A528-44-880 Instruction Manual - Ideal Vacuum · 2019-03-16 · 3and4 Loadlock pump running volt-free control input AIC, CH7 PLl4 Sand6 Loadlock pump on volt-free status output AIC,CH3PL8

Instruction Manual

iQ Interface Module

I'~ EOW"ARDS Edwards High Vacuum International Manor Royal, Crawley, West Sussex, RH10 2LW, UK Telephone: +44 (0) 1293528844 Fax: +44 (0) 1293533453 http://www.edwards.boc.com

A528-44-880 Issue B

~ ~

~. 1993 1996

www.idealvac.com

http://www.idealvac.com

Safety during maintenance

A528-44-BBO Issue A

Amendmentl

Add the following warning to the start of Section 5 (Maintenance):

Amendment 1

WARNING

If you need to open the iQ Interface Module for maintenance, support the inner module before you remove its retaining screws. If you do not, the inner module will fall and may

injure you or be damaged.

1

P600-30-370 Issue B

Amendment to AS28-44-880

iQ Interface Module - Item Number A528-44-404

1 Introduction

This Amendment describes the details of this iQ Interface Module

2 Cards fitted

The following Interface Card is fitted in this iQ Interface Module:

• AIC (Auxiliary Interface Card).

3 Connectors

The connectors in Table Al are fitted to the interface connector panel on this iQ Interface Module:

Connector name/number Connector type Figure At reference

Tool CPC I7/I6-M 1

MCM CPC I7/I6-M 2

Gate valve CPC I3/9-M 3

Remote EMS 9-way D.-conn.-F 4

Table Al - Connector types

Amendment 1

4

Amendment

Use of connector pins

The signals available on the connectors are shown in Tables A2 to AS. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card and Auxiliary Interface Card connectors and for information on the use of the signals.

Pin Signal

Destination! numbers Source

1 and 2 Loadlock pump on 24 Va.c./d.c. control input AIC, CH8 PLlO

3and4 Loadlock pump running volt-free status output AIC, CH6 PL7

7and8 Loadlock pump not in warning volt-free status output AIC,CHSPL7

9 and 10 Loadlock pump not in alarm volt-free status output AIC,CH4 PL8

Table A2 - Tool connector signals

Pin Signal


3and4 Loadlock pump running volt-free control input AIC, CH7 PLl4

Sand6 Loadlock pump on volt-free status output AIC,CH3PL8

7and8 Loadlock pump not in warning volt-free status output AIC, CH6 PUS

9 and 10 Loadlock pump not in alarm volt-free status output AIC, CHS PLlS

Table A3 - MCM connector signals

Pin Signal


1 and 2 Valve closed volt-free status input (from valve) AIC, CH1 PLl7

3and4 Valve open volt-free status intput (from valve) AIC, CH2 PLl7 7and9 Open valve 24 V a.c. control output (to valve) AIC,CH1 PL9

Table A4 - Gate valve connector signals

Pin Signal


1 and 2 EMS input from tool (closed in normal operation) EMO pins 1 and 2 3 and 4 EMS output to tool (closed in normal operation) EMO pins 3 and 4

Table AS - Remote EMS connector signals

2

1. Tool connector 2. MCM connector

3. Gate valve connector 4. Remote EMS connector

Figure Al - Interface connector panel

Amendment 3

).. ~ ~ ~

§ -

~

NETWORK '---I I NTERF ACE MODULE I U;r~IC I

(NET""'" LON CllHMUNICATlIlNS> <TO NEXT ",IT) <J----jf~ (F"RIJM PREY IDUS UN InC>- - - ..J I I

2 OFT 4-f'IN XLR

IQ

AIC

INTERFACE MODULE

Cpt 17I16-M

I I I I I I I I

_...J L

TO EITHER

NOTE'-IF NETWORK MODUlE IS TO BE FInED. CONNECT AS SHOWN.

COMMUNICATIONS 4-9IN XL.R

r--....... II--ELECTRICAL SUPPLY

COMMS.

-~-L=-4-9IN

XL.R IQ PUMPING

SYSTEM 0000

<lOt>

,q~~ I r-lfu RD4DTE EMS

INPUT IDUTPIJT SIGNALS (C~ No.A53208401)

CONTROl' POSN. SIGNALS (CABL£ No.A53208403)

L _ (IIL.TE:RNIITIYE) J PUMP DISPLAY ---- MODULE

CPCLOO 11/~

cpc lClJofM:CM

17/~'

LOADLOCK Q PUMP SET

INPUT/OUTPUT SIGNALS ~ Til TOOL GATE

VALVE Notes

1. The Pump Display Module can be used with the

iQ pumping system on its own without extemal

communication.

2. Vacant XLR-4 pin communications connectors

must have terminator plugs fitted.

41 ELECTRICAL SUPPLY

Figure A2 - Schematic diagram of the electrical connections


P600-30-040 Issue C

Amendment to A528-44-880

1 Introduction


2 Cards fitted


• TIC (Tool Interface Card).

3 Connectors

The connector in Table Al is fitted to the interface connector panel on this iQ Interface Module:


Tool EMS]I epe 11/4-M 1

Tool EMSP2 cpe 11/4-F 2

Tool CPC I7/16-M 3

EMS XLR-6 4


4 Use of connector pins

Amendment

The signals available on the connectors are shown in Table A2 and Table A4. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card connectors and for information on the use of the signals.

Pin Signal


1 EMS output (closed in normal operation) EMS chain 2and3 Internal link -

4 Internal link Tool EMS P2 pin 1

Table A2 - Tool Tool EMS Jl connector signals

1

Pin Signal


1 Internal link Tool EMS Jl pin 4

2and3 Internal link -4 EMS output (closed in normal operation) EMS chain

Table A3 - Tool EMS P2 connector signals

Pin Signal


1 and 2 Pumps on 24 V control input ,. TIC, CH3 PL12

3and4 Pumps running volt-free status output TIC,CH3PL8

7and8 Pumps not in warning volt-free status output TIC, CH4PL8

9 and 10 Pumps not in alarm volt-free status output TIC,CHSPL7

11 and 12 Gas flow not in alarm volt-free status output TIC,CH6PL7

13 and 14 Final valve volt-free status output TIC,CH7PL6

15 and 16 Pumps on volHree control input ,. TIC, CH3 PL16

Note:" Only one type oj'pumps on' control signal may be used


~ o.:s-o --

1. Tool EMS J 1 connector

2. Tool EMS P2 connector

3. Tool connector

4. EMS connector


Amendment 2

). ~

i ~ -

w

(NETWORK LON COMMUNICATIONS)

NETWORK INTERFACE MODULE r----, I Nit I

<TU NEXT ..... T) <l-----n-~ 2 orr (fROM PREVIOUS UNIT> C>- - - _...J I I

I I NDTE,-

4-PIN XLR

iQ INTERFACE MODULE I I I I I I

[f NETWORK MODULE [S TO BE rI TTED. CONNECT AS SHOWN.

_..J L

TO EITHER

TIC -..-----"--L __ -

i

EMS .. TO TOOL

EMS .... TO TOOL I

...--.... 4III--ELECTRICAL SUPPLY

IQ PUMPING SYSTEM

L _ -...!..AL.!~~) __ _

0000

<30

1>

°

Notes



communication.


must have terminator plugs filted.

INPUTIOUTPUT SIGNALS .... TO TOOL


)

O~ PUMP DISPLAY

MODULE


P600-3()"'180 IssueC


1 Introduction


2 Mechanical data

This iQ Interface Module is larger than the standard iQ Interface Module, and its depth is 166.4 mm, not 86.5 mm as specified in the instruction manual.

The actual mass of this iQ Interface Module is specified on a rating plate on the iQ Interface Module.

3 Cards fitted

The foll.owing Interface Cards are fitted in this iQ Interface Module:

• TIC (Tool Interface Card)


4 Connectors

The connectors in Table A1 are fitted to the interface connector panel on this iQ Interface Module:

Connector name/number Connector type Figure Al reference

Gate valve CPC 13/9-M 1 MCMEMO CPC 11/4-F 2

Tool EMSJ1 CPC 11/4-M 3

Tool EMSP2 CPC 11/4-F 4

MCM CPC 17/16-M 5

Loadlock CPC 17/16-M 6 Process CPC 17/16-M 7

EMS XLR-6-M 8

Table A1 - Connector types

Amendment 1

5

Amendment

1. Gate valve connector 5. MCM connector

2. MCM EMO connector 6. Loadlock connector

3. Tool EMS J1 connector 7. Process connector

4. Tool EMS P2 connector 8. EMS connector

Figure A I - Interface connector panel


The signals available on the connectors are shown in Tables A2 to AS. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card and Auxiliary Interface Card connectors and for information on the use of the signals.

Pin Signal


I and 2 Valve closed volt-free status Signal from valve TIC, CHI PL17

3and4 Valve open volt-free status signal from valve TIC, CH2 PL17

7and9 Open valve 24 V a.c. control signal to valve TIC, CHI PL9


2

Pin Signal


1 and 2 EMO input from MCM (closed in normal operation) MCM

3 and 4 Not used -

Table A3 - MCM EMO connector signals

Pin Signal


1 EMS output to tool (closed in normal operation) EMS pin 3

2and3 Internal link -4 Internal link Tool P2 pin 1

Table A4 - Tool EMS Jl connector signals

Pin Signal


1 Internal link Tool II pin 4 2and3 Internal link -

4 EMS output to tool (closed in normal operation) MCMEMO pin 2

Table AS - Tool EMS P2 connector signals

Pin Signal


3and4 Loadlock pump running signal from pump Ale, CH7 PU4

Sand6 Loadlock pump on volt-free control signal to pump AIC,CH3 PL8

7and8 Loadlock pump not in warning volt-free status signal AIC, CH6 PUS from pump

9 and 10 Loadlock pump not in alarm volt-free status signal AlC, CHS PUS from pump


Amendment 3

Pin Signal


1 and 2 Loadlock pump on 24 V a.c./ d.c. control signal from tool AIC, CH8 PLIO

3 and 4 Loadlock pump running volt-free status signal to tool AIC,CH6PL7

7and8 Loadlock pump not in warning volt-free status signal to AIC,CH5PL7 tool

9 and 10 Loadlock pump not in alarm volt-free status signal AIC,CH4PLB to tool .

Table A7 - Loadlock connector signals

Pin Signal


1 and 2 Pumps on 24 V a.c./ d.c. control signal II- TIC, CH3 PL12 3and4 Pumps running volt-free status signal TIC, CH3 PL8 5and6 Open valve 24 V a.c./d.c. control signal TIC, CH5 PL11 7 and 8 Pumps not in warning volt-free status signal . TIC, CH4 PL8

9 and 10 Pumps not in alarm volt-free status signal TIC,CH5PL7 11 and 12 Gas flow not in warning volt-free status signal TIC, CH6 PL7 13 and 14 Final valve volt-free status signal TIC,CH7PL6 15 and 16 Pumps on volt-free control signal .. TIC, CH3 PL16

.. Note: only one type of 'pumps on' control signal may be used.

Table A8 - Process connector signals

Amendment 4

).. ::I ~ l:l.. ::I "' ;:! ....

(JJ

---I r NIC I 2 NETWORK INTEERFACE ~r-iljV

MODUL I, f'r _-I I I I

OfT 4-PIN XLR

NIT) <J- - - ...J I I (TO NEXT U S UNIT) C>- _ I I <FROM PREVIOU I I

(NETWORK LON COMMUNICATIONS) NOTE,- .---...... ---ELECTRICAL SUPPLY

iQ INTERFACE MODULE

~ s-4-PIN 1--XLR

I I ..J L

TO EITHER

IF NETWORK MODULE IS TO BE FITTED. CONNECT AS SHOWN.

CDMHUN I tA TJ OMS

XLR CIMIS.

4_Plr 4-PIN

XLR IQ PUMPING SYSTEM

TIC -~--L~~-

(CABLE No.A53208402)

INPUT/OUTPUT SIGNALS (CABLE No.A53208401)

CONTROL ~ POSITION SIGNALS

(CABLE No.A5320840l1

VI'> ~ TO TDOL

~HS .ro TOOL

EMS

EHO

6-Pt] EMS L-j XLII I I

L ___ (~~T.!Y~ ____ J

CPCl........t!n 11/~

MCM

CP~ COHMS. 17/16

0000

<l~!>

Os PUMP DISPLAY

MODULE

LDADLOCK Q PUMPSET

PROCESS PUMP I INPUT/OUTPUT SIGNALS ~ TO TDOL

GATE VALVE

'---.... ~--ELECTRICAL SUPPLY

LOADLDCK PUMP INPuT/OUTPUT SIGNALS ~ TO TOOL

Notes

t. The Pump Display Module can be used with the

iQ pumping system on its own without external

communication.




P600-30-060 Issue B



1 Introduction


2 Cards fitted



3 Connectors

The connector in Table At is fitted to the interface connector panel on this iQ Interface Module:


SK3Tool HANt6-F t SK4 Tool STAF6-F 2

Table At - Connector types

$-(EMSTOOL(

1. SK3 Tool

2. SK4 Tool

Figure At - Interface connector panel

Amendment 1


Amendment

The signals available on the connectors are shown in Tables A2 and A3. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card connectors and for information on the use of the signals.

Pin Signal


1 and 2 EMS output (closed in normal operation) EMS connector

3 and 4 iQDP pump on volt-free control input TIC, CHI PL17

5 and 6 iQDP pump running volt-free status output TIC,CHI PL9

7and8 iQMB pump on volt-free control input TIC, CH2 PL17

9 and 10 iQMB pump running volt-free status output TIC,CH2PL9

11 and 12 Pumps not in warning volt-free status output TIC,CH4PLB

13 and 14 Pumps not in alarm volt-free status output TIC,CH5PL7

15 and 16 External EMS input ( closed in normal operation) EMS connector

Table A2 - SK3 Tool connector signals

Pin Signal


1 and 2 Gas flow not in warning volt-free status output TIC,CH6PL7

3and4 24 V a.c. output -

Table A3 - SK4 Tool connector signals

2

).

l § ...

w

(NETWORK LON COHMUNICATIONS>

NETWORK INTERrACE MODULE r----, I Nit I

(TO NEXT UNIT> <J-----n-~ 2

OFF 4-PIN XLR

(FROM PREVIOUS UNIT> C>- - - _.J I I I I NOTE'- .. ELECTRICAL SUPPLY

IQ INTERFACE MODULE

rl:b I·-PIN XLR

TIC

L--.... --II~~e:~~A

Notes


iQ pumping system on its own without eKlemal

communication.

2.

I I I I I I

_...1 L

TO EITHER

IF NETWORK HODULE IS TO BE F"I TTED, CONNECT AS SHOWN.

----.--T--...--L ___

j

INPUT/OUTPUT SIGNALS ~ TO TOOL

t

.-Plr xu CIJIoItS •

.-PIN

XU IQ PUMP I NG

6-PrJ EMS lIlR

SYSTEM

0000

INPUT /OUTPUT SIGNALS. TO TOOL L ___ (_AL.!~~) __ _ <l~r>

O~ PUMP DISPLAY MODULE

Vacant XlR-4 pin communications connectors

must have terminator plugs lined. Figure A2 - Schematic diagram of the electrical connections

P600~3()"()10

IssueC



1 Inuoduction


2 Cards fitted



3 Connectors

The connector in Table A1 is fitted to the interface connector panel on this iQ Interface Module:


Tool CPC 17/16-M 1

Tool EMS CPC 1I/4-M 2


1. Tool

2. Tool EMS


Amendment 1


Amendment


Pin Signal


1and2 Both pumps on 24 V control input TIC, CH3 PLl2

3and4 Pumps running volt~free status output TIC,CH3PLB

Sand6 Both pumps on volt-free control input TIC, CH3 PL16

7 and 8 Pumps not in warning volt-free status output TIC,CH4PLB

9 and 10 Pumps not in alarm volt-free status output TIC, CH5 PL7



Pin Signal


1 and 2 EMO output (N/C) Tool

3 and 4 Not connected -

Table A3 - Tool EMO connector signals

2

):. ~ ~ l:l.. ~ ~ .....

"->

NETWORK INTERFACE MODULE r----, I NIC I ~~V 2 OFF 4-PIN XLR

(NETWORK LON COMMUNICATIONS) <TO NEXT UNIT) <J-- - - - _.-J I I I (FROM PREVIOUS UNI T) [>- - - _.J I I

I I NOTE,-IF NETWORK MODULE IS TO BE FITTED, CONNECT AS SHOWN.

r---..... ..--ELECTRICAL SUPPLY

TIC

iQ INTERFACE MODULE

cg-PIN XLI!

Cpt 11/4-H

I I I I I I

_-1 L

TO EITHER

COMMUN I CA T IONS

~--~--L ___ ,

EHS .. TO TOOL

4_P~1 XLII CIM4S.

4-PIN XLII i Q PUMP I NG

6-Pr] EHS XLI!

SYSTEM

INPUT/OUTPUT SIGNIILS • TO TOOL

L ___ (_AL!E~~) __ _

0000

<J~~

O~ Notes PUMP D I SPLA Y MODULE

1 . The Pump Display Module can be used with the


communication.

2. Vacant XLA·4 pin communications connectors




P600-30-360 Issue B

Amendment to A52B-44-880

1 Introd uction


2 Mechanical data


The mass of this iQ Interface Module is specified on a rating plate on the iQ Interface Module.

3 Cards fitted

The following Interface Cards are fitted in this iQ Interface Module:



4 Connectors



Gate valve CPC 13/9-M 1 EMS output CPC l1/4-M 2

MCMEMO CPC 11/4-F 3

MCM CPC 17/16-M 4

Loadlock CPC 17/I6-M 5

Process CPC I7/I6-M 6

EMS input XLR-6 7


Amendment 1

5

Amendment


The signals available on the connectors are shown in Tables A2 to A7. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the connectors and for information on the use of the signals.

Pin Signal


1 and 2 Valve dosed volt-free status input (from valve) AIC, CHI PL17

3and4 Valve open volt-free status input (from valve) AIC, CH2 PL17

7and9 Open valve 24 V a.c. control output (to valve) AIC, CHI PL9


Pin Signal


land2 EMS output (dosed in normal operation) Tool


Table A3 - EMS output connector signals

Pin Signal


1 and 2 EMO input (dosed in normal operation) MCM



Pin Signal


3and4 Loadlock pump running volt-free status input AIe, CH7 PL14 (from pump)

S and 6 Loadlock pump on volt-free control output (to pump) AIC,CH3 PL8 7and8 Loadlock pump not in warning volt-free status input AIC, CH6 PL1S

(from pump)

9 and 10 Loadlock pump not in alarm volt-free status input AIe, CHS PL1S (from Pump)

Table AS - MCM connector signals

2

Pin Signal


1 and 2 Loadlock pump on 24 V control input (from tool) .. AIC, CH8 PLlO

3and4 Loadlock pump running volt-free status output (to tool) AIC,CH6PL7 5and6 Both pumps on volt-free control input (from tool) .. AIC, CH8 PLl4 7 and 8 Loadlock pump not in warning volt-free status output AIC, CH5 PL7

(to tool)

9 and 10 Loadlock pump not in alann volt-free status output AIC,CH4PL8 (to tool)

.. Note: only one of these control inputs can be used.


Pin Signal


1 and 2 Both pumps on 24 V control input .. TIC, CH3 PLl2 3and4 Pumps running volt-free status output TIC, CH3 PL8 5and6 Both pumps on volt-free control input .. TIC, CH3 PLl6 7and8 Pumps not in warning volt-free status output TIC,CH4PL8 9 and 10 Pumps not in alann volt-free status output TIC,CH5PL7

.. Note: only one of these control inputs can be used.


Amendment 3

1. Gate valve connector 5. Loadlock connector

2. EMS output connector 6. Process connector

3. MCM EMO connector 7. EMS input connector

4. MCM connector

Figure At - Interface connector panel

Amendment 4

~

i ~ .....

(Jl

)

NETWORK INTERFACE i -HIC --,

MODULE l£r"b& I 2

(TO NEXT '.IIT> <J-----rr~ OFF 4-PIN XLR

(NETWORK LON COMMUNICATIONS) (FROM PREVIOUS UNIT> C>- - - _.J I I NDTE·- r---...... .--ELEC TR I CAL SUPPLY


IF NETWORK MODULE IS T(] BE FITTED. CONNECT AS SHOWN.

TIC

AIC

_-1 L COHMUHICATlDHS

TO EITHER XLR CIMIS,

---"--L~~-

4-P~1 4-PIN

XLR tQ PUMPING SYSTEM

EMe

(CABU: No.A53208402)

INPUTIOUTPUT SIGNALS (CABLE No.A53208401)

LOADLOCK PUMP INPUTJOUTPUT SIGNALS .. TO TOOL

L-~~--~ .. ~roTOOL

~MD ~TO TOOL

6-Pd EMS

I ~ XLR I I

L ___ (~~T!~ ____ J

CPC:~ 11/~

cp:lW:SCM

17/~'

0000

<10

1>

° O~ PUMP DISPLAY

MODULE

LOADLDCK Q PUMPSET

PROCESS PUHP I INPUT/OUTPUT SIGNALS .. TO TIlIlL

GATE VALVE

L..--...... ..--ELECTRICAL SUPPLY

Noles

1.

CONTROL , POSITION SIGNALS

<CABLE NQ,A53208403>

The Pump Display Module can be used w~h the


communication,


must have terminator plugs fitted. Figure A2 - Schematic diagram of the electrical connections

P600-30-230 Issue B



1 Inaoduction


2 Cards fitted



3 Connectors



Process pump CPC l7/l6-M 1


1. Process pump connector


Amendment 1


Amendment

The signals available on the connectors are shown in Table A2, Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card connectors and for information on the use of the signals,

Pin Signal


1 and 2 Pump on volt-free control input TIC, CH3 PL16 3and4 Pump nmning volt-free status output TIC,CHI PL9

5and6 Exhaust pressure not in warning volt-free status output TIC, CH8 PL6

7and8 Gas flow not in warning volt-free status output TIC, CH6 PL7 9 and 10 Pump not in alarm volt-free status output TIC,CH5PL7

11 Earth (ground) -

Table A2 - Process pump connector signals

2

).. 3 ~ ~ ~ ....

Vl

NETWORK INTERFACE MODULE r---i I NIC I

4-PIN XLR ~ £1i /1""""" 2 orr

(TO NEXT UNIT> <J- - - - - -.J I T rV (FROM PREVIOUS UNIT) C>- - - _...J I I

I I (NETWORK LON COMMUNICATIONS)

NOTE,- .. ELECTRICAL SUPPLY

iQ INTERFACE MODULE i

TIC

Notes



communication.



4-1' IN XLR

I I I I I I

_..J L


CClMJNICAT IONS

TO EITHER

-~--T--~-

L ___ , I

I I

I I

4-1'1~ XLR COMMS.

4-PIN

XLII IQ PUMPING

'-prJ E:HS XLR

SYSTEM

INPUT/OUTPUT SIGtW..S ~ TO TOOL L _ ~AL!~~) __ _

0000

<J~t>

D~ PUMP DISPLAY MODULE



P600-30-420 Issue A


1 Introduction


2 Mechanical data



3 Cards fitted


• TICI (Tool Interface Card 1)

• TIC2 (Tool Interface Card 2)

4 Connectors



Transfer EMS XLR-6 1 Transfer valve CPC 1l/4-M 2 Process valve CPC 1l/4-M 3

J2 EMS Tool CPC 1l/4-F 4

Jl EMS Tool CPC 1l/4-F 5 Process EMS XLR-6 6


Amendment 1

5

Amendment

r---='ft-I '

, '. I ' I L __ ~

1. Transfer EMS connector 4. J2 connector EMS tool

2. Transfer valve connector 5. J1 connector EMS tool

3. Process valve connector 6. Process EMS connector



The signals available on the connectors are shown in Tables A2 to AS. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Cards connectors and for information on the use of the signals.

Pin Signal


I and 2 Transfer pump running volt-free status output TICI, CHI PL9

Table A2 - Transfer valve connector signals

2

Pin Signal


3and4 Process pump running volt-free status output nC2, CH2 PL9

Table A3 - Process valve connector signals

Pin Signal


1 and 2 EMS output - closed in nonnal operation Tool EMS chain

3and4 24 V a.c. pump enable input from tool Tool

Table A4 - J2 EMS toolconnector signals

Pin Signal


land2 EMS output - closed in nonnal operation Tool EMS chain 3and4 24 V a.c. pump enable input from tool Tool

Table A6 - Jl EMS tool connector signals

Amendment 3

).. ;:£ ~ $:l..

~ ......

oj:>.


r--------., I I

NETWORK I me I

INTERFACE MODULE: ~m ;"'6V: 2 OFF 4-PIN XLR ~ [rTlir ,,-,,-'

I I I I (TO NEXT UNIT) <J-----------~ : : : (FROM PREVIOUS UNIT) e>--------J i :

I I I I

NOTE, -


IF NETWORK MODULE I S TO BE F! lTED. CONNECT AS SHOWN. .---...... ---[LECTRICAL SUPPLY

TIe No.1

I I I I

____ 1 L __ J COMlOJNICATlDNS

TO EITHER

-----.. -----r-----~-----L _________ --,

._P'h XLR eCMl4s.

'-PIN TRANSFER XLR L/L

IQ PUMPING SYSTEM

PUMP Dr SPLA Y MODULE

0000 o

6-PIB EMS XLR

i-I ~o[> L _____ ,~",~!",,-_____ j ~

CCM ...... IC.TIIINS

TO EITHER

------r-----~-----L _________ -:

r--..... ..-- ELECT! CAL SUPPL Y

.-P'h XLR to""S.

.-PIN PROCESS XLR L/L

IQ PUMPING SYSTEM

PUMP DI SPLAY MODULE

0000

, r.."~ • L",,.DLt. ~ TO TOOL

I <~ •• (NABLE ~ TO TCD.

I PUMP RUNN[N(; SIGNAL ~ TO VALvr CONTROL UNIT <':528'56OD)

PUMP RUIW[NG SIGNAL ~ TO vALvE CIINTROL UNIT <'529'5600'

6-Pr:] EMS XLI!

'-I ~~[> L _____ ~_TERN!'.!!.!'!=~ _____ j ~

Notes



communication.


must have terminator plugs litted.


P600-30-300 Issue B



1 Introduction


2 Cards fitted



3 Connectors



Loadlock pump CPC I7/I6-M 1


1. Loadlock pump connector


Amendment 1

---~


Amendment

The signals available on the connectors are shown in Table A2. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card connectors and for information on the use of the signals.

Pin Signal


I and 2 Loadlock pump on volt-free control input TIC, CHI PL17 3and4 Loadlock pump running volt-free status output TIC,CHI PL9

Sand6 Loadlock pump not in alarm volt-free status output TIC,CH5PL7 7 Earth -

Table A2 - Loadlock pump connector signals

2

).. ;:i ~ ~ ~ ....

w


NETWORK INTERFACE MODULE r----, I NIC I ~£1i r 2 OFF 4-PIN XLR

(TO NEXT UNIT) <J-----.-I I i T'V (FROM PREVIOUS UNIT) C>- - - _.J I I I I NOTEI-

I I IF NETWORK MODULE IS TO BE FITTED

.. ELEClRICAL SUPPLY

Notes

iQ INTERFACE MODULE

~ I 4-PIN KLR

TIC

CPC '------I117/16-H



communication.

2.

I I CONNECT AS SHOWN.

I I _...1 L

TO EITHER

CDHHUHICATIONS

----.--T--~-

L ___ , I

I I

I I

4-t>~1 KLR COHMS.

4-PIN

XLR IQ PUHPING

6-Pr] EMS XLR

SYSTEM

DODD

INPUT/OUTPUT SIGNIoLS • TO TOOL L _ ~AL.!~'!!=) __ _ <J~t>

O~ PUMP DISPLAY HODULE

Vacant XlR-4 pin communications connectors

must have terminator plugs fitted. Figure A2 - Schematic diagram of the electrical connections

)

P600-30-030 Issue B



1 Introduction


2 Cards fitted


• Tool Interface Card.

3 Connectors

The connector in Table At is fitted to the interface connector panel on this iQ Interface Module:


Tool connector 25-pin '0' type male 1

Table Al - Connector type

Amendment I


Amendment

The signals available on the connector are shown in Table A2. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card connectors and for information on the use of the Signals.

Pin Signal


1 and 14 Both pump on volt-free control input TIC, CH3 PL16

2 and 15 Process on volt-free control input TIC, CH4 PL16

3 and 16 Open valve volt-free control input TIC, CH5 PL15

4 and 17 Run til crash volt-free control input TIC, CH6 PL15

5 and 18 Auto shutdown volt-free control input TIC, CH7 PL14

8 and 20 Pumps running volt-free status output TIC,CH3 PL8

9 and 21 Pumps not in warning (excluding exhaust pressure TIC,CH4PLB warning) volt-free status output

10 and 22 Pump not in alarm volt-free status output TIC, CH5 PL7

11 and 23 Gas flow not in warning volt-free status output TIC, CH6 PL7

12 and 24 Water flow volt-free status output TIC,CH7PL6

13 and 25 Exhaust pressure not in warning volt-free status output TIC, CH8 PL6


~~ o.:g.o --

1. Tool connector


2

~ ::! ~ I::L. ::! ~ .....

w

NETWORK INTERFACE MODULE r----, I NIC I

~~ r 20FF

(NETWORK LON COMMUNICATIONS> (TO NEXT UNIT> <r - - - _.....J I I I V

4-PIN XLR

(FROM PREVIOUS UNIT> C>- - - - -1 I I I I NOTE· - r--... 4'--ELECTRICAL SUPPLY

iQ INTERFACE MODULE

I

TIC

Notes

1 . The Pump Display Module can be used with the


communication.



I I

I 1

j

PIN IU..R

-PIN XLR

-WAY D'

HAL(

I I I I I I

_.....J L

TO EITHER

IF NETWORK MODULE IS TO BE FITTED, CONNECT AS SHOWN.

COMHUNICA nONS

---'--T--'--L ___ I

I

I I

I I

4-P~1 XLR COHHS,

4-PIN XLR i Q PUMPING

6-Pt] (MS XLR

SYSTEM

L _ ~AL..!~~) __ _

INPUT/OUTPUT SIGNALS ~ TO TOOL


0000

<l~t>

D~ PUMP DISPLAY

MODULE

P600-30-240 Issue B



1 Introduction

This Amendment describes the details of this iQ Interface Module.

2 Cards fitted



• AIC (Auxiliary Interface Card)

3 Connectors



Tool 25-way O.-conn.-M I

Valve CPC I3/9-M 2

EMS XLR-6 3


Amendment I


The signals available on the connectors are shown in Tables A2 to A3. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card and Auxiliary Card connectors and for information on the use of the signals.

Pin "'Signal


1 and 14 Both pumps on volt-free control input TIC, CH3 PL16

2 and 15 Process on volt-free control input TIC, CH4 PL16

3 and 16 Open valve volt-free control input TIC, CH5 PL1S 4 and 17 Run til crash volt-free control input TIC, CH6 PL1S 5 and 18 Auto shut-down volt-free control input TIC, CH7 PL14

8 and 20 Pumps running volt-free status output TIC,CH3PL8

9 and 21 Pumps not in warning volt-free status output TIC,CH4PL8



12 and 24 Pumps not in warning water flow volt-free status output TIC,CH7PL6

13 and 25 No exhaust pressure waming volt-free status output TIC,CH8PL6


Pin Signal


1 and 2 Valve closed volt-free status input (from valve) AIC, CHI PL17

3and4 Valve open volt-free status input (from valve) AIC, CH2 PL17 7and9 Open/close valve 24 V a.c. control input (to valve) AIC, CHI PL9

Table A3 - Valve connector signals

1. Tool connector

2. Valve connector

3. EMS connector


Amendment 2

~

t :l ~ ....

VJ


NETWORK INTERFACE MODULE r-----, I NIC I

<TO I£Xl .... IT> <l-----n-~' OFr 4-PIN XLR

(FROM PREVIOUS UNIT) C>- - - - ~ I I I I NOTE.-

Ir NETWORK MODULE IS TO BE n TTED, CONNECT AS SHOWN.

.. ELECTRICAL SUPPLY

iQ INTERFACE MODULE

~ I 4-PIN XLR

TIC

"IC

Notes

~-VAY , D'-MALE


iQ pumping system on ~s own without extemal

communication.


must have terminator plugs litted.

4-PIN XLR

CPC 13/9-M

I I I I I I

_....J L

TO EITHER

COMMUNICATIONS

---4---L~;

I

4-P~I XLR CCMlS.

4-PIN

XLR IQ PUMP I NG SYSTEM

6~:::1 EMS

CONTROL .. POS IT ION SIGNAL. (CABLE No. A53208403)

L _ ~AL.!E~V!) __ _

0000 o

<101>

INPUT/OUTPUT SIGNltLS ~ TO TOOL

GATE VALVE

O~ PUMP DISPLAY MODULE


P600-30-130 Issue B



1 Introduction


2 Cards fitted




3 Connectors


Connector name/number Connector type Figure A1 reference

MCM CPC 17/16-M 1

70J1 Tool EMS CPC 13/9-M 2 70J2 Tool 37-way D. Conn-F 3

EMS XLR-6 4

MCMEMO CPC 11/4-F 5 70J3 Gas box CPC 11/4-M 6


Amendment 1

4 Use of (onnedor pins

Amendment

The signals available on the connectors are shown in Tables A2 to A6. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the connectors and for information on the use of the signals.

Pin Signal Destination!

numbers Source

3and4 Loadlock pump running volt-free contact input AIC, CH7 PL14 Sand6 Loadlock pump on volt-free output signal AIC,CH3PLB 7 and 8 Loadlock pump not in warning volt-free contact input AIC, CH6 PL1S 9 and 10 Loadlock pump not in alarm volt-free contact input AIC, CHS PL1S



numbers Source

1 and 2 EMS output to tool (closed in normal operation) EMS/MCMEMO 3and4 EMS input from tool (closed in normal operation) EMS Sand6 Procrss pump running volt-free status output to tool TIC. CHI PL9

Table A3 -70J1 Tool EMS connector signals


numbers Source

1 and 20 Process pump not in warning volt-free status output TIC, CH4 PLB 2 and 21 Process pump running volt-free status output TIC,CH3PLS 3 and 22 Linked -Sand 24 Linked -10 and 29 Loadlock pump not failed volt-free status output AIC, CH4 & CHS 11 and 30 Loadlock pump running volt-free status output AIC,CH6PL7 36 and 37 Process pump gas flow not in warning volt-free status TIC, CH6 PL7

output

Table A4 - 70J2 Tool connector signals

Pin Signal


1 and 2 EMO input from MCM (closed in normal operation) MCM 3and4 Not connected -

Table AS - MCM EMO connector signals

2


numbers Source 1 and 2 Linked -3and4 Gas Box disable 70J2 pins 34 &: 15

Table A6 - 70J3 Gas box connector signals

1 . MCM connector 4. EMS connector

2. 70J1 Tool EMS connector 5. MCM EMO connector

3. 70J2 Tool connector 6. 70J3 Gas box connector

Figure Al- Interface connector panel

Amendment 3

).

i ....

",.

NETWORK r - NIC - -,

I NTERF ACE MODULE ~ ~ 2 OFT

(NETIIlRK LON C"""",,ICA TIONS> (TO NEXT UNIT> <I- - - - - -' I I I V 4-PIN XLR

(F'ROH PREVIOUS UNIT>I>----.J I I I I .. ELECTRICAL SUPPLY NQTE·-

iQ

TIC

AIC

INTERFACE MODULE I I I I I I

_.....I L

TO EITHER

IF N(T~DRK MODULE IS TO BE F'ITTED, CONNECT AS SHOWN.

XlIt COMMS. 4-P1~ 4-PIN

XLA I Q PUMP I NG SYSTEM ---'--L~-:--

Eft]

(CAIt..£ No.AS3208402)

INPUT/OUTPUT SIGNALS (CABLE No.A53208401)

EMS ... TD TDDL

INPUTIDUTPUT SIGNALS .... TD TID..

'-prJ EMS I l XLA I I

L_~AL.!E!!!!!~~_=--.J

CPC'----o!o . II/U-

Cpc~SCM 17/~'

0000

<lOt> o

O~ PUMP DISPLAY

MODULE

LOADLDCK Q PUMP SET

Notes GAS BOX OISAIl.£ ... TO TDDL '---........ _-ELECTRICAL SUPPLY


iQ pumping system on its own w~hout extemal

communicatiOn.


must have tenninator plugs lilted. Figure A2 - Schematic diagram of the electrical connections

)

P600-30-390 Issue B

Amendment to A52844..gS0


1 Introduction


2 Cards fitted



3 Connectors



Tool connector J2 25 way D-type F 1

Tool EMS connector Jl AMP CPC 206430-1-F 2

Pump EMS connector XLR-6 3


1. TooIJ2

2. Tool EMS J1

3. Pump EMS Figure Al - Interface connector panel

Amendment I


Amendment


Pin Signal

Destination! numbers "- Source

1 and 14 Pumps not in alarm volt-free status output TIC,CH5 PL7 2 and 15 Pumps running volt-free status output TIC,CH3PLS

3 and 16 Pum&S not in warning and gas flow not in warning TIC,CH4PL8 volt- ee status output TICCH6PL7

10 and 23 Both pumps on a.c./d.c. control input TIC, CH3 PL12

Table A2 - Tool J2 connector signals


numbers Source

1 and 2 EMS output to tool normally closed volt-free status EMS output

Table A3 - Tool EMS 11 connector signals

2

)..

i ~ ....

w

(NErwORK LDN COMMUNICATIONS)

NETWORK INTERFACE MODULE

'---I I NlC I

(TIl NEXT UNIT) <J- ___ -n-ftv 21FT

(FROM PREVIOUS UNIT> C>- - - - ..J I I I I NOTE,-

"-PIN XLR

.. ELECTRICAL SUPPLY

10 INTERFACE MODULE I I I I I I

IF NErwORK MODULE IS TO BE nnED, CONNECT AS SHO\IN.

reb 4-f>IN XLR

TIC

as-IiAY • D' -f'EMALE

J2

4-4>IN X\..R

L_-.J L CCII1MUNI CA TI ONS 4-f>1[= TO EI1l£R

XLR CIlHHS.

-~--L~~ 4-4>IN

XLR 10 PUMPI NG

6-4>IB OIS XLR

SYSTEM

D4S TO TOOL.

I ~oooo L ___ (AL_~~)___ <l~1>

ID~ PUMP DISPLAY MODULE

INPlJT IDlJTPU'1 SIGNALS - m mOL


~Q .Interface Modul~ -~N~ber A528-44-481

t ~on

This Aawndment describes the details of this iQ Interface Module

,~<':" . .-" ' .

Qty Description - ~.;.,

., '~!(" 1 "'!, ·jQInterface module Q

.1 Instructions - iQ Interface module Ci 1 Instruction amendment Q

1 Cable assembly - 5m (4 way - XLR) Q

1 iQDP Terminator plug (4 way - XLR) Q

1 CabIe....-wy ,"'''wtI1.~ .. Q

I c:~ assembly -Amphe~0111/4 to 13/9 Q

1 Plug housing.25:~%p~~ector Q

1 Hood.i5-waY!l .. ftrDloo« Q

8 Cmifact pinD-connector Q . i PlVg;. ~ ""<-"'''''.'" Q

1 Clamp' Alze 11 Q

2 Contact pin - Amphenol Q , 1 Plug - Amphenol13/9 Q

1 Clamp - size 13 '. Q

6 Contact socket - Amphenol Q

Table Al - Checklist of items

3 Cards fitted



AIC (Auxiliary Interface Card).

Amendment

P600-30-470 Issue A


4 Connectors



Tool connector J2 25 way D-type F 1

Pump EMS connector XLR-6 2

Tool EMS connector J1 AMP CPC 206430-1-F 3

Process valve CPC 13/9-M 4



Amendment


Pin Signal



2 and 15 Pumps running volt-free status output TIC,CH3PLB

3 and 16 PumfrS not in warning and gas flow not in warning TIC,CH4PLB volt- ree status output TIC,CH6PL7

10 and 23 Both pumps on a.c./d.c. control input TIC, CH3 PL12

Table A3 - Tool J2 connector signals

Pin Signal


1and2 EMS output to tool normally closed volt-free status EMS output

Table A4 - Tool EMS Jl connector signals

Pin Signal


1 and 2 Valve closed volt-free status input (from valve) AIC, CHl PL17

3and4 Valve open volt-free status input (from valve) AIC, CH2 PL17 7and9 Open/close valve 24 V a.c. control input (to valve) AIC,CH1PL9

Table A5 - Process valve connector signals

2

1. TooIJ2 2. Pump EMS 3. Tool EMS J1

4. Process valve


Amendment 3

~

I

~


NETWORK INTERFACE MODULE r----, I "Ie I

eTO NEXT UNIT) <J------n-ftv 2 OFF

4-PIN XLR

(FROM PREVIOUS UNIT) C>- - - _.J I I I I NOTE·- ~ELECTRICAL SUPPLY

iQ INTERFACE MODULE

AIC 1

NOleS

1. Th. Pump DIsplay MoeNI. can be used wi1h the iQ pumping system on its own without external

communication.

2. Vacant XLR-4 pin cofTVllunications connectors

I I I I I I

_--1 L

IF NETWORK MODULE I S TO BE FITTED, CONNECT AS SHOWN.

-_Plr xu CCI'I4S .

• -PIN

XlO I Q PUMP I NG SYSTEM

6-PI-;;] EMS

I L...IXL~

EMS ~ TO TOOL L '''-TE_nV£) ----------

0000

<l~t>

D~ PUMP DISPLAY MODULE

CONTROL' POSITION SIGNAl (CABLE No. 4532OS.03>

INPUT/OUTPUT SIGNAlS ~ TO TOOL

GATE VALVE

mUSl have terminator plugs fitted. Figure A2 - Schematic diagram of the electrical connections


P600-30-140 IssueC


1 Introduction


2 Mechanical data

This iQ Interface Module is larger than the standard iQ Interface Module and its depth is 166.4 mm, not 86.5 mm as specified in the instruction manual.


3 Cards fitted


• TICI (Tool Interface Card for the process pump)

• TIe2 (Tool Interface Card for the loadlock pump)

4 Connectors

The connectors in Table Al are fitted to the interface conne<:tor panel on this iQ Interface Module:


70J2 Tool D.-conn-37 way-F 1

70J3 Gas box disable CPC 11/4-M 2 70Jl Tool EMS CPC I3/9-M 3


Amendment 1

5

Amendment


The signals available on the connectors are shown in Tables A2 to A4. Refer to the appropriate sections of this instruction manual for electrical data for the Signals available on the Tool Interface Card connectors and for information on the use of the signals.

Pin Signal


1 and 20 Process pump not in warning volt-free status output TIC1, CH4 PLB

2 and 21 Process pump running volt-free status output TIC1, CH3 PLB

3 and 22 Internal link

5 and 24 Internal link

10 and 29 Loadlock pump not in warning volt-free status output TIC2, CH4 PLB

11 and 30 Loadlock pump running volt-free status output TIC2, CH3 PL8

15 and 34 Gas box disable input 70J3 pins 3 and 4

36 and 37 Gas flow not in warning volt-free status output TIC1, CH6 PL7

Table A2 - 70J2 Tool connector signals

Pin Signal


1 and 2 Linked -3and4 Gas box disable from tool 70J2 pins 15 and 34

Table A3 - 70J3 Gas box disable connector Signals

Pin Signal


1 and 2 EMS volt-free output to tool closed in normal operation EMS

3 and 4 EMS volt-free input from tool closed in normal operation EMS

5and6 Process pump running volt-free status status output TIC1, CH1 PL9

Table A4 - 70}1 Tool EMS connector signals

2

~, - I .... ... o o"C5"~

it ;----~ -- .......... . .... ... . . .. I I

I·i} I I

~~o~~ L---.,t -- ... r-------i I I

D.[lJ ~---+i I

______ .J ..

1. 70J2 Tool connector

2. 70J3 Gas box disable

3. 70J1 EMS


Amendment 3

~ ~ ~ .... ~ ~ ....

oj:>.

r----, NETI/ORK Nle I

INTERFACE MODULE~~vr 2 Of.

<TO NEXT UNIT> <J- - - - _.-J I I I

"-PIN xu~

(NET\lORK LON CDFMUNICATIONS) <fROM PREVIOUS UNIT) C>- - - _.J I I

I I

iQ INTERFACE MODULE I I

NoTE,-If NETWORK MODULE I S TO BE f !TTED. r---... ~II---ELECTR I CAL SUPPLY -;'1 : : c~'" """~

'- ...J L tDIMlNIC.TUINS '.-P'h ;:::<b 14;::~N ~ I i 111.11 CDMHS. PUMP D I SPLAY TO EITHER MODULE

4-PlND---.--T------G·;:::" POOC[SS 1 10000 ~ ~.1 ·1

TIC HI - I IQ PUMPING 0 No. I J:lI----. _ -- _ --, SYSTEM I <l t>

• ....--V.'UIooI·r"". 016_ ..... TO T(I)L

G.S BOX DISABlE • TO TDIl.

NOTES, -I. PUHi' DISPLAY MODlIl.E CAN BE USED

WITH THE IQ PLl4PING SYSTEM ON ITS OWN \/ITHOUT (Kl[RNAl CONH .... ·HCATJON.

2. VACANT XLR-4 PIN COHHUNICAT IONS CONN£CTORS HUST HAVE TERMINATOR PLUG FI HrD.

·6-PB E.-J n 00 I Lj XLR i I I 8 L _ ~~!~"!) ___ :J

_~ ~ ELECTICAL SUPPLY

4-Pl~ XLR CIMIS. ----T --..----U';r~N ENTRANCE III

I No.2

____ ~ HI PUMPING SYSTEM 6-pB EHO I yu II

L_~~!E~V~) ___ ~

PUMP DISPLAY MODULE

0000·

<I~I>

08


P600~30~ 150 Issue B



1 Introduction


2 Mechanical data



3 Cards fitted


• TICl (Tool Interface Card for the process pump)

• TIC2 (Tool Interface Card for the process load lock pump)

• TIC3 (Tool Interface Card for the entrance loadlock pump)

4 Connectors

Note: If the DSQ stripper tool pump is not in use, you must fit the dummy 6-way neutrix plug supplied in the relevant EMO connector.



70J2 Tool connector O.-conn-37 way-F 1

70J3 Gas box disable CPC 11/4-M 2

70Jl EMO CPC 13/9-M 3


5

Amendment


The signals available on the connectors are shown in Tables A2 to A4. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card connectors and for information on the use of the Signals.

Pin Signal


1 and 20 Process pumps not in warning volt-free status output TICl, CH4 PLB

2 and 21 Process pump on volt-free status output TICl, CH3 PLB

3 and 22 Linked -5 and 24 Linked -10 and 29 Entrance loadlock pump not in warning volt-free status TIC2, CH4 PLB

output

11 and 30 Entrance loadlock both pumps on volt-free status output TIC2, CH3 PL8

12 and 31 Process loadlock pump not in warning volt-free status TIC3, CH4 PLS output

13 and 32 Process loadlock pumps on volt-free status output TIC3, CH3 PL8

15 and 34 Gas box disable input from tool 70J3 process pump COIU1.ector

36 and 37 Process pump gas flow not inwarning volt-free status TICl, CH6 PL7 output

Table A2 - 70J2 Tool COIU1.ector signals

Pin Signal


1 and 2 Linked

3and4 Gas box disable output 70J2 pins 15 and 34

Table A3 - 70J3 (Gas box disable) COIU1.ector signals

Pin Signal

Destinationl numbers Source

1 and 2 EMO output to tool (N/C) -3and4 EMO input from tool (N/C) -5 and 6 Process pump running volt-free status output TICl, CHI PL9

Table A4 - 70Jl EMO connector signals

?

Amendment

1. 70J2 Tool connector

2. 70J3 Gas box disable connector

3. 70J1 EMO connector

r----+' I I I I

L----.J r-------i ..


NOTES,-

1. PUMP DISP\.A'I' HD:DuL.£ CA-N It usn UITH THE IQ PUlfl'IHG S'I'$TD1 ~ ITS [111M UITHI1IT [XTERNAl CDHK.INltATIDN.

z. VACANT XLA-4 PIN CDttCUNICATlDNS CJH.fECTDRS HJST H.tiY[ T£RHJHATIJR P"L1J(i f'"1TT£D.

IQ INTERfACE HIIDULE

(IN(TWRK UN attI.lUCATlmIS')

IKnIIIC IIfIIWMS ..-.a.I r---' I ... I ~~2 mT 4-P1N xur

em lOT 111m <I-----.J I I I (FlDI PllEYItIJI" LNlnt>-----' I I NnE.- ·ELECTRICAL SUftPLY

II "~-.L I I IS 1Q • FETlIlI.

I I CIHCCT" - . .-_-''-__ --, _J L....J_ ... r_

: ... ------<r- TD £ITIER

----L=~----'-~. • ESS 14-4'1" IQ~UIG

(HE'TlIIIIIK UI'I CQIOUrIIICIITtIJN$'

S'lSTEM

I

~~o/IU""": r---, L __ ""'!!!!!!.."!.' _________ _

I ... I . ~£!j r i! DFT 4-f"'IIrt-Xl.Jl

em lOT 111m <I-----.J I 1 IV (nat PAEYIM ....,1"[>----' I I IIJ'TE'- E:t..[CTRICH... SUPPLY

II rr-=- ........ ~ I IS TO IE rlnu. I I CIHCCT AS ....... r--......J~--~

_J L

---- ------:----L-:"~~--------

-.rl..-~~

IQ PlH'IN6 S'ISlEH

.rJ-I

~IIfRIII"ACEiIGILl r---' L_.-.!..~"'!!!!!~ __________ _

CNE:""NIIK UJH t:lJ4UiICIITlDNS>

I .. , I _Gi r. 1tT '..,.'.lUI no tal' 111m <1-____ -' I 1 IV (flUI JltltYn:1JS 'lJII'11)t>-----J I I NIlt,-

ELE~TRICAL SUPPlY II rr-=--.... I I ~I£ 'mD. I lOS""'" r--L--~

_J L

_________ ~----- TO rlntER L------------

.. ttI'UI"JOm"Ift Ite ..


IDDDD

.. ~~ Ol!l

PUMP DISPLAY NDIlU..E

DODD .. O~ o

Om PUMP DISPl..AY

NIIIIUU:

DODD

.. ~~ Ol!l

PI.JMP DISPl.AY MIlIlULE

P600-30-020 Issue B



1 Innoduction


2 Cards fitted



• AIC (Auxiliary Interface Card)

• NIC (Network Interface Card)

3 Connectors



MCM/Tool 25-way D.-Conn.-F 1

Process 25-way D.-Conn.-M 2

Network 9-way D.-Conn.-F 3

Network 9-way D.-Conn.-F 4

Gate Valve CPC 13/9-M 5


Amendment 1


Amendment

The signals available on the connectors are shown in Tables A2 and A6. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Too~ Interface Card and Auxiliary Interface Card connectors and for information on the use of the signals.

Pin Signal


1 and 14 Set outputs for tool volt-free control input TIC, CH8 PLl4

2 and 15 Process On volt-free control input TIC, CH4 PLl6

3 and 16 Open valve (AIM) volt-free control input TIC, CH5 PLl5

4 and 17 Run til crash volt-free control input TIC, CH6 PLl5

5 and 18 Auto shutdown volt-free control input TIC, CH7 PLl4

6and7 Both pumps on 24 V a.c./d.c. control input TIC, CH3 PLl2

8 and 20 Pumps running volt-free status output TIC,CH3PL8

9 and 21 Pumps not in warning (alternative tool- excludes TIC, CH4 PL8 exhaust pressure warning) volt-free status output

10 and 22 Pumps not in alarm volt-free status output TIC,CH5 PL7


12 and 24 Final valve open (alternative tool- waterflow not in TIC,CH7PL6 warning) volt-free status output

13 and 25 Exhaust pressure not in alarm volt-free status output TIC,CH8PL6


Pin Signal


2 and 15 Loadlock pump not in alarm volt-free status output AIC,CH4PL8 (to tool)

3 and 16 Loadlock pump not in warning volt-free status output AIC,CHSPL7 (to tool)

4 and 17 Loadlock pump running volt-free status output (to tool) AIC, CH6 PL7

6 and 7 Loadlock pump on volt-free control input (from tool) AIC, CH8 PLlO

10 and 22 Loadlock pump on volt-free status output (to pump) AIC,CH3PLB

11 and 23 Loadlock pump running volt-free status input AIC, CH7 PL14 (from pump)

12 and 24 Loadlock pump not in warning volt-free status input AIC, CH6 PL1S (from pump)

13 and 25 Loadlock pump not in alarm volt-free status input AIC, CHS PUS (from pump)

Table A3 - MCM/Tool connector signals

2

Amendment

Pin Signal


t Data A NIC, TB2 pint

4 DataB , NIC, TB2 pin2

7 Screen NIC,TB2pin3

Table A4 - Network connector signals

Pin Signal


I Data A NIC, TBI pin I

4 DataB NIC, TBI pin 2

7 Screen NIC, TBl pin 3

Table AS - Network connector signals

Pin Signal


land2 Valve closed volt-free status input (from valve) AIC, CHI PL17 3and4 Valve open volt-free status input (from valve) AIC, CH2 PL17

Sand6 Open valve volt-free control output (to valve) AIC,CHI PL9


1. MCMlTool connector

3. Network connector

2. Process connector

4. Network connector 5. Gate valve connector


-~

3

~ :i

~ :i ~ ....

"'"

ELECTRICAL SUPPLY

IQ INTERFACE MODULE

I

I I

TIC rl

I

AIC

I NIC

fBI I I

-f>IN lClR

-f>IN lClR

-IIAY D'

FDI,

,-IIAY 'D'

IIAL£

'AY 0'

EM,

KlR COMMS,

COIOtUNICATlONS n 4_Prl TO EITHEJI ...- _ 4-PIN

-~---T--- lClR IQ PUMPING L-- - SYSTEM

TO TOOL - -- I 6-f>rJ EMS INPlfTIllUTPUT

SI(;HALS

XLR I I

INPUT/OU'TPlfT SIGNALS L J (Al.~TIV[) -------------

CONTROL L POSITION

SIGNALS (CABLE No,A53209403)

INPlfT/OUTPUT ~ TO TtIOL SIGNALS

I-----I~~~ION

HeM

CP~ COMHS, 17116

0000

<10

1>

° O~ PUMP DISPLAY

MODULE

LOADLOCK Q PUMPSET

T121 I

AY D' M,

~------4 .. ~'~1~ L---........ ---ELECTRICAL SUPPLY

Notes

1 , The Pump Display Module can be used with the


communication,

2, Vacant XLR-4 pin communications connectors

GATE VALVE

must have terminator plugs fitted, Figure A2 - Schematic diagram of the electrical connections


P600-30-190 Issue B


1 Introduction


2 Mechanical data



3 Cards fitted

The following Interface Cardis fitted in this iQ Interface Module~


4 Connectors



EMS XLR-6 1 EMS Tool/Jl CPC 11/4-F 2

EMS Tool/J2 CPC 11/4-F 3

N2/J4 0.-conn-9 way-M 4

Tool/J3 O.-conn-25 way-M 5


Amendment 1


Amendment

The signals available on the connectors are shown in Tables A2 to AS. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card connectors and for information on the use of the signals.

Pin Signal


1 and 2 EMS output to tool (closed in normal operation) EMS chain

3 and 4 24 V a.c. pump enable (from tool) RLl

Table A2 - EMS Too1/Jl connector signals

Pin Signal

Destination! 'numbers Source

1 and 2 EMS output to tool (closed in normal operation) EMS chain

3and4 24 V a.c. pump enable (from tool) RLl

Table A3 - EMS Too1/J2 connector signals

Pin Signal


2and6 N2 flow warning (to tool) TIC, CH6 RL2

3 and 7 Foreline at vacuum (to tool) TIC, CHI PL9 T1

4and8 Linked -

Table A4 - N2/ J4 connector signals

Pin Signal


1 and 14 Exhaust pressure/temperature not in alarm volt-free TIC, CHS PL7 RL3 status output

2 and 15 Exhaust pressure/temperature not in alarm volt-free TIC, CHS PL7 RL3 status output

3 and 16 Pump running volt-free status output TIC, CH3 PL8

4 and 17 N2 flow waming volt-free status output TIC, CH6 PL7 RL2

5 and 18 N2 flow waming volt-free status output TIC, CH6 PL7 RL2

6 and 19 Pump not in waming volt-free status output TIC,CH4PL8 (excluding exhaust pressure waming)

7 and 20 Exhaust pressure not in waming volt-free status output TIC, CH8 PL6

10 and 23 Pump on 24 V a.c/ d.c. control input TIC, CH3 PLl2

Table AS - Too1/J3 connector signals

2

Amendment

1. EMS

3. EMS Tool/J2

5. TooI/J3

-F==,-, 11-$-11 1 1 I 1 1 I I I 1 1 I I I 1

o--t- I I I II I 1 1..-

~~~ I 1 1 I I--L--.J--l

1 I ,

r-L---r-l-i-~~ L - -L-_-_-J- - -1

2. EMS TooI/J1

4. N2/J4


3

).

l ::I ~ ....

"'"


'---I I NIC I

(TO NEXT "Nm <J-----n-ftv 2

OFF 4-PIN XLR

(FROM PREVIOUS UNIT) c:::-- - - - -l I I I I NDTE,- .. ELECTRICAL SUPPLY

iQ INTERFACE MODULE

TIC

• I~:~~Y

9-I/AY 'I)'-M

L-..r--JJ"

I

I I I I I I

_--1 L

TO EITHER


---4--T--~-L ___

1

EMS , ENABLE • TO TOOL

I ._ EMS , ENABLE • TO TOOL I

.. -PrI XLR CIlMMS.

"-PIN

Xt.!I IQ PUMPING SYSTEM

6-Pr] EMS XlR

L _ ~AL~Y~) __ _

I INPUT/OUTPUT SIGNALS. TO TOOL J3

Notes ... TO TOOL

, . The Pump Display Module can be used with the


communication.




0000

<lOt>

° D~ PUMP DISPLAY

MODULE

P600-30-200 Issue A



1 Introduction


2 Cards fitted


• .Tool Interface Card (TIC).

3 Connectors



Valve CPC 11/4-M 1

Jl CPC 11/4-F 2

J2 CPC 11/4-F 3

EMO XLR-6 4

Table Al- Connector types

Amendment 1

4

Amendment


The signals available on the connectors are shown in Tables A2 to A4. Refer to the appropriate sections of this instruction manual for electrical data for the signals available on the Tool Interface Card connectors and for information on the use of the signals.

Pin Signal


3and4 iQDP pump running volt-free status output TIC/CHI PL9


Pin Signal


1 and 2 EMO N IC output Tool EMO chain

3and4 24 V pump enable input from tool Tool

Table A3 - Jl connector signals

Pin Signal


1 and 2 EMO N/C output Tool EMO chain

3and4 24 V pump enable input from tool Tool

Table A4 - J2 connector signals

1. Valve connector

2. J1 connector

3. J2 connector

4. EMO connector


2

).

§

r -

w


NETWORK INTERFACE MODULE

r---, I NIC I ~ili r 2 OFF

(TO NEXT UNIT) <J-- - - - - -I I i jv 4-PIN XLR

(FROM PREV IOUS UN IT) l>- - - - .J I I I I NOTE,- .. ELECTRICAL SUPPLY

__ .. ....:.i.=Q---=-1 N....:.T.:....:E::.;..R:..:..F..:...A=C=-E-.:M..:.:O::.:D:..:U:.=L=E~_-.

.--cP I 4;r~N

TIC

NOTES,-

1, PUMP DISPLAY MODULE CAN BE USED WITH THE iQ PUMPING SYSTEM ON ITS OWN WITHOUT EXTERNAL COMMUNICATION,

2, VACANT XLR-4 PIN COMMUNICATIONS CONNECTORS MUST HAVE TERMINATOR PLUG FITTED.

CPC 11/4-H

I I I I I I

_J L

TO EITHER

IF NETWORK MODULE IS TO BE F I HED, CONNECT AS SHOWN,

CDHMUN I CA TI ONS

-~--L~~-

EHO 8. ENABLE ~ TO TOOL

4-P~[ XLR COHNS,

4-PIN

XLR IQ PUMPING

6-Pt] EHD XLR

SYSTEM

[HD So [NABLE ... TO TOOL L ___ (_AL..!~~) __ _

0000 o

<JOt>

PUHP RUNNING SIGNAL. TO VALVE CONTROL UNIT (A52945600) O~

PUMP DISPLAY MODULE


)

Declaration of Conformity

We, Edwards High Vacuum Internalional, Manor Royal. Crawley, West Sussex RH102LW, UK

declare under our sole responsibility that the product(s)

iQ Interface Module

A52844400 TO A52844599 inclusive

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

IEC 204-1 Electrical Safety; Machines

IEC 1010-1 Electrical Safety; Laboratory

EN 50081-1 EMC Emissions; Light Industrial

EN 50082-2 EMC Immunity ;Heavy Industrial

following the provisions of

Low Voltage ( Electrical Safety) 73-23- EEC

Electromechanical Compatibility ( EMC) 89-336-EEC

)~4!/H ~'a Dr A. Troupe, Director of Technology Date and Place

This product has been manufactured under a quality system registered to 1509001

~EDWARDS

CONTENTS Section Title Page

1 INTRODUCTION 1 1.1 Scope and definitions 1 1.2 General description 1 1.3 Connectors 2 1.4 The Tool Interface Card 2 1.5 The Auxiliary Interface Card 2

2 TECHNICAL DATA 4 2.1 Mechanical data 4 2.2 Electrical data (Tool Interface Card and Auxiliary Interface Card) 4 2.3 Electrical connectors 4

3 INSTALLATION 6

3.1 Unpack and inspect 6 3.2 Fit the iQ Interface Module 6 3.3 Connect to your emergency stop equipment (if necessary) 6

3.4 Connect the iQ Interface Module to the iQ pumping system and to another module (optional) 7

3.5 Connect the iQ Interface Module to other control equipment 7

4 OPERATION 8 4.1 Introduction 8 4.2 Tool Interface Card 8 4.2.1 Inputs and outputs 8

4.2.2 Tool type selection 10 4.2.3 Use of the buttons and LEOs 10 4.2.4 Setpoints store 10 4.2.5 Take and release control 10

4.3 Auxiliary Interface Card 11

4.3.1 Inputs and outputs 11

4.3.2 Introduction to gate valve operation 12

4.3.3 Gate valve operation: normal pumping system operation 12

4.3.4 Emergency shut-down/ emergency stop 13

5 MAINTENANCE 13

6 STORAGE AND DISPOSAL 13

6.1 Storage 13

6.2 Disposal 13

7 SP ARES AND ACCESSORIES 14

'" 7.1 Introduction 14 '" ~ 7.2 Spares 14 10

~ ca Cl RETURN OF EDWARDS EQUIPMENT

iQ Interface Module

Illustrations

Figure

1 2

Tables

Table

11

1 2 3 4

5 6

Title

Components of the iQ Interface Module Dimensions (mm)

Title

Checklist of items Tool Interface Card inputs Tool Interface Card outputs Tool Interface Card outputs set and reset definitions Auxiliary Interface Card inputs Auxiliary Interface Card outputs

Page

3 5

Page

6

8 9

9 11 12

iQ Interface Module

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards iQ Interface Module. You must use the iQ Interface Module as specified in this manual.

Read this manual before you install and use the iQ Interface Module. Important safety information is shown as WARNING instructions; you must obey these instructions. The use of WARNINGs is defined below.

WARNIN"G

Warnings are given where failure to observe the instruction could result in mJury or death to people.

The following symbol appears on the iQ Interface Module:

Caution - refer to accompanying documantation.

The units used throughout this manual confonn to the 51 international system of units of measurement.

1.2 General description

The iQ Interface Module is designed for use with the Edwards iQ dry pumping system and allows you to connect the pumping system to other equipment (for example, your Process Tool or other control equipment). The iQ Interface Module is an enclosure which contains one to six Interface Cards. The types of card which can be fitted are as follows:

• Tool Interface Card: see Section 1.4.

• Auxiliary Interface Card: see Section 1.5.

The cards fitted to your iQ Interface Module are described in the Amendment at the front of this manual.

iQ Interface Module 1

1.3 Connectors

Refer to Figure 1. The iQ Interface Module is connected to the iQ system through the system connector (3) on the bottom of the iQ Interface Module. If required, the module connector (2) is used to connect the iQ Interface Module to other iQ system modules (for example. a Pump Display Module).

Your iQ Interface Module is supplied with a number of connectors fitted to the interface connector panels (1). The pins on the connectors are connected to the inputs and outputs of the Interface Cards fitted to the iQ Interface Module. You will use the connectors as described in the Amendment at the front of this manual.

1.4 The Tool Interface Card

The Tool Interface Card allows you to control the operation of and to monitor the status of the iQ system through your Process Tool.

Refer to Section 4.2 for details of how to use the Tool Interface Card.

1.5 The Auxiliary Interface Card

2

The Auxiliary Interface Card allows you to control pumping system components which are not controlled through the iQ network system; for example, components such as :

• A gate valve.

• A load-lock pump, controlled through a Motor Control Module.

Refer to Section 4.3 for details of how to use the Auxiliary Interface Card.

iQ Interface Module

A Tool Interface Card LEOs and buttons

B Auxiliary Interface Card LEOs and buttons

1. Interface connector panel" 9. Tool Interface Card local control LED

2. Module connector (to other iQ modules) 10. Tool Interface Card OK LED

3. System connector (to iQ system) 11. Auxiliary Interface Card default button

4. Rating plate 12. Auxiliary Interface Card service button

5. Earth (ground) stud 13. Auxiliary Interface Card service LED

6. Tool Interface Card default button 14. Not used

7. Tool Interface Card service button 15. Auxiliary Interface Card OK LED

8. Tool Interface Card service LED

" The interface connector panel is shown above as one half-panel and two-quarter-panels, but may

be different on your iQ Interface Module. Refer to the illustration in the Amendment at the front of

this manual for the configuration of the interface connector panel on your iQ Interface Module.

Figure 1 - Components of the iQ Interface Module


2 TECHNICAL DATA

2.1 Mechanical data

Dimensions

Maximum mass

See Figure 2

Approximately 6 kg*

,. The exact mass of the iQ Interface Mod ule depends on the Interface Cards and the connectors fitted to the iQ Interface Module; refer to the rating plate on the iQ Interface Module (Figure 1, item 4) for the mass

of your iQ Interface Module.

2.2 Electrical data (Tool Interface Card and Auxiliary Interface Card)

Inputs

Number

Type 1

Type 2

High input voltage threshold

Low input voltage threshold

External contact rating

Outputs

Number

Type

Rating

8

a.c./ d.c. input signal

> 20 \'

<5V

Volt-free (dry) contacts

24V

8

Changeover relays, with normally open

and normally closed contacts

lA,24 V

2.3 Electrical connectors

4

Note: Other connectors are described in the Amendment at the front of this manual.

iQ system and module connectors

Emergency stop connector t

XLR type 4-way

XLR type 6-way

t Optional: refer to the Amendment at the front of this manual.

iQ Interface Module

I" ¢ I I

I 170 I

I I

I

c;,. .::.. 00000 -.-c;,. • 00000

~ --.. .. ~

1. Fixing hole: 05

iQ Interface Module

a

a

IfQJ[ F03

375

"I ~ I I

I 150 0 I

I I

I 0 I

-~

.1 350

JI 86.5*

-~

• This dimension depends on the number of Interiace

Cards fitted in the iQ Interiace Module: refer to the

Amendment at the front of this manual.

Figure 2 - Dimensions (mm)

5

3 INSTALLATION

3.1 Unpack and inspect

Remove all packing materials and inspect the iQ Interface Module. If the iQ Interface Module is damaged, notify your supplier and the carrier in writing within three days; state the Item Number of the iQ Interface Module together with your order number and your supplier's invoice number. Retain all the packing materials for inspection. Do not use the iQ Interface Module if it is damaged.

Check that you have receIved the items listed in Table 1. If any item is missing, notify your supplier within three days. If the iQ Interface Module is not to be used immediately, replace it in its protective packaging. Store the iQ Interface Module in suitable conditions, as described in Section 6.

Qty Description Check (.I')

1 iQ Interface Module

t iQ emergency stop cable ...

t iQ connector cable

t Terminator plug .. Connector mating halves ..

t You will requue one cable/plug for each IQ system connected to the IQ Interface Module. ... Emergency stop cable(s) may not be supplied; this depends on your application . .. Refer to the Amendment at the front of this manual for details about these connectors.

Table 1 - Checklist of items

3.2 Fit the iQ Interface Module

0

0

0

0

0

You can fit the iQ Interface Module to a wall or in a panel. Use four suitable bolts and washers through the fixing-holes (Figure 2, item 1) to secure the iQ Interface Module in position.

3.3 Connect to your emergency stop equipment (if necessary)

Note: If required, you can use extend the iQ emergency stop cable(s) up to a maximum length of 10 m. Refer to Section 7.2 for the Item Numbers of extension cables.

Use the following procedure to connect each iQ system to the iQ Interface Module, if you want to use your own control equipment to stop the iQ system in an emergency:

1. Fit the connector at one end of the iQ emergency stop cable to the external emergency stop connector on the rear of the iQ Electrics Module: refer to the instruction manual supplied with the iQ system.

2. Fit the connector at the other end of the iQ emergency stop cable to the emergency stop connector on the interface connector panel: refer to the Amendment at the front of this manual.

6 iQ Interface Module

3.4 Connect the iQ Interface Module to the iQ pumping system and to another module (optional)

Note: If required, you can extend the iQ connector cable(s) up to a maxtmum length of 100 m. Refer to Sectioll 7.2 for tile Item Numbers of extension cables.

1. Fit the connector on one end of the iQ connector cable to one of the module connectors on the front panel of the iQ system: refer to the iQ instruction manual

2. Fit the connector on the other end of the iQ connector cable to the system connector (Figure 1, item 3).

3. If you want to connect the iQ Interface Module to another iQ system module (for example, a Pump Display Module), fit the connector on the end of the iQ connector cable (supplied with the other iQ system module) to the module connector (Figure I, item 2).

If you do not want to connect the iQ Interface Module to another iQ system module, fit the terminator plug to the module COlmector (Figure I, item 2).

3.5 Connect the iQ Interface Module to other control equipment

Connect the iQ Interface Module to your process tool, PC (personal computer) or other control equipment through the connectors on the interface connector panels (Figure 1, items 1). Refer to:

• The information in Section 4 for the use of the iQ Interface Module input and output signals.

• The Amendment at the front of this manual, which defines the type of connectors supplied and the use of the connector pins.

iO Interface Module 7

4 OPERATION

4.1 Introduction

4.2

4.2.1

8

Operate the Interface Cards as described in the following sections. Where necessary, refer to the iQ pumping system instruction manual, or to the instruction manual(s} supplied with other pumping system components (for example, gate valves).

The actual connections available on your iQ Interface Module are described in the Amendment at the front of this manual.

Tool Interface Card

Inputs and outputs

The Tool Interface Card has eight inputs (see Table 2); use these inputs to control the operation of the iQ system. Inputs can be one of two types, as defined in Section 2.2. In Table 2, the terms 'set' and 'reset' are used as described below.

• 'Set' means that you must set the input high if it is a type 1 (a.c./d.c.) input, or you must close (link) the input if it is a type 2 (volt-free contacts) input.

• 'Reset' means that you must set the input low if it is a type 1 (a.c./d.c.) input, or you must open (unlink) the input if it is a type 2 (volt-free contacts) input.

You must allow at least 10 seconds between successive set/reset inputs.

Input Function Use

1 QDP on/off Set the input to switch on the iQDP pump. Reset the input to switch off the pump.

2 QMB on/off Set the input to switch on the iQMB pump. Reset the in!,ut to switch off the~um~.

3 Both pumps on/ off Set the input to switch on both pumps. Reset the input to switch off both 2umps.

4 Process on/ off Set the input to select process on. Reset the input to select process off.

S Open/ close valve Set the input to open the valve. Reset the input to close the valve.

6 Run Til Crash on/off Set the input to select Run Til Crash on. Reset the input to select Run Til Crash off

7 Fast/ Auto shut-down Set the input to select Auto shut-down. Reset the in~ut to select Fast shut-down.

S Process tool select ,. Set the input for process tool type B. Reset the input for process tool type A.

• See SectIon 4.2.2.

Table 2 - Tool Interface Card inputs

iQ Interface Module

The Tool Interface Card has elght outputs (see Table 3); use these outputs to monitor the status of the iQ system. Note that the meanings of some of these outputs depend on your tool type: use input 8 (see Table 2) to select the tool type.

Outputs can be either normally-open or normally closed. In Table 3, the tenns 'set' and 'reset' are used as described in Table 4.

Output Function Meaning

Tool type A" Tool type B"

1 iQDPOn If the output is set, the iQDP pump is on.

2 iQMBOn If the output is set, the iQMB pump is on.

3 Both pumps on If the output is set, both pumps are on.

4 Pump warning t If the output is set, no iQ If the output is set, no iQ warning condition exists. warning condition exists.

5 Pump alarm If the output is set, no iQ alarm condition exists.

6 Gas flow warning If the output is set, no gas purge flow warning

condition exists.

If the output is set, the If the output is set, the pumps are on and no gas cooling-water flow through purge flow warning or the iQ system is acceptable. alarm condition exists.

7 Pump status If the output is reset, the If the output is reset, the pumps are off and/ or a gas cooling-water flow through purge flow warning or the iQ system is too low. alarm condition exists.

8 Exhaust pressure If the output is set, no exhaust pressure warning warning condition exists.

• See Section 4.2.2. t Note that your system may be configured so that some warnings are ignored.

Table 3 - Toollnterface Card outputs

Meanings used in Table 3 Output type

Set Reset

Normally-open Closed Open

Normally-closed Open Closed

Table 4 - Tool Interface Card outputs set and reset definition


4.2.2

4.2.3

4.2.4

Tool type selection

The iQ system provides the electrical supply for the iQ Interface Module. Tool type (A or 6) is selected as follows:

• When the electrical supply for the iQ Interface Module is first switched on (that is, the iQ system is switched on), the tool type is determined from the state of input 8. Thereafter, the input is ignored (that is, a change in the state of input 8 will not change tool type).

• To change the tool type, you must switch off the iQ system then switch it on again, with input 8 in the correct state for the tool type.

Use of the buttons and LEDs

Refer to Figure 1. Some of the uses of the buttons and LEDs for the Tool Interface Card are described below. For the uses of the other LEOs and buttons, refer to the iQ system instruction manual.

Default button (4)

Local Control LED (7)

OK LED (8)

Setpoints store

Use this to reset the configuration store: see Section 4.2.4.

This is on when the Tool Interface Card has control of the iQ system.

This green LED is on when no faults are detected in the Tool Interface Card (by its self-test facility). If the LED goes off, there is a fault: contact your supplier or Edwards for advice.

The Tool Interface Card has a configuration store of iQ system configuration parameters (such as setpoints). Whenever you switch on the iQ system, the information in the store is sent to the iQ system and overwrites the configuration parameters in the iQ system.

To put new information in the configuration store (for example, to preset the store for your application), you must upload the information from a PC (refer to the instruction manual supplied with the iQ System Network Monitor Software).

If you press the default button (Figure I, item 6), the Tool Interface Card configuration parameters in the store are reset to their default values.

4.2.5 Take and release control

10

When you use the Interface Module to control the operation of the iQ pumping system, the Tool Interface Card will try to take control. The Tool Interface Card can only take control if no other iQ module (for example, a Pump Display Module) has controL If another module has control, the Tool Interface Card will continue to try to take control.

Once the Tool Interface Card has control, no other module can operate the iQ system until the Tool Interface Card has released control; the Tool Interface Card only releases control when it is used to switch off the iQDP pump in the iQ system.

iQ Interface Module

4.3

4.3.1

Note also that

• If the Tool Interface Card detects an alann condition, it will release control; this then allows another module (for example, a Pump Display Module) to control the iQ system.

• The modules connected to the iQ system communicate with the iQ system; a 'timeout' occurs if a connected module stops communicating with the iQ system for 90 seconds. If a timeout occurs on a module which has control (for example, if a Pump Display Module which has control is disconnected from the iQ system), control is automatically release from the timeout module; this allows other modules to take control and to switch off the iQ system, if required.

• Once an alarm condition is detected, you cannot use the Tool Interface Card to control the iQ system until the system has been manually restarted (with a Pump Display Module, or with the iQ System Network Monitor Software).

Auxiliary Interface Card

Inputs and outputs

The Auxiliary Interface Card has eight inputs, as shown ill Table 5; use the inputs to control the operation of and to monitor the status of the iQ system components. The Auxiliary Interface Card has eight outputs, as shown in Table 6; use the outputs to monitor the status of the pumping system components. In Tables 5 and 6, 'set' and 'reset' are as defined in Section 4.2.1.

Refer to Figure 1. The uses of the default button (9), service button (10) and OK LED (13) are the same as for the Tool Interface Card: refer to Section 4.2.3.

Input Function Use

1 Valve closed The input is set (by the valve) if the valve is closed.

2 Valve open The input is set (by the valve) if the valve is open.

3 and 4 - Not used.

5 Load-lock pump The input is set (by the load lock pumping system) if alarm there is a load lock pump alarm condition.

6 Load-lock pump The input is set (by the load lock pumping system) if warning there is a load lock pump warning condition.

7 Load-lock pump on The input is set (by the load lock pumping system) if the load lock pwnp is on.

The process tool must set the input to switch on the 8 Load-lock pump on load lock pwnp and reset the input to switch off the

load lock pump.

Table 5 - Auxiliary Interface Card inputs


4.3.2

4.3.3

12

Output Function Use

This output is reset (by the Auxiliary Interface 1 Open/ close valve Card) to open the valve; the output is set to close

the valve: refer to Sections 4.3.2 to 4.3.4.

2 - Not used.

3 Load-lock ptunp on This output is set to indicate that the load-lock pump is on.

4 Load-lock pump alarm This output is reset to indicate that there is a load-lock ptunp alarm condition.

S Load-lock pump warning This output is reset to indicate that there is a load-lock pump warning condition.

6 Load-lock pump running This output is set to indicate that the load-lock pump is on

7andB - Not used

Table 6 - Auxiliary Interface Card outputs

Introduction to gate valve operation

WARNING

Before you select the gate valve open or closed, ensure that it is safe to do so.

The gate valve operation of the Auxiliary Interface Card may be configured (through the iQ Single Pumpset Monitor software) in one of two ways:

• Default configuration

• Non-default configuration

Refer to the instruction manual supplied with the Single Pumpset Monitor for details of how to select these configurations.

Gate valve operation: normal pumping system operation

In the default conguration, the valve will operate as follows:

• The gate valve will open after a specific delay after the iQDP pump is started; this delay is configurable.

• The gate valve will close after a specific delay after the iQDP pump is switched off; this delay is configurable.

In the default configuration, you can also use the Process Tool or the Ptunp Display Module to open and close the gate valve, however the valve will always open/ close when the iQDP pump is started/switched off, as described above.

In the non-default configuration, use the Process Tool or the Pump Display Module to open and close the gate valve, as required.

iQ IlttIT/ace Module

4.3.4

5

Emergency shut-down/emergency stop

When the iQ system is automatically shut down as the result of an alarm, or when emergency stop is selected, the sequence of operations is as follows:

• In the default configuration, the Auxiliary Interface Card will immediately close the gate valve and switch off the load-lock pwnp.

• In the non-default configuration, the Auxiliary Interface Card will immediately close the gate valve but will not switch off the load-lock pwnp.

MAINTENANCE

Do the following checks when you maintain the iQ system:

• Check that the iQ Interface Module is securely fixed in place.

• Inspect all electrical connections and check that they are secure. Tighten any loose connections.

• Inspect all electrical cables and check that they are not damaged and have not overheated. Replace any cable that is damaged or has overheated.

6 STORAGE AND DISPOSAL

6.1 Storage

Store the iQ Interface Module in clean dry conditions until required. When required for use, install the iQ Interface Module as described in Section 3 of this manual.

6.2 Disposal

Dispose of the iQ Interface Module and any components safely in accordance with all local and national safety and environmental requirements.


7 SPARES AND ACCESSORIES

7.1 Introduction

Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, France, Germany, Hong Kong, Italy, Japan, Korea, Switzerland, United Kingdom, U.S.A and a world wide network of distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses.

Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state for each part required:

• Model and Item Number of your equipment

• Serial number (if any)

• Item Number and deSCription of the part.

7.2 Spares

14

Spare

iQ module connector cable, 3 m



iQ emergency stop cable, 3 m



Terminator plug

Item Number

0372-07-591

0372-07-592

0372-07-595

0372-07-598

0372-07-593

0372-07-599

A532-20-050

iQ Interface Module

Documents

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