Per Inch BPS Bits Per Second BPSG Boro-Phospho-Silicate Glass BRT Base Resistance-Controlled Thyristor BST Barium Strontium Titanate BTAB Bumped Tape Atomated Bonding BTS Bias-Temperature Stress BW Bandwidth


C

Ca Calcium CAD Computer Assisted Design CADA Computer Assisted Design and Analysis CADD Computer Assisted Design and Development CAE Computer Assisted Engineering CAM Computer Assisted Manufacturing CANCER Computer Analysis of Nonlinear Circuits, Excluding Radiation: A

predecessor of SPICE CAS Column-Address Strobe: logic signal CASE Computer-Aided Software Engineering CAIBE Chemically Assisted Ion Beam Etching CAM Computer-Aided Manufacturing CBE Chemical Beam Epitaxy CBI Complementary Binary CBT Computer-Based Training CC (1) Constant Current CC (2) Chip Carrier CCC Ceramic Chip Carrier CCD Charge Coupled Device CCW Counter Clock-Wise Cd candela: the SI standard unit of luminous (light) intensity and one of the

seven SI base units of measurement. A candela is the luminous intensity of a source that emits, in a given direction, monochromatic radiation at 50 THz with radiant intensity of 1/683 watt per steradian (1.3988 milliwatts) in a sphere around the light source. See also cp (candlepower).

CD Critical Dimension CDI Collector Diffusion Isolation CEL Contrast Enhancement Layer CEMF Counter Electromotive Force CerDIP Ceramic Dual Inline Package CF Center Frequency CF4 Carbon Tetrafluoride CFM Cubic Feet per Minute CGA Connection Gap CH2Cl2 Dichloromethane CH3COCH2CH3 Methyl ethyl ketone [CH3]2CO Acetone CH3COOH Acetic Acid CH3OH Methanol CH4 Methane CI Confidence Interval CIM Computer-Integrated Manufacturing

CICC Custom Integrated Circuits Conference


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CISC Complex Instruction Set Computer Cl Chlorine Cl2 Gaseous Chlorine CL Current Loop CLEO Conference on Lasers and Electro Optics CMOS Complementary Metal Oxide Semiconductor CMM Capability Maturity Model CMP Chemical Mechanical Polish[ing] CNC Condensation Nucleus Counter CNCN Cyanogen CNCl Cyanogen chloride CO Carbon Monoxide CO2 Carbon Dioxide CoB Chip-On-Board COO Cost of Ownership COP (1) Crystal Organized Pits COP (2) Crystal Originated Particle cp Candlepower: Outdated measure of luminous intensity. Replaced by

candela (cd) in 1948. Cp Process Capability Cpk Process Capability Index CPGA Ceramic Pin Grid Array CPI Character Per Inch CPU Central Processing Unit Cr Chromium CRC Cyclic Redundancy Check CRM Cost/Resource Model CRT Cathode Ray Tube CS Control Strobe: logic signal CS-MAX Compound Semiconductor Manufacturing Expo CTC Counter/Timer Circuit CTE Coefficient of Thermal Expansion CTS Clear To Send: protocol signal Cu Copper CV Constant Voltage C-V Capacitance-Voltage CVD Chemical Vapor Deposition CVT Constant Voltage Transformer CZ Czochralski [crystal growth process]


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D D/A Digital to Analog DAC (1) Digital to Analog Converter DAC (2) Data Acquisition and Control DAC (3) Design Automation Conference DARC Dialectic Anti-reflexive Coating DATE Design Automation Test Expo DAV Data available: logic signal dB Decibel dBa Adjusted Decibel DC Direct Current DCFL Direct-Coupled FET Logic DDE Double Diffused Epitaxy dep DEPosition DES Data Encription Standard DESIRE Diffusion-Enhanced Silylated Resist DFT Design for Test[ability] DHBT Double Heterostructure Bipolar Transistor DIBL Drain-induced Barrier Lowering DIL Dual In Line DIMOS Double-Implanted Metal Oxide Semiconductor DIP Dual Inline Package DI (1) Deionized DI (2) Dielectric Isolation D/I Develop/Inspect DOE Design Of Experiments DOF Depth of Focus DLC Dual-Layer Capacitor DLTS Deep Level Transient Spectroscopy DMA Direct Memory Access DMM Digital Multi-Meter DPDT Dual Pole Dual Throw DPI Dots Per Inch DPSSL Diode-Pumped Solid State Lasers DPST Dual Pole Single Throw DRAM Dynamic Random Access Memory DRC Design Rule Check DS Data Strobe: logic signal DSC Differential Scanning Calorimetry DSO Digital Storage Oscilloscope DSP Digital Signal Processing DST Depleted Substrate Transistor DSW Direct Step-on-Wafer DTL Diode Transistor Logic


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DTMF Dual Tone Multi-Frequency DTR Data Terminal Ready: logic signal DUV Deep Ultraviolet DVM Digital Voltmeter


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E E2PROM Electrically Erasable Programmable Read Only Memory EAPROM Electrically Alterable Read Only Memory EBCDIC Extended Binary Coded Decimal Interchange Code EBDW E-Beam Direct Write E-bit End bit EBIC Electron Beam Induced Current ECC Error Checking and Correction ECL Emitter Coupled Logic ECO Engineering Change Order ECR Electron Cyclotron Resonance EDA Electronic Design Automation EEL Edge Emitting Laser EEPROM Electrically Erasable Programmable Read Only Memory EFV Excess Flow Valve EGA Enhanced Graphics Adapter EIA Electronics Industries Association EL Electroluminescent ELF Extremely Low Frequency EM / EMG ElectroMigration EMC Electromagnetic Compatibility EMF Electromotive Force EMI Electromagnetic Interference EMO Emergency Off EMP Electromagnetic Pulse ENQ Request-To-Send: handshake signal, from ENQuire EOT End Of Transmission / Ready-To-Receive: handshake signal EOT Equivalent Oxide Thickness EPL Electron Projection Lithography EP Electropolish epi Epitaxy EPLD Electrically Programmable Logic Device EPR Electron Paramagnetic Resonance: also known as Electron Spin

Resistance, or ESR EPROM Electrically Programmable Read Only Memory EPSS Electronic Performance Support System EQ Equalizer ERC Equivalent Release Concentration ESCA Electron Spectroscopy for Chemical Analysis ESC Electrostatic Chuck ESD (1) Electrostatic Discharge ESD (2) Electrostatic Sensitive Device ESR Electron Spin Resonance: also known as Electron Paramagnetic

Resistance, or EPR ESR Equivalent Series Resistance


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ESSDERC European Solid-State Device Research Conference EST Emitter Switched Thyristor EUV / EUVL Extreme Ultra Violet Light EV Electron Volt EVC Equilibrium Vapor Concentration


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F F Farad: measure of capacitance FAMOS Floating Gate Avalanche Metal-Oxide-Semiconductor FAST Fairchild Advanced Schottky Transistor-Transistor [Logic] FCC cell Face-Centered Cubic Cell FCM Facilities Cost Model FDC Floppy Disk Controller Fe Iron FDSOI Fully-Depleted Silicon-on-Insulator FEOL Front End of Line [process] FET Field Effect Transistor FF Flip Flop FFT Fast Fourier Transform F/I Final Inspection FIB Focused Ion Beam FIFO First In First Out FILO First In Last Out FinFET Fin-shaped Field Effect Transistor FIT Failure Unit FLRT Factory Layout/Relayout Tool FMEA Failure Mode and Effects Analysis F-N Fowler-Nordheim [tunneling] FOX Field Oxide FP Floating Point FPD Focal Plane Deviation FPLA Field Programmable Logic Array FPU Floating Point Unit FQA Fixed Quality Area FRAM Ferroelectric Random Access Memory FSB Fixed-Shaped Beam FSG Fluorinated Silicate Glass FSM Finite State Machine Model FSK Frequency-Shift Keying FTIR Fourier-Transform Infrared Spectroscopy FTPL Fourier Transform Photoluminescence FTP File Transfer Protocol FVC Frequency-to-Voltage Converter FWI Full Wafer Imaging FZ Float Zone [crystal growth]


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G G-line Exposure wavelength of 436 nanometers GA Gate Array GaAs Gallium Arsenide GaAs IC Gallium Arsenide Integrated Circuits Symposium GaAs ManTech Gallium Arsenide Manufacturing Technology GaAs-on-Si Gallium Arsenide-on-Silicon GaN Gallium Nitride GaP Gallium Phosphide GAL Generic Array Logic GC Gas Chromatography GC-MS Gas Chromatography Mass Spectroscopy GCS Gate Controller Switch Ge Germanium GEM Generic Equipment Model GFCI Ground Fault Circuit Interrupter GFI Ground Fault Interrupter GFLOPS Giga-FLOPS: Billions of Floating-Point Operations Per Second GILD Gas Immersion Laser Diffusion GND Ground GOI Gate Oxide Integrity GOMAC Government Microcircuit Applications Conference GPIB General Purpose Interface Bus GSCE Gas Source Control Equipment GUI Graphical User Interface


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H H2 Hydrogen H2O2 Hydrogen Peroxide H2SiCl2 Dichlorosilane HAL Hardwired Array Logic H-bar Crossbar HBr Hydrochloric acid HBT Heterojunction Bipolar Transistor HC High speed CMOS HCI Heavily Charged Ion HCl Hydrochloric acid HCT High-speed CMOS with TTL Thresholds HD High Density HDC Hard Disk Controller HDP High Density Plasma HDPCVD High Density Plasma Chemical Vapor Deposition HDX Half Duplex He Helium HEPA High-Efficiency Particulate Air [filter] HER High Efficiency Red [LED] HEMT High Electron Mobility Transistor HET Heterodyne HEXFET Hexagonal Cell Field Effect Transistor HF High Frequency HF Hydrofluoric acid HFET Heterostructure Field Effect Transistor HFL HF Last [process] HfO2 Hafnium oxide HfSiO4 Hafnium Silicate HFS Hierarchical File System HIC Hybrid Integrated Circuit HIGFET Heterojunction Insulated Gate Field Effect Transistor HIPOX High Pressure Oxidation HITEC High Temperature Electronics Conference HMDS Hexamethyldisilazane HOPG Highly Oriented Pyrolytic Graphite HPI High Pressure Isolation HPM Hazardous Production Materials HPM Mixure of hydrochloric acid, hydrogen peroxide, water HPV High Pressure Vent HREM High Resolution Electron Microscopy HRTEM High Resolution Transmission Electron Microscopy HSQ Hydrogensilsesquioxanes HTL High Threshold Logic


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HVDC High Voltage Direct Current HVPS High Voltage Power Supply Hz Hertz: cycles per second


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I I2ICE Integrated Instrumentation and In-Circuit Emulation I2L Integrated Injection Logic IA Instrumentation Amplifier IBD Ion Beam Deposition IBL Ion Beam Lithography IC Integrated Circuit IC-CAD Integrated Circuit-Computer Aided Design ICCAD International Conference for CAD ICE In-Circuit Emulation ICMTS International Conference on Microelectronic Test Structures ICP Inductively Coupled Plasma ICP-MS Inductively Coupled Plasma Mass Spectroscopy IDDQ Direct drain quiescent current IDLH Immediately Dangerous to Life And Health IEEE Institute of Electrical and Electronics Engineers IF Intermediate Frequency IGBT Insulated Gate Bipolar Transistor IGFET Insulated Gate Field Effect Transistor IIT Ion Implantation Technology ILD Inter-level (inter-layer) dialectic IMEC Interuniversity Microelectronic Center IMPATT Impact Avalanche Transit Time IMR Integrated Model Repository InP Indium phosphide InSb Indium antimonide I/O Input/Output IP (1) Interface Processor IP (2) Intellectual Property IPA Isopropyl Alcohol IPL Ion Projection Lithography IPRM Indium Phosphide and Related Materials IR (1) Current/Resistance IR (2) Infrared IRED Infrared Emitting Diode ISA Instrument Society of America ISPSD International Symposium on Power Semiconductor Devices IS Information Systems ISCS International Symposium on Compound Semiconductors IT Information Technology ITO Indium Tin Oxide IWSM Int'l Workshop on Statistical Methodology


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J JBS Junction Barrier-controlled Schottky [TTL] JEDEC Joint Electron Device Engineering Council JFET Junction Field Effect Transistor JIS Japanese Industrial Standard JIT Just In Time


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K k Kilo: 1000 units K Kelvin: the standard unit of thermodynamic temperature, and one of the

seven SI base units of measurement. Equal to 1/273.16 of the thermodynamic temperature of the triple point of water.

KA Kilo-Ampere: 1000 Amperes KBPS Kilobits Per Second KEV Electron Kilovolts kg Kilogram: the standard unit of mass (weight), one of the seven SI base

units of measurement, and the only unit that defaults to a kilo- prefix. KGD Known Good Die KHz Kilo Hertz: 1000 Cycles Per Second KOH Potassium Hydroxide KVA Kilo Volt Amperes KWH Kilowatt Hour(s)


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L L Inductance L2FET Logic Level Field Effect Transistor LAN Local Area Network LASCR Light Activated Silicon Controlled Rectifier LASER Light Amplification by Stimulated Emission of Radiation LATID Large-Angle-Tilt Implanted Drain LC Inductance/Capacitance LCC Leadless Chip Carrier LCD Liquid Crystal Display LDD (LLD) Lightly Doped Drain LDL Lower Detectable Limit LDMOSFET Lateral Double-Diffused Metal-on-Silicon Field Effect Transistor LEC Liquid Encapsulated Czochralski Growth LED Light Emitting Diode LER Line Edge Roughness LF Low Frequency LISA Language for Interfacing Silvaco Applications LISP List Processing: Programming Language LLD (LDD) Lightly Doped Drain LLS Localized Light Scatterer. LO Local Oscillator LOC Level Of Concern LOCOS Local Oxidation LORAN Long Range Navigation LP Low Pass LPC Linear Predictive Coding LPD Light Point Defect LPE Liquid Phase Epitaxy LPCVD Low Pressure Chemical Vapor Deposition LPE Layout Parasitic Extractor LPI Low Pressure Isolation LPM Lines Per Minute LPT Line Printer [port]: parallel/printer port LPV Low Pressure Vent LSB Least Significant Bit LSD Least Significant Digit LSE Latex Sphere Equivalent LSI Large Scale Integration LSMCD Liquid Source Misted Chemical Deposition LSMFT Lucky Strike Means Fine Tobacco LUT Look Up Table LTE Low Temperature Epitaxy


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LTO Low Temperature Oxide LVS Layout Versus Schematic LW Long Wave


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M m meter (metre): the SI standard unit of length, and one of the seven SI base

units of measurement. A meter is equal to the distance that light travels in 1/299792458th of a second though vacuum space.

µ (mu) Micro: one millionth (10-6) µm Micrometer: 1/1,000,000 meter, one millionth (10-6) meter (approx 10, 000

Angstroms) µP Microprocessor: µs Microsecond: one millionth (10-6) of a second MAP Manufacturing Automation Protocol MB Megabytes: 1024 * 1024 bytes MBE Molecular Beam Epitaxy MBPS Million Bytes Per Second MCBA Mean Cycles Between Assists MCBF Mean Cycles Between Failures MCM Multi Chip Module MCS Material Control System MCZ Magnetic Czochralski [process] MDAC Multiplying Digital to Analog Converter MDL Minimum Detectable Limit MDU Modular Dispensing Unit MEMS Micro-Electro-Mechanical Systems MERIE Magnetically Enhanced Reactive Ion Etching MESC Modular Equipment Standardization Committee MESFET Metal Semiconductor Field Effect Transistor MFC Mass Flow Controller MFLOPS Mega-FLOPS: Millions of Floating Point Operations Per Second. MFM (1) Mass Flow Meter MFM (2) Modified Frequency Modulation MFMISFET Metal Ferroelectric Metal-Insulated-Semiconductor Field Effect Transistor mG Milligauss: One-thousandth of a gauss [magnetic flux density] MHI Material Hazard Index MHz Megahertz: millions of cycles per second mil One thousandth of an inch MIPS Millions of Instructions Per Second MIS Metal Insulator Semiconductor MISFET Metal Insulator Semiconductor Field Effect Transistor MLM Multi-Level Material MMU Memory Management Unit MO Master Oscillator MOCVD Metal-Organic Chemical Vapor Deposition MODFET Modulation Doping Field Effect Transistor mol mole: the SI standard unit of substance, and one of the seven SI base

units of measurement. Equal to the amount of atoms in 0.012 kilograms of carbon-12. A specifying entity must accompany each use of mole. These


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entities include atoms, molecules, ions, electrons, other particles, and groups of particles.

MOS Metal Oxide Semiconductor MOSFET Metal Oxide Semiconductor Field Effect Transistor MoSi2 Molibdenum silicide MOST Metal Oxide Semiconductor Transistor MOV Metal Oxide Varistor mp Melting point MPC Mask Proximity Correction MPGA Metal Pin Grid Array MPS Merged PIN Schottky [TTL] MPU Main Processing Unit MPX Mulitplexer MR Magnetic Resonance MSB Most Significant Bit MSD Most Significant Digit MSI Medium Scale Integration MTBA Mean Time Between Assists MTBAp Mean Productive Time Between Assists MTBF Mean Time Between Failures MTBFp Mean Productive Time Between Failures MTL Merge Transistor Logic MTOL Mean Time Off Line MTTR Mean Time To Repair MUX Multiplexer MW Microwave


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N N2 Nitrogen N2O Nitrous Oxide NA Numerical Aperature NAA Neutron Activation Analysis NAK Incorrect reception: handshake signal NC (1) Not Connected NC (2) Normally Closed [switch/relay] NEC National Electric Code NEDA National Electronics Distributors Association NEMA National Electrical Manufacturers Association NF Nanofarad: measure of capacitance NF3 Nitrogen trifluoride NFS [UNIX] Network File System ng Nanogram: one billionth (10-9) of a gram NH3 Ammonia NH4F Ammonium fluoride NH4OH Ammonium hydroxide NHE Nanoheteroepitaxy NiCad Nickel Cadmium nm Nanometer: One billionth (10-9) of a meter NMOS N-channel Metal Oxide Semiconductor NMOSFET Metal-Oxide-Semiconductor Field Effect Transistor [with n-type channel] NMR Nuclear Magnetic Resonance NO Normally Open [switch/relay] NO Nitridation NPN Negative Positive Negative NP0 Negative Positive 0 temperature coefficient [in ceramic capacitors] NRZ Non Return to Zero NRZI Non Return to Zero Invert ns Nanosecond: one billionth (10-9) of a second NSREC Nuclear and Space Radiation Effects NT Network Terminator NTC Negative Temperature Coefficient NTD Neutron Transmutation Doping n-type Semiconductor material with negatively charged conductivity.


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O O2 Oxygen OBIC Optical Beam Induced Current OC Open Collector OCR Optical Character Recognition OEM Original Equipment Manufacturer OES Optical Emission Spectroscopy OLED Organic Light-Emitting Diode OMVPE Organometallic Vapor Phase Epitaxy OOP Object Oriented Programming OPC Optical Proximity Correction OPL Optically Pumped Laser OS Operating System OSF Oxidation Induced Stacking Fault OSQB Organosilsesquioxanes OTDR Optical Time Domain Reflectrometry OTFT Organic Thin Film Transistor OTP One Time Programmable [PROM or plastic EPROM] OVL Overlay OVP Over Voltage Protection Ox Oxide


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P P Phosphorus P2ID Plasma and Process Induced Damage PA Power Amplifier PAL Programmable Array Logic PBX Private Branch Exchange PC (1) Personal Computer PC (2) Printed Circuit PC (3) Program Counter PCB Printed Circuit Board PCC Plastic Chip Carrier P-cell Parameterized Cell PCM Pulse Code Modulation PDC Passive Data Collection PDIP Plastic-Dual In-Line Package PDSA Peroxydisulfuric acid PEB Post-Exposure Bake [process] PEC Photoelectric Cell PECVD Plasma Enhanced Chemical Vapor Deposition PEL Possible Exposure Limit PF Power Factor PG Power Gain PGA Pin Grid Array PGI Purge Gas Inlet pH A value of acidic property. The pH scale ranges from 0 to 14, with the lower

end representing acidic elements and the upper end represending alkaline. pHEMT Pseudomorphic High Electron Mobility Transistor PH Power Dissipation PH3 Phosphine PIA Peripheral Interface Adapter PIC Priority Interrupt Controller PID Process-Induced Defect PIII Plasma Immersion Ion Implantation PIV Peak Inverse Voltage PLA Programmable Logic Array PLCC Plastic Leaded Chip Carrier PLD Programmable Logic Device PLL Phase Locked Loop PM (1) Phase Modulation PM (2) Pulse Modulation PMMA Polymethylmethacrylate PMOSFET Metal-Oxide-Semiconductor Field Effect Transistor with p-type channel PNP Positive Negative Positive [transistor] POCl3 Phosphorus Tetrochloride


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PolySi Polycrystalline Silicon POU Point Of Use POV Peak Operating Voltage PPM Parts Per Million PPB Parts Per Billion PPS Pulses Per Second PR Photoresist PRN Pseudo Random Noise PROM Programmable Read Only Memory PSG Programmable Sound Generator PSI Pounds per Square Inch: unit of pressure measurement PSK Phase Shift Keying PSM Phase Shift Mask PTC Post-Process Treatment Chamber Pt/Ir Platinum/iridium PtSi Platinum Silicide PUT Programmable Unijunction Transistor PV Photovoltaic PVD Physical Vapor Deposition PWM Pulse Width Modulation PWP Particles Per Wafer Pass PZT Lead-Zirconate-Titanate: dialectric compound


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Q QA Quality Assurance QB Charge-to-Breakdown QC Quality Control QFP Quad Flat Pack QIC Quarter Inch Cartridge QIP Quad Inline Package QSM Quad Surface Mount


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R RΘJA Junction-to-ambient thermal resistance RΘJc Junction-to-case thermal resistance RAD Radiation Absorbed Dose RADECS Radiation Effects on Components and Systems RAM Random Access Memory RAS Row Address Strobe: logic signal R-Bit Reverse bit RBS Rutherford Backscattering RC Radio Control RC Resistance and Capacitance REM Roentgen Equivalent Man REP Roentgen equivalent Physical RF Radio Frequency RFI (1) Radio Frequency Interference RFI (2) Request For Proposal RGA Residual Gas Analyzer RH Relative Humidity RHDP Right Hand Decimal Point RHEED Reflection High-Energy Electron Diffraction RIBE Reflective Ion Beam Etching RIE Reactive Ion Etch RISC Reduced Instruction Set Computer [see CISC] RLC Resistance Inductance Capacitance RLG Ring Laser Gyroscope RMI Radio Magnetic Interference RMOS Resistor Load Metal Oxide Semiconductor RMS Root Mean Square ROM Read Only Memory RPM Revolutions Per Minute RPN Reverse Polish Notation RPS Revolutions Per Second RSM Response Surface Models ROI Return On Investment ROST Rapid Optical Surface Treatment RS Reed Solomon [error correction] RT (1) Real Time RT (2) Rise Time RTA Rapid Thermal Annealing RTC Rapid Thermal Cleaning RTCVD Rapid Thermal Chemical Vapor Deposition RTD Resistance Temperature Detector RTI Real Time Interrupt RTL (1) Register Transfer Level


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RTL (2) Resistor Transistor Logic RTN Rapid Thermal Nitridation RTO Rapid Thermal Oxidation RTP Rapid Thermal Processing RTS Request To Send: protocol signal RTY Retry limit


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S SACVD Selected Area Chemical Vapor Deposition SAM (1) Scanning Auger Microscopy SAM (2) Self-assembled Monolayer SAMOS Self-aligned Metal Oxide Semiconductor SAW Surface Acoustic Wave Sb Antimony SBC Single Board Computer SC-1 Standard Clean, Level 1: See APM SC-2 Standard Clean, Level 2: See HPM SCA Sub-Carrier Adapter SCALPEL Scattering with Angular Limitations in Projection Electron Beam Lithography SCI Serial Communication Interface SCL Serial Clock SCP Surface Charge Profiling SCR Silicon Controller Rectifier SCR Semiconductor Controlled Rectifier [thyristor] SCS (1) Silicon Controller Switch SCS (2) Semiconductor Controlled Switch SCSI Small Computer System Interface SDHT Selectively Doped Heterojunction Transistor SDI Strategic Defense Initiative SE Spectroscopic Ellipsometry SEG Selective Epitaxial Growth SEM Scanning Electron Microscope SEMI Semiconductor Equipment and Materials Institute SFC Polystyrene Film Capacitor SG Signal Ground Si Silicon Si3N4 Silicon Nitride SiC Silicon Carbide SiGe Silicon Germanium SiH4 Silane SiO2 Silicon Dioxide SI Systéme International: international system of units SIA Semiconductor Industry Association SIMM Single Inline Memory Module SIMOX Separation by Implantation of Oxygen SIMS Secondary Ion Mass Spectroscopy SIO Serial Input and Output SIP Single Inline Package SIPO Serial In Parallel Out SIPOS Semi-Insulating Polycrystalline Silicon Film


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SISPAD Simulation of Semiconductor Processes and Devices SLC Single Layer Ceramic [capacitor] SLS Strained Layer Superlattice SM Surface Mount SMD Surface Mount Device SMIF Standard Mechanical Interface SMT Surface Mount Technology S/N Signal to Noise SNR Signal to Noise Ratio SO Serial Output SoC System-on-Chip SOD Spin On Dielectric SOIC Small Outline Integrated Circuit SoG Spin-on-Glass SoI Silicon-on-Insulator SOJ Small Outline J-leaded [chip package] SOLV Solenoid Valve SOM Mixture of Sulphuric Acid and Ozone SOP Small Outline Package SoS Silicon-on-Sapphire SOW Statement Of Work SP (1) Signal Processor | SP (2) Stack Pointer SPC Statistical Process Control SPDT Single Pole Double Throw SPI Serial to Parallel Interface SPICE Simulation Program with Integrated Circuit Emphasis SPST Single Pole Single Throw SPV Surface Photovoltage SQL Structured Query Language: Used with databases SR Shift Register SRAM Static Random Access Memory SRH Shockley-Read-Hall [recombination statistics] SRO Stress Relieve Oxide SSDM Solid State Device Materials SSI Small Scale Integration SSR Solid State Relay STI Shallow Trench Isolation STM Scanning Tunneling Microscopy ST0 Strontium Titanate SWAMI Sidewall Masked Isolation [process]


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T TA Ambient Temperature Ta Tantalum Ta2O5 Tantalum Pentoxide TaSi2 Tantalum Silicide T/H Track and Hold TJ Junction temperature TCAD Technology Driven Computer Aided Design TC Temperature Coefficient TCP/IP Transmission Control Protocol/Internet Protocol TD Tunnel Diode TDD Telecommunication Devices for the Deaf TED Transferred Electron Diode (Gunn Diode) TEM Transverse Electromagnetic [wave] TF Transfer Function TFD Thin Film Detector TFEL Thin Film Electroluminescent TFT Thin Film Transistor THD Total Harmonic Distortion THz Terahertz TIG Tungsten Inert Gas Ti Titanium TiN Titanium Nitride TiO3 Titanium Oxide TiSi2 Titanium Silicide TOFSIMS Time-of-Flight Secondary Ion Mass Spectroscopy TM Transverse Magnetic [wave] TR Transient Response TRAPATT [diode] Trapped Plasma Avalanche-Triggered Transit TS Time Sharing TTL Transistor-Transistor Logic TTM Time-to-Market TUNNET Tunnel Injection Transit-Time [diode] TWT Traveling Wave Tube TXRF Total Reflection X-Ray Fluorescence [spectroscopy] Tz Damage depth


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U UART Universal Asynchronous Receiver/Transmitter uF Micro Farad (measure of capacitance) UHF Ultra High Frequency UHV Ultra High Vacuum UJT UniJunction Transistor UL Underwriters Laboratories ULSI Ultra Large Scale Integration UMOSFET (UMOS) A vertical MOSFET that features a U-shaped gate electrode trench. UPC Universal Product Code UPS Ultraviolet Electron Spectroscopy UPS Uninterruptible Power Supply USART Universal Synchronous/Asynchronous Receiver/Transmitter UTC Universal Time Code UTSi Ultra-Thin Silicon-on-Sapphire UV Ultraviolet UVA Ultraviolet Alpha UVB Ultraviolet Beta UV/CI2 An abbreviation for a process during which Silicon in a C12 ambient is

irradiated with ultraviolet rays.


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V VA Volt Ampere VA Air Velocity VAC Volts Alternating Current VAR Variable VCC Supply Voltage - positive VCD Variable Capacitance Diode VCO Voltage Controlled Oscillator VCSEL Vertical Cavity Surface Emitting Laser VDC Volts Direct Current VDD Supply Voltage - negative VF Vacuum Fluorescent VFB Flat-band Voltage VFC Voltage to Frequency Converter VFO Variable Frequency Oscillator (vs a crystal oscillator) VHF Very High Frequency VHSIC Very High Speed Integrated Circuit VLF Very Low Frequency VLS Very Large Scale VLSI Very Large Scale Integration VLT Video Look up Table VOM Volt Ohm-meter VMOSFET (VMOS) A MOSFET structure in which the VMOSFET channel is bult around a V

shaped groove in the Si substrate. VOX Voice Operated transmit VPD Vapor Phase Decomposition VPD-AAS Vapor Phase Decomposition Atomic Absorption Spectroscopy VPE Vapor-Phase Epitaxy VR Voltage Regulator VRAM Video Random Access Memory (Very fast RAM) VS Vertical Sync VSS Supply Voltage - Negative VT Voltage Threshold VTM Voltage Tunable Magnetron VTVM Vacuum Tube Volt Meter VUV Vacuum Ultraviolet VXO Variable crystal oscillator


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W W Tungsten WHR Watt Hour WR Write: logic signal WSI Wafer Scale Integration WSi1 Tungsten Silicide WV Working Voltage WW Wire Wound WW Wire Wrap

X X Trans: prefix XLS Extended Light Scatterer XMT Transmit XPS X-Ray Photoelectron Spectroscopy XRF X-ray Fluorescence XTAL Crystal

Y YAG Yttrium Aluminum Garnet [laser] YIG Yttrium Iron Garnet

Z ZD Zero Defects ZIF Zero Insertion Force ZnS Zinc sulfide ZrSiO4 Zirconium Silicate ZrO2 Zirconium Oxide (Zirconia)

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